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1. 发明授权

US06208421B1 Optical stress generator and detector 有权
标题翻译：光应力发生器和探测器
公开(公告)号：US06208421B1
公开(公告)日：2001-03-27
申请号：US09512141
申请日：2000-02-23
申请人： Humphrey J. Maris , Robert J Stoner
发明人： Humphrey J. Maris , Robert J Stoner
IPC分类号： G01N2100
CPC分类号： G01N21/1702 , G01N29/0681 , G01N29/2418 , G01N2291/02827 , G01N2291/02881 , G01N2291/0426 , G01N2291/0427 , Y10S977/834 , Y10S977/90 , Y10S977/901 , Y10S977/955 , Y10S977/956
摘要： Disclosed is a system for the characterization of thin films and interfaces between thin films through measurements of their mechanical and thermal properties. In the system light is absorbed in a thin film or in a structure made up of several thin films, and the change in optical transmission or reflection is measured and analyzed. The change in reflection or transmission is used to give information about the ultrasonic waves that are produced in the structure. The information that is obtained from the use of the measurement methods and apparatus of this invention can include: (a) a determination of the thickness of thin films with a speed and accuracy that is improved compared to earlier methods; (b) a determination of the thermal, elastic, and optical properties of thin films; (c) a determination of the stress in thin films; and (d) a characterization of the properties of interfaces, including the presence of roughness and defects.
摘要翻译：公开了一种用于通过测量其薄膜和薄膜的机械和热性能来表征薄膜和界面的系统。在系统中，光被薄膜吸收或由几个薄膜构成的结构中，并且测量和分析光学透射或反射的变化。反射或透射的变化用于提供关于在结构中产生的超声波的信息。从使用本发明的测量方法和装置获得的信息可以包括：（a）与先前的方法相比，以与速度和准确性相比较的速度和准确度确定薄膜的厚度; （b）确定薄膜的热，弹性和光学性能; （c）确定薄膜中的应力; 和（d）表征界面的性质，包括粗糙度和缺陷的存在。

2. 发明授权

US08567253B2 Opto-acoustic methods and apparatus for performing high resolution acoustic imaging and other sample probing and modification operations 有权
标题翻译：用于执行高分辨率声学成像和其他样本探测和修改操作的光学声学方法和装置
公开(公告)号：US08567253B2
公开(公告)日：2013-10-29
申请号：US11921635
申请日：2006-05-30
申请人： Humphrey J. Maris , Arto V. Nurmikko
发明人： Humphrey J. Maris , Arto V. Nurmikko
IPC分类号： G01N29/34 , G01N29/06
CPC分类号： A61B8/00 , A61B5/0097 , G01N29/0681 , G01N29/221 , G01N29/2418 , G01N2291/02827 , G01N2291/02854 , G01N2291/0423 , G01N2291/0427 , G01S15/8965
摘要： An opto-acoustic transducer assembly includes a substrate; at least one layer of opto-acoustic material coupled to a surface of the substrate, where the at least one layer of opto-acoustic material generates sound waves when struck by pulses of pump light; and an acoustic lens configured to focus sound waves generated by the at least one layer of opto-acoustic material towards a sample. The acoustic lens is further configured to collect sound waves returning from the sample and to direct the returning sound waves to the at least one layer of opto-acoustic material. In one non-limiting embodiment the at least one layer of opto-acoustic material is interposed between the substrate and the acoustic lens, and the substrate is substantially transparent to light having wavelengths of interest.
摘要翻译：光声换能器组件包括基底; 耦合到所述衬底的表面的至少一层光声材料层，其中所述至少一层光声材料层在被泵浦光脉冲击中时产生声波; 以及声透镜，被配置为将由所述至少一层光声材料层产生的声波聚焦到样品。声透镜还被配置为收集从样品返回的声波并将返回的声波引导到至少一层光声材料层。在一个非限制性实施例中，至少一层光声材料层插入在基底和声透镜之间，并且基底对于具有感兴趣波长的光基本上是透明的。

