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1. 发明申请

US20090226096A1 EDGE DETECTION TECHNIQUE AND CHARGED PARTICLE RADIATION EQUIPMENT 有权
标题翻译：边缘检测技术和充电颗粒辐射设备
公开(公告)号：US20090226096A1
公开(公告)日：2009-09-10
申请号：US12393321
申请日：2009-02-26
申请人： Hitoshi NAMAI , Osamu Komuro , Satoru Yamaguchi , Fumihiro Sasajima
发明人： Hitoshi NAMAI , Osamu Komuro , Satoru Yamaguchi , Fumihiro Sasajima
IPC分类号： G06K9/48
CPC分类号： G06K9/4609 , G06T7/13
摘要： An object of the present invention is to provide an edge detection technique and equipment which are capable of stably detecting an edge by suppressing the influence of noise even in the case where the image is obtained by charged particle radiation equipment, such as a scanning electron microscope and has a low S/N ratio. More specifically, the present invention is to propose a technique and equipment which are configured to determine a peak position (edge) on the basis of the following two edge extraction techniques. That is, the present invention is to propose a technique and equipment wherein at least two peaks are formed by using, as edge detection techniques, for example, one peak detection technique having a relatively high sensitivity and the other peak detection technique which is relatively less susceptible to the influence of noise than the one peak detection technique, and wherein a position where the peaks coincide with each other is determined as a true peak position (edge position).
摘要翻译：本发明的目的是提供一种能够通过抑制噪声的影响来稳定地检测边缘的边缘检测技术和设备，即使在通过诸如扫描电子显微镜的带电粒子辐射设备获得图像的情况下并具有较低的S / N比。更具体地，本发明是提出一种被配置为基于以下两个边缘提取技术来确定峰值位置（边缘）的技术和设备。也就是说，本发明提出一种技术和设备，其中通过使用作为边缘检测技术的至少两个峰形成例如具有相对较高灵敏度的一个峰值检测技术和相对较少的另一个峰值检测技术容易受到噪声的影响而不是一个峰值检测技术，并且其中峰值彼此一致的位置被确定为真正的峰值位置（边缘位置）。

2. 发明授权

US08953855B2 Edge detection technique and charged particle radiation equipment 有权
标题翻译：边缘检测技术和带电粒子辐射设备
公开(公告)号：US08953855B2
公开(公告)日：2015-02-10
申请号：US12393321
申请日：2009-02-26
申请人： Hitoshi Namai , Osamu Komuro , Satoru Yamaguchi , Fumihiro Sasajima
发明人： Hitoshi Namai , Osamu Komuro , Satoru Yamaguchi , Fumihiro Sasajima
IPC分类号： G06K9/00 , G06K9/46 , G06T7/00
CPC分类号： G06K9/4609 , G06T7/13
摘要： An object of the present invention is to provide an edge detection technique and equipment which are capable of stably detecting an edge by suppressing the influence of noise even in the case where the image is obtained by charged particle radiation equipment, such as a scanning electron microscope and has a low S/N ratio. More specifically, the present invention is to propose a technique and equipment which are configured to determine a peak position (edge) on the basis of the following two edge extraction techniques. That is, the present invention is to propose a technique and equipment wherein at least two peaks are formed by using, as edge detection techniques, for example, one peak detection technique having a relatively high sensitivity and the other peak detection technique which is relatively less susceptible to the influence of noise than the one peak detection technique, and wherein a position where the peaks coincide with each other is determined as a true peak position (edge position).
摘要翻译：本发明的目的是提供一种能够通过抑制噪声的影响来稳定地检测边缘的边缘检测技术和设备，即使在通过诸如扫描电子显微镜的带电粒子辐射设备获得图像的情况下并具有较低的S / N比。更具体地，本发明是提出一种被配置为基于以下两个边缘提取技术来确定峰值位置（边缘）的技术和设备。也就是说，本发明提出一种技术和设备，其中通过使用作为边缘检测技术的至少两个峰形成例如具有相对较高灵敏度的一个峰值检测技术和相对较少的另一个峰值检测技术容易受到噪声的影响而不是一个峰值检测技术，并且其中峰值彼此重合的位置被确定为真正的峰值位置（边缘位置）。

