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1. 发明授权

US06709791B1 Halftone phase shift photomask and blanks for halftone phase shift photomask for it and pattern forming method using this 有权
标题翻译：半色调相移光掩模和用于其的半色调相移光掩模的坯料以及使用其的图案形成方法
公开(公告)号：US06709791B1
公开(公告)日：2004-03-23
申请号：US09807276
申请日：2001-04-10
申请人： Hiroshi Mohri , Toshiaki Motonaga , Chiaki Hatsuta , Norihito Ito , Naoya Hayashi , Toshio Onodera , Takahiro Matsuo , Toru Ogawa , Keisuke Nakazawa
发明人： Hiroshi Mohri , Toshiaki Motonaga , Chiaki Hatsuta , Norihito Ito , Naoya Hayashi , Toshio Onodera , Takahiro Matsuo , Toru Ogawa , Keisuke Nakazawa
IPC分类号： G03F900
CPC分类号： G03F1/32 , G03F1/26 , G03F1/34
摘要： The invention relates to a halftone phase shift photomask whose transmittance and phase angle remain unchanged even when irradiated with an excimer laser used for exposure over an extended period of time, and a blank therefor, and provides a halftone phase shift mask 108 comprising a pattern of halftone phase shift film 102 containing at least chromium and fluorine on a transparent substrate 101, wherein optical characteristic changes upon irradiation with an exposure excimer laser have been reduced by patterning a film irradiated with light 109 having a wavelength substantially absorbed by halftone phase shift film 102.
摘要翻译：本发明涉及一种半色调相移光掩模，其透射率和相位角即使在用于长时间曝光的受激准分子激光器照射时也保持不变，并且提供了一种空白，并提供了一种半色调相移掩模108，其包括在透明基板101上含有至少铬和氟的半色调相移膜102，其中通过曝光准分子激光器照射时的光学特性变化已经减少了通过半色调相移膜102基本吸收的波长的光109照射的图案。

2. 发明授权

US06780547B2 Halftone phase shifting photomask and blanks for halftone phase shifting photomask therefor and a method for forming pattern by using the halftone phase shifting photomask 失效
标题翻译：半色调相移光掩模和半色调相移光掩模的坯料以及通过使用半色调相移光掩模形成图案的方法
公开(公告)号：US06780547B2
公开(公告)日：2004-08-24
申请号：US09825578
申请日：2001-04-03
申请人： Toshiaki Motonaga , Norihito Ito , Chiaki Hatsuta , Junji Fujikawa , Naoya Hayashi , Toshio Onodera , Takahiro Matsuo , Toru Ogawa , Keisuke Nakazawa
发明人： Toshiaki Motonaga , Norihito Ito , Chiaki Hatsuta , Junji Fujikawa , Naoya Hayashi , Toshio Onodera , Takahiro Matsuo , Toru Ogawa , Keisuke Nakazawa
IPC分类号： G03F900
CPC分类号： G03F1/32
摘要： In a halftone phase shifting photomask 108, having a pattern of halftone phase shifting film 102 containing at least chromium and fluorine, the halftone phase shifting film is heat-treated at a temperature between 250° C. and 500° C. so that a change of the optical property of the film produced by the application of excimer laser for exposure to the film is decreased.
摘要翻译：在具有至少包含铬和氟的半色调相移膜102的图案的半色调相移光掩模108中，半色调相移膜在250℃和500℃之间的温度下进行热处理，从而改变通过施加用于暴露于膜的准分子激光器制造的膜的光学性能降低。

