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1. 发明授权

US08610353B2 Plasma generating apparatus, plasma processing apparatus and plasma processing method 有权
标题翻译：等离子体发生装置，等离子体处理装置和等离子体处理方法
公开(公告)号：US08610353B2
公开(公告)日：2013-12-17
申请号：US13224879
申请日：2011-09-02
申请人： Hitoshi Itoh , Hidenori Miyoshi , Masaru Hori , Hirotaka Toyoda , Makoto Sekine
发明人： Hitoshi Itoh , Hidenori Miyoshi , Masaru Hori , Hirotaka Toyoda , Makoto Sekine
IPC分类号： H01J7/24 , H05B31/26
CPC分类号： H05H1/46 , H01J37/32192 , H01J37/3222 , H01J37/32229 , H01J37/3244 , H05H2001/4622
摘要： An apparatus for generating plasma, comprises: a microwave generator configured to generate a microwave; a wave guide which is connected to the microwave generator, wherein the wave guide is elongated in a traveling direction of the microwave and has a hollow shape having a rectangular section in a direction perpendicular to the traveling direction; a gas feeder which is connected to the wave guide and feeds process gas into the wave guide; and an antenna unit which is a part of the wave guide and discharges plasma generated by the microwave to the outside, wherein the antenna unit has one or more slots formed on a wall constituting a short side in a section of the antenna unit, plasmarizes the process gas fed into the wave guide under an atmospheric pressure in the slots by the microwave, and discharges the plasma out of the slots.
摘要翻译：一种用于产生等离子体的装置，包括：微波发生器，被配置为产生微波; 与微波发生器连接的波导，其中波导在微波的行进方向上伸长，并且具有在与行进方向垂直的方向上具有矩形截面的中空形状; 气体供给器，其连接到波导并将处理气体馈送到波导中; 以及天线单元，其是波导的一部分并将由微波产生的等离子体放电到外部，其中天线单元具有形成在构成天线单元的部分中的短边的壁上的一个或多个槽，通过微波在大气压下在槽中供给到波导管中的工艺气体，并将等离子体从槽中排出。

2. 发明授权

US08638034B2 Multi-micro hollow cathode light source and atomic absorption sepctrometer 有权
标题翻译：多微空心阴极光源和原子吸收分光光度计
公开(公告)号：US08638034B2
公开(公告)日：2014-01-28
申请号：US13578171
申请日：2011-02-08
申请人： Masaru Hori , Masafumi Ito , Takayuki Ohta , Hiroyuki Kano , Koji Yamakawa
发明人： Masaru Hori , Masafumi Ito , Takayuki Ohta , Hiroyuki Kano , Koji Yamakawa
IPC分类号： H01J17/16
CPC分类号： H01J65/046 , G01N21/3103 , H05H1/2406 , H05H2001/2412
摘要： The multi-micro hollow cathode light source has a cathode plate, an insulation plate, an anode plate, and metal pieces. The insulation plate is sandwiched by the cathode plate and the anode plate. The cathode plate is made of copper. The centers of the cathode plate, insulation plate, and anode plate, are provided with holes, respectively. The holes form a penetrating though-hole. Linear slots are disposed in the cathode plate continuously extending from the hole in a cross shape. Each slot penetrates the cathode plate. Four metal pieces made of materials different from one another are inserted and buried in the four slots.
摘要翻译：多微孔中空阴极光源具有阴极板，绝缘板，阳极板和金属片。绝缘板由阴极板和阳极板夹持。阴极板由铜制成。阴极板，绝缘板和阳极板的中心分别设有孔。孔形成贯穿孔。线状槽设置在从十字形状连续延伸的阴极板中。每个槽都穿过阴极板。四个由彼此不同的材料制成的金属片插入并埋在四个槽中。

