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    • 8. 发明申请
    • ZONE CONTROL HEATER PLATE FOR TRACK LITHOGRAPHY SYSTEMS
    • 用于轨道光刻系统的区域控制加热板
    • US20090032522A1
    • 2009-02-05
    • US12192857
    • 2008-08-15
    • Martin Jeff SalinasDavid H. Quach
    • Martin Jeff SalinasDavid H. Quach
    • H05B3/68
    • H05B3/143H01L21/67103H01L21/67248
    • A substrate heater comprising a bake plate having an upper surface, a lower surface and a peripheral side surface extending between the upper and lower surfaces, the bake plate including at least one heating element, at least one temperature sensor and a plurality of wires including at least one wire coupled to the heating element and at least one wire coupled to the temperature sensor; a shield spaced apart from and generally surrounding the lower and peripheral side surfaces of the bake plate, the shield having an interior upper surface facing the lower surface of the bake plate, an interior side surface facing the peripheral side surface of the bake plate and a lower surface opposite the interior upper surface; a patterned signal layer formed on the lower surface of the shield, wherein the plurality of wires are electrically coupled to a corresponding plurality of signal traces formed in the patterned signal layer; and a connector, electrically coupled to the plurality of signal traces in the patterned signal layer, adapted to facilitate electrical connections to the plurality of wires.
    • 一种基板加热器,包括具有上表面,下表面和在上表面和下表面之间延伸的周边表面的烘烤板,所述烘烤板包括至少一个加热元件,至少一个温度传感器和包括在 耦合到所述加热元件的至少一个线和耦合到所述温度传感器的至少一个线; 与烘烤板的下侧和周边侧表面间隔开并且大致围绕烘烤板的下表面和外周侧表面的护罩,所述护罩具有面向烘烤板的下表面的内部上表面,面向烘烤板的周边侧表面的内侧表面和 下表面与内部上表面相对; 形成在所述屏蔽的下表面上的图案化信号层,其中所述多根导线电耦合到形成在所述图案化信号层中的对应的多个信号迹线; 以及连接器,电连接到所述图案化信号层中的所述多个信号迹线,适于促进与所述多根电线的电连接。
    • 10. 发明申请
    • Zone control heater plate for track lithography systems
    • 用于轨道光刻系统的区域控制加热板
    • US20080006619A1
    • 2008-01-10
    • US11483832
    • 2006-07-07
    • Martin Jeff SalinasDavid H. Quach
    • Martin Jeff SalinasDavid H. Quach
    • H05B3/68
    • H05B3/143H01L21/67103H01L21/67248
    • A substrate heater comprising a bake plate having an upper surface, a lower surface and a peripheral side surface extending between the upper and lower surfaces, the bake plate including at least one heating element, at least one temperature sensor and a plurality of wires including at least one wire coupled to the heating element and at least one wire coupled to the temperature sensor; a shield spaced apart from and generally surrounding the lower and peripheral side surfaces of the bake plate, the shield having an interior upper surface facing the lower surface of the bake plate, an interior side surface facing the peripheral side surface of the bake plate and a lower surface opposite the interior upper surface; a patterned signal layer formed on the lower surface of the shield, wherein the plurality of wires are electrically coupled to a corresponding plurality of signal traces formed in the patterned signal layer; and a connector, electrically coupled to the plurality of signal traces in the patterned signal layer, adapted to facilitate electrical connections to the plurality of wires.
    • 一种基板加热器,包括具有上表面,下表面和在上表面和下表面之间延伸的周边表面的烘烤板,所述烘烤板包括至少一个加热元件,至少一个温度传感器和包括在 耦合到所述加热元件的至少一个线和耦合到所述温度传感器的至少一个线; 与烘烤板的下侧和周边侧表面间隔开并且大致围绕烘烤板的下表面和外周侧表面的护罩,所述护罩具有面向烘烤板的下表面的内部上表面,面向烘烤板的周边侧表面的内侧表面和 下表面与内部上表面相对; 形成在所述屏蔽的下表面上的图案化信号层,其中所述多根导线电耦合到形成在所述图案化信号层中的对应的多个信号迹线; 以及连接器,电连接到所述图案化信号层中的所述多个信号迹线,适于促进与所述多根电线的电连接。