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    • 1. 发明授权
    • Semiconductor device and method for making the same
    • 半导体装置及其制造方法
    • US4884120A
    • 1989-11-28
    • US16787
    • 1987-02-20
    • Hiroshi MochizukiReiji TamakiJunichi ArimaMasaaki IkegamiEisuke TanakaKenji Saito
    • Hiroshi MochizukiReiji TamakiJunichi ArimaMasaaki IkegamiEisuke TanakaKenji Saito
    • H01L23/522H01L21/28H01L21/316H01L21/768H01L27/00H01L29/49
    • H01L21/31683H01L21/7684H01L21/76877H01L21/76888
    • An improved interconnection structure and method for forming the interconnection in a semiconductor device having multilayered interconnection structure in which a contact hole for electrically connecting a first layer interconnection to a predetermined region of a semiconductor substrate and a through hole for electrically connecting a second layer interconnection to the first layer interconnection are formed in the regions overlapping with each other in planer layout. In the interconnection structure of the present invention, hillocks effective to compensate for the contact hole step are formed in the first layer interconnection only in the region of the contact hole of the first layer interconnection. In the method for forming the interconnection according to the present invention, a first layer interconnection is formed and a chemical conversion process is selectively performed to form a film which is more rigid than the first layer interconnection film on a predetermined region of the first layer interconnection film, and then a heat process is performed to generate hillocks only at the region of the contact hole of the first layer interconnection film. The second layer interconnection film is formed thereafter.
    • 一种用于在具有多层互连结构的半导体器件中形成互连的改进的互连结构和方法,其中用于将第一层互连电连接到半导体衬底的预定区域的接触孔和用于将第二层互连电连接到 第一层互连形成在以平面布置彼此重叠的区域中。 在本发明的互连结构中,仅在第一层互连的接触孔的区域中,在第一层互连中形成有效补偿接触孔台阶的小丘。 在根据本发明的形成互连的方法中,形成第一层互连,并且选择性地执行化学转换处理以在第一层互连的预定区域上形成比第一层互连膜更刚性的膜 膜,然后进行热处理,仅在第一层互连膜的接触孔的区域产生小丘。 此后形成第二层互连膜。
    • 2. 发明授权
    • Semiconductor integrated circuit interconnection structures and method
of making the interconnection structures
    • US6130481A
    • 2000-10-10
    • US959457
    • 1997-10-28
    • Shigeru HaradaKenji KishibeAkira IhisaHiroshi MochizukiEisuke Tanaka
    • Shigeru HaradaKenji KishibeAkira IhisaHiroshi MochizukiEisuke Tanaka
    • H01L21/768H01L23/522H01L23/532H01L23/48H01L23/52H01L29/40
    • H01L21/76801H01L21/76804H01L21/76814H01L21/76828H01L21/76832H01L21/76834H01L21/76837H01L23/5226H01L23/53223H01L2924/0002Y10S257/901Y10S257/904Y10S257/908Y10S257/915
    • A semiconductor integrated circuit structure includes a semiconductor substrate; an electronic element disposed in the substrate; a first electrically insulating layer disposed on the substrate and the electronic element; a first electrically conducting interconnection layer electrically connected to the electronic element and disposed at least partly on the first electrically insulating layer; a second electrically insulating layer disposed on the first electrically conducting interconnection layer; a second electrically conducting interconnection layer disposed on the second electrically insulating layer; and a through-hole penetrating the second electrically insulating layer to the first electrically conducting interconnection layer, part of the second interconnection layer being disposed within the through-hole and contacting the first electrically conducting interconnection layer wherein the first electrically conducting interconnection layer includes a current barrier including at least one opening in the first electrically conducting interconnection layer proximate the through-hole extending to the first electrically insulating layer and filled with part of the second electrically insulating layer, constraining current flowing between the first and second electrically conducting interconnection layers to flow around the current barrier.A method of making a semiconductor integrated circuit interconnection structure includes forming an active electronic element in a semiconductor substrate; forming a first electrically insulating layer on the electronic element and the semiconductor substrate; forming a first electrically conducting interconnection layer electrically connected to the electronic element, at least partially disposed on the first electrically insulating layer, and including at least one opening extending to the first electrically insulating layer; forming a second electrically insulating layer on the first electrically conducting interconnection layer and filling the opening, thereby forming a barrier to the flow of current in a region of the first electrically conducting interconnection layer; forming a throughhole extending through the second electrically insulating layer to the first electrically conducting interconnection layer proximate the opening; and depositing a second electrically conducting interconnection layer on the second electrically insulating layer and in the through-hole, electrically contacting the first electrically conducting interconnection layer.