3. 发明授权

US08558169B2 Sample substrate for laser desorption ionization-mass spectrometry, and method and device both using the same for laser desorption ionization-mass spectrometry 失效
标题翻译：用于激光解吸电离质谱的样品衬底，以及用于激光解吸电离质谱法的方法和装置
公开(公告)号：US08558169B2
公开(公告)日：2013-10-15
申请号：US13388970
申请日：2010-07-29
申请人： Masaru Hori , Hiroaki Sato , Yasutake Toyoshima , Mineo Hiramatsu
发明人： Masaru Hori , Hiroaki Sato , Yasutake Toyoshima , Mineo Hiramatsu
IPC分类号： H01J49/00
CPC分类号： G01N27/622
摘要： An object of the present invention is to provide a sample substrate for laser desorption ionization mass spectrometry for LDI-MS which substrate enables mass spectrometric analysis of a sample correctly at high sensitivity without generating interference peaks upon irradiation of the sample to laser light and uniform application of the sample onto a base. Another object of the invention is to provide a mass spectrometer (device) employing the sample substrate.In the sample substrate for laser desorption ionization mass spectrometry, the sample substrate is formed of a base and carbon nanowalls having wall surfaces onto which a sample to undergo mass spectrometry is applied, wherein the carbon nanowalls are formed on the base so as to stand on the base. The surfaces of carbon nanowalls serve as an ionization medium and hydrophilized. By use of the sample substrate, mass spectrometry of a sample having a wide range (high to low) molecular weight can be reliably performed at high precision and sensitivity.
摘要翻译：本发明的目的是提供一种用于LDI-MS的激光解吸电离质谱的样品基片，该基片能够以高灵敏度正确地对样品进行质谱分析，而不会在将样品照射到激光上并产生均匀的应用时产生干涉峰的样品到基底上。本发明的另一个目的是提供一种采用样品基质的质谱仪（装置）。在用于激光解吸电离质谱的样品衬底中，样品衬底由具有壁表面的基底和碳纳米壁形成，其上应用要进行质谱的样品，其中碳纳米壁形成在基底上以便立在的基地。碳纳米壁的表面用作电离介质并亲水化。通过使用样品基板，可以以高精度和灵敏度可靠地进行具有宽范围（高低分子量）的样品的质谱分析。

4. 发明授权

US08551657B2 Negative electrode for lithium secondary battery, method for preparing the negative electrode, lithium secondary battery having the negative electrode, and vehicle having the lithium secondary battery 有权
标题翻译：锂二次电池用负极，负极制造方法，具有负极的锂二次电池以及具有锂二次电池的车辆
公开(公告)号：US08551657B2
公开(公告)日：2013-10-08
申请号：US13508553
申请日：2010-11-10
申请人： Satoshi Yoshida , Yuichiro Hama , Masaru Hori , Mineo Hiramatsu , Hiroyuki Kano
发明人： Satoshi Yoshida , Yuichiro Hama , Masaru Hori , Mineo Hiramatsu , Hiroyuki Kano
IPC分类号： H01M4/58 , C01B31/00
CPC分类号： H01M4/1395 , H01M4/0416 , H01M4/0423 , H01M4/0428 , H01M4/0473 , H01M4/134 , H01M4/38 , H01M4/383 , H01M4/625 , H01M4/663 , H01M10/0525 , Y02E60/122
摘要： A negative electrode (10) for a lithium secondary battery, including a negative electrode collector (20), and a negative electrode active substance layer (30) that is supported on the negative electrode collector (20) and includes carbon nanowalls (32) which are formed on the negative electrode collector (20), and a negative electrode active substance (36) which is supported on the carbon nanowalls (32).
摘要翻译：一种用于锂二次电池的负极（10），包括负极集电体（20）和负极活性物质层（30），负极活性物质层（30）被负载在负极集电体（20）上并且包括碳纳米壁（32）形成在负极集电体（20）上，负极活性物质（36）被负载在碳纳米壁（32）上。

5. 发明申请

US20130220223A1 RADICAL GENERATOR AND MOLECULAR BEAM EPITAXY APPARATUS 有权
标题翻译：辐射发生器和分子束外观设备
公开(公告)号：US20130220223A1
公开(公告)日：2013-08-29
申请号：US13819284
申请日：2011-08-24
申请人： Masaru Hori , Hiroshi Amano , Hiroyuki Kano , Shoji Den , Koji Yamakawa
发明人： Masaru Hori , Hiroshi Amano , Hiroyuki Kano , Shoji Den , Koji Yamakawa
IPC分类号： C30B23/02 , H05H1/46
CPC分类号： H01J37/321 , C30B23/02 , C30B23/066 , C30B25/14 , C30B29/403 , H01J37/3178 , H01J37/32091 , H01J37/32357 , H01J37/3244 , H01J37/32541 , H01J37/3266 , H01J2237/006 , H01J2237/083 , H01J2237/327 , H01J2237/3321 , H05H1/30 , H05H1/46 , H05H2001/2462 , H05H2001/2468
摘要： [Object] To provide a radical generator which can produce radicals at higher density.[Means for Solution] The radical generator includes a supply tube 10 made of SUS, a hollow cylindrical plasma-generating tube 11 which is connected to the supply tube 10 and which is made of pyrolytic boron nitride (PBN). A cylindrical CCP electrode 13 is disposed outside the plasma-generating tube 11. A coil 12 is provided so as to wind about the outer circumference of the plasma-generating tube at the downstream end of the CCP electrode 13. A parasitic-plasma-preventing tube 15 made of a ceramic material is inserted into an opening of the supply tube 10 at the connection site between the supply tube 10 and the plasma-generating tube 11.
摘要翻译：提供一种能够以更高密度产生自由基的自由基发生器。 [解决方案]自由基发生器包括由SUS制成的供应管10，连接到供应管10并由热解氮化硼（PBN）制成的中空圆柱形等离子体产生管11。一个圆柱形的CCP电极13设置在等离子体发生管11的外部。线圈12设置成在CCP电极13的下游端围绕等离子体产生管的外周缠绕。一个等离子体等离子体防止在供给管10和等离子体产生管11之间的连接部位插入由陶瓷材料制成的管15供给管10的开口。

