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    • 1. 发明申请
    • METHOD FOR MANUFACTURING A THIN FILM TRANSISTOR ARRAY PANEL
    • 制造薄膜晶体管阵列的方法
    • US20110177639A1
    • 2011-07-21
    • US12767667
    • 2010-04-26
    • Hoon KANGJin-Ho JuYang-Ho JungJae-Sung Kim
    • Hoon KANGJin-Ho JuYang-Ho JungJae-Sung Kim
    • H01L21/768
    • H01L21/76816H01L27/124H01L27/1288
    • A thin film transistor display panel includes gate wiring formed on an insulation substrate and including gate lines, and gate electrodes and gate pads connected to the gate lines; a gate insulation layer covering the gate wiring; a semiconductor pattern formed over the gate insulation layer; data wiring formed over the gate insulation layer or the semiconductor pattern and including source electrodes, drain electrodes, and data pads; a protection layer including a Nega-PR type of organic insulating layer formed all over the semiconductor pattern and the data wiring, wherein the thickness of the Nega-PR type of organic insulating layer in both the gate and data pad regions is smaller than in the other regions; and a pixel electrode connected to the drain electrode. When exposing the Nega-PR type of passivation layer in the pad region during a photolithography process, a photomask having a lattice pattern made of a metal such as Cr that has a line width of less than the resolution of a light exposer is used. Thus, the resulting post-etch height of the passivation layer can be selectively controlled so as to provide reduced effective thickness in the pad regions.
    • 薄膜晶体管显示面板包括形成在绝缘基板上并包括栅极线的栅极布线,以及连接到栅极线的栅电极和栅极焊盘; 覆盖栅极布线的栅极绝缘层; 形成在所述栅极绝缘层上的半导体图案; 数据线形成在栅极绝缘层或半导体图案上,并且包括源电极,漏电极和数据焊盘; 包括形成在整个半导体图案上的Nega-PR型有机绝缘层和数据布线的保护层,其中栅极和数据焊盘区域中的Nega-PR类型的有机绝缘层的厚度小于 其他地区; 以及连接到漏电极的像素电极。 在光刻工艺中,当在焊盘区域中曝光Nega-PR类型的钝化层时,使用具有由诸如Cr之类的金属制成的格子图案的光掩模,该栅极图案的线宽小于曝光器的分辨率。 因此,可以选择性地控制所得到的钝化层的蚀刻后高度,以便在焊盘区域中提供减小的有效厚度。
    • 3. 发明授权
    • Method for manufacturing a thin film transistor array panel
    • 薄膜晶体管阵列面板的制造方法
    • US08324003B2
    • 2012-12-04
    • US12767667
    • 2010-04-26
    • Hoon KangJin-Ho JuYang-Ho JungJae-Sung Kim
    • Hoon KangJin-Ho JuYang-Ho JungJae-Sung Kim
    • H01L21/311H01L33/44
    • H01L21/76816H01L27/124H01L27/1288
    • A thin film transistor display panel includes gate wiring formed on an insulation substrate and including gate lines, and gate electrodes and gate pads connected to the gate lines; a gate insulation layer covering the gate wiring; a semiconductor pattern formed over the gate insulation layer; data wiring formed over the gate insulation layer or the semiconductor pattern and including source electrodes, drain electrodes, and data pads; a protection layer including a Nega-PR type of organic insulating layer formed all over the semiconductor pattern and the data wiring, wherein the thickness of the Nega-PR type of organic insulating layer in both the gate and data pad regions is smaller than in the other regions; and a pixel electrode connected to the drain electrode. When exposing the Nega-PR type of passivation layer in the pad region during a photolithography process, a photomask having a lattice pattern made of a metal such as Cr that has a line width of less than the resolution of a light exposer is used. Thus, the resulting post-etch height of the passivation layer can be selectively controlled so as to provide reduced effective thickness in the pad regions.