3. 发明申请

US20110036171A1 ENHANCED ULTRA-HIGH RESOLUTION ACOUSTIC MICROSCOPE 有权
标题翻译：增强超分辨率声学显微镜
公开(公告)号：US20110036171A1
公开(公告)日：2011-02-17
申请号：US12449415
申请日：2008-02-05
申请人： Humphrey J. Maris , Arto V. Nurmikko
发明人： Humphrey J. Maris , Arto V. Nurmikko
IPC分类号： G01N29/00
CPC分类号： G01N29/0681 , G01N29/2418 , G01S15/8965 , G10K15/046
摘要： An optical-acoustic transducer structure includes at least one metal or semiconducting film in which a part of a pump light pulse is absorbed to generate a sound pulse; and at least one dielectric film. The thicknesses and optical properties of the at least one metal or semiconducting film and the at least one dielectric film are selected so that a returning sound pulse results in a measurable change in the optical reflectivity and/or some other optical characteristic of the transducer structure. The transducer structure includes a resonant cavity, and an output surface that is shaped so as to provide no significant focusing of generated sound waves when the sound waves are launched towards a surface of the sample.
摘要翻译：光声换能器结构包括至少一个金属或半导体膜，其中泵浦光脉冲的一部分被吸收以产生声脉冲; 和至少一个电介质膜。选择至少一种金属或半导体膜和至少一种电介质膜的厚度和光学性质，使得返回的声脉冲导致换能器结构的光学反射率和/或某些其他光学特性的可测量的变化。换能器结构包括谐振腔和输出表面，其被形成为当声波朝向样品的表面发射时不产生所产生的声波的显着聚焦。

4. 发明授权

US07782471B2 Optical method for the characterization of laterally-patterned samples in integrated circuits 有权
标题翻译：用于表征集成电路中横向图案化样品的光学方法
公开(公告)号：US07782471B2
公开(公告)日：2010-08-24
申请号：US12381640
申请日：2009-03-13
申请人： Humphrey J. Maris
发明人： Humphrey J. Maris
IPC分类号： G01B11/28
CPC分类号： G01N29/0681 , G01B11/02 , G01B11/0658 , G01B11/0666 , G01B11/24 , G01N21/1702 , G01N21/1717 , G01N21/211 , G01N21/4788 , G01N21/9501 , G01N21/956 , G01N29/2418 , G01N2021/1706 , G01N2291/02827 , G01N2291/02881 , G01N2291/0426 , G01N2291/0427
摘要： Disclosed is a method for characterizing a sample having a structure disposed on or within the sample, comprising the steps of applying a first pulse of light to a surface of the sample for creating a propagating strain pulse in the sample, applying a second pulse of light to the surface so that the second pulse of light interacts with the propagating strain pulse in the sample, sensing from a reflection of the second pulse a change in optical response of the sample, and relating a time of occurrence of the change in optical response to at least one dimension of the structure.
摘要翻译：公开了一种用于表征具有设置在样品上或样品内的结构的样品的方法，包括以下步骤：将第一脉冲光施加到样品的表面，以在样品中产生传播的应变脉冲，施加第二脉冲的光使得第二脉冲光与样品中的传播应变脉冲相互作用，从第二脉冲的反射检测样品的光学响应的变化，并将光学响应的变化的发生时间与结构的至少一个维度。

5. 发明授权

US07624640B2 Opto-acoustic methods and apparatus for performing high resolution acoustic imaging and other sample probing and modification operations 有权
标题翻译：用于执行高分辨率声学成像和其他样本探测和修改操作的光学声学方法和装置
公开(公告)号：US07624640B2
公开(公告)日：2009-12-01
申请号：US11324866
申请日：2006-01-04
申请人： Humphrey J. Maris , Arto V Nurmikko
发明人： Humphrey J. Maris , Arto V Nurmikko
IPC分类号： G01N29/06 , G01N29/24
CPC分类号： G01N29/075 , A61B5/0097 , A61B8/00 , G01N29/0681 , G01N29/11 , G01N29/221 , G01N29/2418 , G01N2291/02827 , G01N2291/02854 , G01N2291/0423 , G01N2291/0427 , G01S15/8965
摘要： An opto-acoustic transducer assembly includes a substrate; at least one layer of opto-acoustic material coupled to a surface of the substrate, where the at least one layer of opto-acoustic material generates sound waves when struck by pulses of pump light; and an acoustic lens configured to focus sound waves generated by the at least one layer of opto-acoustic material towards a sample. The acoustic lens is further configured to collect sound waves returning from the sample and to direct the returning sound waves to the at least one layer of opto-acoustic material. The at least one layer of opto-acoustic material is responsive to the returning sound waves for having at least one optical property thereof changed, where the change is detectable from a change in a characteristic of reflected pulses of probe light that are time delayed with respect to the pulses of pump light.
摘要翻译：光声换能器组件包括基底; 耦合到所述衬底的表面的至少一层光声材料层，其中所述至少一层光声材料层在被泵浦光脉冲击中时产生声波; 以及声透镜，被配置为将由所述至少一层光声材料层产生的声波聚焦到样品。声透镜还被配置为收集从样品返回的声波并将返回的声波引导到至少一层光声材料层。所述至少一层光声材料响应于返回的声波，以使其至少一个光学特性发生变化，其中可以根据相对于时间延迟的探测光的反射脉冲的特性的变化来检测该变化到泵浦光的脉冲。

