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    • 1. 发明授权
    • Sample inspection apparatus and sample inspection method
    • 样品检验仪器和样品检验方法
    • US5960106A
    • 1999-09-28
    • US413704
    • 1995-03-30
    • Hideo TsuchiyaToru TojoMitsuo TabataToshiyuki WatanabeEiichi Kobayashi
    • Hideo TsuchiyaToru TojoMitsuo TabataToshiyuki WatanabeEiichi Kobayashi
    • G01N21/88G01N21/93G01N21/956G03F1/84G06T1/00G06T7/00H01L21/027G06K9/00
    • G06T7/0006G06T2207/30148
    • In a method of inspecting a sample on which a pattern relating to fabrication of a semiconductor device is formed, there are provided a light radiation unit, an acquiring unit, a storage unit, a template, a calculation unit, a correction unit, a defect detection unit and an output unit. Pinhole shape data to be detected of the pattern is stored in the template. The calculation unit calculates the degree of coincidence between the pinhole shape data stored in the template and the measured image data stored in the storage unit in units of a predetermined amount of data. The correction unit corrects a portion of the measured image data corresponding to a value of the degree of coincidence exceeding a second predetermined value in units of the predetermined amount of data, when the degree of coincidence obtained by the calculation unit has exceeded a first predetermined value, thereby correcting the portion of the measured image data including the detected pinhole. The defect detection unit detects a defect in the pattern on the basis of the corrected measured image data portion including the pinhole, which is obtained by the correcting unit, and the measured image data.
    • 在形成有与半导体器件的制造有关的图案的样品的检查方法中,设置有光照单元,获取单元,存储单元,模板,计算单元,校正单元,缺陷 检测单元和输出单元。 要检测的图案的针孔形状数据存储在模板中。 计算单元以预定量的数据为单位计算存储在模板中的针孔形状数据与存储在存储单元中的测量图像数据之间的一致度。 当由计算单元获得的一致度已经超过第一预定值时,校正单元以与预定数据量为单位对应的符合度超过第二预定值的值的部分测量图像数据进行校正 从而校正包括检测到的针孔的测量图像数据的部分。 缺陷检测单元基于由校正单元获得的包括针孔的校正的测量图像数据部分和测量的图像数据来检测图案中的缺陷。
    • 8. 发明申请
    • Endoscope apparatus for performing measurement using image
    • 用于使用图像进行测量的内窥镜装置
    • US20060161042A1
    • 2006-07-20
    • US11314666
    • 2005-12-21
    • Eiichi KobayashiHideyoshi Yamauchi
    • Eiichi KobayashiHideyoshi Yamauchi
    • A61B1/04H04N7/18
    • A61B1/00039A61B1/00096A61B1/00101A61B1/00114A61B1/00193H04N13/10H04N13/189
    • A CPU includes: an original image recording function for recording a still image or a recorded image as an original image; a contrast correction function for performing contrast correction on a still image or a recorded image; a coordinate calculation function for calculating pixel coordinates on an original image which correspond to pixel coordinates designated on a contrast corrected image; a stereo measurement function for performing stereo measurement using pixel coordinates of an original image calculated by the coordinate calculation function; a measurement result reflection function for reflecting on a contrast corrected image a measurement result of stereo measurement performed by the stereo measurement function; and a dynamic range expansion function for enhancing brightness of an image area which is darker than a predetermined threshold. These functions enable stereo measurement to be performed precisely using an image on which image processing has been performed.
    • CPU包括:用于将静止图像或记录图像记录为原始图像的原始图像记录功能; 用于对静止图像或记录图像执行对比度校正的对比度校正功能; 坐标计算功能,用于计算对应于在对比度校正图像上指定的像素坐标的原始图像上的像素坐标; 立体测量功能,用于使用由所述坐标计算功能计算的原始图像的像素坐标来执行立体测量; 测量结果反射功能,用于在对比度校正图像上反映由立体测量功能执行的立体测量的测量结果; 以及用于增强比预定阈值更暗的图像区域的亮度的动态范围扩展功能。 这些功能可以使用执行了图像处理的图像精确地执行立体声测量。