3. 发明授权

US08278126B2 Method for manufacturing organic electroluminescence device 有权
标题翻译：制造有机电致发光元件的方法
公开(公告)号：US08278126B2
公开(公告)日：2012-10-02
申请号：US12670524
申请日：2008-07-24
申请人： Makoto Sasaki , Shinichi Morishima , Norihito Ito
发明人： Makoto Sasaki , Shinichi Morishima , Norihito Ito
IPC分类号： H01L21/00
CPC分类号： H01L51/56 , C23C14/0652 , C23C14/46 , H01L51/5253
摘要： The present invention is intended to provide a method for manufacturing an organic EL device, which method can form a film having high barrier properties to water vapor or oxygen, while suppressing damage to an organic EL element, during formation of the film including inorganic layers for sealing the organic EL element. When an organic EL element (20) which is composed of a pair of electrodes in which at least one of the electrodes being transparent or translucent and an organic EL layer (22) which comprises a light-emitting layer held between the electrodes, and a sealing layer (30) which includes at least one layer of inorganic film being in contact with the organic EL element (20) and which seals the organic EL element (20) are formed on a substrate (10), a first sealing film (31) which is included in the sealing layer (30) and which is in contact with the organic EL element (20) is formed by ion beam sputtering method, and the other inorganic film which is included in the sealing layer (30) is formed by any method other than the ion beam sputtering method.
摘要翻译：本发明旨在提供一种制造有机EL器件的方法，该方法可以在形成含有无机层的膜的同时，在形成含有无机层的膜的同时，抑制对有机EL元件的损伤，从而形成对水蒸汽或氧气具有高阻隔性的膜密封有机EL元件。当由一对电极构成的有机EL元件（20），其中至少一个电极是透明的或半透明的，以及包括在电极之间保持的发光层的有机EL层（22），以及在基板（10）上形成包括至少一层与有机EL元件（20）接触并密封有机EL元件（20）的无机膜的密封层（30），第一密封膜（31））包含在密封层（30）中并且与有机EL元件（20）接触的方法通过离子束溅射法形成，并且包含在密封层（30）中的另一种无机膜由除离子束溅射法以外的任何方法。

4. 发明申请

US20100124603A1 PATTERN FORMATION METHOD FOR ELECTROLUMINESCENT ELEMENT 失效
标题翻译：电致发光元件的图案形成方法
公开(公告)号：US20100124603A1
公开(公告)日：2010-05-20
申请号：US12693822
申请日：2010-01-26
申请人： Nobuyuki Ito , Norihito Ito
发明人： Nobuyuki Ito , Norihito Ito
IPC分类号： B05D5/06
CPC分类号： H01L27/3246 , H01L51/0005 , H01L51/0037 , H01L51/0042 , H01L51/005 , H01L51/0052 , Y10S428/917 , Y10T428/24777
摘要： There is provided an organic electroluminescent display having excellent practicality that can be produced by a simple method which does not cause electrode breaking and can realize even thickness of an electroluminescent layer. There is also provided a pattern formed object having a coating as an electroluminescent layer or the like having even thickness, for an electroluminescent element, formed using a coating liquid and provided in each area surrounded by partition walls provided on a substrate. The electroluminescent display comprises at least a substrate, an electrode provided on the substrate, protrusions which each are provided on the substrate so as to cover the ends of the electrode and are convexly curved in section relatively to the surface of the substrate, and an electroluminescent layer provided in each opening which is located on the electrode and defined by adjacent protrusions. The pattern formed object comprises: a substrate; partition walls provided on the substrate; and a coating stacked on the substrate in its part between the partition walls, wherein the partition walls have a sloped liquid-nonrepellent surface and have such a sectional form that, at least in the lower part of the partition wall, as the distance from the substrate increases, the size of the partition wall in a direction parallel to the substrate decreases, and, in the coating, the ratio of the maximum thickness (Tmax) to the minimum thickness (Tmin), Tmax/Tmin, is not more than 130% as measured in the coating in its part between the lower ends of the partition walls adjacent to each other.
摘要翻译：提供一种具有优异实用性的有机电致发光显示器，其可以通过不引起电极断裂并且可以实现电致发光层的均匀厚度的简单方法来制造。还提供了一种形成图案的物体，其具有使用涂布液形成的电致发光元件具有均匀厚度的电致发光层等的涂层，并且设置在由设置在基板上的分隔壁包围的每个区域中。电致发光显示器至少包括衬底，设置在衬底上的电极，每个设置在衬底上以覆盖电极的端部并且相对于衬底表面凸起弯曲的突起，以及电致发光层设置在位于电极上并由相邻突起限定的每个开口中。图案形成对象包括：基板; 设置在基板上的分隔壁; 以及在分隔壁之间的部分上堆叠在基板上的涂层，其中分隔壁具有倾斜的无液体液体表面，并且具有这样的截面形式，使得至少在分隔壁的下部中，与隔离壁的距离衬底增加，分隔壁在平行于衬底的方向上的尺寸减小，并且在涂层中，最大厚度（Tmax）与最小厚度（Tmin）的比Tmax / Tmin不大于130 在其相邻的分隔壁的下端之间的涂层中测量的％。

