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    • 1. 发明授权
    • Temperature-actuated valve device and flow passage switching valve using
such device
    • 采用这种装置的温控阀装置和流路切换阀
    • US5878949A
    • 1999-03-09
    • US849053
    • 1997-05-29
    • Hideyuki MatsuiMasatoshi EnokiTsutomu KatoTetsuo MasatakeToshiyuki Ooshima
    • Hideyuki MatsuiMasatoshi EnokiTsutomu KatoTetsuo MasatakeToshiyuki Ooshima
    • G05D23/02
    • G05D23/025E03C1/041Y10T137/7835
    • A temperature-actuated valve device which comprises a body 5 provided with a fluid inlet opening 6b and a fluid outlet opening 5a, a vale seat 5b formed on the peripheral edge of the outlet opening 5a, a main valve body 8 which is disposed movably within the body 5 in the flow direction of fluid and which is brought into and out of an abutting engagement with the outlet opening 5a to perform the opening and closing operation, a pilot valve body 7 which is disposed movably within the body 5 in the same direction as the direction of movement of the main valve body 8 and which is of a tubular shape causing a change in the fluid pressure acting on the upstream side or the downstream side of the main valve body 8, and a temperature-actuated spring 11 which is linked to the pilot valve body 7 and which deforms when it reaches a predetermined temperature and above. When the temperature of fluid reaches a predetermined temperature and above, the temperature-actuated spring 11 deforms in the direction of expansion, thereby causing the pilot valve body 7 to be moved and causing the fluid pressure acting on the downstream side of the main valve body 8 to be reduced, whereby the main valve body 8 is brought into an abutting engagement with the valve seat 5b to shut off the outflow of the fluid.
    • PCT No.PCT / JP96 / 02481 Sec。 371日期1997年5月29日 102(e)日期1997年5月29日PCT提交1996年9月30日PCT公布。 公开号WO97 / 12164 日期1997年04月3日一种温度调节阀装置,其包括设有流体入口6b和流体出口5a的主体5,形成在出口5a的周缘上的阀座5b,主阀体8 其在流体的流动方向上可移动地设置在主体5内,并且与出口开口5a抵接接合以进行打开和关闭操作;先导阀体7,其可移动地设置在主体内 5与主阀体8的运动方向相同的方向,并且是作用在主阀体8的上游侧或下游侧的流体压力的变化的管状, 致动弹簧11,其连接到先导阀体7,并且当其达到预定温度及以上时变形。 当流体温度达到预定温度以上时,温度驱动弹簧11沿膨胀方向变形,导致先导阀体7移动,并使作用在主阀体下游侧的流体压力 从而主阀体8与阀座5b形成邻接接合,从而切断流体的流出。
    • 6. 发明申请
    • Substrate processing apparatus and manufacturing method of semiconductor device
    • 基板加工装置及半导体装置的制造方法
    • US20090325389A1
    • 2009-12-31
    • US12457584
    • 2009-06-16
    • Yuji TakebayashiMasanori SakaiTsutomu KatoKenji Ono
    • Yuji TakebayashiMasanori SakaiTsutomu KatoKenji Ono
    • H01L21/18B05C11/00
    • C23C16/4481C23C16/4408C23C16/45557C23C16/52
    • To grasp an accumulation state of residual matters inside of a vaporizer without decomposing the vaporizer, and grasp the timing of performing maintenance to the inside of the vaporizer in advance. A substrate processing apparatus of the present invention includes: a processing chamber in which substrates are contained; a vaporizer having a vaporizing space, for generating vaporized gas by vaporizing liquid source supplied into the vaporizing space; a liquid source supply system having a liquid source supply line for supplying the liquid source into the vaporizing space; a vaporized gas supply system having a vaporized gas supply line for supplying the vaporized gas into the processing chamber; an exhaust system for exhausting an atmosphere in the processing chamber; a pressure meter for measuring a pressure in the vaporizing space; a carrier gas supply system having a carrier gas supply line for supplying carrier gas into the vaporizing space; and a controller for judging a state of the vaporizer based on a measured value of the pressure meter when the carrier gas is supplied into the vaporizing space.
    • 在不分解蒸发器的情况下掌握蒸发器内的残留物的积聚状态,并且预先对蒸发器内部进行维护的时机。 本发明的基板处理装置包括:处理室,其中容纳基板; 蒸发器,其具有蒸发空间,用于通过蒸发供应到蒸发空间中的液体源产生汽化气体; 液体源供应系统,具有用于将液体源供应到蒸发空间中的液体源供应管线; 气化气体供给系统,具有用于将蒸发气体供给到处理室中的汽化气体供给管线; 用于排出处理室中的气氛的排气系统; 用于测量蒸发空间中的压力的​​压力计; 载气供应系统,具有用于将载气供应到蒸发空间中的载气供应管线; 以及控制器,用于当将载气供应到汽化空间中时,基于压力计的测量值来判断蒸发器的状态。
    • 9. 发明申请
    • Tape and tape cassette containing the tape
    • 磁带和磁带录像带
    • US20060177618A1
    • 2006-08-10
    • US11348341
    • 2006-02-07
    • Tsutomu KatoToshio TakahashiHitomi Hioki
    • Tsutomu KatoToshio TakahashiHitomi Hioki
    • B32B33/00
    • B41J15/044Y10T428/14
    • The disclosure describes a print tape which allows a separating sheet to be removed easily and quickly without bending the print tape and a tape cassette containing the tape. The print tape is accommodated in the tape cassette and has a tape base material, an adhesive agent layer and a separating sheet. Side portions are each provided adjacent both sides, in a width direction, of the tape base material. A back scoring portion is provided in a center in the width direction of the separating sheet. Therefore, both sides in the width direction of an end portion of the print tape can be gripped and pulled in a direction in which they separate from each other. As a consequence, the separating sheet separates along the back scoring and a center portion of the tape base material is freed for application. Because of the structure, the separating sheet can be peeled easily and quickly from the printed base material without bending the print tape.
    • 本公开描述了一种打印带,其允许容易且快速地移除分离纸,而不弯曲打印带和包含带的带盒。 打印带容纳在带盒中,并具有带基材,粘合剂层和分离片。 侧部各自设置在带基材的宽度方向的两侧。 在分离片的宽度方向的中心设有背部刻痕部。 因此,打印带的端部的宽度方向上的两侧可以在彼此分离的方向上被夹持并拉动。 因此,分离片沿着背面刻痕分离,并且带基材的中心部分被释放以供施用。 由于结构,分离片可以从打印的基材容易且快速地剥离,而不会弯曲打印带。