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1. 发明授权

US5817406A Ceramic susceptor with embedded metal electrode and brazing material connection 失效
标题翻译：陶瓷感受器带有嵌入式金属电极和钎焊材料连接
公开(公告)号：US5817406A
公开(公告)日：1998-10-06
申请号：US591333
申请日：1996-01-24
申请人： David W. Cheung , Mark A. Fodor , Christopher Lane , Ryusuke Ushikoshi , Hideyoshi Tsuruta , Tomoyuki Fujii
发明人： David W. Cheung , Mark A. Fodor , Christopher Lane , Ryusuke Ushikoshi , Hideyoshi Tsuruta , Tomoyuki Fujii
IPC分类号： C23C16/458 , H01L21/683 , H05B6/10 , B32B3/00
CPC分类号： C23C16/4586 , H01L21/6831 , Y10T428/24926
摘要： A ceramic susceptor with an embedded metal electrode. The metal electrode has multiple apertures, and the ceramic material is cross-linked through the apertures. An electrical connection to the electrode protects the electrode from the environment in the processing chamber. The ceramic may be aluminum nitride, and the metal electrode may be a mesh of molybdenum wires. To form the electrical connection, the susceptor may be heated until an eutectic forms between a conductive connector and the metal electrode. Alternately, a brazing material may be placed between the metal layer and a conductive connector.
摘要翻译：具有嵌入式金属电极的陶瓷感受体。金属电极具有多个孔，陶瓷材料通过孔交联。与电极的电连接保护电极免受处理室中的环境的影响。陶瓷可以是氮化铝，金属电极可以是钼丝网。为了形成电连接，基座可以被加热直到在导电连接器和金属电极之间形成共晶体。或者，钎焊材料可以放置在金属层和导电连接器之间。

2. 发明授权

US06617514B1 Ceramics joint structure and method of producing the same 失效
标题翻译：陶瓷接头结构及其制造方法
公开(公告)号：US06617514B1
公开(公告)日：2003-09-09
申请号：US09095157
申请日：1998-06-10
申请人： Ryusuke Ushikoshi , Hideyoshi Tsuruta , Tomoyuki Fujii
发明人： Ryusuke Ushikoshi , Hideyoshi Tsuruta , Tomoyuki Fujii
IPC分类号： H01R400
CPC分类号： H01L21/6833
摘要： The disclosed ceramics joint structure, in which a ceramics member having an oxidation resistance property and a metal member are joined via a joint layer, has a structure such that a part of the embedded member is exposed to a joint surface of the ceramics member, which is contacted with the joint layer to form a metal exposing portion, and the ceramics member and the metal exposing portion are joined via the joint layer to the metal member respectively. Moreover, the joint layer is mainly made of one or more metal selected from the group consisting of gold, platinum and palladium.
摘要翻译：所公开的具有耐氧化性的陶瓷构件和金属构件的陶瓷接头结构通过接合层接合，具有使嵌入构件的一部分暴露于陶瓷构件的接合面的结构，与接合层接触以形成金属暴露部分，并且陶瓷构件和金属暴露部分分别经由接合层接合到金属构件。此外，接合层主要由选自金，铂和钯的一种或多种金属制成。

3. 发明授权

US6057513A Joint structure of metal member and ceramic member and method of producing the same 失效
标题翻译：金属构件和陶瓷构件的接合结构及其制造方法
公开(公告)号：US6057513A
公开(公告)日：2000-05-02
申请号：US13199
申请日：1998-01-26
申请人： Ryusuke Ushikoshi , Hideyoshi Tsuruta , Tomoyuki Fujii
发明人： Ryusuke Ushikoshi , Hideyoshi Tsuruta , Tomoyuki Fujii
IPC分类号： C04B37/02 , H01L21/683 , H05K1/16
CPC分类号： H01L21/6833 , Y10T279/23 , Y10T29/49149
摘要： A joint structure having a metal member and a ceramic member having a housing hole for accommodating at least a part of the metal member therein, in which an electrically conductive joint layer is formed between a bottom face of the metal member and a bottom face of the housing hole, and a film having a given wettability by the electrically conductive joint layer is formed on at least a part of the side wall face of the metal member.
摘要翻译：一种具有金属构件和陶瓷构件的接合结构，其具有用于容纳至少一部分金属构件的容纳孔，其中在金属构件的底面和底面之间形成导电接合层在金属构件的侧壁面的至少一部分上形成有由导电性接合层赋予润湿性的膜的容纳孔和膜。