    • 3. 发明授权
    • Semiconductor integrated circuit interconnection structures
    • 半导体集成电路互连结构
    • US5712509A
    • 1998-01-27
    • US873015
    • 1992-04-24
    • Shigeru HaradaKenji KishibeAkira OhisaHiroshi MochizukiEisuke Tanaka
    • Shigeru HaradaKenji KishibeAkira OhisaHiroshi MochizukiEisuke Tanaka
    • H01L21/768H01L23/522H01L23/532H01L23/48H01L23/52
    • H01L21/76801H01L21/76804H01L21/76814H01L21/76828H01L21/76832H01L21/76834H01L21/76837H01L23/5226H01L23/53223H01L2924/0002Y10S257/901Y10S257/904Y10S257/908Y10S257/915
    • A semiconductor integrated circuit structure includes a semiconductor substrate; an electronic element disposed in the substrate; a first electrically insulating layer disposed on the substrate and the electronic element; a first electrically conducting interconnection layer electrically connected to the electronic element and disposed at least partly on the first electrically insulating layer; a second electrically insulating layer disposed on the first electrically conducting interconnection layer; a second electrically conducting interconnection layer disposed on the second electrically insulating layer; and a through-hole penetrating the second electrically insulating layer to the first electrically conducting interconnection layer, part of the second interconnection layer being disposed within the through-hole and contacting the first electrically conducting interconnection layer wherein the first electrically conducting interconnection layer includes a current barrier including at least one opening in the first electrically conducting interconnection layer proximate the through-hole extending to the first electrically insulating layer and filled with part of the second electrically insulating layer, constraining current flowing between the first and second electrically conducting interconnection layers to flow around the current barrier.
    • 半导体集成电路结构包括半导体衬底; 设置在所述基板中的电子元件; 设置在所述基板和所述电子元件上的第一电绝缘层; 电连接到所述电子元件并且至少部分地设置在所述第一电绝缘层上的第一导电互连层; 设置在所述第一导电互连层上的第二电绝缘层; 设置在所述第二电绝缘层上的第二导电互连层; 以及穿过所述第二电绝缘层到所述第一导电互连层的通孔,所述第二互连层的一部分设置在所述通孔内并与所述第一导电互连层接触,其中所述第一导电互连层包括电流 阻挡层,包括靠近通孔延伸到第一电绝缘层的第一导电互连层中的至少一个开口,并填充有第二电绝缘层的一部分,约束在第一和第二导电互连层之间流动的电流流动 围绕当前的障碍。
    • 5. 发明授权
    • Printing device and printing method
    • 印刷装置和印刷方式
    • US08654164B2
    • 2014-02-18
    • US13497685
    • 2010-09-24
    • Hiroshi MochizukiYuichi AiharaTsuyoshi Kubota
    • Hiroshi MochizukiYuichi AiharaTsuyoshi Kubota
    • B41J2/325
    • B41J2/325B41J2/0057B41J17/02
    • The present invention provides a printing device which provides high printing quality. The printing device includes: an image forming section which has a thermal head 9 and a platen roller 12; a media conveyance section for conveying an intermediate transfer film F; a ribbon conveyance section for conveying an ink ribbon R; a sensor 10 for detecting a first mark formed on the film F; and a control section for controlling the image forming section, the media conveyance section, and the ribbon conveyance section in accordance with output information from the sensor 10. The control section presses the head 9 into contact with the roller 12 when the first mark is not detected, which is when the first mark is further upstream than the position of the sensor 10, while the film F and the ribbon R are being conveyed, and selectively heats a heating element formed in the head 9 when the film F is positioned in the printing start position, which is a state in which the first mark is detected when the first mark is further downstream than the position of the sensor 10.
