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    • 4. 发明授权
    • Method of growing nitride semiconductor material
    • 生长氮化物半导体材料的方法
    • US07608532B2
    • 2009-10-27
    • US12014200
    • 2008-01-15
    • Hung-Cheng LinJen-Inn Chyi
    • Hung-Cheng LinJen-Inn Chyi
    • H01L21/28H01L21/3205
    • H01L21/0262H01L21/0242H01L21/02458H01L21/0254H01L33/0062H01L33/06
    • A method of growing nitride semiconductor material and particularly a method of growing Indium nitride is disclosed can increase surface flatness of a nitride semiconductor material and decrease density of V-defects therein. Further, the method can increase light emission efficiency of a quantum well or quantum dots of the produced LED as well as greatly increase yield. The method is also applicable to the fabrications of electronic devices made of nitride semiconductor material and diodes of high breakdown voltage for rectification. The method can greatly increase surface flatness of semiconductor material for HBT, thereby increasing quality of the produced semiconductor devices.
    • 公开了一种生长氮化物半导体材料的方法,特别是生长氮化铟的方法可以增加氮化物半导体材料的表面平坦度并降低其中的V型缺陷的密度。 此外,该方法可以提高所产生的LED的量子阱或量子点的发光效率,并且大大提高产量。 该方法还适用于由氮化物半导体材料制成的电子器件和用于整流的高击穿电压的二极管的制造。 该方法可以大大增加用于HBT的半导体材料的表面平坦度,从而提高所制造的半导体器件的质量。
    • 9. 发明授权
    • Method of manufacturing semiconductor laser device structure
    • 制造半导体激光器件结构的方法
    • US07445949B2
    • 2008-11-04
    • US10710843
    • 2004-08-06
    • Hung-Cheng LinJen-Inn ChyiGuan-Ting Chen
    • Hung-Cheng LinJen-Inn ChyiGuan-Ting Chen
    • H01L21/00
    • H01S5/22H01S5/0425H01S5/2214
    • A method of manufacturing a semiconductor laser device is provided. First, a first mask layer is formed on an epitaxial structure to define a protrudent area in a ridge structure. Thereafter, a conformal second mask layer is formed over the epitaxial structure to cover the first mask layer. A third mask layer is formed over the second mask layer. The exposed second mask layer is removed. Using the first and the third mask layers as etching masks, a portion of the epitaxial structure is removed. The third mask layer and the remaining second mask layer are removed to form the ridge structure. An insulation layer is formed on the epitaxial structure and then the first mask layer is removed to expose the top surface of the protrudent area. A conductive layer is formed on the epitaxial structure such that it contacts with the top surface of the protrudent area.
    • 提供一种制造半导体激光器件的方法。 首先,在外延结构上形成第一掩模层以限定脊结构中的突出区域。 此后,在外延结构上形成保形第二掩模层以覆盖第一掩模层。 在第二掩模层上形成第三掩模层。 暴露的第二掩模层被去除。 使用第一和第三掩模层作为蚀刻掩模,去除外延结构的一部分。 去除第三掩模层和剩余的第二掩模层以形成脊结构。 在外延结构上形成绝缘层,然后去除第一掩模层以暴露突出区域的顶表面。 导电层形成在外延结构上,使得其与突出区域的顶表面接触。