3. 发明申请

US20130270436A1 PATTERN DETERMINATION DEVICE AND COMPUTER PROGRAM 有权
标题翻译：图案确定设备和计算机程序
公开(公告)号：US20130270436A1
公开(公告)日：2013-10-17
申请号：US13882134
申请日：2011-10-14
申请人： Hitoshi Namai , Satoru Yamaguchi , Fumihiro Sasajima
发明人： Hitoshi Namai , Satoru Yamaguchi , Fumihiro Sasajima
IPC分类号： G01B21/30
CPC分类号： G01B21/30 , H01J37/28 , H01J2237/24578 , H01J2237/24592 , H01J2237/2816 , H01J2237/2817
摘要： An object of the invention is to provide: a sample unevenness device that stably identifies unevenness formed on a sample, regardless of a pattern formation state or image acquisition conditions; and a computer program. As an aspect to achieve the above object, a device and computer program are proposed that obtain the area of a plurality of regions formed by a profile waveform of a given threshold or lower for a profile formed based on a detection signal obtained by scanning with a charged particle beam with respect to the sample; and determine either or both of that a site corresponding to a region with a relatively large area is a concave portion or that a space portion and a site corresponding to a space with a relatively small area is a convex portion or a line portion.
摘要翻译：本发明的目的是提供：不管图案形成状态或图像获取条件如何，均匀地识别形成在样品上的不均匀性的样本不均匀装置; 和计算机程序。作为实现上述目的的一个方面，提出了一种装置和计算机程序，其基于通过以下步骤扫描获得的检测信号，获得由给定阈值或更低的轮廓波形形成的多个区域的面积带电粒子束相对于样品; 并且确定与具有相对较大面积的区域相对应的部位之一或两者是凹部，或者空间部分和与具有相对较小面积的空间相对应的部位是凸部或线部分。

4. 发明授权

US09329034B2 Pattern determination device and computer program 有权
标题翻译：图案确定装置和计算机程序
公开(公告)号：US09329034B2
公开(公告)日：2016-05-03
申请号：US13882134
申请日：2011-10-14
申请人： Hitoshi Namai , Satoru Yamaguchi , Fumihiro Sasajima
发明人： Hitoshi Namai , Satoru Yamaguchi , Fumihiro Sasajima
IPC分类号： G01B21/30 , H01J37/28
CPC分类号： G01B21/30 , H01J37/28 , H01J2237/24578 , H01J2237/24592 , H01J2237/2816 , H01J2237/2817
摘要： An object of the invention is to provide: a sample unevenness device that stably identifies unevenness formed on a sample, regardless of a pattern formation state or image acquisition conditions; and a computer program. As an aspect to achieve the above object, a device and computer program are proposed that obtain the area of a plurality of regions formed by a profile waveform of a given threshold or lower for a profile formed based on a detection signal obtained by scanning with a charged particle beam with respect to the sample; and determine either or both of that a site corresponding to a region with a relatively large area is a concave portion or that a space portion and a site corresponding to a space with a relatively small area is a convex portion or a line portion.
摘要翻译：本发明的目的是提供：不管图案形成状态或图像获取条件如何，均匀地识别形成在样品上的不均匀性的样本不均匀装置; 和计算机程序。作为实现上述目的的一个方面，提出了一种装置和计算机程序，其基于通过以下步骤扫描获得的检测信号，获得由给定阈值或更低的轮廓波形形成的多个区域的面积带电粒子束相对于样品; 并且确定与具有相对较大面积的区域相对应的部位之一或两者是凹部，或者空间部分和与具有相对较小面积的空间相对应的部位是凸部或线部分。

5. 发明授权

US06872943B2 Method for determining depression/protrusion of sample and charged particle beam apparatus therefor 有权
公开(公告)号：US06872943B2
公开(公告)日：2005-03-29
申请号：US10192692
申请日：2002-07-11
申请人： Atsushi Takane , Satoru Yamaguchi , Osamu Komuro , Yasuhiko Ozawa , Hideo Todokoro
发明人： Atsushi Takane , Satoru Yamaguchi , Osamu Komuro , Yasuhiko Ozawa , Hideo Todokoro
IPC分类号： G01B15/04 , G01B15/08 , H01J37/28 , H01L21/66 , G01K1/08 , G01N23/00
CPC分类号： H01J37/28 , H01J2237/2815
摘要： A method for determining a depression/protrusion, especially of a line and space pattern formed on a sample, and an apparatus therefor. A charged particle beam is scanned with its direction being inclined to the original optical axis of the charged particle beam or a sample stage is inclined, broadening of a detected signal in a line scanning direction of the charged particle beam is measured, the broadening is compared with that when the charged particle beam is scanned with its direction being parallel to the original optical axis of the charged particle beam, and a depression/protrusion of the scanned portion is determined on the basis of increase/decrease of the broadening.

