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1. 发明授权

US07249494B2 Beam tracking system for scanning-probe type atomic force microscope 有权
标题翻译：用于扫描探针型原子力显微镜的光束跟踪系统
公开(公告)号：US07249494B2
公开(公告)日：2007-07-31
申请号：US11146517
申请日：2005-06-06
申请人： Ing-Shouh Hwang , Shao-Kang Hung , Li-Chen Fu , Ming-Yen Lin
发明人： Ing-Shouh Hwang , Shao-Kang Hung , Li-Chen Fu , Ming-Yen Lin
IPC分类号： G01B5/28 , G01N13/16 , G21B21/20 , G21B21/22
CPC分类号： G01Q20/02 , G01Q70/02
摘要： Disclosed is a novel scanning-probe type atomic force microscope wherein false deflection of the probe is reduced. The probe of the scanning-probe type atomic force microscope moves in both the horizontal direction and the vertical direction during the scanning, while the sample is kept in order to reduce the false deflection brought to the probe due to the scanning motion, two approaches are adopted. The first is to have a focused laser spot tracking an invariant point on the probe's cantilever, which moves three-dimensionally during the scanning. The second approach is to have the laser beam, which is reflected from the moving cantilever, hitting an invariant point of the PSD, when the sample is distanced from the probe and induces no deflection. A beam tracking system wherein the scanning probe is located approximately at the focal point of an objective lens and he optical system including a laser source, an optical module, a feedback module and the probe are driven by an approach mechanism to move in synchronization.
摘要翻译：公开了一种新型的扫描探针型原子力显微镜，其中探针的错误偏转减小。扫描探针型原子力显微镜的探针在扫描期间在水平方向和垂直方向上移动，同时保持样品以减少由于扫描运动而导致探头的错误偏转，两种方法是通过了首先是将聚焦激光点跟踪探头悬臂上的不变点，扫描中三维移动。第二种方法是当样品离开探头并且不产生偏转时，使来自移动悬臂反射的激光束撞击PSD的不变点。一种光束跟踪系统，其中扫描探针大致位于物镜的焦点处，并且包括激光源，光学模块，反馈模块和探针的光学系统由进近机构驱动以同步移动。

2. 发明申请

US20060272398A1 Beam tracking system for scanning-probe type atomic force microscope 有权
标题翻译：用于扫描探针型原子力显微镜的光束跟踪系统
公开(公告)号：US20060272398A1
公开(公告)日：2006-12-07
申请号：US11146517
申请日：2005-06-06
申请人： Ing-Shouh Hwang , Shao-Kang Hung , Li-Chen Fu , Ming-Yen Lin
发明人： Ing-Shouh Hwang , Shao-Kang Hung , Li-Chen Fu , Ming-Yen Lin
IPC分类号： G01B5/28
CPC分类号： G01Q20/02 , G01Q70/02
摘要： Disclosed is a novel scanning-probe type atomic force microscope wherein false deflection of probe is reduced. Probe of the scanning-probe type atomic force microscope moves in both the horizontal direction and the vertical direction during the scanning, while the sample is kept stationary. In order to reduce the false deflection brought to the probe due to the scanning motion, two approaches are adopted. The first is to have the focused laser spot tracking an invariant point on the probe's cantilever, which moves 3-dimensionally during the scanning. The second approach is to have the laser beam, which is reflected from the moving cantilever, hitting an invariant point of the PSD, when the sample is distanced from the probe and induces no deflection. A beam racking system wherein the scanning probe locates approximately at focus of objective lens and the optical system including a laser source, an optical module, a feedback module and the probe are driven by an approach mechanism to move in synchronization.
摘要翻译：公开了一种新颖的扫描探针型原子力显微镜，其中探针的错误偏转减小。扫描探针型原子力显微镜的探头在扫描期间在水平方向和垂直方向上移动，而样品保持静止。为了减少由于扫描运动而导致探头的错误偏转，采用了两种方法。首先是使聚焦的激光点跟踪探头悬臂上的不变点，扫描中三维移动。第二种方法是当样品离开探头并且不产生偏转时，使来自移动悬臂反射的激光束撞击PSD的不变点。一种梁架系统，其中扫描探针大致定位在物镜的焦点处，并且包括激光源，光学模块，反馈模块和探针的光学系统由进近机构驱动以同步移动。