    • 薄膜晶体管显示面板包括形成在绝缘基板上并包括栅极线的栅极布线,以及连接到栅极线的栅电极和栅极焊盘; 覆盖栅极布线的栅极绝缘层; 形成在所述栅极绝缘层上的半导体图案; 数据线形成在栅极绝缘层或半导体图案上,并且包括源电极,漏电极和数据焊盘; 包括形成在整个半导体图案上的Nega-PR型有机绝缘层和数据布线的保护层,其中栅极和数据焊盘区域中的Nega-PR类型的有机绝缘层的厚度小于 其他地区; 以及连接到漏电极的像素电极。 在光刻工艺中,当在焊盘区域中曝光Nega-PR类型的钝化层时,使用具有由诸如Cr之类的金属制成的格子图案的光掩模,该栅极图案的线宽小于曝光器的分辨率。 因此,可以选择性地控制所得到的钝化层的蚀刻后高度,以便在焊盘区域中提供减小的有效厚度。
    • 5. 发明授权
    • Thin film transistor array panel and method for manufacturing the same
    • 薄膜晶体管阵列面板及其制造方法
    • US08501512B2
    • 2013-08-06
    • US12910268
    • 2010-10-22
    • Jae-Sung KimHoon KangYang-Ho Jung
    • Jae-Sung KimHoon KangYang-Ho Jung
    • H01L33/08
    • G02F1/136227G02F1/00H01L27/1248H01L27/1288H01L29/41733
    • A manufacturing method of a thin film transistor array panel includes forming a gate line, forming a gate insulating layer on the gate line, forming a data line including a drain electrode on the gate insulating layer, forming a passivation layer on the gate insulating layer, the data line, and the drain electrode, forming a negative photosensitive organic layer on the passivation layer, heat treating the negative photosensitive organic layer to form an insulating layer including a first portion, and a second portion that is thinner than the first portion, and forming a pixel electrode, a first contact assistant, and a second contact assistant on the insulating layer. The pixel electrode is disposed on the first portion, the first and second contact assistants are disposed on the second portion, and the thickness of the second portion is less than about 1.5 micrometers (μm).
    • 薄膜晶体管阵列面板的制造方法包括形成栅极线,在栅极线上形成栅极绝缘层,在栅极绝缘层上形成包括漏电极的数据线,在栅极绝缘层上形成钝化层, 数据线和漏电极,在钝化层上形成负光敏有机层,对负光敏有机层进行热处理,形成包含第一部分的绝缘层和比第一部分薄的第二部分,以及 在绝缘层上形成像素电极,第一接触辅助件和第二接触辅助件。 像素电极设置在第一部分上,第一和第二接触助剂设置在第二部分上,第二部分的厚度小于约1.5微米(母体)。
    • 7. 发明申请
    • LIQUID CRYSTAL DISPLAY AND METHOD FOR MANUFACTURING THE SAME
    • 液晶显示器及其制造方法
    • US20090237581A1
    • 2009-09-24
    • US12267164
    • 2008-11-07
    • Jae-Sung KIMHoon KangYang-Ho JungHi-Kuk Lee
    • Jae-Sung KIMHoon KangYang-Ho JungHi-Kuk Lee
    • G02F1/1368G02F1/13
    • G02F1/1339
    • In accordance with one or more embodiments of the present disclosure, a liquid crystal display includes a first substrate, a plurality of first signal lines formed on the first substrate, a plurality of second signal lines intersecting the first signal lines, a plurality of thin film transistors connected to the first signal lines and the second signal lines, an organic insulator formed on the thin film transistors, a plurality of pixel electrodes formed on the organic insulator, a second substrate facing the first substrate, a common electrode formed on the second substrate, a sealant disposed between the first substrate and the second substrate and formed according to the circumference of the second substrate, and a liquid crystal layer interposed between the first substrate and the second substrate and disposed in a region defined by the sealant. The organic insulator includes an opening formed at a position overlapping the sealant.
    • 根据本公开的一个或多个实施例,液晶显示器包括第一基板,形成在第一基板上的多个第一信号线,与第一信号线相交的多个第二信号线,多个薄膜 连接到第一信号线和第二信号线的晶体管,形成在薄膜晶体管上的有机绝缘体,形成在有机绝缘体上的多个像素电极,面对第一基板的第二基板,形成在第二基板上的公共电极 ,设置在所述第一基板和所述第二基板之间并根据所述第二基板的圆周形成的密封剂,以及插入在所述第一基板和所述第二基板之间并且设置在由所述密封剂限定的区域中的液晶层。 有机绝缘体包括形成在与密封剂重叠的位置处的开口。