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    • 4. 发明授权
    • Interference measurement device and measurement method
    • 干涉测量装置及测量方法
    • US09041937B2
    • 2015-05-26
    • US13577044
    • 2011-02-02
    • Masaru HoriMasafumi ItoYasuhiro HigashijimaTakayuki Ohta
    • Masaru HoriMasafumi ItoYasuhiro HigashijimaTakayuki Ohta
    • G01B11/02G01B9/02G01K11/00
    • G01B9/02023G01B9/02058G01B9/0209G01K11/00
    • [Problem to be Solved] To improve the measurement accuracy of an interference measurement device which utilizes interference of light.[Means for Solution] An interference measurement device includes a light source 10 for emitting supercontinuum light (SC light), an optical fiber coupler 11 for splitting the SC light into measurement light and reference light, a dispersion compensation element 12, a drive unit 13 for moving the dispersion compensation element 12, and light-receiving means 14 for measuring an interference waveform produced as a result of interference between the measurement light and the reference light. A measurement object 15 to be measured is an Si substrate having a thickness of 800 μm. The dispersion compensation element 12 is an Si substrate having a thickness of 780 μm. Namely, the dispersion compensation element 12 is formed of the same material as that of the measurement object 15 and is 20 μm thinner than the measurement object 15. The interference caused by reflection on the back surface of the measurement object 15 and reflection on the back surface of the dispersion compensation element 12 has a narrow peak width because wavelength dispersion is cancelled almost completely. Thus, the accuracy in measuring the peak position improves. As a result, the accuracy in measuring temperature, etc., improves.
    • [待解决的问题]提高利用干扰的干涉测量装置的测量精度。 解决方案干扰测量装置包括用于发射超连续光(SC灯)的光源10,用于将SC光分解为测量光和参考光的光纤耦合器11,色散补偿元件12,驱动单元13 用于移动色散补偿元件12和用于测量作为测量光和参考光之间的干涉的结果而产生的干涉波形的光接收装置14。 待测量的测量对象15是厚度为800μm的Si衬底。 色散补偿元件12是厚度为780μm的Si衬底。 也就是说,色散补偿元件12由与测量对象15相同的材料形成,并且比测量对象15薄20μm。由测量对象15的背面上的反射引起的干涉和背面的反射 由于波长色散几乎完全消除,所以色散补偿元件12的表面具有窄的峰宽。 因此,测量峰值位置的精度提高。 结果,测量温度等的精度提高。
    • 5. 发明申请
    • INTERFERENCE MEASUREMENT DEVICE AND MEASUREMENT METHOD
    • 干扰测量装置和测量方法
    • US20120300218A1
    • 2012-11-29
    • US13577044
    • 2011-02-02
    • Masaru HoriMasafumi ItoYasuhiro HigashijimaTakayuki Ohta
    • Masaru HoriMasafumi ItoYasuhiro HigashijimaTakayuki Ohta
    • G01B9/02G01B11/06
    • G01B9/02023G01B9/02058G01B9/0209G01K11/00
    • [Problem to be Solved]To improve the measurement accuracy of an interference measurement device which utilizes interference of light.[Means for Solution]An interference measurement device includes a light source 10 for emitting supercontinuum light (SC light), an optical fiber coupler 11 for splitting the SC light into measurement light and reference light, a dispersion compensation element 12, a drive unit 13 for moving the dispersion compensation element 12, and light-receiving means 14 for measuring an interference waveform produced as a result of interference between the measurement light and the reference light. A measurement object 15 to be measured is an Si substrate having a thickness of 800 μm. The dispersion compensation element 12 is an Si substrate having a thickness of 780 μm. Namely, the dispersion compensation element 12 is formed of the same material as that of the measurement object 15 and is 20 μm thinner than the measurement object 15. The interference caused by reflection on the back surface of the measurement object 15 and reflection on the back surface of the dispersion compensation element 12 has a narrow peak width because wavelength dispersion is cancelled almost completely. Thus, the accuracy in measuring the peak position improves. As a result, the accuracy in measuring temperature, etc., improves.
    • [待解决的问题]提高利用干扰的干涉测量装置的测量精度。 解决方案干扰测量装置包括用于发射超连续光(SC灯)的光源10,用于将SC光分解为测量光和参考光的光纤耦合器11,色散补偿元件12,驱动单元13 用于移动色散补偿元件12和用于测量作为测量光和参考光之间的干涉的结果而产生的干涉波形的光接收装置14。 待测量的测量对象15是厚度为800μm的Si衬底。 色散补偿元件12是厚度为780μm的Si衬底。 也就是说,色散补偿元件12由与测量对象15相同的材料形成,并且比测量对象15薄20μm。由测量对象15的背面上的反射引起的干涉和背面的反射 由于波长色散几乎完全消除,所以色散补偿元件12的表面具有窄的峰宽。 因此,测量峰值位置的精度提高。 结果,测量温度等的精度提高。
    • 7. 发明授权
    • Communication system, information collecting system and method therefor
    • 通信系统,信息采集系统及其方法
    • US07382742B2
    • 2008-06-03
    • US10689210
    • 2003-10-21
    • Takayuki OhtaTetsuya Nakayama
    • Takayuki OhtaTetsuya Nakayama
    • H04Q7/20
    • H04W48/16H04W40/22H04W84/18
    • Interconnect of communication between mobile objects by another mobile object is enabled. Station A transmits its own identifier to another mobile station on a broadcast basis. Out of other mobile stations, Station B receives the identifier of Station A, and returns a response including its own identifier. Station A notifies Station B of identifiers of nodes with which it can communicate. Station B notifies Station A of identifiers of nodes with which it can communicate. This sequence of processing enables information on nodes with which either station can communicate to be exchanged between Stations A and B, and a communication path to nodes to be found between Station B (station A) and another node via Station A (station B).
    • 使移动对象之间的通信由另一个移动对象互连。 站A在广播的基础上将其自己的标识符发送到另一个移动台。 在其他移动站之外,站B接收站A的标识符,并返回包括其自己的标识符的响应。 站A通知站B与其可以通信的节点的标识符。 站B通知站A与其可以通信的节点的标识符。 该处理序列使得能够在站A和B之间进行通信的节点之间的信息,以及通过站A(站B)在站B(站A)和另一个节点之间找到的节点的通信路径。