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    • 3. 发明授权
    • Contained object transfer system
    • 包含对象传输系统
    • US08186927B2
    • 2012-05-29
    • US12471987
    • 2009-05-26
    • Tsutomu OkabeToshihiko MiyajimaHiroshi Igarashi
    • Tsutomu OkabeToshihiko MiyajimaHiroshi Igarashi
    • B65G49/07
    • H01L21/67772H01L21/67276
    • A transfer chamber is partitioned into a second chamber in which a transfer robot moving through an opening portion which can be opened/closed by a door is arranged, and a minute first chamber which serves as a FIMS system and includes a door capable of retaining a lid of a pod. The second chamber maintains a state in which an inert gas constantly circulates owing to minute nitrogen while having a pressure higher than that inside the first chamber. The first chamber is normally sealed while an oxide gas is suppressed in advance. In addition, at a time of transferring wafers, a partial pressure of the oxide gas is lowered with use of a downflow which is caused by the inert gas. Further, the first chamber and the second chamber are communicated with each other after a level of the partial pressure is confirmed with use of an oxygen level meter. As described above, an existing amount of the oxide gas is reduced in the so-called transfer chamber in semiconductor processing equipment in which the FIMS system is secured.
    • 传送室被分隔成第二室,其中布置有移动通过可由门打开/关闭的开口部分的传送机器人,以及用作FIMS系统的微小的第一室,并且包括能够保持 荚的盖子 第二室保持这样的状态,其中惰性气体由于微小的氮气而不断地循环,同时压力高于第一室内的压力。 通常密封第一室,同时预先抑制氧化物气体。 此外,在转移晶片时,使用由惰性气体引起的向下流动,氧化物气体的分压降低。 此外,在使用氧水位计确认分压水平之后,第一室和第二室彼此连通。 如上所述,在确保FIMS系统的半导体加工设备中,在所谓的转移室中,氧化物气体的存在量减少。
    • 5. 发明申请
    • CONTAINED OBJECT TRANSFER SYSTEM
    • 包含对象传输系统
    • US20090297298A1
    • 2009-12-03
    • US12471987
    • 2009-05-26
    • Tsutomu OkabeToshihiko MiyajimaHiroshi Igarashi
    • Tsutomu OkabeToshihiko MiyajimaHiroshi Igarashi
    • B65G49/07
    • H01L21/67772H01L21/67276
    • A transfer chamber is partitioned into a second chamber in which a transfer robot moving through an opening portion which can be opened/closed by a door is arranged, and a minute first chamber which serves as a FIMS system and includes a door capable of retaining a lid of a pod. The second chamber maintains a state in which an inert gas constantly circulates owing to minute nitrogen while having a pressure higher than that inside the first chamber. The first chamber is normally sealed while an oxide gas is suppressed in advance. In addition, at a time of transferring wafers, a partial pressure of the oxide gas is lowered with use of a downflow which is caused by the inert gas. Further, the first chamber and the second chamber are communicated with each other after a level of the partial pressure is confirmed with use of an oxygen level meter. As described above, an existing amount of the oxide gas is reduced in the so-called transfer chamber in semiconductor processing equipment in which the FIMS system is secured.
    • 传送室被分隔成第二室,其中布置有移动通过可由门打开/关闭的开口部分的传送机器人,以及用作FIMS系统的微小的第一室,并且包括能够保持 荚的盖子 第二室保持这样的状态,其中惰性气体由于微小的氮气而不断地循环,同时压力高于第一室内的压力。 通常密封第一室,同时预先抑制氧化物气体。 此外,在转移晶片时,使用由惰性气体引起的向下流动,氧化物气体的分压降低。 此外,在使用氧水位计确认分压水平之后,第一室和第二室彼此连通。 如上所述,在确保FIMS系统的半导体加工设备中,在所谓的转移室中,氧化物气体的存在量减少。
    • 6. 发明授权
    • Load port mounting mechanism
    • 装载端口安装机构
    • US06883770B1
    • 2005-04-26
    • US09572458
    • 2000-05-17
    • Toshihiko MiyajimaHiroshi IgarashiTsutomu Okabe
    • Toshihiko MiyajimaHiroshi IgarashiTsutomu Okabe
    • H01L21/00H01L21/677F16M13/00
    • H01L21/67775H01L21/67772
    • A positioning member and a movable member that is to be brought into contact with the positioning member are arranged in one and the other of the load port and the semiconductor manufacture apparatus, respectively. Two pairs of such positioning members and movable members are provided. A groove (preferably V-shaped) into which the movable member is to be fitted is provided in a surface of one of the positioning member that contacts with the movable member. Furthermore, a mechanism for making it possible to adjust the position by moving the movable member in an up-and-down direction is provided to adjust the position of the movable member to thereby make it possible to perform the positional adjustment between the semiconductor manufacture apparatus and the load port. In a preferred embodiment, the positioning member is a roller which may rotate about its own shaft.
