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    • 6. 发明申请
    • SEPARATING DEVICE FOR PROCESS CHAMBERS OF VACUUM COATING INSTALLATION AND VACUUM COATING INSTALLATION
    • 真空涂料安装过程中的分离装置和真空涂料安装
    • US20090139452A1
    • 2009-06-04
    • US12092328
    • 2006-11-21
    • Michael HofmannJochen Krause
    • Michael HofmannJochen Krause
    • C23C14/56
    • C23C14/568C23C16/54
    • A separating device for process chambers arranged one after the other in a vacuum coating installation for coating two-dimensional substrates comprises a separating element which can be fitted between two process chambers transversely in relation to the transporting direction of the substrates. The element comprises a passage for the substrate that is arranged in the region of the transporting plane of the substrate and formed by at least one through-opening provided in the separating element, and includes at least one closure, optionally closing or opening the passage. An intermediate chamber formed by intermediate chamber outer walls is also provided and the separating element is arranged inside the intermediate chamber and the intermediate chamber is subdivided into two intermediate chamber segments. In this configuration, the separating device forms a chamber of its own, arranged between two neighbouring process chambers.
    • 在用于涂覆二维基板的真空涂布装置中一个接一个地布置的用于处理室的分离装置包括分离元件,其可以相对于基板的输送方向横向地安装在两个处理室之间。 元件包括用于基底的通道,该通道布置在基板的输送平面的区域中并由设置在分离元件中的至少一个通孔形成,并且包括至少一个封闭件,可选地封闭或打开该通道。 还设置由中间室外壁形成的中间室,分离元件设置在中间室的内部,中间室被细分成两个中间室段。 在这种构造中,分离装置形成了它自己的室,它设置在两个相邻的处理室之间。
    • 7. 发明授权
    • Transport device, in particular for use in a vacuum chamber
    • 运输装置,特别用于真空室
    • US07490714B2
    • 2009-02-17
    • US11411650
    • 2006-04-26
    • Jochen KrauseMichael Hofmann
    • Jochen KrauseMichael Hofmann
    • B65G15/10
    • B65G49/064B65G2249/02
    • A transport device is particularly suitable for use in a vacuum chamber for the transportation of a flat substrate through the vacuum chamber and comprises a belt conveyor with at least one flexible infinite belt guided around at least two deflection rollers, whereby at least one deflection roller can be driven, and further including a filling element positioned for filling at least the space contained by the infinite belt or belts. The air volume enclosed by the transport device is significantly reduced in comparison to conventional solutions by incorporating the filling element in the transport element. As a result, the volume to be evacuated from the vacuum chamber is reduced. The vacuum chamber can be evacuated and ventilated more rapidly. Nevertheless, the transport device is constructed so as to be maintenance-friendly. Maintenance work can be carried out easily, because the infinite belts and the deflection rollers are easily accessible. The transport device can also easily be upgraded in the case of existing vacuum chambers.
    • 输送装置特别适合用于真空室中,以便通过真空室输送平面基底,并且包括具有围绕至少两个偏转辊引导的至少一个柔性无限带的带式输送机,由此至少一个偏转辊可以 被驱动,并且还包括填充元件,该填充元件定位成用于至少填充由无限皮带或皮带包含的空间。 与常规解决方案相比,通过将填充元件结合在传送元件中,由输送装置封闭的空气体积显着减少。 结果,减少了从真空室排出的体积。 真空室可以更快地抽真空通风。 然而,运输装置的构造使得维修方便。 维护工作可以轻松进行,因为无缝的皮带和转向滚轮容易接近。 在现有的真空室的情况下,输送装置也可以容易地升级。
    • 8. 发明授权
    • Process for telomerizing dienes
    • 聚合二烯的方法
    • US6150298A
    • 2000-11-21
    • US242918
    • 1999-06-25
    • Ahmed TafeshMatthias BellerJochen Krause
    • Ahmed TafeshMatthias BellerJochen Krause
    • B01J31/24C07C29/36C07C33/02C07C67/08C07C69/80C07F9/50B01J31/00
    • C07C29/36C07C67/08
    • Process for the telomerization of dienesThe present invention relates to a process for the telomerization of dienes, according to which the diene is reacted with a compound containing an active hydrogen atom in the presence of a palladium compound, a water-soluble phosphine ligand and a base, the water-soluble ligand being a bidentate ligand having the following formula I ##STR1## in which R is identical or different and is phenyl, C.sub.1 -C.sub.12 -alkyl or C.sub.3 -C.sub.10 -cycloalkyl, which may be unsubstituted or substituted by one or more radicals R',R' is identical or different and is SO.sub.3.sup.- M.sup.+, --NMe.sub.3.sup.+ or --COO.sup.- M.sup.+,n is an integer from 1 to 6, in each case based on a naphthyl backbone, andM is H, Na, K, Cs or R".sub.4 N.sup.+ where R" is identical or different and is H, C.sub.1 -C.sub.12 -alkyl or C.sub.1 -C.sub.10 -cycloalkyl.