    • 本发明提供一种提供高打印质量的打印装置。 打印装置包括:具有热敏头9和压纸辊12的图像形成部分; 用于输送中间转印膜F的介质输送部; 用于输送墨带R的色带传送部; 用于检测形成在胶片F上的第一标记的传感器10; 以及根据来自传感器10的输出信息来控制图像形成部分,介质传送部分和色带传送部分的控制部分。当第一标记不是时,控制部分将头部9按压与辊12接触 当胶片F和色带R被输送时,当第一标记比传感器10的位置更上游时,检测到该位置,并且当胶片F位于该位置时,选择性地加热形成在头部9中的加热元件 打印开始位置,其是当第一标记比传感器10的位置更下游时检测到第一标记的状态。
    • 6. 发明申请
    • Sphygmomanometer
    • 血压计
    • US20080312544A1
    • 2008-12-18
    • US11662207
    • 2005-09-12
    • Hiroshi Mochizuki
    • Hiroshi Mochizuki
    • A61B5/0225
    • A61B5/02225A61B5/02116A61B5/022A61B5/02233
    • The objective of the present invention is to provide a sphygmomanometer that is easy to use. The sphygmomanometer according to the present invention measures blood pressure in accordance with an oscillation in an artery wall, resulting from an arterial pulse correspondent with a change in cuff pressure. It comprises a cuff that is connected to the sphygmomanometer main body by a tube, a display unit for displaying the results of blood pressure measurements, and an air supply unit for supplying air to, and thus pressurizing, the cuff, which is detachable from the sphygmomanometer main body. The air supply unit is screwed into the sphygmomanometer main body with a screw assembly, and the screwed-in state is preserved by a caulking ring. The air supply unit also comprises a filter for keeping dust from entering the sphygmomanometer main body.
    • 本发明的目的是提供一种易于使用的血压计。 根据本发明的血压计根据与袖带压力的变化相对应的动脉脉搏导致的动脉壁的振动来测量血压。 其包括通过管连接到血压计主体的袖带,用于显示血压测量结果的显示单元,以及用于向袖带提供空气并因此加压袖带的空气供应单元,该袖带可从 血压计主体。 空气供给单元用螺钉组件拧入血压计主体,并且螺纹固定状态由填缝环保持。 空气供给单元还包括用于防止灰尘进入血压计主体的过滤器。
    • 9. 发明授权
    • Method of forming a ferroelectric device
    • 形成铁电体器件的方法
    • US06190957B1
    • 2001-02-20
    • US09324501
    • 1999-06-02
    • Hiroshi MochizukiKumi OkuwadaHiroyuki KanayaOsamu HidakaSusumu ShutoIwao Kunishima
    • Hiroshi MochizukiKumi OkuwadaHiroyuki KanayaOsamu HidakaSusumu ShutoIwao Kunishima
    • H01L218242
    • H01L27/11507H01L21/76895H01L27/10852H01L27/11502H01L28/55
    • A method of manufacturing a semiconductor apparatus comprises the steps of forming, on a surface of a semiconductor substrate, an MIS transistor including a drain region and a source region each formed of an impurity diffusion region, forming an insulation film on the semiconductor substrate after the MIS transistor has been formed, selectively forming contact holes in the insulation film, embedding, into the contact hole, a capacitor contact plug having a lower end which is in contact with one of the drain region and the source region of the MIS transistor, forming a ferroelectric capacitor having a lower electrode, a ferroelectric film and an upper electrode on the insulation film after the capacitor contact plug has been formed, and forming an electric wire for establishing a connection between the upper electrode of the ferroelectric capacitor and an upper surface of the capacitor contact plug.
    • 一种制造半导体器件的方法包括以下步骤:在半导体衬底的表面上形成包括漏区和源区的MIS晶体管,所述漏极区和源区各自由杂质扩散区形成,在所述半导体衬底之后形成绝缘膜 MIS晶体管已经形成,在绝缘膜中选择性地形成接触孔,将接触孔埋入电容器接触插塞中,该电容器接触插塞的下端与MIS晶体管的漏极区域和源极区域中的一个接触,形成 在形成电容器接触插塞之后,在绝缘膜上形成具有下电极,铁电体膜和上电极的铁电电容器,并且形成用于建立铁电电容器的上电极和上电极之间的连接的电线 电容器接触插头。