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1. 发明申请

US20060097158A1 Scanning electron microscope 有权
公开(公告)号：US20060097158A1
公开(公告)日：2006-05-11
申请号：US11292002
申请日：2005-12-02
申请人： Satoru Yamaguchi , Takashi Iizumi , Osamu Komuro , Hidetoshi Morokuma , Tatsuya Maeda , Juntaro Arima , Yasuhiko Ozawa
发明人： Satoru Yamaguchi , Takashi Iizumi , Osamu Komuro , Hidetoshi Morokuma , Tatsuya Maeda , Juntaro Arima , Yasuhiko Ozawa
IPC分类号： G01N23/00
CPC分类号： H01J37/28 , G01N23/04 , G01N23/225 , G06T7/74 , G06T2207/10056 , G06T2207/30148 , H01J37/222 , H01J2237/2817
摘要： An object of the present invention is to provide a scanning electron microscope for reducing a process concerning inspection positioning or an input operation, thereby functioning with high precision at high speed. To accomplish the above object, the present invention provides a scanning electron microscope having a function for identifying a desired position on the basis of a pattern registered beforehand, which includes a means for setting information concerning the pattern kind, the interval between a plurality of parts constituting the pattern, and the size of parts constituting the pattern and a means for forming a pattern image composed of a plurality of parts on the basis of the information obtained by the concerned means.

2. 发明授权

US06925423B2 Monitoring device and monitoring method for vacuum device 有权
标题翻译：真空装置监控装置及监控方法
公开(公告)号：US06925423B2
公开(公告)日：2005-08-02
申请号：US10253485
申请日：2002-09-25
申请人： Hitoshi Fukube , Kenichiro Sonobe , Juntaro Arima
发明人： Hitoshi Fukube , Kenichiro Sonobe , Juntaro Arima
IPC分类号： H01J37/28 , G05B23/02 , H01L21/027 , H01L21/66 , G06F17/40
CPC分类号： G05B23/024
摘要： A monitoring device and method, of a vacuum-system device having a vacuum portion, which can collectively perform the maintenance control of the device or counter measures to overcome drawbacks by providing a monitoring method equivalent to monitoring in real time and simultaneously based on data from respective types of sensors of the vacuum system. By visualizing the state of a driving system in a vacuum, a vacuum valve, a vacuum state and a state of an electro-optic system on a screen, the device state in a vacuum may be grasped. Further, it is possible to perform the time measuring and the comparison of data with the reference data by setting up timing charts with respect to the ON/OFF timing of various sensors, Open/Close timing and vacuum state. Judgment can be made at the time of performing the device maintenance operation and the device repairing operation.
摘要翻译：具有真空部分的真空系统装置的监视装置和方法，其可以共同执行装置或计数器的维护控制，以通过提供等同于实时监测的监测方法来克服缺点的措施，并基于来自各种类型的真空系统的传感器。通过可视化真空中的驱动系统的状态，真空阀，真空状态和屏幕上电光系统的状态，可以掌握真空中的装置状态。此外，可以通过设置关于各种传感器的打开/关闭定时，打开/关闭定时和真空状态的时序图来执行时间测量和数据与参考数据的比较。在执行设备维护操作和设备维修操作时可以进行判断。

3. 发明授权

US06901306B2 Semiconductor manufacturing apparatus and its diagnosis apparatus and operating system 失效
标题翻译：半导体制造装置及其诊断装置及操作系统
公开(公告)号：US06901306B2
公开(公告)日：2005-05-31
申请号：US10083254
申请日：2002-02-27
申请人： Shigeru Nakamoto , Hideaki Kondo , Juntaro Arima
发明人： Shigeru Nakamoto , Hideaki Kondo , Juntaro Arima
IPC分类号： G05B23/02 , H01L21/00 , G06F19/00
CPC分类号： G05B23/0272 , G05B17/02 , G05B2219/33284 , G05B2219/33324 , G05B2219/45031 , H01L21/67276 , Y02P90/86 , Y10T29/41
摘要： A semiconductor manufacturing apparatus allows the user to accurately determine the state of the apparatus and the cause of an abnormal condition for a short time. The apparatus includes a main unit for processing raw materials and forming a semiconductor, recording means for recording information of an operation to be executed by the main unit as predetermined data, operating means for operating the operation of said main unit and simulating the operation by using the predetermined data, and display means located remotely from the main unit and for displaying the simulated result.
摘要翻译：半导体制造装置允许用户在短时间内精确地确定装置的状态和异常状况的原因。该装置包括用于处理原材料并形成半导体的主单元，用于记录由主单元执行的操作的信息作为预定数据的记录装置，用于操作所述主单元的操作并通过使用模拟操作的操作装置预定数据和远离主单元的显示装置，用于显示模拟结果。

