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    • 6. 发明授权
    • Magnetic recording head with shaped pole
    • 带磁极的磁记录头和制造工艺
    • US07535675B2
    • 2009-05-19
    • US11046356
    • 2005-01-27
    • Hisashi KimuraNobuo YoshidaIsao NunokawaKimitoshi Etoh
    • Hisashi KimuraNobuo YoshidaIsao NunokawaKimitoshi Etoh
    • G11B5/147G11B5/127
    • G11B5/1278G11B5/3163Y10T29/49021
    • Embodiments of the invention provide a thin film magnetic recording head that can reduce the round portion of the track restriction part of the main pole and has excellent track width accuracy, as well as its fabrication method. In one embodiment, the main pole is etched in the following three processes. (1) An ion beam is injected into the substrate at an angle of about 50°±20° while vibrating the substrate horizontally within a range of about ±(30° to 150°) in a reference direction in which the ion beam is oriented from the medium to the air bearing surface. (2) The ion beam is injected into the substrate at an angle of about 60°±20° while vibrating the substrate around a predetermined angle of about 90° to 135° from a direction in which the ion beam is oriented from the medium to the air bearing surface. (3) The ion beam is injected into the substrate at an angle of about 60°±20° while vibrating the substrate horizontally at a predetermined angle within about ±45° around a predetermined angle within about −90° to −135° from a direction in which the ion beam is oriented from the medium to the air bearing surface.
    • 本发明的实施例提供一种薄膜磁记录头,其可以减小主极的轨道限制部分的圆形部分,并且具有优异的轨道宽度精度及其制造方法。 在一个实施例中,主极在以下三个过程中被蚀刻。 (1)离子束以约50°±20°的角度注入基板,同时在离子束取向的基准方向上在约±(30°〜150°)的范围内水平振动基板 从介质到空气轴承表面。 (2)离子束以大约60°±20°的角度注入到基片中,同时使离子束从介质取向的方向围绕约90°至135°的预定角度振动, 空气轴承表面。 (3)将离子束以大约60°±20°的角度注入到基片中,同时以大约±45°的预定角度水平地振动衬底,大约在-90°至-135°的预定角度 离子束从介质定向到空气轴承表面的方向。
    • 7. 发明申请
    • Magnetic recording head with shaped pole and fabrication process
    • 带磁极的磁记录头和制造工艺
    • US20050162778A1
    • 2005-07-28
    • US11046356
    • 2005-01-27
    • Hisashi KimuraNobuo YoshidaIsao NunokawaKimitoshi Etoh
    • Hisashi KimuraNobuo YoshidaIsao NunokawaKimitoshi Etoh
    • G11B5/31G11B5/127G11B5/147
    • G11B5/1278G11B5/3163Y10T29/49021
    • Embodiments of the invention provide a thin film magnetic recording head that can reduce the round portion of the track restriction part of the main pole and has excellent track width accuracy, as well as its fabrication method. In one embodiment, the main pole is etched in the following three processes. (1) An ion beam is injected into the substrate at an angle of about 50°±20° while vibrating the substrate horizontally within a range of about ±(30° to 150°) in a reference direction in which the ion beam is oriented from the medium to the air bearing surface. (2) The ion beam is injected into the substrate at an angle of about 60°±20° while vibrating the substrate around a predetermined angle of about 90° to 135° from a direction in which the ion beam is oriented from the medium to the air bearing surface. (3) The ion beam is injected into the substrate at an angle of about 60°±20° while vibrating the substrate horizontally at a predetermined angle within about ±45° around a predetermined angle within about −90° to −135° from a direction in which the ion beam is oriented from the medium to the air bearing surface.
    • 本发明的实施例提供一种薄膜磁记录头,其可以减小主极的轨道限制部分的圆形部分,并且具有优异的轨道宽度精度及其制造方法。 在一个实施例中,主极在以下三个过程中被蚀刻。 (1)离子束以约50°±20°的角度注入基板,同时在离子束取向的基准方向上在约±(30°〜150°)的范围内水平振动基板 从介质到空气轴承表面。 (2)离子束以大约60°±20°的角度注入到基片中,同时使离子束从介质取向的方向围绕约90°至135°的预定角度振动, 空气轴承表面。 (3)将离子束以大约60°±20°的角度注入到基片中,同时以大约±45°的预定角度水平地振动衬底,大约在-90°至-155°的预定角度 离子束从介质定向到空气轴承表面的方向。
    • 9. 发明申请
    • METHOD FOR MANUFACTURING A MAGNETIC SENSOR HAVING A FLAT UPPER SHIELD
    • 用于制造具有平坦上层屏蔽的磁传感器的方法
    • US20120187079A1
    • 2012-07-26
    • US13010908
    • 2011-01-21
    • Hideki MashimaNobuo Yoshida
    • Hideki MashimaNobuo Yoshida
    • G11B5/127C23F1/00
    • G11B5/398G01R33/098G11B5/3163G11B5/3912G11B5/3932
    • A method for manufacturing a magnetic sensor that has a flat upper shield. A sensor stack is formed with a sensor capping layer at its top and a first CMP stop layer over the sensor capping layer and a mask formed over the CMP stop layer. A hard bias layer and second CMP stop layer are deposited over the sensor stack, capping layer, first CMP stop layer and mask. A chemical mechanical polishing process is then performed to remove the mask, leaving a portion of the hard bias layer exposed between the first and second CMP stop layers. An ion milling is then performed to etch back the exposed portions of the hard magnetic bias layer. A reactive ion etching is then performed to remove the remaining first and second CMP top layers. An upper shield can then be formed on a substantially flat surface.
    • 一种制造具有平坦的上屏蔽的磁传感器的方法。 传感器堆叠在其顶部形成有传感器覆盖层,并且在传感器覆盖层上方形成第一CMP停止层,并且在CMP停止层上形成掩模。 在传感器堆叠,封盖层,第一CMP停止层和掩​​模上沉积硬偏压层和第二CMP停止层。 然后执行化学机械抛光工艺以去除掩模,使得一部分硬偏压层暴露在第一和第二CMP停止层之间。 然后进行离子铣削以蚀刻硬磁偏置层的暴露部分。 然后执行反应离子蚀刻以去除剩余的第一和第二CMP顶层。 然后可以在基本平坦的表面上形成上屏蔽。