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1. 发明申请

US20080145517A1 METHOD FOR MANUFACTURING PLASMA DISPLAY PANEL, AND APPARATUS FOR INSPECTING PLASMA DISPLAY PANEL 审中-公开
标题翻译：制造等离子显示面板的方法和检查等离子显示面板的装置
公开(公告)号：US20080145517A1
公开(公告)日：2008-06-19
申请号：US11834036
申请日：2007-08-06
申请人： Hideaki SASAZAWA , Mineo Nomoto , Kouji Kashiwagi , Shigeru Saitou , Tomohiko Murase
发明人： Hideaki SASAZAWA , Mineo Nomoto , Kouji Kashiwagi , Shigeru Saitou , Tomohiko Murase
IPC分类号： C23C14/54
CPC分类号： H01J11/42 , H01J9/227 , H01J11/12
摘要： A method for manufacturing a plasma display comprises: a phosphor painting process for painting phosphor layer in ribs formed on a back plate; and a phosphor inspection process that includes the steps of: irradiating the phosphor layer with ultraviolet light; preparing an imaging system so that the imaging system images the emitted light beam to acquire information on brightness; comparing the brightness information with correlation between a shape model of the phosphor layer and brightness signal information that have been obtained in advance; and obtaining a painted state of the phosphor layer painted in the ribs; and a process for feeding back the applied state of the phosphor layer, which has been obtained in the phosphor inspection process, to the phosphor painting process so that the manufacturing equipment is controlled in the phosphor painting process.
摘要翻译：一种等离子体显示器的制造方法，其特征在于，包括：在背板上形成的肋上喷涂荧光体层的荧光体涂布工序; 以及荧光体检查处理，其包括以下步骤：用紫外光照射荧光体层; 准备成像系统，使得成像系统对发射的光束进行成像以获取关于亮度的信息; 将亮度信息与荧光体层的形状模型和预先获得的亮度信号信息之间的相关性进行比较; 并且获得在所述肋中涂覆的荧光体层的涂漆状态; 以及将在荧光体检查处理中获得的荧光体层的施加状态反馈到荧光体涂布工序，使得在荧光体涂布工序中控制制造设备的处理。

2. 发明申请

US20120081701A1 METHOD AND APPARATUS FOR INSPECTING A SURFACE OF A SUBSTRATE 失效
标题翻译：用于检查基板表面的方法和装置
公开(公告)号：US20120081701A1
公开(公告)日：2012-04-05
申请号：US13210418
申请日：2011-08-16
申请人： Hideaki SASAZAWA , Takayuki ISHIGURO , Kiyotaka HORIE , Yu YANAKA
发明人： Hideaki SASAZAWA , Takayuki ISHIGURO , Kiyotaka HORIE , Yu YANAKA
IPC分类号： G01N21/88 , G01N21/55 , G01N21/47
CPC分类号： G01N21/8851 , G01N21/95 , G01N2021/4711 , G01N2021/556 , G01N2021/8854 , G01N2021/8874
摘要： The present invention provides a method and apparatus for inspecting a surface of a substrate. The apparatus includes: a rotatable stage on which a substrate to be inspected is placed; an inspection optical system having an illumination light source for emitting light to a substrate placed on the stage and a detector for detecting light from the substrate which is irradiated with the light from the illumination light source; an A/D converter for amplifying and A/D converting signals output from the detector in the inspection optical system; and a defect detector for detecting defects in a surface of the substrate by processing signals output from the detector and converted by the A/D converter and classifying the defected defects. The defect detector extracts micro defects in the surface of the substrate by processing the signals output from the detector, and detects linear defects existing discretely in a linear region.
摘要翻译：本发明提供一种用于检查基板表面的方法和装置。该装置包括：可旋转台，放置待检查的基板; 具有用于向放置在载物台上的基板发光的照明光源的检查光学系统和用于检测来自基板的光的检测器，所述检测器照射来自照明光源的光; A / D转换器，用于放大和A / D转换检测光学系统中的检测器输出的信号; 以及缺陷检测器，用于通过处理从检测器输出并由A / D转换器转换并对缺陷缺陷进行分类的信号来检测基板的表面中的缺陷。缺陷检测器通过处理从检测器输出的信号来提取衬底表面的微缺陷，并检测线性区域中离散存在的线性缺陷。

3. 发明申请

US20130077092A1 SUBSTRATE SURFACE DEFECT INSPECTION METHOD AND INSPECTION DEVICE 审中-公开
标题翻译：基板表面缺陷检查方法和检查装置
公开(公告)号：US20130077092A1
公开(公告)日：2013-03-28
申请号：US13565833
申请日：2012-08-03
申请人： Hideaki SASAZAWA , Shigeru SERIKAWA , Kiyotaka HORIE , Yu YANAKA
发明人： Hideaki SASAZAWA , Shigeru SERIKAWA , Kiyotaka HORIE , Yu YANAKA
IPC分类号： G01N21/956
CPC分类号： G01N21/94 , G01N21/95
摘要： A substrate surface inspection device includes an inspection optical system irradiating at least one light onto a substrate, which is an inspection target and carried on a turnable stage, and having at least one detector detecting reflected or scattered light from the substrate, a detector processing the signals, which are outputted from the at least one detector and A/D converted, and detecting a defect on the substrate, an output calculator performing scattered light simulation on a defect detection model and estimating a plurality of detector outputs; and a classifier constructor constructing a classifier by mechanical learning of a rule base, wherein the classifier constructor is adapted to present collection of a necessary actual defect sample on the basis of the classifier obtained by scattered light simulation, and construct the classifier under necessary and sufficient conditions.
摘要翻译：基板表面检查装置包括检查光学系统，其将至少一个光照射到作为检查对象的基板上并承载在可转动台上，并且具有至少一个检测器，其检测来自基板的反射或散射光，检测器处理信号，其从所述至少一个检测器输出并进行A / D转换，并检测所述基板上的缺陷;输出计算器，对缺陷检测模型执行散射光模拟并估计多个检测器输出; 以及通过规则库的机械学习构建分类器的分类器构造器，其中分类器构造器适于基于通过散射光模拟获得的分类器来呈现必要的实际缺陷样本的收集，并且在必要且足够的情况下构建分类器条件。

4. 发明申请

US20100098320A1 METHOD AND DEVICE FOR INSPECTING PATTERNED MEDIUM 失效
标题翻译：用于检查图案的方法和装置
公开(公告)号：US20100098320A1
公开(公告)日：2010-04-22
申请号：US12482126
申请日：2009-06-10
申请人： Hideaki SASAZAWA , Takenori Hirose , Minoru Yoshida , Keiya Saito , Shigeru Serikawa
发明人： Hideaki SASAZAWA , Takenori Hirose , Minoru Yoshida , Keiya Saito , Shigeru Serikawa
IPC分类号： G06K9/00
CPC分类号： G11B5/746 , G01B11/24 , G01N21/8851 , G01N21/956 , G11B5/855
摘要： An inspection region is specified using the design information to perform region division for measurement through a scatterometry method. The obtained detection data is classified by pattern into a periodic region and a non-periodic region. A spectroscopic characteristic is detected by an optical sensor to extract features. The extracted features are compared with features stored in a feature map database for each region to evaluate a state of a patterned medium.
摘要翻译：使用设计信息指定检查区域，以通过散射法进行测量的区域划分。所获得的检测数据通过图案分类为周期性区域和非周期性区域。通过光学传感器检测光谱特性以提取特征。将提取的特征与存储在每个区域的特征图数据库中的特征进行比较，以评估图案化介质的状态。

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