3. 发明申请

US20060158228A1 Motion actuator 失效
标题翻译：运动执行器
公开(公告)号：US20060158228A1
公开(公告)日：2006-07-20
申请号：US10753258
申请日：2004-01-05
申请人： Ing-Shouh Hwang , Shao-Kang Hung , Cheng-Shing Tin , And Hu
发明人： Ing-Shouh Hwang , Shao-Kang Hung , Cheng-Shing Tin , And Hu
IPC分类号： G01N30/86
CPC分类号： H02N2/023
摘要： A motion actuator comprises a cylindrical movable shaft and a stage that contains an expansible/contractible device and two clamps. The expansible/contractible device can be controlled to drive the axial motion of the movable shaft, and the two clamps can be controlled to grip/release the shaft. The two clamps and the expansible/contractible device are each controlled by a bimorph structure, which comprises a cut cylindrical piezoelectric tube section in a hole enclosed by a thin wall in the stage. By sequentially activating the three piezoelectric tube sections, axial motions of the movable shaft relative to the stage in small steps are made. Each of the two clamps can be adjusted by a screw, which presses a spring structure that makes contact with the top surface of the movable shaft, so that the clamps can grip the movable shaft firmly when actuated, but not when not actuated. The flat top surface of the movable shaft is designed to inhibit the possible rotation along its axis during its axial motion. The shaft is supported by two lines at the bottom of each of the two clamps to reduce the contact area, which improves the reliability of the motion.
摘要翻译：运动致动器包括圆柱形可动轴和包含可膨胀/收缩装置和两个夹具的台架。可以控制可膨胀/收缩装置以驱动可动轴的轴向运动，并且可以控制两个夹具以夹紧/释放轴。两个夹具和可膨胀/收缩装置各自由双压电晶片结构控制，该双压电晶片结构包括在阶段中由薄壁包围的孔中的切割的圆柱形压电管部分。通过顺序地激活三个压电管部分，制造可移动轴相对于台阶的小步骤的轴向运动。两个夹具中的每一个可以通过螺钉调节，该螺钉挤压与可动轴的顶表面接触的弹簧结构，使得夹具可以在致动时牢固地夹紧可动轴，而不是在未致动时夹紧可动轴。可移动轴的平坦顶面被设计成在其轴向运动期间阻止沿其轴线的可能的旋转。轴由两个夹具每个底部的两条线支撑，以减小接触面积，从而提高了运动的可靠性。

4. 发明授权

US07309946B2 Motion actuator 失效
标题翻译：运动执行器
公开(公告)号：US07309946B2
公开(公告)日：2007-12-18
申请号：US10753258
申请日：2004-01-05
申请人： Ing-Shouh Hwang , Shao-Kang Hung , Cheng-Shing Tin , And De Hu
发明人： Ing-Shouh Hwang , Shao-Kang Hung , Cheng-Shing Tin , And De Hu
IPC分类号： H01L41/08
CPC分类号： H02N2/023
摘要： A motion actuator comprises a cylindrical movable shaft and a stage that contains an expansible/contractible device and two clamps. The expansible/contractible device can be controlled to drive the axial motion of the movable shaft, and the two clamps can be controlled to grip/release the shaft. The two clamps and the expansible/contractible device are each controlled by a bimorph structure, which comprises a cut cylindrical piezoelectric tube section in a hole enclosed by a thin wall in the stage. By sequentially activating the three piezoelectric tube sections, axial motions of the movable shaft relative to the stage in small steps are made. Each of the two clamps can be adjusted by a screw, which presses a spring structure that makes contact with the top surface of the movable shaft, so that the clamps can grip the movable shaft firmly when actuated, but not when not actuated. The flat top surface of the movable shaft is designed to inhibit the possible rotation along its axis during its axial motion. The shaft is supported by two lines at the bottom of each of the two clamps to reduce the contact area, which improves the reliability of the motion.
摘要翻译：运动致动器包括圆柱形可动轴和包含可膨胀/收缩装置和两个夹具的台架。可以控制可膨胀/收缩装置以驱动可动轴的轴向运动，并且可以控制两个夹具以夹紧/释放轴。两个夹具和可膨胀/收缩装置各自由双压电晶片结构控制，该双压电晶片结构包括在阶段中由薄壁包围的孔中的切割的圆柱形压电管部分。通过顺序地激活三个压电管部分，制造可移动轴相对于台阶的小步骤的轴向运动。两个夹具中的每一个可以通过螺钉调节，该螺钉挤压与可动轴的顶表面接触的弹簧结构，使得夹具可以在致动时牢固地夹紧可动轴，而不是在未致动时夹紧可动轴。可移动轴的平坦顶面被设计成在其轴向运动期间阻止沿其轴线的可能的旋转。轴由两个夹具每个底部的两条线支撑，以减小接触面积，从而提高了运动的可靠性。