6. 发明授权

US07941008B2 Pattern search method 有权
标题翻译：模式搜索方式
公开(公告)号：US07941008B2
公开(公告)日：2011-05-10
申请号：US11104632
申请日：2005-04-13
申请人： Norio Satou , Akiyuki Sugiyama , Osamu Komuro , Satoru Yamaguchi
发明人： Norio Satou , Akiyuki Sugiyama , Osamu Komuro , Satoru Yamaguchi
IPC分类号： G06K9/54
CPC分类号： G06T7/001
摘要： According to the pattern search method of the present invention, detection of a detection image region relative to an observation image is performed by a pattern matching. An image whose size is substantially the same as that of the observation image is used as the detection image region. The detection image region is relatively displaced with reference to the observation image, thereby detecting a degree of similarity for a common region which is common to both of the region and the image. Displacement range of the detection image region is set in advance. If area of the common region is larger than a predetermined value, calculating the degree of similarity will be performed.
摘要翻译：根据本发明的图案搜索方法，通过图案匹配来执行相对于观察图像的检测图像区域的检测。使用与观察图像基本相同的图像作为检测图像区域。检测图像区域相对于观察图像相对移位，从而检测对于区域和图像两者共同的公共区域的相似度。预先设定检测图像区域的位移范围。如果公共区域的面积大于预定值，则将执行相似度的计算。

7. 发明授权

US07166840B2 Method for determining depression/protrusion of sample and charged particle beam apparatus therefor 有权
标题翻译：用于确定样品和带电粒子束装置的凹陷/突起的方法
公开(公告)号：US07166840B2
公开(公告)日：2007-01-23
申请号：US11056191
申请日：2005-02-14
申请人： Atsushi Takane , Satoru Yamaguchi , Osamu Komuro , Yasuhiko Ozawa , Hideo Todokoro
发明人： Atsushi Takane , Satoru Yamaguchi , Osamu Komuro , Yasuhiko Ozawa , Hideo Todokoro
IPC分类号： G01N23/00
CPC分类号： H01J37/28 , H01J2237/2815
摘要： A method for determining a depression/protrusion, especially of a line and space pattern formed on a sample, and an apparatus therefor. A charged particle beam is scanned with its direction being inclined to the original optical axis of the charged particle beam or a sample stage is inclined, broadening of a detected signal in a line scanning direction of the charged particle beam is measured, the broadening is compared with that when the charged particle beam is scanned with its direction being parallel to the original optical axis of the charged particle beam, and a depression/protrusion of the scanned portion is determined on the basis of increase/decrease of the broadening.
摘要翻译：用于确定凹陷/突起的方法，特别是用于形成在样本上的线和空间图案及其装置。扫描带电粒子束的方向与带电粒子束的原始光轴倾斜，或者样品台倾斜，测量带电粒子束的扫描方向上的检测信号的变宽，比较加宽其中当带电粒子束的扫描方向平行于带电粒子束的原始光轴时，并且基于增宽的增加/减小来确定扫描部分的凹陷/突起。

8. 发明申请

US20050109937A1 Scanning electron microscope 有权
标题翻译：扫描电子显微镜
公开(公告)号：US20050109937A1
公开(公告)日：2005-05-26
申请号：US10933342
申请日：2004-09-03
申请人： Satoru Yamaguchi , Takashi Iizumi , Osamu Komuro , Hidetoshi Morokuma , Tatsuya Maeda , Juntaro Arima , Yasuhiko Ozawa
发明人： Satoru Yamaguchi , Takashi Iizumi , Osamu Komuro , Hidetoshi Morokuma , Tatsuya Maeda , Juntaro Arima , Yasuhiko Ozawa
IPC分类号： H01L21/66 , G01N23/04 , G01Q10/00 , G01Q20/00 , G01Q30/02 , G01Q30/04 , G21K7/00 , H01J37/22 , H01J37/28 , G01N23/00
CPC分类号： H01J37/28 , G01N23/04 , G01N23/225 , G06T7/74 , G06T2207/10056 , G06T2207/30148 , H01J37/222 , H01J2237/2817
摘要： An object of the present invention is to provide a scanning electron microscope for reducing a process concerning inspection positioning or an input operation, thereby functioning with high precision at high speed. To accomplish the above object, the present invention provides a scanning electron microscope having a function for identifying a desired position on the basis of a pattern registered beforehand, which includes a means for setting information concerning the pattern kind, the interval between a plurality of parts constituting the pattern, and the size of parts constituting the pattern and a means for forming a pattern image composed of a plurality of parts on the basis of the information obtained by the concerned means.
摘要翻译：本发明的目的是提供一种用于减少与检查定位或输入操作相关的处理的扫描电子显微镜，从而以高速度高精度地运行。为了实现上述目的，本发明提供了一种扫描电子显微镜，其具有基于预先登记的图案来识别期望位置的功能，该扫描电子显微镜包括用于设置关于图案种类的信息的装置，多个部分之间的间隔构成图案的部分，以及构成图案的部分的尺寸，以及基于由相关装置获得的信息形成由多个部分组成的图案图像的装置。