4. 发明申请

US20050038545A1 Remote maintenance method, industrial device, and semiconductor device 有权
标题翻译：远程维护方法，工业设备和半导体器件
公开(公告)号：US20050038545A1
公开(公告)日：2005-02-17
申请号：US10943964
申请日：2004-09-20
申请人： Juntaro Arima , Masaaki Inaba , Takeiki Aizono , Takashi Iizumi
发明人： Juntaro Arima , Masaaki Inaba , Takeiki Aizono , Takashi Iizumi
IPC分类号： G05B23/02 , G06Q30/04 , G06Q30/06 , G06Q50/00 , G06Q50/10 , H01L21/02 , G06F19/00
CPC分类号： G06Q10/06 , G05B19/4184 , G05B23/0267 , G05B23/0283 , G05B2219/24001 , G05B2219/32234 , G06Q30/0283 , G06Q30/04 , Y02P90/14 , Y02P90/18 , Y02P90/86
摘要： The present invention provides a remote maintenance method, a remote maintenance system, and an industrial device for enabling control and thorough services and billing according to the contents of the remote maintenance operation and the request destination of maintenance and enabling access limit according to the attribute of a service person, access limit according to the device state, and output limit according to the output mode. The industrial device 123 installed at the factory 120 and the operation device 113 installed in the maintenance center 110 are connected via the network 100. The operation device 113 transmits command information indicating a command concerning maintenance to the industrial device 123 and the industrial device 123 executes a process according to the received command information, generates charge information indicating a charge concerning maintenance according to the contents of the executed process, and outputs the whole or a part of the generated charge information to the output device of the industrial device 123.
摘要翻译：本发明提供了一种远程维护方法，远程维护系统和工业设备，用于根据远程维护操作的内容和维护的请求目的地以及根据本发明的属性启用访问限制来实现全面的服务和计费服务人员根据设备状态访问限制，并根据输出模式输出限制。安装在工厂120的工业设备123和安装在维护中心110中的操作设备113经由网络100连接。操作设备113向工业设备123发送指示关于维护的命令的命令信息，并且工业设备123执行根据接收到的命令信息的处理，根据所执行的处理的内容生成表示与维护有关的费用的费用信息，并将生成的收费信息的全部或一部分输出到工业装置123的输出装置。

5. 发明授权

US07117127B2 Monitoring device and monitoring method for vacuum device 有权
标题翻译：真空装置监控装置及监控方法
公开(公告)号：US07117127B2
公开(公告)日：2006-10-03
申请号：US11165577
申请日：2005-06-24
申请人： Hitoshi Fukube , Kenichiro Sonobe , Juntaro Arima
发明人： Hitoshi Fukube , Kenichiro Sonobe , Juntaro Arima
IPC分类号： G06F17/40
CPC分类号： G05B23/024
摘要： A monitoring device and method, of a vacuum-system device having a vacuum portion, which can collectively perform the maintenance control of the device or counter measures to overcome drawbacks by providing a monitoring method equivalent to monitoring in real time and simultaneously based on data from respective types of sensors of the vacuum system. By visualizing the state of a driving system in a vacuum, a vacuum valve, a vacuum state and a state of an electro-optic system on a screen, the device state in a vacuum may be grasped. Further, it is possible to perform the time measuring and the comparison of data with the reference data by setting up timing charts with respect to the ON/OFF timing of various sensors, Open/Close timing and vacuum state.
摘要翻译：具有真空部分的真空系统装置的监视装置和方法，其可以共同执行装置或计数器的维护控制，以通过提供等同于实时监测的监测方法来克服缺点的措施，并基于来自各种类型的真空系统的传感器。通过可视化真空中的驱动系统的状态，真空阀，真空状态和屏幕上电光系统的状态，可以掌握真空中的装置状态。此外，可以通过设置关于各种传感器的打开/关闭定时，打开/关闭定时和真空状态的时序图来执行时间测量和数据与参考数据的比较。

