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    • 1. 发明授权
    • Magnetic recording head with shaped pole
    • 带磁极的磁记录头和制造工艺
    • US07535675B2
    • 2009-05-19
    • US11046356
    • 2005-01-27
    • Hisashi KimuraNobuo YoshidaIsao NunokawaKimitoshi Etoh
    • Hisashi KimuraNobuo YoshidaIsao NunokawaKimitoshi Etoh
    • G11B5/147G11B5/127
    • G11B5/1278G11B5/3163Y10T29/49021
    • Embodiments of the invention provide a thin film magnetic recording head that can reduce the round portion of the track restriction part of the main pole and has excellent track width accuracy, as well as its fabrication method. In one embodiment, the main pole is etched in the following three processes. (1) An ion beam is injected into the substrate at an angle of about 50°±20° while vibrating the substrate horizontally within a range of about ±(30° to 150°) in a reference direction in which the ion beam is oriented from the medium to the air bearing surface. (2) The ion beam is injected into the substrate at an angle of about 60°±20° while vibrating the substrate around a predetermined angle of about 90° to 135° from a direction in which the ion beam is oriented from the medium to the air bearing surface. (3) The ion beam is injected into the substrate at an angle of about 60°±20° while vibrating the substrate horizontally at a predetermined angle within about ±45° around a predetermined angle within about −90° to −135° from a direction in which the ion beam is oriented from the medium to the air bearing surface.
    • 本发明的实施例提供一种薄膜磁记录头,其可以减小主极的轨道限制部分的圆形部分,并且具有优异的轨道宽度精度及其制造方法。 在一个实施例中,主极在以下三个过程中被蚀刻。 (1)离子束以约50°±20°的角度注入基板,同时在离子束取向的基准方向上在约±(30°〜150°)的范围内水平振动基板 从介质到空气轴承表面。 (2)离子束以大约60°±20°的角度注入到基片中,同时使离子束从介质取向的方向围绕约90°至135°的预定角度振动, 空气轴承表面。 (3)将离子束以大约60°±20°的角度注入到基片中,同时以大约±45°的预定角度水平地振动衬底,大约在-90°至-135°的预定角度 离子束从介质定向到空气轴承表面的方向。
    • 2. 发明申请
    • Magnetic recording head with shaped pole and fabrication process
    • 带磁极的磁记录头和制造工艺
    • US20050162778A1
    • 2005-07-28
    • US11046356
    • 2005-01-27
    • Hisashi KimuraNobuo YoshidaIsao NunokawaKimitoshi Etoh
    • Hisashi KimuraNobuo YoshidaIsao NunokawaKimitoshi Etoh
    • G11B5/31G11B5/127G11B5/147
    • G11B5/1278G11B5/3163Y10T29/49021
    • Embodiments of the invention provide a thin film magnetic recording head that can reduce the round portion of the track restriction part of the main pole and has excellent track width accuracy, as well as its fabrication method. In one embodiment, the main pole is etched in the following three processes. (1) An ion beam is injected into the substrate at an angle of about 50°±20° while vibrating the substrate horizontally within a range of about ±(30° to 150°) in a reference direction in which the ion beam is oriented from the medium to the air bearing surface. (2) The ion beam is injected into the substrate at an angle of about 60°±20° while vibrating the substrate around a predetermined angle of about 90° to 135° from a direction in which the ion beam is oriented from the medium to the air bearing surface. (3) The ion beam is injected into the substrate at an angle of about 60°±20° while vibrating the substrate horizontally at a predetermined angle within about ±45° around a predetermined angle within about −90° to −135° from a direction in which the ion beam is oriented from the medium to the air bearing surface.
    • 本发明的实施例提供一种薄膜磁记录头,其可以减小主极的轨道限制部分的圆形部分,并且具有优异的轨道宽度精度及其制造方法。 在一个实施例中,主极在以下三个过程中被蚀刻。 (1)离子束以约50°±20°的角度注入基板,同时在离子束取向的基准方向上在约±(30°〜150°)的范围内水平振动基板 从介质到空气轴承表面。 (2)离子束以大约60°±20°的角度注入到基片中,同时使离子束从介质取向的方向围绕约90°至135°的预定角度振动, 空气轴承表面。 (3)将离子束以大约60°±20°的角度注入到基片中,同时以大约±45°的预定角度水平地振动衬底,大约在-90°至-155°的预定角度 离子束从介质定向到空气轴承表面的方向。