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    • 1. 发明授权
    • Display device
    • 显示设备
    • US08651679B2
    • 2014-02-18
    • US13419544
    • 2012-03-14
    • Hiroyuki ShimaneHirohisa TanakaAkio ItoKazuya Sato
    • Hiroyuki ShimaneHirohisa TanakaAkio ItoKazuya Sato
    • G01D11/28F01P11/16B01D1/26
    • B60K37/02B60K2350/408G01D7/08G01D13/265
    • A display device includes a first light guide member provided with a first reflecting surface formed at its first end to reflect light emitted by a light source; a second light guide member provided with a penetrating hole in which the first light guide member is intended to be inserted and a second reflecting surface formed at its first end to reflect the light; a first pointer and a second pointer fixed to the first end of the first light guide member and the first end of the second light guide member to be illuminated by the light reflected by the first reflection surface and the second reflection surface, respectively, and a driving member configured to separately rotate the first light guide member and the second light guide member around a same rotation axis with the first pointer and the second pointer, respectively.
    • 显示装置包括:第一导光部件,设置有在其第一端部处形成的第一反射面,以反射由光源发射的光; 第二导光构件,其设置有要插入第一导光构件的穿透孔和形成在其第一端处以反射光的第二反射表面; 第一指针和第二指针,分别固定在第一导光部件的第一端和第二导光部件的被第一反射面和第二反射面反射的光所照射的第一端上,第 驱动构件,其被构造成分别与第一指针和第二指针分别旋转第一导光构件和第二导光构件在与第一指针和第二指针相同的旋转轴线周围。
    • 2. 发明申请
    • DISPLAY DEVICE
    • 显示设备
    • US20130094175A1
    • 2013-04-18
    • US13419544
    • 2012-03-14
    • Hiroyuki ShimaneHirohisa TanakaAkio ItoKazuya Sato
    • Hiroyuki ShimaneHirohisa TanakaAkio ItoKazuya Sato
    • G01D11/28
    • B60K37/02B60K2350/408G01D7/08G01D13/265
    • A display device includes a first light guide member provided with a first reflecting surface formed at its first end to reflect light emitted by a light source; a second light guide member provided with a penetrating hole in which the first light guide member is intended to be inserted and a second reflecting surface formed at its first end to reflect the light; a first pointer and a second pointer fixed to the first end of the first light guide member and the first end of the second light guide member to be illuminated by the light reflected by the first reflection surface and the second reflection surface, respectively, and a driving member configured to separately rotate the first light guide member and the second light guide member around a same rotation axis with the first pointer and the second pointer, respectively.
    • 显示装置包括:第一导光部件,设置有在其第一端部处形成的第一反射面,以反射由光源发射的光; 第二导光构件,其设置有要插入第一导光构件的穿透孔和形成在其第一端处以反射光的第二反射表面; 第一指针和第二指针,分别固定在第一导光部件的第一端和第二导光部件的被第一反射面和第二反射面反射的光所照射的第一端上,第 驱动构件,其被构造成分别与第一指针和第二指针分别旋转第一导光构件和第二导光构件在与第一指针和第二指针相同的旋转轴线周围。
    • 5. 发明授权
    • Illumination optical system, exposure apparatus, and device manufacturing method
    • 照明光学系统,曝光装置和装置制造方法
    • US08947635B2
    • 2015-02-03
    • US13168068
    • 2011-06-24
    • Hirohisa TanakaYasushi Mizuno
    • Hirohisa TanakaYasushi Mizuno
    • G03B27/72G02B27/09G03F7/20
    • G02B27/0966G03F7/70091G03F7/70191
    • According to one embodiment, an illumination optical system is provided with an optical integrator which forms a predetermined light intensity distribution on an illumination pupil plane in an illumination optical path of the illumination optical system with incidence of exposure light from a light source device thereinto; a transmission filter arranged on the reticle side with respect to the optical integrator and in a first adjustment region set including the illumination pupil plane in an optical-axis direction of the illumination optical system, and having a transmittance characteristic varying according to positions of the exposure light incident thereinto; and a movement mechanism which moves the transmission filter along the optical-axis direction in the first adjustment region.
    • 根据一个实施例,照明光学系统设置有光学积分器,其在照明光学系统的照明光路中在照明光瞳平面上形成预定的光强度分布,其中光源装置的曝光光入射到照明光学系统中; 相对于光积分器布置在光罩侧的透射滤光器和在照明光学系统的光轴方向上包括照明光瞳面的第一调整区域,并且具有根据曝光位置而变化的透射率特性 光线事件 以及在第一调整区域中沿着光轴方向移动发送滤波器的移动机构。
    • 8. 发明授权
    • Illumination optical apparatus, exposure apparatus, and device manufacturing method
    • 照明光学装置,曝光装置和装置的制造方法
    • US08094290B2
    • 2012-01-10
    • US12266321
    • 2008-11-06
    • Soichi OwaOsamu TanitsuHirohisa Tanaka
    • Soichi OwaOsamu TanitsuHirohisa Tanaka
    • G03B27/54G03B27/72G03B27/32
    • G02B27/0905G02B26/0833G02B27/0927G03F7/70075G03F7/70116G03F7/70583Y10T29/49826
    • An illumination optical system with a simple structure reduces the effects of illumination variations caused by a spatial coherency of illumination light, while maintaining a high usage efficiency of illumination light that is emitted in pulses. The illumination optical system illuminates an irradiated plane with pulse-emitted illumination light and includes a spatial light modulator including a plurality of mirror elements each of which spatially modulates the illumination light in accordance with an incident position of the illumination light. A modulation control unit controls the mirror elements, whenever at least one pulse of illumination light is emitted, in a manner such that the optical elements spatially modulate the pulses of illumination light differently from one another and form substantially the same intensity distribution for the pulses of illumination light on a predetermined plane.
    • 具有简单结构的照明光学系统降低了由照明光的空间相干性引起的照明变化的影响,同时保持以脉冲发射的照明光的高使用效率。 照明光学系统用脉冲发射的照明光照射被照射的平面,并且包括空间光调制器,其包括多个反射镜元件,每个反射镜元件根据照明光的入射位置对照明光进行空间调制。 每当发射照明光的至少一个脉冲时,调制控制单元控制镜元件,使得光学元件彼此空间地调制照明光的脉冲,并且形成基本相同的强度分布,用于脉冲的 在预定平面上的照明光。