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1. 发明申请

US20050094155A1 Reduction of thermal non-cyclic error effects in interferometers 有权
标题翻译：降低干涉仪中的热非循环误差效应
公开(公告)号：US20050094155A1
公开(公告)日：2005-05-05
申请号：US10879681
申请日：2004-06-28
申请人： Henry Hill , Michael Schroeder , Andrew Carlson
发明人： Henry Hill , Michael Schroeder , Andrew Carlson
IPC分类号： G01B9/02 , G03F7/20
CPC分类号： G01B9/02049 , G01B9/02003 , G01B2290/70 , G03F7/70775 , G03F7/70858
摘要： In general, in one aspect, the invention features an interferometer assembly for use in a lithography tool used for fabricating integrated circuits on a wafer, wherein the lithography tool includes a support structure and a stage for positioning the wafer relative to the support structure, the interferometer assembly including an interferometer configured to direct a measurement beam between the stage and the support structure and combine the measurement beam with another beam to form an output beam which includes a phase related to a position of the stage relative to the support structure, wherein the interferometer is mechanically secured to the lithography tool through an interferometer surface selected to cause the phase of the output beam to be insensitive to thermal changes of the interferometer over a range of temperatures.
摘要翻译：通常，在一个方面，本发明的特征在于一种用于在用于在晶片上制造集成电路的光刻工具中使用的干涉仪组件，其中所述光刻工具包括支撑结构和用于相对于支撑结构定位晶片的台，干涉仪组件，包括干涉仪，其被配置为将测量光束引导在所述平台和所述支撑结构之间并且将所述测量光束与另一个光束组合以形成输出光束，所述输出光束包括与所述平台相对于所述支撑结构的位置相关的相位，其中，干涉仪通过干涉仪表面被机械地固定到光刻工具，所述干涉仪表面被选择为使得输出光束的相位对于干涉仪在一定温度范围内的热变化不敏感。

2. 发明申请

US20060285124A1 Apparatus and method for in situ and ex situ measurements of optical system flare 失效
标题翻译：光学系统火炬的原位和非原位测量的装置和方法
公开(公告)号：US20060285124A1
公开(公告)日：2006-12-21
申请号：US11383328
申请日：2006-05-15
申请人： Henry Hill
发明人： Henry Hill
IPC分类号： G01B11/02 , G01B9/02
CPC分类号： G03F7/706 , G01J2009/0223 , G03F7/70591 , G03F7/7085 , G03F7/70941
摘要： Apparatus and methods for in situ and ex situ measurements of spatial profiles of the modulus of the complex amplitude and intensity of flare generated by an optical system. The in situ and ex situ measurements comprise interferometric and non-interferometric measurements that use an array of diffraction sites simultaneously located in an object plane of the optical system to increase signals related to measured properties of flare in a conjugate image plane. The diffraction sites generate diffracted beams with randomized relative phases. In general, the interferometric profile measurements employ phase-shifting point-diffraction interferometry to generate a topographical interference signal and the non-interferometric measurements are based on flare related signals other than topographic interference signals. The topographical interference signal and flare related signals are generated by a detector either as an electrical interference signal or electrical flare related signals or as corresponding exposure induced changes in a recording medium.
摘要翻译：用于原位和非原位测量由光学系统产生的光斑的复振幅和强度的模量的空间分布的装置和方法。原位和非原位测量包括使用同时位于光学系统的物平面中的衍射位置阵列的干涉测量和非干涉测量，以增加与共轭图像平面中的测光特性相关的信号。衍射点产生具有随机相对相位的衍射光束。通常，干涉测量轮廓测量采用相移点衍射干涉测量法来产生地形干涉信号，并且非干涉测量基于与地形干扰信号不同的闪光相关信号。地形干扰信号和火炬相关信号由检测器产生，作为电干扰信号或电眩光相关信号，或作为记录介质中相应的曝光引起的变化。