9. 发明授权

US06803573B2 Scanning electron microscope 有权
标题翻译：扫描电子显微镜
公开(公告)号：US06803573B2
公开(公告)日：2004-10-12
申请号：US10615864
申请日：2003-07-10
申请人： Satoru Yamaguchi , Takashi Iizumi , Osamu Komuro , Hidetoshi Morokuma , Tatsuya Maeda , Juntaro Arima , Yasuhiko Ozawa
发明人： Satoru Yamaguchi , Takashi Iizumi , Osamu Komuro , Hidetoshi Morokuma , Tatsuya Maeda , Juntaro Arima , Yasuhiko Ozawa
IPC分类号： H01J3728
CPC分类号： H01J37/28 , G01N23/04 , G01N23/225 , G06T7/74 , G06T2207/10056 , G06T2207/30148 , H01J37/222 , H01J2237/2817
摘要： An object of the present invention is to provide a scanning electron microscope for reducing a process concerning inspection positioning or an input operation, thereby functioning with high precision at high speed. To accomplish the above object, the present invention provides a scanning electron microscope having a function for identifying a desired position on the basis of a pattern registered beforehand, which includes a means for setting information concerning the pattern kind, the interval between a plurality of parts constituting the pattern, and the size of parts constituting the pattern and a means for forming a pattern image composed of a plurality of parts on the basis of the information obtained by the concerned means.
摘要翻译：本发明的目的是提供一种用于减少与检查定位或输入操作相关的处理的扫描电子显微镜，从而以高速度高精度地运行。为了实现上述目的，本发明提供了一种扫描电子显微镜，其具有基于预先登记的图案来识别期望位置的功能，该扫描电子显微镜包括用于设置关于图案种类的信息的装置，多个部分之间的间隔构成图案的部分，以及构成图案的部分的尺寸，以及基于由相关装置获得的信息形成由多个部分组成的图案图像的装置。

10. 发明授权

US06627888B2 Scanning electron microscope 有权
标题翻译：扫描电子显微镜
公开(公告)号：US06627888B2
公开(公告)日：2003-09-30
申请号：US09792721
申请日：2001-02-23
申请人： Satoru Yamaguchi , Takashi Iizumi , Osamu Komuro , Hidetoshi Morokuma , Tatsuya Maeda , Juntaro Arima , Yasuhiko Ozawa
发明人： Satoru Yamaguchi , Takashi Iizumi , Osamu Komuro , Hidetoshi Morokuma , Tatsuya Maeda , Juntaro Arima , Yasuhiko Ozawa
IPC分类号： H01J3728
CPC分类号： H01J37/28 , G01N23/04 , G01N23/225 , G06T7/74 , G06T2207/10056 , G06T2207/30148 , H01J37/222 , H01J2237/2817
摘要： An object of the present invention is to provide a scanning electron microscope for reducing a process concerning inspection positioning or an input operation, thereby functioning with high precision at high speed. To accomplish the above object, the present invention provides a scanning electron microscope having a function for identifying a desired position on the basis of a pattern registered beforehand, which includes a means for setting information concerning the pattern kind, the interval between a plurality of parts constituting the pattern, and the size of parts constituting the pattern and a means for forming a pattern image composed of a plurality of parts on the basis of the information obtained by the concerned means.
摘要翻译：本发明的目的是提供一种用于减少检查定位或输入操作的过程的扫描电子显微镜，从而以高精度高功能运行。为了实现上述目的，本发明提供一种扫描电子显微镜，其具有用于基于预先登记的图案来识别期望位置的功能，其包括用于设置关于图案种类的信息的装置，构成图案的多个部分之间的间隔和构成图案的部分的尺寸的装置，以及用于基于由相关装置获得的信息，形成由多个部分组成的图案图像。

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