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    • 4. 发明授权
    • Interferometry systems and methods of using interferometry systems
    • 干涉测量系统和使用干涉测量系统的方法
    • US07375823B2
    • 2008-05-20
    • US11365991
    • 2006-03-01
    • Gary WomackHenry A. Hill
    • Gary WomackHenry A. Hill
    • G01B11/02
    • G01B9/02007G01B9/02018G01B9/02027G01B9/02058G01B9/02059G01B9/02061G01B9/0207G01B9/02072G01B9/02084G01B2290/15G01B2290/70G03F7/70775G03F9/7034G03F9/7049
    • In general, in one aspect, the invention features methods that include interferometrically monitoring a distance between an interferometry assembly and a measurement object along each of three different measurement axes while moving the measurement object relative to the interferometry assembly. The methods also include monitoring an orientation angle of the measurement object with respect to a rotation axis non-parallel to the three different measurement axes while the measurement object is moving, determining values of a parameter for different positions of the measurement object from the monitored distances, wherein for a given position the parameter is based on the distances of the measurement object along each of the three different measurement axes at the given position, and deriving information about a surface figure profile of the measurement object from a frequency transform of at least the parameter values. Deriving the information includes accounting for variations of the monitored orientation angle during the measurement object's motion.
    • 通常,在一个方面,本发明的特征在于,在相对于干涉测量组件移动测量对象的同时,包括干涉测量组件和测量对象之间的距离沿着三个不同测量轴中的每一个进行干涉测量。 所述方法还包括在测量对象移动时监测测量对象相对于不平行于三个不同测量轴的旋转轴线的定向角度,从测量对象的距离确定测量对象的不同位置的参数值 其中,对于给定位置,所述参数基于所述测量对象沿所述给定位置处的所述三个不同测量轴中的每一个的距离,并且从至少所述测量对象的频率变换导出关于所述测量对象的表面图形轮廓的信息 参数值。 导出信息包括考虑测量对象运动期间监视的定向角度的变化。
    • 6. 发明授权
    • Interferometry systems and methods of using interferometry systems
    • 干涉测量系统和使用干涉测量系统的方法
    • US07280223B2
    • 2007-10-09
    • US11112375
    • 2005-04-22
    • Henry A. HillGary Womack
    • Henry A. HillGary Womack
    • G01B11/02
    • G01B9/02061G01B9/02018G01B9/02027G01B9/02059G01B9/02072G01B9/02084G01B2290/15G01B2290/70G01J2009/0261G03F7/70775
    • In general, in one aspect, the invention features methods that include interferometrically monitoring a distance between an interferometry assembly and a measurement object along each of three different measurement axes while moving the measurement object relative to the interferometry assembly, determining values of a first parameter and a second parameter for different positions of the measurement object from the monitored distances, wherein for a given position the first parameter is based on the monitored distances of the measurement object along each of the three different measurement axes at the given position, and for a given position the second parameter is based on the monitored distance of the measurement object along each of two of the measurement axes at the given position, and deriving information about a surface figure profile of the measurement object from the first and second parameter values.
    • 通常,在一个方面,本发明的特征在于,包括在沿着三个不同测量轴中的每一个干涉测量组件和测量对象之间进行干涉测量同时相对于干涉测量组件移动测量对象的干涉测量方法,确定第一参数的值, 测量对象与监测距离的不同位置的第二参数,其中对于给定位置,第一参数基于测量对象沿给定位置处的三个不同测量轴中的每一个的监测距离,以及对于给定位置 位置第二参数是基于测量对象沿着给定位置处的两个测量轴中的每一个的监测距离,以及从第一和第二参数值导出关于测量对象的表面图形的信息。
    • 9. 发明申请
    • Interferometry systems and methods of using interferometry systems
    • 干涉测量系统和使用干涉测量系统的方法
    • US20060187464A1
    • 2006-08-24
    • US11365991
    • 2006-03-01
    • Gary WomackHenry Hill
    • Gary WomackHenry Hill
    • G01B11/02
    • G01B9/02007G01B9/02018G01B9/02027G01B9/02058G01B9/02059G01B9/02061G01B9/0207G01B9/02072G01B9/02084G01B2290/15G01B2290/70G03F7/70775G03F9/7034G03F9/7049
    • In general, in one aspect, the invention features methods that include interferometrically monitoring a distance between an interferometry assembly and a measurement object along each of three different measurement axes while moving the measurement object relative to the interferometry assembly. The methods also include monitoring an orientation angle of the measurement object with respect to a rotation axis non-parallel to the three different measurement axes while the measurement object is moving, determining values of a parameter for different positions of the measurement object from the monitored distances, wherein for a given position the parameter is based on the distances of the measurement object along each of the three different measurement axes at the given position, and deriving information about a surface figure profile of the measurement object from a frequency transform of at least the parameter values. Deriving the information includes accounting for variations of the monitored orientation angle during the measurement object's motion.
    • 通常,在一个方面,本发明的特征在于,在相对于干涉测量组件移动测量对象的同时,包括干涉测量组件和测量对象之间的距离沿着三个不同测量轴中的每一个进行干涉测量。 所述方法还包括在测量对象移动时监测测量对象相对于不平行于三个不同测量轴的旋转轴线的定向角度,从测量对象的距离确定测量对象的不同位置的参数值 其中,对于给定位置,所述参数基于所述测量对象沿所述给定位置处的所述三个不同测量轴中的每一个的距离,并且从至少所述测量对象的频率变换导出关于所述测量对象的表面图形轮廓的信息 参数值。 导出信息包括考虑测量对象运动期间监视的定向角度的变化。