    • PCT No.PCT / EP97 / 04500 Sec。 371日期1999年6月25日第 102(e)1999年6月25日PCT 1997年8月18日PCT公布。 出版物WO98 / 08794 日期:1998年3月5日二烯的调聚方法本发明涉及二烯的调聚方法,根据该方法,二烯在钯化合物存在下与含有活性氢原子的化合物反应, 可溶性膦配体和碱,所述水溶性配体是具有下式I的二​​齿配体,其中R相同或不同,并且是苯基,C 1 -C 12 - 烷基或C 3 -C 10 - 环烷基,其可以是未取代或取代的 通过一个或多个基团R',R'相同或不同,为SO 3 -M +,-NMe 3+或-COO-M +,n为1至6的整数,在每种情况下基于萘基骨架,M为H ,Na,K,Cs或R''4N +,其中R“相同或不同,为H,C 1 -C 12 - 烷基或C 1 -C 10 - 环烷基。
    • 9. 发明授权
    • Separating device for process chambers of vacuum coating installations and vacuum coating installation
    • 真空镀膜装置和真空镀膜装置处理室分离装置
    • US09057131B2
    • 2015-06-16
    • US12092328
    • 2006-11-21
    • Michael HofmannJochen Krause
    • Michael HofmannJochen Krause
    • C23C14/56C23C16/54
    • C23C14/568C23C16/54
    • A separating device for process chambers arranged one after the other in a vacuum coating installation for coating two-dimensional substrates comprises a separating element which can be fitted between two process chambers transversely in relation to the transporting direction of the substrates. The element comprises a passage for the substrate that is arranged in the region of the transporting plane of the substrate and formed by at least one through-opening provided in the separating element, and includes at least one closure, optionally closing or opening the passage. An intermediate chamber formed by intermediate chamber outer walls is also provided and the separating element is arranged inside the intermediate chamber and the intermediate chamber is subdivided into two intermediate chamber segments. In this configuration, the separating device forms a chamber of its own, arranged between two neighboring process chambers.
    • 在用于涂覆二维基板的真空涂布装置中一个接一个地布置的用于处理室的分离装置包括分离元件,其可以相对于基板的输送方向横向地安装在两个处理室之间。 元件包括用于基底的通道,该通道布置在基板的输送平面的区域中并由设置在分离元件中的至少一个通孔形成,并且包括至少一个封闭件,可选地封闭或打开该通道。 还设置由中间室外壁形成的中间室,分离元件设置在中间室的内部,中间室被细分成两个中间室段。 在这种构造中,分离装置形成了它自己的室,它设置在两个相邻的处理室之间。
    • 10. 发明授权
    • Measuring instrument, in particular for transmission measurement in vacuum system
    • 测量仪器,特别适用于真空系统中的传输测量
    • US07443518B2
    • 2008-10-28
    • US11400857
    • 2006-04-10
    • Jochen KrauseHolger Proehl
    • Jochen KrauseHolger Proehl
    • G01B11/06G01B9/02G01D5/36
    • G01N21/59C23C14/547C23C16/52G01B11/0616G01N21/01G01N21/5907G01N21/8422G01N2021/558G01N2021/5996
    • A measuring instrument, in particular for transmission measurement with transparent substrates, comprises a measuring head with a light emitting element for emitting a light beam and a light receiver element for recording an incident light beam, and a retro-reflector for reflection of the emitted light beam. The measuring instrument allows transmission measurements to be carried out on transparent substrates with only one reflection measuring head. The measuring instrument also allows reflection measurements to be carried out, for example on non-transparent substrates or by tilting the measuring head and covering the retro-reflector. The measuring instrument only requires one measuring head and can therefore be produced more cost-effectively. It does not require calibration, as the retro-reflector also reflects the light in the original direction in the case of oblique incidence and in the event of positional changes caused by process or operational factors (vibrations etc.).
    • 一种测量仪器,特别是用于透明基板的透射测量,包括具有用于发射光束的发光元件的测量头和用于记录入射光束的光接收元件,以及用于反射发射光的回射反射器 光束。 测量仪器允许在只有一个反射测量头的透明基板上进行透射测量。 测量仪器还允许进行反射测量,例如在非透明基板上,或者通过倾斜测量头并覆盖后向反射器。 测量仪器只需要一个测量头,因此可以更经济地生产。 它不需要校准,因为在倾斜入射的情况下以及由于过程或操作因素(振动等)引起的位置变化的情况下,回射器还反射原始方向的光。