4. 发明授权

US5995357A Ceramic member-electric power supply connector coupling structure 失效
标题翻译：陶瓷构件 - 电源连接器耦合结构
公开(公告)号：US5995357A
公开(公告)日：1999-11-30
申请号：US13045
申请日：1998-01-26
申请人： Ryusuke Ushikoshi , Hideyoshi Tsuruta , Tomoyuki Fujii
发明人： Ryusuke Ushikoshi , Hideyoshi Tsuruta , Tomoyuki Fujii
IPC分类号： H01L21/683 , H01R13/24 , H02N13/00
CPC分类号： H01J37/32577 , H01R13/24
摘要： A ceramic member-electric power supply connector coupling structure includes a ceramic member with a hole and is provided with a metallic member therein so as to be partially exposed to the hole. An electric power supply connector and a tubular atmosphere-shielding member are provided in the hole. Further, a stress-mitigating, low heat expansion conductor is provided inside the atmosphere-shielding member and the power supply connector is partially positioned therein. The atmosphere-shielding member is gas-tightly joined to the power supply connector, and the expansion conductor and the tubular atmosphere-shielding member are joined to the metallic member. The coupling structure has high heat and corrosion resistance, high joining strength, and remains highly conductive even at high temperature conditions in an oxidative or corrosive environment.
摘要翻译：陶瓷构件 - 电源连接器联接结构包括具有孔的陶瓷构件，并且在其中设置有金属构件以部分地暴露于孔。电源连接器和管状气氛屏蔽部件设置在孔中。此外，在气氛屏蔽部件内部设置有减轻应力的低热膨胀导体，电源连接器部分地位于其中。气密屏蔽构件气密地接合到电源连接器，并且膨胀导体和管状气氛屏蔽构件接合到金属构件。连接结构具有高耐热腐蚀性，接合强度高，即使在氧化或腐蚀性环境的高温条件下也能保持高导电性。

5. 发明授权

US5794838A Ceramics joined body and method of joining ceramics 失效
标题翻译：陶瓷加入陶瓷的机体和方法
公开(公告)号：US5794838A
公开(公告)日：1998-08-18
申请号：US679286
申请日：1996-07-12
申请人： Ryusuke Ushikoshi , Hideyoshi Tsuruta , Tomoyuki Fujii
发明人： Ryusuke Ushikoshi , Hideyoshi Tsuruta , Tomoyuki Fujii
IPC分类号： C04B37/00 , C04B37/02 , B23K31/02 , B23K103/16
CPC分类号： C04B37/006 , C04B37/026 , C04B2237/08 , C04B2237/121 , C04B2237/122 , C04B2237/123 , C04B2237/124 , C04B2237/126 , C04B2237/127 , C04B2237/343 , C04B2237/366 , C04B2237/402 , C04B2237/403 , C04B2237/405 , C04B2237/592 , C04B2237/62 , C04B2237/72 , C04B2237/76 , C04B2237/80 , C04B2237/84 , C04B2237/86
摘要： Novel method of joining ceramics containing aluminum nitride and another member made of a metal or a ceramic is provided having an improved joining strength and a corrosion-resistant property by joining a first member made of a ceramics consisting of an aluminum compound. The second member is made of a ceramics or a metal, forming a metal film directly on a surface to be joined of the first member interposing a metallic joining material which is made of a different material from the metal film. The metallic joining material is between the metal film and the second member, and by heating at least the metallic joining material and the metal film in such an interposed state to form a joining layer made of the metallic joining material and an intermetallic compound between the first and second members, so as to join the two members.
摘要翻译：通过将由铝化合物构成的陶瓷构成的第一构件接合，提供了接合含有氮化铝的陶瓷和由金属或陶瓷制成的另一构件的新型方法，其具有改善的接合强度和耐腐蚀性。第二构件由陶瓷或金属制成，在第一构件的待接合表面上直接形成金属膜，该金属接合材料由与金属膜不同的材料制成。金属接合材料在金属膜和第二构件之间，并且通过在这种插入状态下至少加热金属接合材料和金属膜，以形成由金属接合材料制成的接合层和金属间化合物和第二名成员，以加入两个成员。

6. 发明授权

US6106960A Joined articles, corrosion-resistant joining materials and process for producing joined articles 失效
标题翻译：接合制品，耐腐蚀接合材料和生产连接制品的方法
公开(公告)号：US6106960A
公开(公告)日：2000-08-22
申请号：US594655
申请日：1996-02-02
申请人： Tomoyuki Fujii , Ryusuke Ushikoshi
发明人： Tomoyuki Fujii , Ryusuke Ushikoshi
IPC分类号： B23K1/19 , B23K35/24 , B23K35/28 , B23K35/30 , C04B37/00 , C04B37/02 , B32B15/04
CPC分类号： B23K35/30 , C04B37/006 , C04B37/026 , B23K35/286 , B23K35/302 , B23K35/3033 , C04B2237/121 , C04B2237/123 , C04B2237/124 , C04B2237/126 , C04B2237/127 , C04B2237/366 , C04B2237/402 , C04B2237/405 , C04B2237/407 , C04B2237/595 , C04B2237/704 , C04B2237/708 , C04B2237/765 , C04B2237/78 , C04B2237/80 , Y10T428/12535 , Y10T428/12576 , Y10T428/1275
摘要： A joined article is constituted by a first member made of aluminum nitride joined to each other through a joining layer, wherein a second member is made of a material selected from a ceramic material or a metal, and the joining layer involves a continuous phase made of a metal selected from the group consisting of copper, aluminum and nickel as a main component and 10% by weight of at least one active metal selected from the group consisting of magnesium, titanium, zirconium and hafnium relative to the joining layer.
摘要翻译：接合制品由通过接合层彼此接合的由氮化铝制成的第一构件构成，其中第二构件由选自陶瓷材料或金属的材料制成，并且接合层包括由选自由铜，铝和镍为主要成分的金属和相对于接合层选自镁，钛，锆和铪的10重量％的至少一种活性金属。