5. 发明授权

US07534557B2 Production method for electroluminescent element 失效
标题翻译：电致发光元件的制造方法
公开(公告)号：US07534557B2
公开(公告)日：2009-05-19
申请号：US10513954
申请日：2003-05-08
申请人： Tomoyuki Tachikawa , Norihito Ito
发明人： Tomoyuki Tachikawa , Norihito Ito
IPC分类号： G03F7/00
CPC分类号： H01L51/56 , H01L27/3211 , H01L51/0018
摘要： The present invention provides a method for manufacturing an EL element, capable of preferably carrying out the peeling operation at the time of peeling off an unnecessary layer such as a photoresist layer. This object is achieved by providing a method for manufacturing an EL element comprising: an organic EL layer forming process of forming an organic EL layer on a substrate, on which at least an electrode layer is formed; a peeling layer forming process of forming a peeling layer on the organic EL layer; a photoresist layer forming process of forming a photoresist layer on the peeling layer; a photoresist layer patterning process of patterning the photoresist layer by exposing and developing; an organic EL layer developing process of removing the organic EL layer of a part not covered with the photoresist layer; and a peeling layer peeling process of removing the photoresist layer laminated thereon by peeling off the peeling layer.
摘要翻译：本发明提供一种EL元件的制造方法，其能够优选在剥离诸如光致抗蚀剂层的不需要的层时进行剥离操作。该目的通过提供一种用于制造EL元件的方法来实现，该方法包括：在基底上形成有机EL层的有机EL层形成工艺，在其上形成至少一个电极层; 在有机EL层上形成剥离层的剥离层形成工序; 在所述剥离层上形成光致抗蚀剂层的光致抗蚀剂层形成工序; 通过曝光和显影来图案化光致抗蚀剂层的光致抗蚀剂层图案化工艺; 去除未被光致抗蚀剂层覆盖的部分的有机EL层的有机EL层显影工艺; 以及通过剥离剥离层去除层压在其上的光致抗蚀剂层的剥离层剥离处理。

6. 发明申请

US20080067931A1 Electroluminescent display and process for producing the same 失效
标题翻译：电致发光显示器及其制造方法
公开(公告)号：US20080067931A1
公开(公告)日：2008-03-20
申请号：US11980273
申请日：2007-10-30
申请人： Nobuyuki Ito , Norihito Ito
发明人： Nobuyuki Ito , Norihito Ito
IPC分类号： H01J1/62 , B05D3/02 , B32B3/02
CPC分类号： H01L27/3246 , H01L51/0005 , H01L51/0037 , H01L51/0042 , H01L51/005 , H01L51/0052 , Y10S428/917 , Y10T428/24777
摘要： There is provided an organic electroluminescent display having excellent practicality that can be produced by a simple method which does not cause electrode breaking and can realize even thickness of an electroluminescent layer. There is also provided a pattern formed object having a coating as an electroluminescent layer or the like having even thickness, for an electroluminescent element, formed using a coating liquid and provided in each area surrounded by partition walls provided on a substrate. The electroluminescent display comprises at least a substrate, an electrode provided on the substrate, protrusions which each are provided on the substrate so as to cover the ends of the electrode and are convexly curved in section relatively to the surface of the substrate, and an electroluminescent layer provided in each opening which is located on the electrode and defined by adjacent protrusions. The pattern formed object comprises: a substrate; partition walls provided on the substrate; and a coating stacked on the substrate in its part between the partition walls, wherein the partition walls have a sloped liquid-nonrepellent surface and have such a sectional form that, at least in the lower part of the partition wall, as the distance from the substrate increases, the size of the partition wall in a direction parallel to the substrate decreases, and, in the coating, the ratio of the maximum thickness (Tmax) to the minimum thickness (Tmin), Tmax/Tmin, is not more than 130% as measured in the coating in its part between the lower ends of the partition walls adjacent to each other.
摘要翻译：提供一种具有优异实用性的有机电致发光显示器，其可以通过不引起电极断裂并且可以实现电致发光层的均匀厚度的简单方法来制造。还提供了一种形成图案的物体，其具有使用涂布液形成的电致发光元件具有均匀厚度的电致发光层等的涂层，并且设置在由设置在基板上的分隔壁包围的每个区域中。电致发光显示器至少包括衬底，设置在衬底上的电极，每个设置在衬底上以覆盖电极的端部并且相对于衬底表面凸起弯曲的突起，以及电致发光层设置在位于电极上并由相邻突起限定的每个开口中。图案形成对象包括：基板; 设置在基板上的分隔壁; 以及在分隔壁之间的部分上堆叠在基板上的涂层，其中分隔壁具有倾斜的无液体液体表面，并且具有这样的截面形式，使得至少在分隔壁的下部中，与隔离壁的距离衬底增加，分隔壁在平行于衬底的方向上的尺寸减小，并且在涂层中，最大厚度（Tmax）与最小厚度（Tmin）的比率Tmax / Tmin不大于130 在其相邻的分隔壁的下端之间的涂层中测量的％。