3. 发明申请

US20060066873A1 Catoptric imaging systems comprising pellicle and/or aperture-array beam-splitters and non-adaptive and/or adaptive catoptric surfaces 失效
标题翻译：包括防护薄膜组件和/或孔径阵列束分离器和非自适应和/或自适应反射表面的层析成像系统
公开(公告)号：US20060066873A1
公开(公告)日：2006-03-30
申请号：US11229314
申请日：2005-09-16
申请人： Henry Hill
发明人： Henry Hill
IPC分类号： G01B11/02
CPC分类号： G01B9/02028 , G01B9/02022 , G01B9/02056 , G01J1/58 , G01J3/04 , G01J3/2823 , G01N21/45 , G01N21/9501
摘要： An interferometry system including: a first imaging system that directs a measurement beam at an object to produce a return measurement beam from the object, that directs the return measurement beam onto an image plane, and that delivers a reference beam to the image plane; and a beam combining element in the image plane, said beam combining element comprising a first layer containing an array of sagittal slits and a second layer containing an array of tangential slits, wherein each slit of the array of sagittal slits is aligned with a corresponding different slit of the array of tangential slits, wherein the beam combining element combines the return measurement beam with the reference beam to produce an array of interference beams.
摘要翻译：一种干涉测量系统，包括：第一成像系统，其将物体处的测量光束引导以产生来自所述物体的返回测量光束，所述光束将所述返回测量光束引导到图像平面上，并将参考光束传送到所述像面; 以及所述图像平面中的光束组合元件，所述光束组合元件包括含有矢状狭缝阵列的第一层和包含切向狭缝阵列的第二层，其中所述矢状狭缝阵列的每个狭缝与相应的不同的切割狭缝阵列的狭缝，其中光束组合元件将返回测量光束与参考光束组合以产生干涉光束阵列。

4. 发明申请

US20050237536A1 Interferometry systems and methods of using interferometry systems 失效
标题翻译：干涉测量系统和使用干涉测量系统的方法
公开(公告)号：US20050237536A1
公开(公告)日：2005-10-27
申请号：US11112681
申请日：2005-04-22
申请人： Henry Hill , Gary Womack
发明人： Henry Hill , Gary Womack
IPC分类号： G01B9/02 , G01B11/02 , G01J9/02 , G03F7/20
CPC分类号： G01B9/02061 , G01B9/02018 , G01B9/02027 , G01B9/02059 , G01B9/02072 , G01B9/02084 , G01B2290/15 , G01B2290/70 , G01J2009/0261 , G03F7/70775
摘要： In general, in one aspect, the invention features methods that include interferometrically monitoring a distance between an interferometry assembly and a measurement object along each of three different measurement axes while moving the measurement object relative to the interferometry assembly, determining values of a parameter for different positions of the measurement object from the monitored distances, wherein for a given position the parameter is based on the distances of the measurement object along each of the three different measurement axes at the given position, and deriving information about a surface figure profile of the measurement object from a frequency transform of at least the parameter values.
摘要翻译：通常，在一个方面，本发明的特征在于，在将测量对象相对于干涉测量组件移动的同时，包括干涉测量组件和测量对象之间的距离沿着三个不同测量轴中的每一个进行干涉测量的方法，确定不同的参数的值测量对象距监测距离的位置，其中对于给定位置，该参数基于测量对象沿给定位置处的三个不同测量轴中的每一个的距离，以及导出关于测量的表面图形轮廓的信息至少对参数值进行频率变换。

5. 发明申请

US20050225772A1 Interferometric servo control system for stage metrology 有权
公开(公告)号：US20050225772A1
公开(公告)日：2005-10-13
申请号：US11154130
申请日：2005-06-15
申请人： Henry Hill
发明人： Henry Hill
IPC分类号： G01B9/02 , G02B9/02 , G02B11/02 , G03F7/20 , G05B19/19
CPC分类号： G01B9/02007 , G01B9/02003 , G01B9/02059 , G01B9/02067 , G01B9/02083 , G01B2290/70 , G03F7/70725 , G03F7/70775 , G05B19/19 , G05B2219/37275 , G05B2219/37506 , G05B2219/41184
摘要： The invention features a method for determining non-linear cyclic errors in a metrology system that positions a measurement object under servo-control based on an interferometrically derived position signal. The method includes: translating the measurement object under servo-control at a fixed speed; identifying frequencies of any oscillations in the position of measurement object as it is translated at the fixed speed; and determining amplitude and phase coefficients for sinusoidal components at the identified frequencies which when combined with the position signal suppress the oscillations. The invention also features a method for positioning a measurement object under servo-control based on an interferometrically derived position signal indicative of a position for the measurement object. This method includes: generating a compensated position signal based on the interferometrically derived position signal and at least one correction term that has a sinusoidal dependence on the position of the measurement object; and repositioning the measurement object based on the compensated position signal and a desired position for the measurement object.