6. 发明授权

US07047096B2 Remote maintenance method, industrial device, and semiconductor device 有权
标题翻译：远程维护方法，工业设备和半导体器件
公开(公告)号：US07047096B2
公开(公告)日：2006-05-16
申请号：US10943891
申请日：2004-09-20
申请人： Juntaro Arima , Masaaki Inaba , Takeiki Aizono , Takashi Iizumi
发明人： Juntaro Arima , Masaaki Inaba , Takeiki Aizono , Takashi Iizumi
IPC分类号： G06F19/00 , G06F11/30 , G06F11/00 , G06F15/00 , G21C17/00
CPC分类号： G06Q10/06 , G05B19/4184 , G05B23/0267 , G05B23/0283 , G05B2219/24001 , G05B2219/32234 , G06Q30/0283 , G06Q30/04 , Y02P90/14 , Y02P90/18 , Y02P90/86
摘要： The present invention provides a remote maintenance method, a remote maintenance system, and an industrial device for enabling control and thorough services and billing according to the contents of the remote maintenance operation and the request destination of maintenance and enabling access limit according to the attribute of a service person, access limit according to the device state, and output limit according to the output mode. The industrial device 123 installed at the factory 120 and the operation device 113 installed in the maintenance center 110 are connected via the network 100. The operation device 113 transmits command information indicating a command concerning maintenance to the industrial device 123 and the industrial device 123 executes a process according to the received command information, generates charge information indicating a charge concerning maintenance according to the contents of the executed process, and outputs the whole or a part of the generated charge information to the output device of the industrial device 123.
摘要翻译：本发明提供了一种远程维护方法，远程维护系统和工业设备，用于根据远程维护操作的内容和维护的请求目的地以及根据本发明的属性启用访问限制来实现全面的服务和计费服务人员根据设备状态访问限制，并根据输出模式输出限制。安装在工厂120的工业设备123和安装在维护中心110中的操作设备113经由网络100连接。操作装置113向工业装置123发送指示关于维护的命令的指令信息，工业装置123根据接收到的命令信息执行处理，根据执行的处理的内容生成表示与维护有关的费用的费用信息，将所生成的电荷信息的全部或一部分输出到工业设备123的输出装置。

7. 发明授权

US07047093B2 Semiconductor manufacturing apparatus and its diagnosis apparatus and operating system 失效
标题翻译：半导体制造装置及其诊断装置及操作系统
公开(公告)号：US07047093B2
公开(公告)日：2006-05-16
申请号：US10689594
申请日：2003-10-22
申请人： Shigeru Nakamoto , Hideaki Kondo , Juntaro Arima
发明人： Shigeru Nakamoto , Hideaki Kondo , Juntaro Arima
IPC分类号： G06F19/00
CPC分类号： G05B23/0272 , G05B17/02 , G05B2219/33284 , G05B2219/33324 , G05B2219/45031 , H01L21/67276 , Y02P90/86 , Y10T29/41
摘要： A sample processing apparatus having a main unit for processing a sample, a recorder for recording information of an operation in the main unit as predetermined data, which information includes a plurality of data corresponding to outputs of a plurality of sensors installed on the main unit, and a display unit for displaying each of the data corresponding to outputs of the sensors simultaneously.
摘要翻译：具有用于处理样本的主单元的样本处理设备，用于将主单元中的操作的信息记录为预定数据的记录器，该信息包括对应于安装在主单元上的多个传感器的输出的多个数据，以及显示单元，用于同时显示与传感器的输出相对应的每个数据。

