会员体验
专利管家(专利管理)
工作空间(专利管理)
风险监控(情报监控)
数据分析(专利分析)
侵权分析(诉讼无效)
联系我们
交流群
官方交流:
QQ群: 891211   
微信请扫码    >>>
现在联系顾问~
热词
    • 3. 发明授权
    • Method and apparatus for forming thin film
    • 用于形成薄膜的方法和装置
    • US4901669A
    • 1990-02-20
    • US47328
    • 1987-05-08
    • Takashi YamamotoShozo KanekoTadashi GengoJoji IchinariHiroshi FujiyamaYoshio KayumiMasayoshi Murata
    • Takashi YamamotoShozo KanekoTadashi GengoJoji IchinariHiroshi FujiyamaYoshio KayumiMasayoshi Murata
    • C23C16/517H01L21/205
    • C23C16/517H01L21/02532H01L21/0262
    • The present invention is directed to a method for forming a thin film on a substrate by the use of a glow discharge plasma which comprises generating a magnetic field in a direction which crosses an electric field for discharge at right angles and fluctuating the magnetic field. The present invention is also directed to an apparatus for practicing the above method, which apparatus is composed of a reaction vessel, means for reducing the pressure in the reaction vessel and means for introducing the feed of reaction gases to the reaction vessel, electrodes for discharge disposed face to face in the reaction vessel, a power source from which a voltage for causing a glow discharge is fed to the electrodes for discharge, a coil surrounding the electrodes for discharge, for generating a magnetic field in a direction crossing at right angles to an electric field generated between the electrodes for discharge, and an AC power source for generating a magnetic field fed to the coil, whereby a thin film is formed on a base plate supported outside the range of the discharge electric field and in parallel with the direction of the electric field.
    • 本发明涉及一种通过使用辉光放电等离子体在衬底上形成薄膜的方法,该方法包括在与电场交叉的方向上产生磁场,以便以直角放电并使磁场发生波动。 本发明还涉及一种用于实施上述方法的装置,该装置由反应容器,用于降低反应容器内的压力的装置和将反应气体进料引入反应容器的装置,排出电极 面对面设置在反应容器内,将用于引起辉光放电的电压供给到放电用电极的电源,围绕放电用电极的线圈,用于沿垂直方向交叉的方向产生磁场 在用于放电的电极之间产生的电场和用于产生馈送到线圈的磁场的AC电源,由此在支撑在放电电场的范围外并与该方向平行的基板上形成薄膜 的电场。
    • 10. 发明授权
    • Dust collecting method
    • 集尘方式
    • US06228336B1
    • 2001-05-08
    • US09373579
    • 1999-08-13
    • Yasuo KatsukiTakashi OhnishiShozo KanekoAkira HashimotoYuichi FujiokaKikuo TokunagaToshihiko Setoguchi
    • Yasuo KatsukiTakashi OhnishiShozo KanekoAkira HashimotoYuichi FujiokaKikuo TokunagaToshihiko Setoguchi
    • B01J800
    • B01D50/002B01D53/508
    • A dust collecting apparatus and method for dedusting a Ca-containing gas using a ceramics filter is provided, in which a filter differential pressure elevation rate is suppressed. A desulferizing agent 103 and a mineral 106 containing MgO are supplied via a hopper 13, 15 a valve 14 and a feeder 16 into a pressurized fluidized-bed combustion furnace 1 together with coal 101 and air 102. A combustion gas 201 is dedusted by a cyclone 2 to become a combustion gas 301, the combustion gas 301 enters a filter container 3a, 3b having a ceramics filter 31a, 31b and is further dedusted. A combustion gas 401 which is dedusted is supplied into a gas turbine 4 to generate power, and combustion gas 501 heats a waste heat recovery boiler 5 which in turn drives a steam turbine 7. The mineral 106 containing MgO is added in the combustion gas 301 which flows in the ceramics filter 31a, 31b. Thereby MgO is added to the combustion gas so that the filter differential pressure elevation rate can be suppressed. The more MgO that is supplied, the greater the effect becomes, and an operation stop due to the differential pressure elevation is eliminated.
    • 提供一种使用陶瓷过滤器除尘含Ca气体的集尘装置和方法,其中抑制了过滤器差压升高速率。 脱硫剂103和含有MgO的矿物106通过料斗13,15,阀14和进料器16与煤101和空气102一起供应到加压流化床燃烧炉1中。燃烧气体201通过 旋风分离器2成为燃烧气体301,燃烧气体301进入具有陶瓷过滤器31a,31b的过滤容器3a,3b,并进一步除尘。 将除尘的燃烧气体401供给燃气轮机4发电,燃烧气体501加热余热回收锅炉5,废热回收锅炉5又驱动蒸汽轮机7.含有MgO的矿物106加入燃烧气体301 其在陶瓷过滤器31a,31b中流动。 由此,将MgO添加到燃烧气体中,从而可以抑制过滤器差压提升率。 供给的MgO越多,效果越大,并且消除由于差压升高引起的操作停止。