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    • 1. 发明授权
    • Optical signal detection circuit and optical receiver
    • 光信号检测电路和光接收机
    • US09160458B2
    • 2015-10-13
    • US13981313
    • 2012-01-25
    • Hiroshi KoizumiMasafumi NogawaYusuke Ohtomo
    • Hiroshi KoizumiMasafumi NogawaYusuke Ohtomo
    • H04B10/06H04B10/60H04B10/69
    • H04B10/60H04B10/69H04B10/697
    • An optical signal detection circuit (10) includes an amplification circuit (11) that differentially amplifies an electrical signal (Tout) corresponding to the pulse train of an optical signal (Pin) and outputs a differential output signal (Aout), and a comparator (12) that compares the voltage value of the positive-phase signal of the differential output signal (Aout) with the voltage value of the negative-phase signal and outputs a pulsed comparison output signal (Cout) corresponding to the comparison result. The amplification circuit (11) includes a current addition circuit (11E) that adjusts a DC load current to generate a positive-phase signal (Aout+) and a negative-phase signal (Aout−) of the differential output signal (Aout) in accordance with an adjusted voltage value from an external adjusted voltage source (Vadj) and adjusts the DC bias of the positive-phase signal (Aout+) and the DC bias of the negative-phase signal (Aout−).
    • 光信号检测电路(10)包括对与光信号(Pin)的脉冲序列相对应的电信号(Tout)进行差分放大并输出差分输出信号(Aout)的放大电路(11)和比较器 12),其将差分输出信号(Aout)的正相信号的电压值与负相位信号的电压值进行比较,并输出与比较结果对应的脉冲比较输出信号(Cout)。 放大电路(11)包括电流相加电路(11E),该电流相加电路(11E)调节直流负载电流,以产生差分输出信号(Aout)的正相信号(Aout +)和负相位信号(Aout-) 具有来自外部调整电压源(Vadj)的调整电压值,并调节正相信号(Aout +)的直流偏置和负相位信号(Aout-)的直流偏置。
    • 2. 发明申请
    • OPTICAL SIGNAL DETECTION CIRCUIT AND OPTICAL RECEIVER
    • 光信号检测电路和光接收器
    • US20140016949A1
    • 2014-01-16
    • US13981313
    • 2012-01-25
    • Hiroshi KoizumiMasafumi NogawaYusuke Ohtomo
    • Hiroshi KoizumiMasafumi NogawaYusuke Ohtomo
    • H04B10/60
    • H04B10/60H04B10/69H04B10/697
    • An optical signal detection circuit (10) includes an amplification circuit (11) that differentially amplifies an electrical signal (Tout) corresponding to the pulse train of an optical signal (Pin) and outputs a differential output signal (Aout), and a comparator (12) that compares the voltage value of the positive-phase signal of the differential output signal (Aout) with the voltage value of the negative-phase signal and outputs a pulsed comparison output signal (Cout) corresponding to the comparison result. The amplification circuit (11) includes a current addition circuit (11E) that adjusts a DC load current to generate a positive-phase signal (Aout+) and a negative-phase signal (Aout−) of the differential output signal (Aout) in accordance with an adjusted voltage value from an external adjusted voltage source (Vadj) and adjusts the DC bias of the positive-phase signal (Aout+) and the DC bias of the negative-phase signal (Aout−).
    • 光信号检测电路(10)包括对与光信号(Pin)的脉冲序列相对应的电信号(Tout)进行差分放大并输出差分输出信号(Aout)的放大电路(11)和比较器 12),其将差分输出信号(Aout)的正相信号的电压值与负相位信号的电压值进行比较,并输出与比较结果对应的脉冲比较输出信号(Cout)。 放大电路(11)包括电流相加电路(11E),该电流相加电路(11E)调节直流负载电流,以产生差分输出信号(Aout)的正相信号(Aout +)和负相位信号(Aout-) 具有来自外部调整电压源(Vadj)的调整电压值,并调节正相信号(Aout +)的直流偏置和负相位信号(Aout-)的直流偏置。
    • 6. 发明授权
    • Substrate replacing method and substrate processing apparatus
    • 基板更换方法和基板处理装置
    • US08663489B2
    • 2014-03-04
    • US12732451
    • 2010-03-26
    • Shigeru IshizawaHiroshi KoizumiTatsuya Ogi
    • Shigeru IshizawaHiroshi KoizumiTatsuya Ogi
    • B44C1/22
    • H01L21/67745H01L21/67748
    • A method for replacing plural substrates to be processed by a substrate processing apparatus which includes a substrate processing chamber, a load lock chamber, and a conveying apparatus including first and second conveying members for conveying the plural substrates into and out from the substrate processing chamber and the load lock chamber. The method includes the steps of a) conveying a first substrate out from the substrate processing chamber with the first conveying member, b) conveying a second substrate into the substrate processing chamber with the second conveying member, c) conveying the second substrate out from the load lock chamber with the second conveying member, and d) conveying the first substrate into the load lock chamber with the first conveying member. The steps c) and d) are performed between step a) and step b).
    • 一种用于替换多个基板的方法,所述基板处理装置包括基板处理室,负载锁定室和输送装置,所述基板处理装置包括用于将多个基板输入和移出基板处理室的第一和第二输送部件, 负载锁定室。 该方法包括以下步骤:a)用第一输送部件从基板处理室输出第一基板,b)用第二输送部件将第二基板输送到基板处理室中,c)将第二基板从 负载锁定室与第二输送构件,以及d)用第一输送构件将第一基板输送到装载锁定室。 在步骤a)和步骤b)之间执行步骤c)和d)。