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    • 8. 发明授权
    • Vibrating mirror element
    • 振动镜元件
    • US08867114B2
    • 2014-10-21
    • US13520411
    • 2010-12-24
    • Isaku KannoHidetoshi KoteraManabu MurayamaNaoki Inoue
    • Isaku KannoHidetoshi KoteraManabu MurayamaNaoki Inoue
    • G02B26/08
    • G02B26/0841
    • This vibrating mirror element (100) includes a mirror portion (10), a first driving portion (41), being cantilevered, including a first fixed end (41a) formed on a first side of a first direction and a first free end (41b) formed on a second side thereof, and linearly extending, a first mirror support portion (46) capable of supporting the mirror portion (10) in an inclined state, a second driving portion (51), being cantilevered, including a second fixed end (51a) formed on the second side of the first direction and a second free end (51b) formed on the first side thereof, being point-symmetrical to the first driving portion with respect to the center of a mirror, and linearly extending, and a second mirror support portion (56) being point-symmetrical to the first mirror support portion with respect to the center of the mirror and capable of supporting the mirror portion in an inclined state.
    • 该振动镜元件(100)包括镜部(10),悬臂的第一驱动部(41),包括形成在第一方向的第一侧上的第一固定端(41a)和第一自由端(41b) ),其形成在其第二侧上并线性延伸,能够以倾斜状态支撑所述镜部(10)的第一反射镜支撑部(46),悬臂的第二驱动部(51),包括第二固定端 形成在第一方向的第二侧上的第一自由端(51b)和形成在第一方向上的第二自由端(51b),其相对于反射镜的中心与第一驱动部分对称并且线性延伸,并且 第二反射镜支撑部分(56)相对于反射镜的中心与第一反射镜支撑部分对称,并且能够以倾斜状态支撑反射镜部分。