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1. 发明申请

US20140152996A1 POLARIZATION-SENSITIVE OPTICAL MEASUREMENT INSTRUMENT 有权
标题翻译：偏振灵敏度测量仪器
公开(公告)号：US20140152996A1
公开(公告)日：2014-06-05
申请号：US14083599
申请日：2013-11-19
申请人： Hitachi Media Electronics Co., Ltd.
发明人： Kentaro OSAWA , Tatsuro IDE , Masaki MUKOH
IPC分类号： G01B9/02
CPC分类号： G01B9/02091 , G01B9/02081 , G01B2290/45 , G01B2290/70
摘要： A beam emitted from a light source is split into a probe beam that irradiates a measurement object and a reference beam that does not irradiate the measurement object. A signal beam obtained by the reflection of the probe beam is split into first and second split signal beams, which are mutually orthogonal polarized components. The first split signal beam and the reference beam are inputted to a first coherence optical system to cause the beams to interfere with each other to generate at least three coherence beams differing in phasic relationship. The second split signal beam and the reference beam are inputted to a second coherence optical system to cause the beams to interfere with each other to generate at least three coherence beams differing in phasic relationship. The coherence beams are then detected.
摘要翻译：从光源发射的光束被分割成照射测量对象的探测光束和不照射测量对象的参考光束。通过探测光束的反射而获得的信号光束被分割为相互正交的偏振分量的第一和第二分割信号光束。第一分割信号光束和参考光束被输入到第一相干光学系统，以使光束彼此干涉以产生不同相位关系的至少三个相干光束。第二分割信号光束和参考光束被输入到第二相干光学系统，以使光束相互干扰以产生不同阶段关系的至少三个相干光束。然后检测相干光束。

2. 发明申请

US20140204389A1 OPTICAL TOMOGRAPH AND OPTICAL TOMOGRAPHIC METHOD 有权
标题翻译：光学图像和光学方法
公开(公告)号：US20140204389A1
公开(公告)日：2014-07-24
申请号：US14083636
申请日：2013-11-19
申请人： HITACHI MEDIA ELECTRONICS CO., LTD.
发明人： Masaki MUKOH , Kentaro OSAWA , Tatsuro IDE
IPC分类号： G01B9/02
CPC分类号： G01B9/02091 , A61B3/102 , G01B9/02007 , G01B9/02081 , G01B2290/70
摘要： A luminous flux including laser light of different wavelengths outgoing from a light source unit is split into two luminous fluxes, the first luminous flux is focused on a sample with an objective lens, and the second luminous flux functions as reference light without radiating it onto the sample. Signal light reflected from the sample and the reference light are multiplexed by a polarized beam splitter and are made to interfere on four photodetectors out of phase in a photodetection unit. A signal processing unit acquires the optical axis distribution of an object of examination in the sample by operating using the outputs of the plural photodetectors for input every wavelength, acquiring a detection signal and calculating the ratio of detection signals of different wavelengths every position in the sample.
摘要翻译：将包含从光源单元出射的不同波长的激光的光通量分成两个光束，第一光束聚焦在具有物镜的样品上，第二光束用作参考光，而不将其照射到样品。从采样和参考光反射的信号光被偏振光束分离器多路复用，并使其在光检测单元中相互干涉四个光电探测器。信号处理单元通过使用多个光电检测器的输出进行各波长的输入来获取样本中的检查对象的光轴分布，获取检测信号并计算样本中每个位置的不同波长的检测信号的比率。

3. 发明申请

US20150062589A1 OPTICAL MEASUREMENT APPARATUS AND OPTICAL MEASUREMENT METHOD 有权
标题翻译：光学测量装置和光学测量方法
公开(公告)号：US20150062589A1
公开(公告)日：2015-03-05
申请号：US14189159
申请日：2014-02-25
申请人： Hitachi Media Electronics Co., Ltd.
发明人： Kentaro OSAWA , Daisuke TOMITA , Masaki MUKO
IPC分类号： G01B9/02
CPC分类号： G01B9/02091 , G01B9/02027 , G01B9/02038 , G01B2290/45
摘要： A small and inexpensive optical measurement apparatus is provided in which noise due to optical interference such as inter-layer crosstalk or speckle is suppressed. The optical measurement apparatus includes a light source to emit laser light, a high-frequency superimposing unit to superimpose a high-frequency current on a driving current to drive the light source, a light branching element to branch the laser light into signal light and reference light, an objective lens to condense and irradiate the signal light on a measurement object, a condensing position scanning unit to scan a condensing position of the signal light, a light path length adjusting unit to adjust a light path length difference between the signal light and the reference light, an interference optical system which combines the signal light reflected or scattered by the measurement object and the reference light, and generates a plurality of interference lights different from each other in phase relation, and a photodetector to detect the interference lights.
摘要翻译：提供了一种小型廉价的光学测量装置，其中抑制了诸如层间串扰或散斑等光干扰的噪声。光学测量装置包括发射激光的光源，将高频电流叠加在驱动电流上以驱动光源的高频叠加单元，将激光分支成信号光和参考的光分支元件光，用于在测量对象上冷凝和照射信号光的物镜，用于扫描信号光的聚光位置的聚光位置扫描单元，调整信号光与信号光之间的光路长度差的光路长度调节单元，参考光，将由测量对象反射或散射的信号光与参考光组合的干涉光学系统，并且产生彼此相位不同的多个干涉光;以及光电检测器，用于检测干涉光。

4. 发明申请

US20140204388A1 OPTICAL MEASURING APPARATUS 有权
标题翻译：光学测量装置
公开(公告)号：US20140204388A1
公开(公告)日：2014-07-24
申请号：US14074851
申请日：2013-11-08
申请人： HITACHI MEDIA ELECTRONICS CO., LTD.
发明人： Kentaro OSAWA , Koichi WATANABE , Daisuke TOMITA
IPC分类号： G01B9/02
CPC分类号： G01B9/02091 , G01B9/02063 , G01B9/02064 , G01B2290/35 , G01B2290/45 , G01B2290/65 , G01B2290/70
摘要： Provided is a compact, low-cost optical measuring apparatus capable of acquiring an image of a target to be measured without moving a mirror or using a wavelength-scanning light source or beam splitter. A laser beam emitted from a light source is split into first and second beams, and the first beam is focused as a signal beam onto the target by a lens for irradiation purposes, while the second beam is reflected as a reference beam by a mirror without irradiating the target. Then, a signal beam reflected by or scattered by the target is multiplexed with the reference beam and then enters interference optics, whereby three or more interference beams with different phases are generated and detected by photodetectors. Then, the detection signals are operated by a signal processing unit. During the measurement, the focus position of the first beam is moved at least in the optical axis direction.
摘要翻译：提供了一种紧凑的，低成本的光学测量装置，其能够在不移动反射镜或使用波长扫描光源或分束器的情况下获取要测量的目标的图像。从光源发射的激光束被分割为第一和第二光束，并且第一光束作为信号光束被透镜用于照射目的被聚焦到目标上，而第二光束被反射而作为参考光束而被反射而没有照射目标。然后，由目标反射或散射的信号光束与参考光束多路复用，然后进入干涉光学器件，由此产生三个或更多个具有不同相位的干涉光束并由光电检测器检测。然后，检测信号由信号处理单元操作。在测量期间，第一光束的聚焦位置至少在光轴方向上移动。

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