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    • 1. 发明申请
    • METHOD OF MANUFACTURING A TRANSISTOR
    • 制造晶体管的方法
    • US20080138991A1
    • 2008-06-12
    • US11932994
    • 2007-10-31
    • Hong ChoSeung-Pil ChungHong-Sik YoonKyung-Rae Byun
    • Hong ChoSeung-Pil ChungHong-Sik YoonKyung-Rae Byun
    • H01L21/308H01L21/465
    • H01L51/057B82Y10/00H01L51/0048Y10T29/49105
    • A multilayer insulating structure including a first stop layer, a first insulating layer and a second stop layer is formed on the first conductive structure. A second conductive structure and a second insulating layer are formed on the first conductive structure. The second insulating layer and the second conductive structure are etched to form a first hole and a second hole having a first radius. A spacer is formed on sidewalls of the first and second holes. The second stop layer and the first insulating layer are etched using the spacer as an etch mask to form a third hole having a second radius smaller than the first radius. A sacrificial filler is formed on the first stop layer to fill the third hole. After removing the spacer, the sacrificial filler is removed. The first stop layer is etched. A carbon nano-tube is grown from the first conductive structure.
    • 在第一导电结构上形成包括第一阻挡层,第一绝缘层和第二阻挡层的多层绝缘结构。 在第一导电结构上形成第二导电结构和第二绝缘层。 蚀刻第二绝缘层和第二导电结构以形成具有第一半径的第一孔和第二孔。 间隔件形成在第一孔和第二孔的侧壁上。 使用间隔物作为蚀刻掩模蚀刻第二阻挡层和第一绝缘层,以形成具有小于第一半径的第二半径的第三孔。 在第一停止层上形成牺牲填料以填充第三孔。 去除间隔物后,去除牺牲填料。 第一个停止层被蚀刻。 从第一导电结构生长碳纳米管。
    • 6. 发明申请
    • MULTIPLEXER AND METHOD OF MANUFACTURING THE SAME
    • 多路复用器及其制造方法
    • US20100155853A1
    • 2010-06-24
    • US12641836
    • 2009-12-18
    • Hong-Sik Yoon
    • Hong-Sik Yoon
    • H01L27/105H03K17/00H01L21/77
    • G11C7/1006G11C7/1012
    • A multiplexer can include a signal line arranged on a substrate and including a plurality of data wires extending in a first direction and electrically insulated from one another, where each of the data wires has at least one recess to provide at least two data wiring pieces. An address line is arranged on the signal line and includes a plurality of coding lines extending in a second direction different from the first direction and electrically insulated from the data wires. A plurality of switching elements are positioned in the recesses of the data wires and make electrical contact with the coding lines, where the switching element is configured to switch a data signal applied to the data wiring on and off in accordance with a coding signal applied to the coding lines, so that one of the data wires is selected according to a binary code of the address line corresponding to combinations of the coding lines to which coding signal is applied.
    • 多路复用器可以包括布置在基板上的信号线,并且包括在第一方向上延伸并且彼此电绝缘的多条数据线,其中每条数据线具有至少一个凹部以提供至少两条数据布线片。 地址线布置在信号线上,并且包括沿与第一方向不同的第二方向延伸并与数据线电绝缘的多条编码线。 多个开关元件位于数据线的凹部中并与编码线电接触,其中开关元件被配置为根据施加到数据线的编码信号来接通和断开施加到数据线的数据信号 编码线,使得根据与应用了编码信号的编码线的组合对应的地址线的二进制码来选择数据线之一。