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    • 3. 发明申请
    • High voltage semiconductor device having a lateral channel and enhanced gate-to-drain separation
    • 具有侧向通道和增强的栅 - 漏分离的高电压半导体器件
    • US20070145417A1
    • 2007-06-28
    • US11711340
    • 2007-02-27
    • Berinder BrarWonill HaMariam SadakaChanh Nguyen
    • Berinder BrarWonill HaMariam SadakaChanh Nguyen
    • H01L29/76
    • H01L29/66462H01L29/4175H01L29/41766H01L29/7785
    • A semiconductor device having a lateral channel with contacts on opposing surfaces thereof. The semiconductor device includes a conductive substrate having a source contact covering a substantial portion of a bottom surface thereof. The semiconductor device also includes an isolation layer above the conductive substrate, a lateral channel above the isolation layer and a drain contact above the lateral channel. The semiconductor device further includes a gate located in a gate recess interposed between the lateral channel and the drain contact and a drain formed by at least one source/drain contact layer interposed between the lateral channel and the drain contact. The drain is offset on one side of the gate by a gate-to-drain separation distance. The semiconductor device still further includes an interconnect that connects the lateral channel to the conductive substrate operable to provide a low resistance coupling between the source contact and the lateral channel.
    • 一种具有在其相对表面上具有触点的横向通道的半导体器件。 半导体器件包括具有覆盖其底表面的大部分的源极接触的导电基底。 半导体器件还包括在导电衬底之上的隔离层,隔离层上方的横向沟道和横向沟道上方的漏极接触。 所述半导体器件还包括位于所述横向沟道和所述漏极接触之间的栅极凹槽中的栅极和由介于所述侧向沟道和所述漏极接触之间的至少一个源极/漏极接触层形成的漏极。 漏极在栅极到漏极间隔距离的一侧偏移。 半导体器件还包括将横向沟道连接到导电衬底的互连,其可操作以在源极接触和侧向通道之间提供低电阻耦合。
    • 5. 发明申请
    • Semiconductor Device Including a Lateral Field-Effect Transistor and Schottky Diode
    • 包括横向场效应晶体管和肖特基二极管的半导体器件
    • US20080048174A1
    • 2008-02-28
    • US11866270
    • 2007-10-02
    • Mariam SadakaBerinder BrarWonill HaChanh Nguyen
    • Mariam SadakaBerinder BrarWonill HaChanh Nguyen
    • H01L29/15
    • H01L29/7783H01L27/0605H01L27/0629H01L27/0727H01L29/66462H01L29/872
    • A semiconductor device including a lateral field-effect transistor and Schottky diode and method of forming the same. In one embodiment, the lateral field-effect transistor includes a buffer layer having a contact covering a substantial portion of a bottom surface thereof, a lateral channel above the buffer layer, another contact above the lateral channel, and an interconnect that connects the lateral channel to the buffer layer. The semiconductor device also includes a Schottky diode parallel-coupled to the lateral field-effect transistor including a cathode formed from another buffer layer interposed between the buffer layer and the lateral channel, a Schottky interconnect interposed between the another buffer layer and the another contact, and an anode formed on a surface of the Schottky interconnect operable to connect the anode to the another contact. The semiconductor device may also include an isolation layer interposed between the buffer layer and the lateral channel.
    • 包括横向场效应晶体管和肖特基二极管的半导体器件及其形成方法。 在一个实施例中,横向场效应晶体管包括缓冲层,该缓冲层具有覆盖其底表面的大部分的接触,缓冲层上方的横向通道,横向通道上方的另一接触件以及将侧向通道 到缓冲层。 半导体器件还包括并联耦合到横向场效应晶体管的肖特基二极管,该晶体管包括由介于缓冲层和横向沟道之间的另一个缓冲层形成的阴极,插入另一个缓冲层和另一个触点之间的肖特基互连, 以及形成在所述肖特基互连件的表面上的阳极,其可操作以将所述阳极连接到所述另一个触点。 半导体器件还可以包括插入在缓冲层和横向沟道之间的隔离层。