6. 发明申请

US20050206909A1 Method and apparatus for enhanced resolution of high spatial frequency components of images using standing wave beams in non-interferometric and interferometric microscopy 失效
标题翻译：用于在非干涉和干涉显微镜中使用驻波束增强图像高空间频率分量分辨率的方法和装置
公开(公告)号：US20050206909A1
公开(公告)日：2005-09-22
申请号：US10954625
申请日：2004-09-30
申请人： Henry Hill
发明人： Henry Hill
IPC分类号： G01B9/02 , G02B20060101 , G02B21/00
CPC分类号： G01B9/02022 , G01B9/02003 , G01B9/02024 , G01B2290/70 , G02B21/14
摘要： A method of measuring properties of a substrate, the method involving: illuminating a spot on the substrate with a standing wave measurement beam to generate a return measurement beam, the standing wave measurement beam characterized by a standing wave pattern; generating an electrical signal from the return measurement beam; causing the standing wave pattern to be at a succession of different positions on the surface of the substrate; and for each of the succession of different positions of the standing wave pattern, acquiring measurement data from the electrical signal.
摘要翻译：一种测量基板特性的方法，所述方法包括：用驻波测量光束照射所述基板上的点以产生返回测量光束，所述驻波测量光束以驻波图案为特征; 从返回测量光束产生电信号; 使驻波图案在基板的表面上处于不同位置的连续位置; 并且对于驻波图案的不同位置的连续中的每一个，从电信号获取测量数据。

7. 发明申请

US20050134862A1 Characterization and compensation of errors in multi-axis interferometry systems 失效
标题翻译：多轴干涉测量系统误差的表征和补偿
公开(公告)号：US20050134862A1
公开(公告)日：2005-06-23
申请号：US10981316
申请日：2004-11-04
申请人： Henry Hill
发明人： Henry Hill
IPC分类号： G01B9/02 , G03F7/20 , G03F9/00
CPC分类号： G03F9/7003 , G03F7/70775 , G03F9/7049
摘要： In general, in one aspect, the invention features a method that includes monitoring a position of a stage along a first measurement axis and a second measurement axis of a multi-axis interferometry system and determining a position of the stage with respect to another degree of freedom based on the monitored positions along the first and second axes and predetermined information about how the measurement axes deviate from being parallel to one another.
摘要翻译：通常，在一个方面，本发明的特征在于一种方法，其包括监测沿着多轴干涉测量系统的第一测量轴和第二测量轴的台的位置，并且相对于另一程度确定阶段的位置基于沿着第一轴和第二轴的监视位置的自由度以及关于测量轴如何偏离彼此平行的预定信息。

