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1. 发明授权

US4582666A Method and apparatus for making a patterned non-woven fabric 失效
标题翻译：制造图案无纺布的方法和装置
公开(公告)号：US4582666A
公开(公告)日：1986-04-15
申请号：US438853
申请日：1982-10-22
申请人： Ian Kenworthy , Robert B. Gettins , Peter W. Logan , Patrick Jeambar , Andre Vuillaume
发明人： Ian Kenworthy , Robert B. Gettins , Peter W. Logan , Patrick Jeambar , Andre Vuillaume
IPC分类号： D21F1/44 , D04H1/70 , D21F20060101 , D21F11/00
CPC分类号： D21F11/006
摘要： A non-woven fabric having a pattern defined by an array of discrete areas having a reduced fibre density but which are substantially free of perforations is produced by supporting a freshly wet laid web of the non-woven fabric on a porous surface and directing spaced jets of fluid against the unsupported side in order to displace fibres within discrete areas while maintaining in position a proportion of fibres that are within those areas and that are adjacent the porous surface. The fabric web may be supported on a Fourdrinier wire (1) and the jets of fluid (e.g. water) may be directed through the apertures in a perforated cylinder (6), the fluid being supplied under pressure from a water-knife device (11). The apertures in the cylinder (6) preferably have a cross-section that increases in the direction of the water jets. Vacuum may be applied through the Fourdrinier wire (1) by means of a vacuum box (10) and vacuum may also be applied within the cylinder (6) from means (17) in order to remove excess water from within the cylinder (6).
摘要翻译： PCT No.PCT / GB82 / 00064 Sec。 371日期1982年10月22日 102（e）日期1982年10月22日PCT提交1982年2月25日PCT公布。公开号WO82 / 02911 日本1982年9月2日。具有由具有纤维密度降低但基本上没有穿孔的离散区域阵列限定的图案的无纺织物通过将无纺布的新鲜湿法成网幅材支撑在多孔表面并且引导间隔开的流体抵靠未支撑的一侧，以便在离散区域内置换纤维，同时保持位于那些区域内并且与多孔表面相邻的一部分纤维。织物网可以被支撑在长网线（1）上，并且流体（例如水）的射流可以被引导穿过穿孔的圆柱体（6）中的孔，该流体在压力下从水刀装置（11 ）。气缸（6）中的孔优选地具有在水射流方向上增加的横截面。真空可以通过长丝线（1）通过真空箱（10）施加，并且真空也可以从装置（17）施加到气缸（6）内，以从缸体（6）中去除多余的水分，。

2. 发明申请

US20110259519A1 COATING METHOD FOR GAS DELIVERY SYSTEM 有权
标题翻译：气体输送系统涂层方法
公开(公告)号：US20110259519A1
公开(公告)日：2011-10-27
申请号：US12766529
申请日：2010-04-23
申请人： Ian Kenworthy , Duane Outka , Fangli Hao , Leonard Sharpless , Yijun Du
发明人： Ian Kenworthy , Duane Outka , Fangli Hao , Leonard Sharpless , Yijun Du
IPC分类号： C23F1/08 , B05D7/22
CPC分类号： F17D5/005 , B05D1/30 , B05D7/222 , F17D1/04 , H01J37/3244 , H01J37/32495 , H01J2237/3341 , H01L21/67069 , Y10T137/8593
摘要： A method of coating the inner surfaces of gas passages of a gas delivery system for a plasma process system such as a plasma etching system includes (a) flowing a fluidic precursor of a corrosion-resistant material through the gas passages and depositing a layer of the fluidic precursor to completely coat the inner surfaces of the gas passages; (b) removing excess fluidic precursor from the inner surfaces; (c) curing the deposited layer of the fluidic precursor to form a corrosion-resistant material coating.
摘要翻译：涂覆等离子体处理系统例如等离子体蚀刻系统的气体输送系统的气体通道的内表面的方法包括（a）使耐腐蚀材料的流体前体流过气体通道并沉积一层流体前体，以完全涂覆气体通道的内表面; （b）从内表面除去多余的流体前体; （c）固化流体前体的沉积层以形成耐腐蚀材料涂层。

