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    • 7. 发明授权
    • Heating systems
    • 加热系统
    • US07044399B2
    • 2006-05-16
    • US10702131
    • 2003-11-05
    • Yoshinobu GotoHideyoshi Tsuruta
    • Yoshinobu GotoHideyoshi Tsuruta
    • F24H3/00
    • H01L21/67103C23C16/4581C23C16/4586C23C16/46
    • A heating system 1 has a ceramic substrate 2 having a mounting face 2a for mounting an object W, a back face 2b and a side face 2c; a heating means 3 for generating heat from the mounting face 2a of the ceramic substrate 2; and a plate-shaped supporting metal member 4 for supporting the back face 2b of the ceramic substrate 2. According to the system, the thermal deformation of the mounting face upon heating over time may be reduced and the flatness of the object may be maintained at a low value. It is further possible to impart a mechanical strength to the heater sufficient for its handling and to reduce the production cost.
    • 加热系统1具有陶瓷基板2,陶瓷基板2具有用于安装物体W的安装面2a,背面2b和侧面2c; 用于从陶瓷基板2的安装面2a产生热量的加热装置3; 以及用于支撑陶瓷基板2的背面2b的板状支撑金属构件4。 根据该系统,随着时间的推移,安装面的加热变形可能降低,并且物体的平坦度可以维持在较低的值。 进一步可能赋予加热器机械强度足以使其处理并降低生产成本。