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    • 1. 发明申请
    • FULL-SPECTRUM ABSORPTION SOLAR CELL
    • 全光谱吸收太阳能电池
    • US20120152335A1
    • 2012-06-21
    • US12973101
    • 2010-12-20
    • Hui-Ying SHIUTri-Rung Yew
    • Hui-Ying SHIUTri-Rung Yew
    • H01L31/0256
    • H01L31/18H01L31/032H01L31/0321H01L31/0336H01L31/072Y02E10/50
    • A full-spectrum absorption solar cell adopts cobalt-doped tin dioxide as an N-type material. Thereby, a solar cell of the present invention can be fabricated by a spray method in a hot pressing fabrication process. The present invention does not need to fabricate a solar cell in a vacuum or furnace system and thus can solve the high cost problem of the conventional technology. The N-type cobalt-doped layer can absorb full spectrum of sunlight. The N-type cobalt-doped layer can be used to fabricate a solar cell with a low-temperature fabrication process. Thus, the present invention does not need to adopt a high-temperature resistant substrate (such as silicon chip or glass) used in the conventional high-temperature fabrication process but can adopt a substrate made of plastic. And, the conversion efficiency of the invention can achieve 1.2%, it is a significant improvement over the oxide-based nanostructures heterojunction solar cells in the world.
    • 全光谱吸收太阳能电池采用钴掺杂二氧化锡作为N型材料。 因此,本发明的太阳能电池可以通过喷涂法在热压制造工艺中制造。 本发明不需要在真空或炉系中制造太阳能电池,因此可以解决传统技术的高成本问题。 N型钴掺杂层可吸收全光谱。 N型钴掺杂层可用于制造具有低温制造工艺的太阳能电池。 因此,本发明不需要采用常规高温制造工艺中使用的耐高温基板(例如硅芯片或玻璃),而是可以采用由塑料制成的基板。 而且,本发明的转换效率可以达到1.2%,相对于世界上基于氧化物的纳米结构异质结太阳能电池来说,这是一个显着的改进。
    • 8. 发明授权
    • Method of forming dual damascene structure
    • 形成双镶嵌结构的方法
    • US06680248B2
    • 2004-01-20
    • US09991131
    • 2001-11-20
    • Yimin HuangTri-Rung Yew
    • Yimin HuangTri-Rung Yew
    • H01L214763
    • H01L21/76829H01L21/76807
    • A method of forming a dual damascene structure comprises the steps of providing a substrate having a first conductive layer formed thereon, and then sequentially forming a first dielectric layer, an anti-reflection layer and a second dielectric layer over the substrate. Next, the first dielectric layer, the anti-reflection layer and the second dielectric layer are patterned to form a first opening that exposes the conductive layer. Thereafter, the second dielectric layer is patterned to form a trench (or second opening) in a position above the first conductive layer. The trench and the first opening together form an opening of the dual damascene structure. Finally, a second conductive material is deposited into the opening and the trench to form conductive lines and the dual damascene structures.
    • 形成双镶嵌结构的方法包括以下步骤:提供其上形成有第一导电层的衬底,然后在衬底上顺序形成第一电介质层,抗反射层和第二电介质层。 接下来,对第一电介质层,抗反射层和第二电介质层进行图案化以形成暴露导电层的第一开口。 此后,第二介电层被图案化以在第一导电层上方的位置形成沟槽(或第二开口)。 沟槽和第一开口一起形成双镶嵌结构的开口。 最后,将第二导电材料沉积到开口和沟槽中以形成导电线和双镶嵌结构。
    • 9. 发明授权
    • Method of fabricating DRAM capacitor
    • 制造DRAM电容的方法
    • US06479344B2
    • 2002-11-12
    • US09542715
    • 2000-04-04
    • Kuo-Tai HuangWen-Yi HsiehTri-Rung Yew
    • Kuo-Tai HuangWen-Yi HsiehTri-Rung Yew
    • H01L218242
    • H01L28/75H01L21/28568H01L21/3211H01L27/10852H01L28/55
    • A method of fabricating a DRAM capacitor uses tungsten nitride in the process of forming a capacitor. The structure of the capacitor is simple and the process is easily executed. Furthermore, the invention provides a method of forming tungsten nitride, comprising a step of implanting nitrogen into a tungsten silicide layer and a step of executing a rapid thermal process under ammonia gas to form a tungsten nitride layer on the surface of the tungsten silicide layer. The method of fabricating a DRAM capacitor comprises forming the tungsten silicide layer after forming a part smaller than a bottom electrode of the capacitor from doped polysilicon and forming tungsten nitride on the surface of the tungsten nitride layer.
    • 制造DRAM电容器的方法在形成电容器的过程中使用氮化钨。 电容器的结构简单,易于执行。 此外,本发明提供了一种形成氮化钨的方法,包括将氮气注入到硅化钨层中的步骤以及在氨气下执行快速热处理以在硅化钨层的表面上形成氮化钨层的步骤。 制造DRAM电容器的方法包括在从掺杂多晶硅形成小于电容器的底部电极的部分之后形成硅化钨层,并在氮化钨层的表面上形成氮化钨。