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    • 5. 发明授权
    • Non-destructive signal propagation system and method to determine substrate integrity
    • 非破坏性信号传播系统和方法确定衬底完整性
    • US08508239B2
    • 2013-08-13
    • US12435934
    • 2009-05-05
    • John Valcore
    • John Valcore
    • G01R23/20
    • G01N29/11G01N29/075G01N29/2475G01N2291/044G01N2291/106G01N2291/2697H01L22/12
    • In various exemplary embodiments described herein, a system and associated method relate to non-destructive signal propagation to detect one or more defects in a substrate. The system can be built into a semiconductor process tool such as a substrate handling mechanism. The system comprises a transducer configured to convert one or more frequencies from an electrical signal into at least one mechanical pulse. The mechanical pulse is coupled to the substrate through the substrate handling mechanism. A plurality of sensors is positioned distal to the transducer and configured to be coupled, acoustically or mechanically, to the substrate. The plurality of distal sensors is further configured to detect both the mechanical pulse and any distortions to the pulse. A signal analyzer is coupled to the plurality of distal sensors to compare the detected pulse and any distortions to the pulse with a baseline response.
    • 在本文描述的各种示例性实施例中,系统和相关联的方法涉及非破坏性信号传播以检测衬底中的一个或多个缺陷。 该系统可以内置在诸如基板处理机构的半导体处理工具中。 该系统包括被配置为将一个或多个频率从电信号转换成至少一个机械脉冲的换能器。 机械脉冲通过基板处理机构耦合到基板。 多个传感器位于换能器的远侧并且被配置为与声学或机械地耦合到基底。 多个远端传感器还被配置为检测机械脉冲和对脉冲的任何失真。 信号分析器耦合到多个远端传感器,以将检测到的脉冲和具有基线响应的脉冲的任何失真进行比较。
    • 8. 发明申请
    • CONTAINERIZED SYSTEMS
    • 集成系统
    • US20120033209A1
    • 2012-02-09
    • US13205325
    • 2011-08-08
    • Mark A. OsterkampKenneth R. YawnAlan J. Norris
    • Mark A. OsterkampKenneth R. YawnAlan J. Norris
    • G01N21/01
    • G01N29/2418G01N29/075G01N29/12G01N29/265G01N2291/0289G01N2291/0423
    • Containerized systems are provided. In one embodiment, a containerized system includes a moveable three-dimensional container, a first generator, a second generator, and a scanner. The first generator is located within the container, and the second generator is located outside of the container. The scanner is mechanically supported by the container and transmits waves received from the first and the second generators. The containerized system optionally includes one or more rails connected to the outside of the container, and the scanner moves along the one or more rails. The containerized system may also include a multi-axes arm that positions the scanner and that is mechanically supported by the container. Furthermore, the containerized system may include an interferometer, an electronics rack, and/or an air conditioning unit.
    • 提供集装箱系统。 在一个实施例中,容器化系统包括可移动的三维容器,第一发生器,第二发生器和扫描器。 第一发生器位于容器内,第二发生器位于容器外部。 扫描器由容器机械地支撑并且传输从第一和第二发生器接收的波。 容器化系统可选地包括连接到容器外部的一个或多个轨道,并且扫描器沿着一个或多个轨道移动。 容器化系统还可以包括定位扫描仪并由容器机械支撑的多轴臂。 此外,容器化系统可以包括干涉仪,电子机架和/或空调单元。