5. 发明申请

US20110095210A1 OPTICAL IMAGING SYSTEM 有权
标题翻译：光学成像系统
公开(公告)号：US20110095210A1
公开(公告)日：2011-04-28
申请号：US12604711
申请日：2009-10-23
申请人： Ing-Shouh Hwang , En-Te Hwu , Shao-Kang Hung
发明人： Ing-Shouh Hwang , En-Te Hwu , Shao-Kang Hung
IPC分类号： G01D5/30
CPC分类号： G01D5/30
摘要： A system includes an objective lens, an imaging module, and a measurement module. The objective lens is configured to receive light emitted by a light source, focus the emitted light onto a target object, and receive light reflected by the target object. The imaging module is configured to receive a first portion of the reflected light. The measurement module is configured to receive a second portion of the reflected light and includes a photo detector and an astigmatic lens configured to direct the second beam onto the photo detector.
摘要翻译：系统包括物镜，成像模块和测量模块。物镜被配置为接收由光源发射的光，将发射的光聚焦到目标物体上，并且接收由目标物体反射的光。成像模块被配置为接收反射光的第一部分。测量模块被配置为接收反射光的第二部分，并且包括光电检测器和被配置为将第二光束引导到光电检测器上的像散透镜。

6. 发明授权

US08269157B2 Optical imaging system 有权
标题翻译：光学成像系统
公开(公告)号：US08269157B2
公开(公告)日：2012-09-18
申请号：US12604711
申请日：2009-10-23
申请人： Ing-Shouh Hwang , En-Te Hwu , Shao-Kang Hung
发明人： Ing-Shouh Hwang , En-Te Hwu , Shao-Kang Hung
IPC分类号： G02B27/40 , G11B7/00
CPC分类号： G01D5/30
摘要： A system includes an objective lens, an imaging module, and a measurement module. The objective lens is configured to receive light emitted by a light source, focus the emitted light onto a target object, and receive light reflected by the target object. The imaging module is configured to receive a first portion of the reflected light. The measurement module is configured to receive a second portion of the reflected light and includes a photo detector and an astigmatic lens configured to direct the second beam onto the photo detector.
摘要翻译：系统包括物镜，成像模块和测量模块。物镜被配置为接收由光源发射的光，将发射的光聚焦到目标物体上，并且接收由目标物体反射的光。成像模块被配置为接收反射光的第一部分。测量模块被配置为接收反射光的第二部分，并且包括光电检测器和被配置为将第二光束引导到光电检测器上的像散透镜。

7. 发明授权

US07940150B2 Six-degree-of-freedom precision positioning system 有权
标题翻译：六自由度精密定位系统
公开(公告)号：US07940150B2
公开(公告)日：2011-05-10
申请号：US12147096
申请日：2008-06-26
申请人： Li-Chen Fu , Sheng-Chih Huang , Shao-Kang Hung , Mei-Yung Chen
发明人： Li-Chen Fu , Sheng-Chih Huang , Shao-Kang Hung , Mei-Yung Chen
IPC分类号： H01F1/00
CPC分类号： G03F7/70758 , G03F7/70725 , G03F7/70816 , H02N15/00 , Y10T74/20348
摘要： In a six-degree-of-freedom precision positioning system, magnetic force and fluid buoyancy are used to levitate a platform, and the non-contact magnetic force between electromagnets and magnets forms a main driving force for the platform. Therefore, no friction is present in the system and no lubricating mechanism is needed for the system. Moreover, in the system, electric current is converted by electromagnets and magnets into a magnetic driving force without using any transmission gears. Therefore, the backlash phenomenon that is not easily controllable in the conventional servo positioning systems is avoided. The system has simplified structure without the need of complicated fabrication, and utilizes the properties of fluid to achieve low power consumption, high precision positioning, and fast response.
摘要翻译：在六自由度精密定位系统中，磁力和流体浮力用于悬浮平台，电磁铁和磁铁之间的非接触磁力形成平台的主要驱动力。因此，系统中不存在摩擦，系统不需要润滑机构。此外，在该系统中，不用任何传动齿轮，由电磁铁和磁铁将电流转换成磁力驱动力。因此，避免了在传统的伺服定位系统中不容易控制的齿隙现象。该系统结构简单，无需复杂的制造，并利用流体的性能实现低功耗，高精度定位和快速响应。