7. 发明授权

US6020076A Joined ceramic structures and a process for the production thereof 失效
标题翻译：结合的陶瓷结构及其制造方法
公开(公告)号：US6020076A
公开(公告)日：2000-02-01
申请号：US590026
申请日：1996-02-02
申请人： Tomoyuki Fujii , Ryusuke Ushikoshi
发明人： Tomoyuki Fujii , Ryusuke Ushikoshi
IPC分类号： B23K1/19 , B23K1/20 , B23K35/24 , C04B37/02 , B21D39/00 , B32B15/00 , B32B15/10
CPC分类号： C04B37/026 , C04B2237/121 , C04B2237/123 , C04B2237/124 , C04B2237/126 , C04B2237/127 , C04B2237/366 , C04B2237/402 , C04B2237/405 , C04B2237/407 , C04B2237/595 , C04B2237/62 , C04B2237/704 , C04B2237/708 , C04B2237/765 , C04B2237/80 , C04B2237/84 , Y10S228/903 , Y10T428/12535 , Y10T428/12576 , Y10T428/12583 , Y10T428/12743 , Y10T428/1275 , Y10T428/12764 , Y10T428/12826 , Y10T428/1284 , Y10T428/12944
摘要： A joined ceramic structure including a ceramic member and a metallic joining member joined to each other through a joining layer made of a brazing material wherein a metallic member is buried in the ceramic member in the state that a metal-exposed portion is formed through partial exposure of the metallic member from such a joining surface of the ceramic member as contacting said joining layer, and the ceramic member and the metal-exposed portion are also joined to the joining layer along the joining surface of the ceramic member.
摘要翻译：一种接合陶瓷结构体，包括陶瓷构件和金属接合构件，所述金属接合构件通过由钎焊材料制成的接合层彼此接合，其中金属构件以通过部分暴露形成金属暴露部分的状态而被掩埋在陶瓷构件中所述金属构件从所述陶瓷构件的与所述接合层接触的接合面接合，并且所述陶瓷构件和所述金属暴露部分也沿着所述陶瓷构件的接合面接合到所述接合层。

8. 发明授权

US07067200B2 Joined bodies and a method of producing the same 有权
标题翻译：结合体及其生产方法
公开(公告)号：US07067200B2
公开(公告)日：2006-06-27
申请号：US10623052
申请日：2003-07-18
申请人： Tomoyuki Fujii , Hideyoshi Tsuruta , Tetsuya Kawajiri
发明人： Tomoyuki Fujii , Hideyoshi Tsuruta , Tetsuya Kawajiri
IPC分类号： B32B7/04 , B32B7/10 , B32B15/04 , B23K35/26 , B23K101/36
CPC分类号： B23K35/26 , B32B15/04 , B32B18/00 , B32B2309/022 , B32B2311/24 , C04B35/6455 , C04B37/006 , C04B37/023 , C04B37/026 , C04B2235/6567 , C04B2235/6581 , C04B2235/96 , C04B2237/12 , C04B2237/122 , C04B2237/125 , C04B2237/343 , C04B2237/346 , C04B2237/366 , C04B2237/368 , C04B2237/40 , C04B2237/402 , C04B2237/405 , C04B2237/406 , C04B2237/407 , C04B2237/408 , C04B2237/62 , C04B2237/68 , C04B2237/704 , C04B2237/706 , C04B2237/708 , C04B2237/72 , Y10T428/12396 , Y10T428/12528 , Y10T428/12535 , Y10T428/12681 , Y10T428/12708
摘要： A joined body and method of producing the joined body are provided. A first member containing at least a ceramic and a second member containing at least one of a metal and a metal composite are joined with each other via a metal adhesive. The metal adhesive contains at least indium and at least one material containing at least a component capable of reducing the melting point of indium and is provided between the first and second members to provide a laminate. The laminate is heated at a temperature in a solid-liquid coexisting range of an alloy comprising indium and the indium melting point reducing component to join the first and second members.
摘要翻译：提供一种接合体及其制造方法。含有至少陶瓷的第一构件和含有金属和金属复合物中的至少一种的第二构件通过金属粘合剂相互连接。金属粘合剂至少含有铟和至少一种至少含有能够降低铟的熔点的成分的材料，并且设置在第一和第二构件之间以提供层压体。将层压体在包含铟和铟熔点降低组分的合金的固液共存范围内加热，以使第一和第二构件接合。

