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    • 5. 发明申请
    • SEMICONDUCTOR ELEMENT HAVING HIGH BREAKDOWN VOLTAGE
    • 具有高电压破坏的半导体元件
    • US20130240895A1
    • 2013-09-19
    • US13571041
    • 2012-08-09
    • Jen-Inn CHYIGeng-Yen LeeHsueh-Hsing Liu
    • Jen-Inn CHYIGeng-Yen LeeHsueh-Hsing Liu
    • H01L29/205
    • H01L29/66212H01L29/2003H01L29/4236H01L29/475H01L29/7787H01L29/872
    • A semiconductor element having a high breakdown voltage includes a substrate, a buffer layer, a semiconductor composite layer and a bias electrode. The buffer layer disposed on the substrate includes a high edge dislocation defect density area. The semiconductor composite layer disposed on the buffer layer includes a second high edge dislocation defect density area formed due to the first high edge dislocation defect density area. The bias electrode is disposed on the semiconductor composite layer. A virtual gate effect of defect energy level capturing electrons is generated due to the first and second high edge dislocation defect density areas, such that an extended depletion region expanded from the bias electrode is formed at the semiconductor composite layer. When the bias electrode receives a reverse bias, the extended depletion region reduces a leakage current and increases the breakdown voltage of the semiconductor element.
    • 具有高击穿电压的半导体元件包括衬底,缓冲层,半导体复合层和偏置电极。 设置在基板上的缓冲层包括高边缘位错缺陷密度区域。 设置在缓冲层上的半导体复合层包括由于第一高边缘位错缺陷密度区域而形成的第二高边缘位错缺陷密度区域。 偏置电极设置在半导体复合层上。 由于第一和第二高边缘位错缺陷密度区域产生缺陷能级捕获电子的虚拟栅极效应,使得在半导体复合层处形成从偏置电极扩展的扩展的耗尽区。 当偏置电极接收到反向偏压时,扩展耗尽区减小漏电流并增加半导体元件的击穿电压。