8. 发明申请

US20090241719A1 SIX-DEGREE-OF-FREEDOM PRECISION POSITIONING SYSTEM 有权
标题翻译：六自由度精确定位系统
公开(公告)号：US20090241719A1
公开(公告)日：2009-10-01
申请号：US12147096
申请日：2008-06-26
申请人： Li-Chen Fu , Sheng-Chih Huang , Shao-Kang Hung , Mei-Yung Chen
发明人： Li-Chen Fu , Sheng-Chih Huang , Shao-Kang Hung , Mei-Yung Chen
IPC分类号： G05G11/00
CPC分类号： G03F7/70758 , G03F7/70725 , G03F7/70816 , H02N15/00 , Y10T74/20348
摘要： In a six-degree-of-freedom precision positioning system, magnetic force and fluid buoyancy are used to levitate a platform, and the non-contact magnetic force between electromagnets and magnets forms a main driving force for the platform. Therefore, no friction is present in the system and no lubricating mechanism is needed for the system. Moreover, in the system, electric current is converted by electromagnets and magnets into a magnetic driving force without using any transmission gears. Therefore, the backlash phenomenon that is not easily controllable in the conventional servo positioning systems is avoided. The system has simplified structure without the need of complicated fabrication, and utilizes the properties of fluid to achieve low power consumption, high precision positioning, and fast response.
摘要翻译：在六自由度精密定位系统中，磁力和流体浮力用于悬浮平台，电磁铁和磁铁之间的非接触磁力形成平台的主要驱动力。因此，系统中不存在摩擦，系统不需要润滑机构。此外，在该系统中，不用任何传动齿轮，由电磁铁和磁铁将电流转换成磁力驱动力。因此，避免了在传统的伺服定位系统中不容易控制的齿隙现象。该系统结构简单，无需复杂的制造，并利用流体的性能实现低功耗，高精度定位和快速响应。

9. 发明申请

US20120037815A1 TEM PHASE PLATE LOADING SYSTEM 审中-公开
标题翻译： TEM相板加载系统
公开(公告)号：US20120037815A1
公开(公告)日：2012-02-16
申请号：US13193951
申请日：2011-07-29
申请人： Yunn-Shin Shiue , Shao-Kang Hung , I-Hui Chen , Chia-Seng Chang
发明人： Yunn-Shin Shiue , Shao-Kang Hung , I-Hui Chen , Chia-Seng Chang
IPC分类号： H01J37/20 , H01J37/18
CPC分类号： H01J37/20 , H01J37/147 , H01J37/18 , H01J2237/2614
摘要： A phase plate loading system, which can be installed on any commercial TEM (transmission electron microscope) without modifying its optical or lens design, includes an airlock chamber and a transport unit. The airlock chamber is disposed adjacent to the specimen section of the TEM. The transport unit transfers a phase plate into the TEM through the airlock chamber.
摘要翻译：可以在任何商业TEM（透射电子显微镜）上安装而不修改其光学或透镜设计的相位板加载系统包括气锁室和输送单元。气闸室设置在TEM的样本部分附近。运输单元通过气闸室将相位板转移到TEM中。

10. 发明申请

US20120104581A1 Semiconductor package device with a heat dissipation structure and the packaging method thereof 有权
公开(公告)号：US20120104581A1
公开(公告)日：2012-05-03
申请号：US12929544
申请日：2011-02-01
申请人： Chia-Feng Yeh , Chung-Hwa Wu , Shao-Kang Hung
发明人： Chia-Feng Yeh , Chung-Hwa Wu , Shao-Kang Hung
IPC分类号： H01L23/495 , H01L21/60
CPC分类号： H01L23/4334 , H01L21/561 , H01L23/3128 , H01L24/29 , H01L24/32 , H01L24/33 , H01L24/48 , H01L24/73 , H01L24/83 , H01L24/85 , H01L24/92 , H01L24/97 , H01L2224/29036 , H01L2224/2919 , H01L2224/29294 , H01L2224/29339 , H01L2224/32225 , H01L2224/32245 , H01L2224/33181 , H01L2224/48091 , H01L2224/48105 , H01L2224/48227 , H01L2224/48235 , H01L2224/73215 , H01L2224/8385 , H01L2224/85181 , H01L2224/92165 , H01L2224/92247 , H01L2224/94 , H01L2224/97 , H01L2924/00014 , H01L2924/01013 , H01L2924/01019 , H01L2924/01029 , H01L2924/01047 , H01L2924/01074 , H01L2924/014 , H01L2924/15311 , H01L2924/181 , H01L2224/85 , H01L2224/83 , H01L2924/00012 , H01L2224/45099 , H01L2224/45015 , H01L2924/207
摘要： The present invention provide a heat dissipation structure on the active surface of the die to increase the performance of the heat conduction in longitude direction of the semiconductor package device, so that the heat dissipating performance can be improved when the semiconductor package device is associated with the exterior heat dissipation mechanism.

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