6. 发明授权

US6025918A Apparatus and method for measurement of the mechanical properties and electromigration of thin films 失效
标题翻译：用于测量薄膜的机械性能和电迁移的装置和方法
公开(公告)号：US6025918A
公开(公告)日：2000-02-15
申请号：US111456
申请日：1998-07-07
申请人： Humphrey J. Maris
发明人： Humphrey J. Maris
IPC分类号： G01N21/17 , G01B11/00
CPC分类号： G01N21/1717
摘要： A method for characterizing a sample comprising the steps of depositing the sample on a substrate, measuring a first change in optical response of the sample, changing the lateral strain of the sample, measuring a second change in optical response of the sample, comparing the second change in optical response of with the first change in optical response and associating a difference between the second change and the first change in optical response with a property of interest in the sample. The measurement of the first change in optical response is made with the sample having an initial lateral strain. The measurement of the second change in optical response is made after the lateral strain in the sample is changed from the initial lateral strain to a different lateral strain. The second change in optical response is compared to the first change in optical response to find the difference between the second change and the first change.
摘要翻译：一种用于表征样品的方法，包括以下步骤：将样品沉积在基底上，测量样品的光学响应的第一变化，改变样品的横向应变，测量样品的光学响应的第二变化，将第二随着光学响应的第一变化而改变光学响应，并且利用样品中感兴趣的属性将光响应的第二变化与第一变化之间的差值相关联。用具有初始侧向应变的样品进行光响应的第一变化的测量。在样品中的横向应变从初始侧向应变变为不同的横向应变之后，进行光学响应的第二变化的测量。将光响应的第二变化与光响应的第一变化进行比较，以找出第二变化与第一变化之间的差异。

7. 发明授权

US5959735A Optical stress generator and detector 失效
公开(公告)号：US5959735A
公开(公告)日：1999-09-28
申请号：US954347
申请日：1997-10-17
申请人： Humphrey J. Maris , Robert J Stoner
发明人： Humphrey J. Maris , Robert J Stoner
IPC分类号： B82B1/00 , G01N21/17 , G01N21/59 , G01N29/24 , G01B11/06 , G02B7/04 , G01B21/17
CPC分类号： G01N29/0681 , G01N21/1702 , G01N21/59 , G01N29/2418 , G01N2291/02827 , G01N2291/02881 , G01N2291/0426 , G01N2291/0427
摘要： Disclosed is a system for the characterization of thin films and interfaces between thin films through measurements of their mechanical and thermal properties. In the system light is absorbed in a thin film or in a structure made up of several thin films, and the change in optical transmission or reflection is measured and analyzed. The change in reflection or transmission is used to give information about the ultrasonic waves that are produced in the structure. The information that is obtained from the use of the measurement methods and apparatus of this invention can include: (a) a determination of the thickness of thin films with a speed and accuracy that is improved compared to earlier methods; (b) a determination of the thermal, elastic, and optical properties of thin films; (c) a determination of the stress in thin films; and (d) a characterization of the properties of interfaces, including the presence of roughness and defects.