7. 发明授权

US07307381B2 Electroluminescent display and process for producing the same 失效
标题翻译：电致发光显示器及其制造方法
公开(公告)号：US07307381B2
公开(公告)日：2007-12-11
申请号：US10630089
申请日：2003-07-30
申请人： Nobuyuki Ito , Norihito Ito
发明人： Nobuyuki Ito , Norihito Ito
IPC分类号： H05B33/20
CPC分类号： H01L27/3246 , H01L51/0005 , H01L51/0037 , H01L51/0042 , H01L51/005 , H01L51/0052 , Y10S428/917 , Y10T428/24777
摘要： An organic electroluminescent display which has excellent partiality, and which includes a substrate, an electrode provided on the substrate, and protrusions provided on the substrate so as to cover the ends of the electrode and convexly curved in section relative to the surface of the substrate. An electroluminescent layer is provided in each opening which is located on the electrode and defined by adjacent protrusions. The electroluminescent layer in its part around the boundary between the electroluminescent layer and the protusion is in contact with the protrusion can be in such a state that the electroluminescent layer is curved in section in a direction opposite to the convexly curved protrusion.
摘要翻译：具有优异偏向性的有机电致发光显示器，其包括基板，设置在基板上的电极和设置在基板上的突起，以覆盖电极的端部并且相对于基板的表面凸出部分地弯曲。在每个开口中设置电致发光层，其位于电极上并由相邻突起限定。在电致发光层和突起之间的边界周围的电致发光层与突起接触可以处于使电致发光层沿与凸曲面突起相反的方向弯曲的状态。

8. 发明授权

US07898173B2 Pattern formed object for an electroluminescent display 失效
标题翻译：用于电致发光显示器的图案形成对象
公开(公告)号：US07898173B2
公开(公告)日：2011-03-01
申请号：US11980273
申请日：2007-10-30
申请人： Nobuyuki Ito , Norihito Ito
发明人： Nobuyuki Ito , Norihito Ito
IPC分类号： H05B33/00 , H05B33/02
CPC分类号： H01L27/3246 , H01L51/0005 , H01L51/0037 , H01L51/0042 , H01L51/005 , H01L51/0052 , Y10S428/917 , Y10T428/24777
摘要： A pattern formed object for an electroluminescent element includes a substrate; partition walls provided on the substrate; and a coating stacked on the substrate in its part between the partition walls. The partition walls have a sloped liquid-nonrepellent surface and have such a sectional form that, at least in the lower part of the partition wall, as the distance from the substrate increases, the size of the partition wall in a direction parallel to the substrate decreases, and, in the coating, the ratio of the maximum thickness (Tmax) to the minimum thickness (Tmin), Tmax/Tmin, is not more than 130% as measured in the coating in its part between the lower ends of the partition walls adjacent to each other.
摘要翻译：电致发光元件的图形形成对象包括基板; 设置在基板上的分隔壁; 以及在分隔壁之间的部分上堆叠在基板上的涂层。分隔壁具有倾斜的无液体表面，并且具有这样的截面形式，即至少在分隔壁的下部，随着离开基板的距离的增加，分隔壁在与基板平行的方向上的尺寸并且在涂层中，最大厚度（Tmax）与最小厚度（Tmin）之比Tmax / Tmin的比例不大于130％，如在隔板的下端部分的涂层中所测量的相邻的墙壁。