6. 发明申请

US20130174984A1 REACTIVE-SPECIES SUPPLY DEVICE AND SURFACE TREATMENT APPARATUS 有权
标题翻译：反应物供应装置和表面处理装置
公开(公告)号：US20130174984A1
公开(公告)日：2013-07-11
申请号：US13807249
申请日：2011-06-30
申请人： Masaru Hori , Hiroyuki Kano , Tetsunori Kawasumi , Naofumi Yoshida , Akihiro Kawajiri , Toshimitsu Watanabe , Joji Isozumi
发明人： Masaru Hori , Hiroyuki Kano , Tetsunori Kawasumi , Naofumi Yoshida , Akihiro Kawajiri , Toshimitsu Watanabe , Joji Isozumi
IPC分类号： H05H1/24
CPC分类号： H05H1/24 , H01J37/32559 , H01J37/32733 , H05H1/48 , H05H2001/485 , H05H2001/488 , H05H2245/123
摘要： A reactive-species supply device is configured to supply a treatment gas to an electric discharge space, for thereby supplying at least a reactive species formed in a plasma, to an object. The reactive-species supply device includes (a) at least one pair of electrodes configured to form the electric discharge space and (b) an electrode protection device configured to protect the electrodes from the treatment gas. Also disclosed is a surface treatment apparatus that includes the reactive-species supply device.
摘要翻译：反应物质供给装置被配置为将处理气体供应到放电空间，从而至少将形成在等离子体中的反应物质供应到物体。反应物种供应装置包括（a）至少一对电极，其被配置为形成放电空间，（b）电极保护装置，其被配置为保护电极免受处理气体的影响。还公开了包括反应物种供应装置的表面处理装置。

7. 发明申请

US20120225353A1 NEGATIVE ELECTRODE FOR LITHIUM SECONDARY BATTERY, METHOD FOR PREPARING THE NEGATIVE ELECTRODE, LITHIUM SECONDARY BATTERY HAVING THE NEGATIVE ELECTRODE, AND VEHICLE HAVING THE LITHIUM SECONDARY BATTERY 有权
标题翻译：用于锂二次电池的负极，用于制备负极的方法，具有负极的锂二次电池和具有锂二次电池的车辆
公开(公告)号：US20120225353A1
公开(公告)日：2012-09-06
申请号：US13508553
申请日：2010-11-10
申请人： Satoshi Yoshida , Yuichiro Hama , Masaru Hori , Mineo Hiramatsu , Hiroyuki Kano
发明人： Satoshi Yoshida , Yuichiro Hama , Masaru Hori , Mineo Hiramatsu , Hiroyuki Kano
IPC分类号： H01M4/64 , H01M4/04 , B82Y30/00 , B82Y40/00
CPC分类号： H01M4/1395 , H01M4/0416 , H01M4/0423 , H01M4/0428 , H01M4/0473 , H01M4/134 , H01M4/38 , H01M4/383 , H01M4/625 , H01M4/663 , H01M10/0525 , Y02E60/122
摘要： A negative electrode (10) for a lithium secondary battery, including a negative electrode collector (20), and a negative electrode active substance layer (30) that is supported on the negative electrode collector (20) and includes carbon nanowalls (32) which are formed on the negative electrode collector (20), and a negative electrode active substance (36) which is supported on the carbon nanowalls (32).
摘要翻译：一种用于锂二次电池的负极（10），包括负极集电体（20）和负极活性物质层（30），负极活性物质层（30）被负载在负极集电体（20）上并且包括碳纳米壁（32）形成在负极集电体（20）上，负极活性物质（36）被负载在碳纳米壁（32）上。

