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    • 8. 发明授权
    • Method for manufacturing a semiconductor device
    • 半导体器件的制造方法
    • US08338272B2
    • 2012-12-25
    • US12480077
    • 2009-06-08
    • Yuichi HaranoHidenori Suzuki
    • Yuichi HaranoHidenori Suzuki
    • H01L21/326
    • H01L21/6831
    • A wafer is mounted on the top surface of the stage having an electrostatic chuck function, and the wafer at 50° C. or more is cooled to a temperature lower than 50° C. In this step, the voltage to be applied to the internal electrode provided in the stage is raised stepwise to gradually increase the contact area between the back surface of the wafer and the top surface of the stage. Finally, a chuck voltage is applied to the internal electrode, so that the entire back surface of the wafer is uniformly attracted to the top surface of the stage. This reduces damage occurring in the top surface of the stage due to rubbing between the back surface of the wafer and the top surface of the stage.
    • 将晶片安装在具有静电卡盘功能的平台的顶表面上,并且将在50℃或更高的晶片冷却至低于50℃的温度。在该步骤中,施加到内部的电压 设置在台架中的电极逐步升高以逐渐增加晶片的背表面和台的顶表面之间的接触面积。 最后,向内部电极施加卡盘电压,使得晶片的整个背面被均匀地吸引到台的顶面。 这减少了由于在晶片的后表面和台的顶表面之间的摩擦而在台的顶表面中发生的损坏。
    • 9. 发明申请
    • CURTAIN AIRBAG DEVICE
    • 窗帘安全气囊设备
    • US20120267879A1
    • 2012-10-25
    • US13498027
    • 2010-09-24
    • Minfun KimYoshihiro OhbaHidenori Suzuki
    • Minfun KimYoshihiro OhbaHidenori Suzuki
    • B60R21/232
    • B60R21/213B60R21/232B60R2021/161
    • A curtain airbag device capable of inflating and deploying without suffering a burst of a cushion part at an end of a cushion part protector near an inflator. The curtain airbag device includes a cushion part extending in a front to back direction of the vehicle, accommodated in a state rolled up from a lower end toward an upper end thereof, and inflating and deploying downward when gas is supplied thereto. The curtain airbag device includes an inflator for supplying gas to the cushion part from a predetermined position at the upper end of the cushion part, and an elongated protector 180 having an arc-like open curve cross section that is open downward and covering the cushion part, with an inner surface thereof making contact with the cushion part. The cross section of the protector being defined by the open curve, with an end point P of the open curve on a vehicle inner side smoothly going up at a first end near the inflator so that the open curve has an increasing distance between end points thereof.
    • 一种帘式气囊装置,其能够在充气机附近的缓冲部件保护器的端部处不发生缓冲部件的膨胀而展开。 帘式安全气囊装置包括从车辆的前后方向延伸的缓冲部件,其容纳在从下端朝向其上端卷起的状态,并且当向其供应气体时向下膨胀展开。 帘式安全气囊装置包括用于从缓冲部件的上端的预定位置向缓冲部供应气体的充气机,以及具有向下敞开并覆盖缓冲部的弧形开口曲线横截面的细长保护器180 ,其内表面与缓冲部分接触。 保护器的横截面由开口曲线限定,车辆内侧上的开口曲线的终点P在充气机附近的第一端处平滑地向上升高,使得开口曲线在其端点之间具有增加的距离 。