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    • 10. 发明申请
    • SCANNING PROBE MICROSCOPE AND MEASUREMENT METHOD OF SAME
    • 扫描探针显微镜及其测量方法
    • US20080245139A1
    • 2008-10-09
    • US12061308
    • 2008-04-02
    • Takafumi MorimotoToru KurenumaManabu EdamuraHiroshi KurodaYukio KemboMasahiro WatanabeShuichi Baba
    • Takafumi MorimotoToru KurenumaManabu EdamuraHiroshi KurodaYukio KemboMasahiro WatanabeShuichi Baba
    • G01B5/28
    • G01Q10/06G01Q10/04
    • A measurement method of a scanning probe microscope including a first approach operation adjusting an operation position of a fine positioning unit to near a maximum extension amount and ending the approach by coarse positioning, a first measurement operation making the probe scan the surface for measurement in a close probe state based on the first approach operation to obtain relief information of the sample surface, a positioning operation positioning the probe at a recessed part based on the relief information obtained by the first measurement operation, a second approach operation making the probe again approach the surface at a position determined by the positioning operation, adjusting an operation position of the Z-axis fine positioning device to close to a maximum extension amount, and ending the repeated approach, and a second measurement operation making the probe scan the surface for measurement in a close probe state based on the second approach operation to obtain relief information of the sample surface.
    • 一种扫描探针显微镜的测量方法,包括:将精细定位单元的操作位置调整到最大延伸量附近的第一接近操作,并且通过粗略定位来结束接近;第一测量操作,使得探测器扫描表面以进行测量 基于第一接近操作关闭探针状态以获得样品表面的浮雕信息,基于通过第一测量操作获得的浮雕信息将探针定位在凹陷部分的定位操作,使探针再次接近的第二接近操作 在由定位操作确定的位置处的表面,将Z轴精细定位装置的操作位置调整为接近最大延伸量,并且结束重复进近,以及使探针扫描表面以进行测量的第二测量操作 基于第二种方法操作获得缓解的近距离探测状态 样品表面的信息。