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    • 5. 发明授权
    • Multiple wavelength surface-emitting laser device and method for its manufacture
    • 多波长表面发射激光器件及其制造方法
    • US06795457B2
    • 2004-09-21
    • US09867709
    • 2001-05-31
    • Young-jin SongSeung-ho NamByoung-lyong ChoiJae-ho You
    • Young-jin SongSeung-ho NamByoung-lyong ChoiJae-ho You
    • H01S310
    • H01S5/423H01S5/0425H01S5/18311H01S5/18361H01S5/4087
    • A multiple wavelength surface-emitting laser device equipped with a substrate and a plurality of surface-emitting lasers formed on the substrate by a continuous manufacturing process is provided. Each surface-emitting laser includes a bottom reflection layer on the substrate, that is doped with impurities of one type and composed of alternating semiconductor material layers having different refractive indexes; an active layer that is formed on the bottom reflection layer; an intermediate layer that is doped with impurities of the other type on the active layer; a top electrode that is formed on the intermediate layer to have a window through which light is emitted; and a dielectric reflection layer where dielectric materials with different refractive indexes are alternately layered on the intermediate layer and/or the top electrode to a thickness suitable for a desired resonance wavelength, and the resonance wavelength is controlled by adjusting the thickness of the dielectric reflection layer.
    • 提供了通过连续制造工艺配置有基板和形成在基板上的多个表面发射激光器的多波长表面发射激光器件。 每个表面发射激光器包括在衬底上的底部反射层,其掺杂了一种类型的杂质,并且由具有不同折射率的交替的半导体材料层组成; 形成在底部反射层上的有源层; 在活性层上掺杂另一种杂质的中间层; 形成在所述中间层上以具有通过其发出光的窗口的顶部电极; 以及介电反射层,其中具有不同折射率的电介质材料在中间层和/或顶部电极上交替层叠到适于所需共振波长的厚度,并且通过调节介电反射层的厚度来控制谐振波长 。