3. 发明申请

US20130299605A1 COMPRESSION MEMBER FOR USE IN SHOWERHEAD ELECTRODE ASSEMBLY 有权
公开(公告)号：US20130299605A1
公开(公告)日：2013-11-14
申请号：US13467652
申请日：2012-05-09
申请人： Darrell Ehrlich , Daniel Arthur Brown , Ian Kenworthy
发明人： Darrell Ehrlich , Daniel Arthur Brown , Ian Kenworthy
IPC分类号： B05B7/16 , H01L21/3065 , H05K13/00
CPC分类号： H01J37/32541 , C23C16/4557 , H01J37/32091 , H01J37/3244 , H01J37/32522 , H01L21/3065 , Y10T29/49002 , Y10T29/49083 , Y10T29/49098 , Y10T29/49117 , Y10T29/49803
摘要： A compression member for use in a showerhead electrode assembly of a capacitively coupled plasma chamber. The member applies a compression force to a portion of a film heater adjacent a power supply boot on an upper surface of a thermal control plate and is located between the thermal control plate and a temperature-controlled top plate. The member is composed of an electrically insulating elastomeric material which can work over a large range of compressions and temperatures.

4. 发明授权

US09058960B2 Compression member for use in showerhead electrode assembly 有权
标题翻译：用于喷头电极组件的压缩构件
公开(公告)号：US09058960B2
公开(公告)日：2015-06-16
申请号：US13467652
申请日：2012-05-09
申请人： Darrell Ehrlich , Daniel Arthur Brown , Ian Kenworthy
发明人： Darrell Ehrlich , Daniel Arthur Brown , Ian Kenworthy
IPC分类号： H01J37/32 , C23C16/455
CPC分类号： H01J37/32541 , C23C16/4557 , H01J37/32091 , H01J37/3244 , H01J37/32522 , H01L21/3065 , Y10T29/49002 , Y10T29/49083 , Y10T29/49098 , Y10T29/49117 , Y10T29/49803
摘要： A compression member for use in a showerhead electrode assembly of a capacitively coupled plasma chamber. The member applies a compression force to a portion of a film heater adjacent a power supply boot on an upper surface of a thermal control plate and is located between the thermal control plate and a temperature-controlled top plate. The member is composed of an electrically insulating elastomeric material which can work over a large range of compressions and temperatures.
摘要翻译：一种用于电容耦合等离子体室的喷头电极组件中的压缩构件。该构件对与热控制板的上表面相邻的电源罩的薄膜加热器的一部分施加压缩力，并且位于热控制板和温度控制的顶板之间。该构件由电绝缘的弹性体材料组成，其可在大范围的压缩和温度下工作。

5. 发明授权

US08852685B2 Coating method for gas delivery system 有权
标题翻译：气体输送系统涂层方法
公开(公告)号：US08852685B2
公开(公告)日：2014-10-07
申请号：US12766529
申请日：2010-04-23
申请人： Ian Kenworthy , Duane Outka , Fangli Hao , Leonard Sharpless , Yijun Du
发明人： Ian Kenworthy , Duane Outka , Fangli Hao , Leonard Sharpless , Yijun Du
IPC分类号： C23F1/08 , B05D7/22
CPC分类号： F17D5/005 , B05D1/30 , B05D7/222 , F17D1/04 , H01J37/3244 , H01J37/32495 , H01J2237/3341 , H01L21/67069 , Y10T137/8593
摘要： A method of coating the inner surfaces of gas passages of a gas delivery system for a plasma process system such as a plasma etching system includes (a) flowing a fluidic precursor of a corrosion-resistant material through the gas passages and depositing a layer of the fluidic precursor to completely coat the inner surfaces of the gas passages; (b) removing excess fluidic precursor from the inner surfaces; (c) curing the deposited layer of the fluidic precursor to form a corrosion-resistant material coating.
摘要翻译：涂覆等离子体处理系统例如等离子体蚀刻系统的气体输送系统的气体通道的内表面的方法包括（a）使耐腐蚀材料的流体前体流过气体通道并沉积一层流体前体，以完全涂覆气体通道的内表面; （b）从内表面除去多余的流体前体; （c）固化流体前体的沉积层以形成耐腐蚀材料涂层。

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