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    • 2. 发明申请
    • ACTIVE MATRIX SUBSTRATE
    • 主动矩阵基板
    • US20130009160A1
    • 2013-01-10
    • US13635200
    • 2010-12-07
    • Hiromitsu KatsuiWataru NakamuraKenichi Kitoh
    • Hiromitsu KatsuiWataru NakamuraKenichi Kitoh
    • H01L27/15
    • H01L27/1248G02F1/136227G02F1/136286H01L27/1244
    • Disposed on an insulating substrate (10a) are a plurality of TFTs arranged in a matrix, each including a drain electrode (18b) in which a first conductive layer (16b) and a second conductive layer (17bb) are laminated in this order; an interlayer insulating film (21) deposited on each of the TFTs, in which a plurality of contact holes (21a) reaching to the respective drain electrodes (18b) are formed; and a plurality of pixel electrodes (22a) disposed on the interlayer insulating film (21) in a matrix, each connected to a corresponding drain electrode (18b) via a corresponding contact hole (21a), being susceptible to an electric corrosion reaction with the second conductive layer (17bb). At a side of the drain electrode, which is connected to the pixel electrode (22a), a top surface of the first conductive layer (16b) is exposed from the second conductive layer (17bb). The interlayer insulating film (21) is disposed to cover the second conductive layer (17bb).
    • 设置在绝缘基板(10a)上的是排列成矩阵状的多个TFT,每个TFT依次层叠有第一导电层(16b)和第二导电层(17bb),漏电极(18b) 沉积在每个TFT上的层间绝缘膜(21),其中形成到达各个漏电极(18b)的多个接触孔(21a); 以及以矩阵形式设置在所述层间绝缘膜(21)上的多个像素电极(22a),每个像素电极通过相应的接触孔(21a)连接到相应的漏极电极(18b),所述接触孔易受到与 第二导电层(17bb)。 在与像素电极(22a)连接的漏电极的一侧,第一导电层(16b)的顶表面从第二导电层(17bb)露出。 层间绝缘膜(21)设置成覆盖第二导电层(17bb)。
    • 8. 发明授权
    • Active matrix substrate and display unit provided with it
    • 提供有源矩阵基板和显示单元
    • US08405808B2
    • 2013-03-26
    • US12946000
    • 2010-11-15
    • Wataru NakamuraAtsushi BanShoji OkazakiHiromitsu KatsuiYoshihiro Okada
    • Wataru NakamuraAtsushi BanShoji OkazakiHiromitsu KatsuiYoshihiro Okada
    • G02F1/1333
    • G02F1/136227G02F1/136286
    • An active matrix substrate includes a substrate; scanning lines formed on the substrate; an insulating film covering the scanning lines; signal lines intersecting the scanning lines via the insulating film; switching elements formed on the substrate, each operating in response to a signal which is applied to the corresponding scanning line; and pixel electrodes each capable of being electrically connected to the corresponding signal line via the switching elements. The insulating film is a multilayer insulating film including a first insulating layer and a second insulating layer. The first insulating layer is formed of an insulating material containing an organic component, and the multilayer insulating film has a low-stack region in at least a portion of a region overlapping each switching element, the first insulating layer not being formed in the low-stack region. The active matrix substrate reduces the capacitance formed at each intersection between a scanning line and a signal line, without causing an increase in the wiring resistance or a degradation of the driving ability of switching elements.
    • 有源矩阵基板包括基板; 形成在基板上的扫描线; 覆盖扫描线的绝缘膜; 经由绝缘膜与扫描线相交的信号线; 形成在基板上的开关元件,每个开关元件响应于施加到相应扫描线的信号而工作; 以及各自能够经由开关元件电连接到对应的信号线的像素电极。 绝缘膜是包括第一绝缘层和第二绝缘层的多层绝缘膜。 第一绝缘层由含有有机成分的绝缘材料形成,并且多层绝缘膜在与开关元件重叠的区域的至少一部分中具有低堆叠区域,第一绝缘层不形成在低电压 堆栈区域。 有源矩阵基板减少了在扫描线和信号线之间的每个交叉点处形成的电容,而不会导致布线电阻的增加或开关元件的驱动能力的劣化。
    • 10. 发明授权
    • Active matrix substrate and display unit provided with it
    • 提供有源矩阵基板和显示单元
    • US07864281B2
    • 2011-01-04
    • US11574087
    • 2005-08-23
    • Wataru NakamuraAtsushi BanShoji OkazakiHiromitsu KatsuiYoshihiro Okada
    • Wataru NakamuraAtsushi BanShoji OkazakiHiromitsu KatsuiYoshihiro Okada
    • G02F1/1333
    • G02F1/136227G02F1/136286
    • An active matrix substrate includes a substrate; scanning lines formed on the substrate; an insulating film covering the scanning lines; signal lines intersecting the scanning lines via the insulating film; switching elements formed on the substrate, each operating in response to a signal which is applied to the corresponding scanning line; and pixel electrodes each capable of being electrically connected to the corresponding signal line via the switching elements. The insulating film is a multilayer insulating film including a first insulating layer and a second insulating layer. The first insulating layer is formed of an insulating material containing an organic component, and the multilayer insulating film has a low-stack region in at least a portion of a region overlapping each switching element, the first insulating layer not being formed in the low-stack region. The active matrix substrate reduces the capacitance formed at each intersection between a scanning line and a signal line, without causing an increase in the wiring resistance or a degradation of the driving ability of switching elements.
    • 有源矩阵基板包括基板; 形成在基板上的扫描线; 覆盖扫描线的绝缘膜; 经由绝缘膜与扫描线相交的信号线; 形成在基板上的开关元件,每个开关元件响应于施加到相应扫描线的信号而工作; 以及各自能够经由开关元件电连接到对应的信号线的像素电极。 绝缘膜是包括第一绝缘层和第二绝缘层的多层绝缘膜。 第一绝缘层由含有有机成分的绝缘材料形成,并且多层绝缘膜在与开关元件重叠的区域的至少一部分中具有低堆叠区域,第一绝缘层不形成在低电压 堆栈区域。 有源矩阵基板减少了在扫描线和信号线之间的每个交叉点处形成的电容,而不会导致布线电阻的增加或开关元件的驱动能力的劣化。