8. 发明申请

US20080030742A1 Apparatus and method for in situ and ex situ measurement of spatial impulse response of an optical system using phase-shiftin point-diffraction interferometry 失效
$Apparatus and method for in situ and ex situ measurement of spatial impulse response of an optical system using phase-shiftin point-diffraction interferometry$
标题翻译：使用相位移素点衍射干涉测量的光学系统的空间脉冲响应的原位和非原位测量的装置和方法
公开(公告)号：US20080030742A1
公开(公告)日：2008-02-07
申请号：US11881141
申请日：2007-07-25
申请人： Henry Hill
发明人： Henry Hill
IPC分类号： G01B11/02 , G02B27/14
CPC分类号： G03F7/706 , G01M11/0257 , G01M11/0271 , G01M11/0278
摘要： A test object including: an arrangement of optical elements defining a first partially reflecting surface and a second partially reflecting surface, at least one of the first and second partially reflecting surfaces being curved, wherein the first partially reflecting surface is arranged to receive a substantially collimated input beam and produce therefrom a first transmitted beam that passes on to the second partially reflecting surface, wherein the second partially reflecting surface is arranged to receive the first transmitted beam from the first partially reflecting surface and produce a collimated second transmitted beam and a first reflected beam therefrom, wherein the first partially reflecting surface is arranged to receive the first reflected beam and produce a second reflected beam therefrom, and wherein the first and second reflecting surfaces are configured to cause the second reflecting beam to converge onto a spot on a back surface to produce a diverging beam traveling in the same direction as the collimated output beam.
摘要翻译：一种测试对象，包括：限定第一部分反射表面和第二部分反射表面的光学元件的布置，所述第一和第二部分反射表面中的至少一个是弯曲的，其中所述第一部分反射表面被布置成接收基本上准直的输入光束并由其产生传递到第二部分反射表面的第一透射光束，其中第二部分反射表面布置成从第一部分反射表面接收第一透射光束并产生准直的第二透射光束和第一反射光束其中，所述第一部分反射表面被布置成接收所述第一反射光束并从其产生第二反射光束，并且其中所述第一和第二反射表面被配置为使所述第二反射光束会聚到背面上的光斑上产生一个发散的光束 n与准直输出光束的方向相同。

9. 发明申请

US20070064240A1 Angle interferometers 失效
标题翻译：角度干涉仪
公开(公告)号：US20070064240A1
公开(公告)日：2007-03-22
申请号：US11504455
申请日：2006-08-15
申请人： Henry Hill
发明人： Henry Hill
IPC分类号： G01B9/02
CPC分类号： G01B9/02027 , G01B9/02003 , G01B11/272 , G01B2290/45 , G01B2290/70 , G03F7/70775
摘要： Methods and systems for determining information about the incident angle of a beam are disclosed, the method including directing a beam having an s-polarized component and a p-polarized component to reflect from an interface at a non-normal angle, where the non-normal reflection introduces for each component a phase change upon reflection that is different for each component, and measuring an optical interference signal related to the phase change between the components of the reflected beam.
摘要翻译：公开了用于确定关于梁的入射角的信息的方法和系统，所述方法包括引导具有s偏振分量和p偏振分量的光束以非正常角度从界面反射，对于每个分量，正常反射引入对于每个分量不同的反射时的相位变化，以及测量与反射光束的分量之间的相位变化相关的光学干涉信号。

10. 发明申请

US20070008547A1 Cyclic Error Compensation in Interferometry Systems 有权
标题翻译：干涉测量系统中的循环误差补偿
公开(公告)号：US20070008547A1
公开(公告)日：2007-01-11
申请号：US11462185
申请日：2006-08-03
申请人： Henry Hill , Frank Demarest , Alan Field
发明人： Henry Hill , Frank Demarest , Alan Field
IPC分类号： G01B11/02
CPC分类号： G01B9/0207 , G01B9/02007 , G01B9/02084 , G03F7/70775
摘要： An interference signal S(t) is provided from interference between two beams directed along different paths. The signal S(t) is indicative of changes in an optical path difference n{tilde over (L)}(t) between the different paths, where n is an average refractive index along the different paths, {tilde over (L)}(t) is a total physical path difference between the different paths, and t is time. An error signal is provided to reduce errors in an estimate of {tilde over (L)}(t). The error signal is derived at least in part based on one or more collective properties of a distribution of multi-dimensional values. At least one of the multi-dimensional values in the distribution is generated from a plurality of samples of the signal S(t) (e.g., samples of the signal captured at different times).
摘要翻译：通过沿着不同路径指向的两个波束之间的干扰来提供干扰信号S（t）。信号S（t）表示不同路径之间的光程差nL（t）的变化，其中n是沿着不同路径的平均折射率，L（t）是不同路径之间的总物理路径差，而t是时间。提供误差信号以减少L（t）的估计中的误差。至少部分地基于多维值的分布的一个或多个集合属性导出误差信号。从信号S（t）的多个样本（例如，在不同时间捕获的信号的样本）生成分布中的多维值中的至少一个。

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