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    • 10. 发明授权
    • Two-axis actuator with large stage
    • 双轴执行器大台阶
    • US07142077B2
    • 2006-11-28
    • US10922140
    • 2004-08-20
    • Kyoung-lock BaeckJong-up JunJu-hwan JungSeung-bum HongDong-ki MinHong-sik Park
    • Kyoung-lock BaeckJong-up JunJu-hwan JungSeung-bum HongDong-ki MinHong-sik Park
    • H01H51/22
    • H02N1/008H02K2201/18
    • A two-axis actuator having a large stage area and including includes a substrate, an anchor unit having sides approximately in a rectangular shape, fixed on the substrate, a plurality of first actuating parts actuating in a first direction and separated from the substrate within regions of both sides of the anchor unit, a plurality of second actuating parts actuating in a second direction between the first actuating parts, a rectangular shaped stage that actuates in the second direction, disposed above the second actuating parts, a third actuating part formed on the first actuating part, and elevated at a predetermined distance from the stage and the anchor unit, first direction deformable springs that support the first actuating part in inner parts of the anchor unit, and second direction deformable springs formed to fix the second actuating part in an inner part of the third actuating part.
    • 具有大台阶区域的双轴致动器包括:基板,具有固定在基板上的大致矩形形状的侧面的锚定单元,多个第一致动部件,其在第一方向上致动并且在区域内与基板分离 所述锚定单元的两侧的多个第二致动部件在所述第一致动部件之间沿第二方向致动,所述第二致动部件设置在所述第二致动部件上方的在所述第二方向上致动的矩形台架, 第一致动部件,并且与所述平台和所述锚固单元一起预定距离地升高,所述第一方向可变形弹簧,其支撑所述锚固单元的内部部分中的所述第一致动部件;以及第二方向可变形弹簧,其形成为将所述第二致动部件固定在 第三驱动部件的内部部分。