9. 发明申请

US20150177112A1 Tensile Test Machine 有权
标题翻译：拉力试验机
公开(公告)号：US20150177112A1
公开(公告)日：2015-06-25
申请号：US14363308
申请日：2012-12-04
申请人： Tomoyuki FUJII , Keiichiro TOHGO , Yoshinobu SHIMAMURA
发明人： Tomoyuki Fujii , Keiichiro Tohgo , Yoshinobu Shimamura
IPC分类号： G01N3/08
CPC分类号： G01N3/08 , G01N2203/0017
摘要： A tensile test machine which has a simple structure and which can measure the strength of a sample having a minute tensile strength is provided. The tensile test machine 100 has a first gripping member 117 and a second gripping member 125 which oppose each other in the horizontal direction and grip two end portions of a sample WK. The first gripping member 117 is supported by a moment receiving member 113a of a torque meter 113 through a first support beam 116 and a tensile force transmitting member 115. The tensile force transmitting member 115 is formed so as to extend in the radial direction of the moment receiving member 113a. The second gripping member 125 is supported by a displacement table 121 through a second support beam 124 and a gripping member support base 123. It is displaced in the direction away from the first gripping member 117, and the amount of displacement is measured by a displacement measuring device 128. An external computer 130 measures the tensile strength of the sample WK using the tensile force sensed by the torque meter 113 and the amount of displacement of the second gripping member 125 sensed by the displacement measuring device 128.
摘要翻译：提供了具有简单结构并且可以测量具有微小拉伸强度的样品的强度的拉伸试验机。拉伸试验机100具有在水平方向上彼此相对并夹持样品WK的两个端部的第一夹持构件117和第二夹持构件125。第一夹持构件117由力矩计113的力矩承受构件113a通过第一支撑梁116和张力传递构件115支撑。张力传递构件115形成为沿着径向方向力矩接收构件113a。第二夹持构件125通过第二支撑梁124和夹持构件支撑基座123由位移台121支撑。其沿远离第一夹持构件117的方向移位，并且通过位移来测量位移量测量装置128.外部计算机130使用由扭矩计113感测的拉力和由位移测量装置128感测到的第二夹持构件125的位移量来测量样品WK的拉伸强度。

10. 发明授权

US06590760B1 Joint structure of ceramics and metal and intermediate insertion member used in this joint structure 有权
标题翻译：在这种接头结构中使用的陶瓷和金属和中间插入件的接头结构
公开(公告)号：US06590760B1
公开(公告)日：2003-07-08
申请号：US09580073
申请日：2000-05-30
申请人： Tomoyuki Fujii
发明人： Tomoyuki Fujii
IPC分类号： H01T2300
CPC分类号： H01L21/6833 , B32B9/005 , B32B9/041 , B32B2250/42 , B32B2307/202 , B32B2457/14 , C04B37/026 , C04B2235/9607 , C04B2237/12 , C04B2237/121 , C04B2237/123 , C04B2237/124 , C04B2237/125 , C04B2237/343 , C04B2237/366 , C04B2237/368 , C04B2237/401 , C04B2237/405 , C04B2237/68 , C04B2237/708 , C04B2237/72 , C04B2237/765 , C04B2237/84
摘要： A joint structure of a first member includes a substrate made of ceramics and a metal embedded member embedded in the substrate, in which a part of the metal embedded member is exposed to a joint surface of the first member, and a second member made of metal. The joint structure includes: an intermediate insertion member interposed between the joint surface of the first member and the second member; a first joint layer which joins the joint surface of the first member and the intermediate insertion member; and a second joint layer which joins the second member and the intermediate insertion member. In the joint structure, the intermediate insertion member is made of a laminated member of a plurality of ceramics layers and at least one metal layer interposed between respective ceramics layers.
摘要翻译：第一构件的接合结构包括由陶瓷制成的基板和嵌入到基板中的金属嵌入构件，其中金属嵌入构件的一部分暴露于第一构件的接合表面，以及由金属制成的第二构件。接头结构包括：中间插入构件，其插入在第一构件的接合面和第二构件之间; 第一接合层，其接合第一构件和中间插入构件的接合表面; 以及连接第二构件和中间插入构件的第二接合层。在接合结构中，中间插入部件由多个陶瓷层的层压部件和介于各陶瓷层之间的至少一个金属层构成。

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