8. 发明申请

US20060004544A1 Monitoring device and monitoring method for vacuum device 有权
标题翻译：真空装置监控装置及监控方法
公开(公告)号：US20060004544A1
公开(公告)日：2006-01-05
申请号：US11165577
申请日：2005-06-24
申请人： Hitoshi Fukube , Kenichiro Sonobe , Juntaro Arima
发明人： Hitoshi Fukube , Kenichiro Sonobe , Juntaro Arima
IPC分类号： G06F17/40 , G06F15/00
CPC分类号： G05B23/024
摘要： A monitoring device and method, of a vacuum-system device having a vacuum portion, which can collectively perform the maintenance control of the device or counter measures to overcome drawbacks by providing a monitoring method equivalent to monitoring in real time and simultaneously based on data from respective types of sensors of the vacuum system. By visualizing the state of a driving system in a vacuum, a vacuum valve, a vacuum state and a state of an electro-optic system on a screen, the device state in a vacuum may be grasped. Further, it is possible to perform the time measuring and the comparison of data with the reference data by setting up timing charts with respect to the ON/OFF timing of various sensors, Open/Close timing and vacuum state. Judgment can be made at the time of performing the device maintenance operation and the device repairing operation.
摘要翻译：具有真空部分的真空系统装置的监视装置和方法，其可以共同执行装置或计数器的维护控制，以通过提供等同于实时监测的监测方法来克服缺点的措施，并基于来自各种类型的真空系统的传感器。通过可视化真空中的驱动系统的状态，真空阀，真空状态和屏幕上电光系统的状态，可以掌握真空中的装置状态。此外，可以通过设置关于各种传感器的打开/关闭定时，打开/关闭时间和真空状态的时序图来执行时间测量和数据与参考数据的比较。在执行设备维护操作和设备维修操作时可以进行判断。

9. 发明申请

US20050038546A1 Remote maintenance method, industrial device, and semiconductor device 失效
公开(公告)号：US20050038546A1
公开(公告)日：2005-02-17
申请号：US10944074
申请日：2004-09-20
申请人： Juntaro Arima , Masaaki Inaba , Takeiki Aizono , Takashi Iizumi
发明人： Juntaro Arima , Masaaki Inaba , Takeiki Aizono , Takashi Iizumi
IPC分类号： G05B23/02 , G06Q30/04 , G06Q30/06 , G06Q50/00 , G06Q50/10 , H01L21/02 , G06F19/00
CPC分类号： G06Q10/06 , G05B19/4184 , G05B23/0267 , G05B23/0283 , G05B2219/24001 , G05B2219/32234 , G06Q30/0283 , G06Q30/04 , Y02P90/14 , Y02P90/18 , Y02P90/86
摘要： The present invention provides a remote maintenance method, a remote maintenance system, and an industrial device for enabling control and thorough services and billing according to the contents of the remote maintenance operation and the request destination of maintenance and enabling access limit according to the attribute of a service person, access limit according to the device state, and output limit according to the output mode. The industrial device 123 installed at the factory 120 and the operation device 113 installed in the maintenance center 110 are connected via the network 100. The operation device 113 transmits command information indicating a command concerning maintenance to the industrial device 123 and the industrial device 123 executes a process according to the received command information, generates charge information indicating a charge concerning maintenance according to the contents of the executed process, and outputs the whole or a part of the generated charge information to the output device of the industrial device 123.

10. 发明授权

US06708072B2 Remote maintenance method, industrial device, and semiconductor device 失效
公开(公告)号：US06708072B2
公开(公告)日：2004-03-16
申请号：US10080394
申请日：2002-02-25
申请人： Juntaro Arima , Masaaki Inaba , Takeiki Aizono , Takashi Iizumi
发明人： Juntaro Arima , Masaaki Inaba , Takeiki Aizono , Takashi Iizumi
IPC分类号： G06F1900
CPC分类号： G06Q10/06 , G05B19/4184 , G05B23/0267 , G05B23/0283 , G05B2219/24001 , G05B2219/32234 , G06Q30/0283 , G06Q30/04 , Y02P90/14 , Y02P90/18 , Y02P90/86
摘要： The present invention provides a remote maintenance method, a remote maintenance system, and an industrial device for enabling control and thorough services and billing according to the contents of the remote maintenance operation and the request destination of maintenance and enabling access limit according to the attribute of a service person, access limit according to the device state, and output limit according to the output mode. The industrial device 123 installed at the factory 120 and the operation device 113 installed in the maintenance center 110 are connected via the network 100. The operation device 113 transmits command information indicating a command concerning maintenance to the industrial device 123 and the industrial device 123 executes a process according to the received command information, generates charge information indicating a charge concerning maintenance according to the contents of the executed process, and outputs the whole or a part of the generated charge information to the output device of the industrial device 123.

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