9. 发明申请

US20110014389A1 LYOPHILIC/LYOPHOBIC PATTERN-FORMING METHOD AND ORGANIC ELECTROLUMINESCENT ELEMENT MANUFACTURING METHOD 审中-公开
标题翻译： LYOPHILIC / LYOPHOBIC PATTERN-FORMING METHOD AND有机电致发光元件制造方法
公开(公告)号：US20110014389A1
公开(公告)日：2011-01-20
申请号：US12935231
申请日：2009-03-24
申请人： Norihito Ito
发明人： Norihito Ito
IPC分类号： B05D5/06 , B05D5/00 , B05D3/06
CPC分类号： H01L51/0005 , H01L51/0012 , H01L51/5012 , H01L51/56
摘要： Disclosed is a lyophilic/lyophobic pattern-forming method comprising a first lyophilization step for lyophilizing the surface of a first member and a second member provided on the first member and having through-holes formed down to the surface of the first member, a lyophobic layer-forming step for forming a lyophobic layer on the surfaces of the first and second members, and a second lyophilization step that lyophilizes said lyophobic layer to form a lyophilic/lyophobic pattern, wherein said first and second members are made of different materials, and the lyophobic layer comprises material, wherein locations formed on the first member are lyophilized more than locations formed on the surface of the second member during the second lyophilization step.
摘要翻译：公开了一种亲液/疏液图案形成方法，其包括用于将第一部件的表面冻结的第一冻干步骤和设置在第一部件上的第二部件，并且具有形成在第一部件的表面下方的通孔，疏液层在第一和第二构件的表面上形成疏液层的成形步骤和将所述疏液层冻干以形成亲液/疏液图案的第二冻干步骤，其中所述第一和第二构件由不同的材料制成，并且疏液层包括材料，其中形成在第一构件上的位置比在第二冻干步骤期间形成在第二构件的表面上的位置更多地被冻干。

10. 发明申请

US20100227477A1 METHOD FOR FORMING THIN FILM, METHOD FOR PRODUCING ORGANIC ELECTROLUMINESCENT DEVICE, METHOD FOR PRODUCING SEMICONDUCTOR DEVICE, AND METHOD FOR PRODUCING OPTICAL DEVICE 审中-公开
标题翻译：用于形成薄膜的方法，用于生产有机电致发光器件的方法，用于生产半导体器件的方法和用于生产光学器件的方法
公开(公告)号：US20100227477A1
公开(公告)日：2010-09-09
申请号：US12666950
申请日：2008-06-27
申请人： Norihito Ito
发明人： Norihito Ito
IPC分类号： H01L21/30 , C23F1/04 , B29D11/00
CPC分类号： H01L51/0003 , H01L51/0005 , H01L51/50
摘要： The present invention has the object of providing a method by which a thin film pattern can be formed using a liquid material application in a prescribed area in an economical and simple manner, and a method for producing organic electroluminescent devices, semiconductor devices, and optical devices using said method.A method by which a liquid material 16a containing a thin film forming material is applied to a substrate 11 to form a thin film in a prescribed region, comprising: a step of subjecting the substrate 11 to lyophobization to make a lyophobized surface A; a step of patterning an underlayer 15 on the lyophobized surface A of the substrate 11, the underlayer 15 being more lyophilic to the liquid material 16a than the lyophobized surface A; and a step of applying the liquid material 16a to the underlayer 15 and then drying it.
摘要翻译：本发明的目的是提供一种以经济和简单的方式在规定区域中以液体材料施加形成薄膜图案的方法，以及制造有机电致发光器件，半导体器件和光学器件的方法使用所述方法。将含有薄膜形成材料的液体材料16a施加到基板11上以在规定区域中形成薄膜的方法包括：使基板11进行疏水化以形成疏液化表面A的步骤; 在衬底11的疏水化表面A上图案化底层15的步骤，与液体材料16a相比，底层15比疏液化表面A更亲液; 以及将液体材料16a施加到底层15然后将其干燥的步骤。

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