8. 发明授权

US09329224B2 Optical testing of a multi quantum well semiconductor device 有权
标题翻译：多量子阱半导体器件的光学测试
公开(公告)号：US09329224B2
公开(公告)日：2016-05-03
申请号：US14112800
申请日：2012-04-02
申请人： Humphrey J. Maris
发明人： Humphrey J. Maris
IPC分类号： G01B11/16 , G01R31/265 , H01L33/00 , G01R31/44 , H02S50/10 , H01L33/06 , H01L33/32
CPC分类号： G01R31/2656 , G01R31/44 , H01L33/0095 , H01L33/06 , H01L33/32 , H02S50/10
摘要： A pump light pulse is generating a strain pulse in a sample that includes quantum wells. A signal is measured using a probe light pulse. The probe light pulse is delayed in relation to the pump light pulse. The signal derives from a change in an optical property of the sample, which optical property responds to the generated strain pulse. One may deduce parameters of interest of the sample, including the quantum wells, from the characteristics of the signal. For discerning between various components of the stress in the quantum wells a lead pump pulse, preceding the pump light, pulse my also be used. A system for the application of such methods is also disclosed.
摘要翻译：泵浦光脉冲在包括量子阱的样品中产生应变脉冲。使用探测光脉冲测量信号。探针光脉冲相对于泵浦光脉冲被延迟。该信号来源于样品的光学特性的变化，该光学特性响应于所产生的应变脉冲。可以从信号的特征中推导出样本的关注参数，包括量子阱。为了在量子阱中的应力的各个组件之间识别，在泵浦光之前的引导泵脉冲脉冲我也可以使用。还公开了一种应用这种方法的系统。

9. 发明申请

US20120309116A1 Substrate Analysis Using Surface Acoustic Wave Metrology 有权
标题翻译：使用表面声波测量的基板分析
公开(公告)号：US20120309116A1
公开(公告)日：2012-12-06
申请号：US13500692
申请日：2010-10-08
申请人： Michael Colgan , Michael J. Kotelyanskii , Christopher J. Morath , Humphrey J. Maris
发明人： Michael Colgan , Michael J. Kotelyanskii , Christopher J. Morath , Humphrey J. Maris
IPC分类号： G01H9/00 , H01L21/66
CPC分类号： G01N29/2418 , B82Y20/00 , B82Y35/00 , G01N29/041 , G01N29/12 , G01N2291/0423 , G01Q60/22
摘要： A system for imposing and analyzing surface acoustic waves in a substrate to determine characteristics of the substrate is disclosed. Optical elements and arrangements for imposing and analyzing surface acoustic waves in a substrate are also disclosed. NSOM's, gratings, and nanolight elements may be used to impose surface acoustic waves in a substrate and may also be used to measure transient changes in the substrate due to the passage of surface acoustic waves therethrough.
摘要翻译：公开了一种用于强化和分析衬底中表面声波以确定衬底特性的系统。还公开了用于强化和分析衬底中表面声波的光学元件和布置。 NSOM，光栅和Nightight元件可以用于将表面声波施加在衬底中，并且还可以用于测量由于表面声波通过其中的衬底的瞬态变化。

10. 发明申请

US20080151219A1 Optical method for the characterization of laterally patterned samples in integrated circuits 有权
标题翻译：用于表征集成电路中横向图案化样品的光学方法
公开(公告)号：US20080151219A1
公开(公告)日：2008-06-26
申请号：US12072841
申请日：2008-02-28
申请人： Humphrey J. Maris
发明人： Humphrey J. Maris
IPC分类号： G01B11/16
CPC分类号： G01N29/0681 , G01B11/02 , G01B11/0658 , G01B11/0666 , G01B11/24 , G01N21/1702 , G01N21/1717 , G01N21/211 , G01N21/4788 , G01N21/9501 , G01N21/956 , G01N29/2418 , G01N2021/1706 , G01N2291/02827 , G01N2291/02881 , G01N2291/0426 , G01N2291/0427
摘要： Disclosed is a method for characterizing a sample having a structure disposed on or within the sample, comprising the steps of applying a first pulse of light to a surface of the sample for creating a propagating strain pulse in the sample, applying a second pulse of light to the surface so that the second pulse of light interacts with the propagating strain pulse in the sample, sensing from a reflection of the second pulse a change in optical response of the sample, and relating a time of occurrence of the change in optical response to at least one dimension of the structure.
摘要翻译：公开了一种用于表征具有设置在样品上或样品内的结构的样品的方法，包括以下步骤：将第一脉冲光施加到样品的表面，以在样品中产生传播的应变脉冲，施加第二脉冲的光使得第二脉冲光与样品中的传播应变脉冲相互作用，从第二脉冲的反射检测样品的光学响应的变化，并将光学响应的变化的发生时间与结构的至少一个维度。

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