    • 与定位构件接触的定位构件和可动构件分别设置在负载端口和半导体制造装置中的另一个中。 提供两对这样的定位构件和可动构件。 在与可动构件接触的定位构件中的一个的表面设置有可移动构件将要装配的凹槽(优选V形)。 此外,提供了一种用于通过沿上下方向移动可动件来调节位置的机构,以调整可移动部件的位置,从而可以在半导体制造装置 和负载端口。 在优选实施例中,定位构件是可围绕其自身轴旋转的辊。
    • 7. 发明授权
    • Container and method for sealing the container
    • 用于密封容器的容器和方法
    • US06390145B1
    • 2002-05-21
    • US09494405
    • 2000-01-31
    • Tsutomu OkabeToshihiko MiyajimaHiroshi Igarashi
    • Tsutomu OkabeToshihiko MiyajimaHiroshi Igarashi
    • B65D8530
    • H01L21/67376B65D81/2015H01L21/67373H01L21/67772Y10S414/139
    • A clean box has a container including a container body opened at one surface and a lid for closing the opening of the container body. An annular groove is formed in at least one of the container body and the lid so as to surround the opening. An elastic seal member is disposed within the annular groove along its whole length. A cross-section in a width direction of the elastic seal member has relatively thick end portions and a relatively thin intermediate portion in its dimension in a depth direction of the annular groove. Thus, when the lid closes the opening of the container body, an annular suction space is defined along the intermediate portion of the seal member. Also, the suction space is sealed by elastic deformation of the both end portions of the seal member between the container body and the lid. Further, the clean box has an intake/exhaust port mechanism for evacuation/release of the suction space from the outside.
    • 清洁箱具有容器,该容器包括在一个表面上开口的容器主体和用于封闭容器主体的开口的盖。 在容器主体和盖中的至少一个中形成环形槽,以围绕开口。 弹性密封件沿其整个长度设置在环形槽内。 弹性密封件的宽度方向上的横截面在环形槽的深度方向上具有相对较厚的端部和相对较薄的中间部分。 因此,当盖关闭容器主体的开口时,沿着密封构件的中间部分限定环形抽吸空间。 此外,通过密封构件的两个端部在容器主体和盖之间的弹性变形,吸引空间被密封。 此外,清洁箱具有用于从外部排出/释放吸入空间的进气/排气口机构。
    • 8. 发明授权
    • Closed container and lid opening/closing system therefor
    • 封闭的容器和盖子打开/关闭系统
    • US08528947B2
    • 2013-09-10
    • US12491574
    • 2009-06-25
    • Hiroshi IgarashiToshihiko MiyajimaTsutomu Okabe
    • Hiroshi IgarashiToshihiko MiyajimaTsutomu Okabe
    • E05C1/06B65D85/00
    • H01L21/67772Y10T292/0808Y10T292/0824Y10T292/0845Y10T292/1021Y10T292/1038
    • In a pod used in an FIMS system, diffusion of dust particles or the like adhering on the lid of the pod to the interior of the system is reduced. An engaged portion is provided inside the outer surface of the lid of the pod, and a flange portion provided around a pod opening to which the lid can be fitted is provided with an insertion hole that allows access to the engaged portion from the exterior space. A latch mechanism is supported on the pod body side surface of the flange portion in such a way that the latch mechanism can slide along a direction parallel to the side wall of the flange. An engagement portion of the latch mechanism reaches the engaged portion through the insertion hole, and the state of the latch mechanism changes between an engaged state and a disengaged state with movement of the latch mechanism.
    • 在用于FIMS系统的荚中,减少了附着在荚的盖上的灰尘颗粒等的扩散到系统的内部。 一个啮合部分设置在荚的盖子的外表面内部,并且设置在可以装配盖子的荚壳开口周围的凸缘部分设置有允许从外部空间进入被接合部分的插入孔。 闩锁机构被支撑在凸缘部分的荚体主体侧表面上,使得闩锁机构可以沿着平行于凸缘的侧壁的方向滑动。 闩锁机构的接合部分通过插入孔到达接合部分,并且闩锁机构的状态随着闩锁机构的移动而在接合状态和脱离状态之间变化。