8. 发明授权

US08119530B2 Pattern forming method and semiconductor device manufacturing method 有权
标题翻译：图案形成方法和半导体器件制造方法
公开(公告)号：US08119530B2
公开(公告)日：2012-02-21
申请号：US12521184
申请日：2007-12-20
申请人： Masaru Hori , Yoshiro Kabe , Toshihiko Shiozawa , Junichi Kitagawa
发明人： Masaru Hori , Yoshiro Kabe , Toshihiko Shiozawa , Junichi Kitagawa
IPC分类号： H01L21/302 , H01L21/461
CPC分类号： H01L21/31662 , H01L21/02238 , H01L21/02252 , H01L21/30604 , H01L21/3065 , H01L21/31111 , H01L21/31116 , H01L29/66818
摘要： A pattern forming method includes preparing a target object including silicon with an initial pattern formed thereon and having a first line width; performing a plasma oxidation process on the silicon surface inside a process chamber of a plasma processing apparatus and thereby forming a silicon oxide film on a surface of the initial pattern; and removing the silicon oxide film. The pattern forming method is arranged to repeatedly perform formation of the silicon oxide film and removal of the silicon oxide film so as to form an objective pattern having a second line width finer than the first line width on the target object.
摘要翻译：图案形成方法包括制备包括硅的目标物体，其中形成有初始图案并具有第一线宽度; 在等离子体处理装置的处理室内的硅表面上进行等离子体氧化处理，由此在初始图案的表面上形成氧化硅膜; 并除去氧化硅膜。图案形成方法被配置为反复进行氧化硅膜的形成和氧化硅膜的去除，以形成目标物体上具有比第一线宽窄的第二线宽的物镜图案。

9. 发明授权

US07989364B2 Plasma oxidation processing method 有权
标题翻译：等离子体氧化处理方法
公开(公告)号：US07989364B2
公开(公告)日：2011-08-02
申请号：US12439019
申请日：2007-08-27
申请人： Masaru Hori , Toshihiko Shiozawa , Yoshiro Kabe , Junichi Kitagawa
发明人： Masaru Hori , Toshihiko Shiozawa , Yoshiro Kabe , Junichi Kitagawa
IPC分类号： H01L21/469
CPC分类号： H01L21/31662 , C23C8/10 , C23C8/36 , H01L21/02238 , H01L21/02252 , H01L22/20
摘要： A plasma oxidation process is performed to form a silicon oxide film on the surface of a target object by use of plasma with an O(1D2) radical density of 1×1012 [cm−3] or more generated from a process gas containing oxygen inside a process chamber of a plasma processing apparatus. During the plasma oxidation process, the O(1D2) radical density in the plasma is measured by a VUV monochromator 63, and a correction is made to the plasma process conditions.
摘要翻译：进行等离子体氧化处理，通过使用从含有氧气的工艺气体产生的O（1D2）自由基密度为1×10 12 [cm -3]以上的等离子体，在目标物体的表面上形成氧化硅膜等离子体处理装置的处理室。在等离子体氧化过程中，通过VUV单色仪63测量等离子体中的O（1D2）自由基密度，并对等离子体处理条件进行校正。

10. 发明申请

US20100201978A1 LIGHT SOURCE 有权
标题翻译：光源
公开(公告)号：US20100201978A1
公开(公告)日：2010-08-12
申请号：US12450402
申请日：2008-03-24
申请人： Masaru Hori , Hiroyuki Kano , Shoji Den
发明人： Masaru Hori , Hiroyuki Kano , Shoji Den
IPC分类号： G01N21/31
CPC分类号： H05H1/0025 , G01N21/15 , G01N21/3103 , G01N2021/158 , G01N2201/023 , G01N2201/0233 , G01N2201/061
摘要： To provide a light source which realizes accurate determination of the particle density of a plasma atmosphere without disturbing the state of the plasma atmosphere.The light source of the invention includes a tubular casing 12; a cooling medium passage 30 for causing a cooling medium to flow therethrough, the passage being provided along the inner wall of the casing; a lens 50 provided at a tip end of the casing; a first electrode 44 and a second electrode 45 which are provided in the casing and before the lens so as to be vertical to the axis of the casing and parallel to each other; and an insulating spacer 46 provided between the first electrode and the second electrode. The light source further includes a hole 47 axially penetrating the center portions of the first electrode, the insulating spacer, and the second electrode; and an electric discharge gas passage for introducing an electric discharge gas, along the inner wall of the cooling medium passage, to the back surface of the lens so that the electric discharge gas is reflected by the lens and flows through the hole.
摘要翻译：提供一种实现等离子体气氛的粒子密度的精确测定而不干扰等离子体气氛的状态的光源。本发明的光源包括管状壳体12; 用于使冷却介质流过其中的冷却介质通道30，所述通道沿着所述壳体的内壁设置; 设置在所述壳体的前端的透镜50; 第一电极44和第二电极45，其设置在壳体内并且在透镜之前垂直于壳体的轴线并且彼此平行; 以及设置在第一电极和第二电极之间的绝缘间隔件46。光源还包括轴向穿过第一电极，绝缘间隔物和第二电极的中心部分的孔47; 以及放电气体通道，用于沿着冷却介质通道的内壁将放电气体引导到透镜的背面，使得放电气体被透镜反射并流过孔。

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