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    • 2. 发明授权
    • Semiconductor wafer carrier transport apparatus
    • 半导体晶片载体输送装置
    • US4722659A
    • 1988-02-02
    • US863961
    • 1986-05-16
    • Hazen L. Hoyt, IIIJohn D. SandersJon C. GoldmanWilliam R. Mello
    • Hazen L. Hoyt, IIIJohn D. SandersJon C. GoldmanWilliam R. Mello
    • H01L21/00H01L21/67H01L21/677B65B21/02
    • H01L21/67115H01L21/67H01L21/67769Y10S414/137Y10S414/14
    • Semiconductor wafers in plastic cassettes are loaded into (and later unloaded from) an input/output station serving a CVD furnace and thereafter the cassettes are non-manually transported by a programmable elevator to and from a flat-finder, a wafer transfer machine (where the wafers are transferred to a boat) and in-process storage. The boats are non-manually transported by a second programmable elevator to and from the wafer transfer machine, in-process boat storage and a boat loader (or process chamber directly). The cassettes can be loaded or unloaded while one or both of the elevators are operating. Up to eight human assisted steps are reduced to only two such steps.Furnaces having more than one processing chamber have a loading station, in-process cassettes and boat storage and boats dedicated to each processing chamber so that there is no cross contamination between processing chambers caused by the boats and the cassettes in which wafers are delivered to the process are the same cassettes in which process wafers are returned to the input/output station so that there is no cross contamination of the wafers caused by the cassettes.
    • 将塑料盒中的半导体晶片装载到服务于CVD炉的输入/输出站(然后从其中卸载),此后,盒可以通过可编程电梯非平移式地从平板扫描器,晶片转印机(其中 晶片转移到船上)和过程中的存储。 船只通过第二可编程电梯非手动地运送到晶片转移机器,进程中的船舶存储器和船装载机(或直接处理室)中。 当一个或两个电梯正在操作时,盒可以装载或卸载。 最多八个人工辅助步骤仅减少到两个这样的步骤。 具有多于一个处理室的炉具有加载站,处理中的盒和船的存储和专用于每个处理室的船,使得由船形成的处理室和盒之间没有交叉污染,其中晶片被递送到 处理是相同的盒,其中处理晶片返回到输入/输出站,使得由盒引起的晶片不会交叉污染。
    • 4. 发明授权
    • Wafer boat transfer tool
    • 晶圆船转移工具
    • US4728246A
    • 1988-03-01
    • US863963
    • 1986-05-16
    • William R. Mello
    • William R. Mello
    • H01L21/677B65G1/10
    • H01L21/67781Y10S206/833Y10S414/14
    • A wafer boat transfer tool has an upper fork and a lower fork which may be differently configured for supporting wafer boats in different ways. The same tool may be used to transfer boats in one or more steps from locations where they are supported in one way to other locations where they are supported in the same or a different way. Also, the tool may be used to transfer more than one boat at a time without excessive travel in a direction parallel to the boat loader axis.A versatile wafer designed for use with two different forks of the tool may be utilized with different boat loaders and a common wafer transfer machine and in-process storage nests.
    • 晶片舟转移工具具有上叉和下叉,其可以不同地构造用于以不同的方式支撑晶片舟。 相同的工具可以用于以一个或多个步骤的方式将船舶以一种方式支撑在其他位置,以相同或不同的方式支撑船只。 此外,该工具可以用于一次传送多于一个船,而不会在平行于船装载机轴线的方向上过度行驶。 设计用于工具的两个不同叉的通用晶片可以与不同的装载机和普通的晶片传送机以及进程中的存储巢一起使用。
    • 5. 发明授权
    • Tool detection system
    • 刀具检测系统
    • US4504824A
    • 1985-03-12
    • US442357
    • 1982-11-17
    • William R. Mello
    • William R. Mello
    • B23B47/24B23B49/00B23Q11/00
    • B23Q17/006B23B49/001B23Q17/003Y10T408/14Y10T408/21
    • Apparatus for detecting the presence of a tool in a spindle which can be used where automatic unattend operation occurs and it must be known that a tool is in the spindle. For example, if the tool changer on a machining center dropped a tool when transferring it from a magazine to a spindle the machine would continue to operate but machining would not occur. In the invention, air pressure is supplied to a point through a series of holes in the spindle and if a tool is present in the spindle, it will prevent air from escaping. If the tool is absent, air will escape from the spindle or when the tool is not properly seated in the taper of the spindle which will cause the air pressure to drop and to stop the spindle motor and/or provide a suitable indication and warning to the operator.
    • 用于检测主轴中存在工具的装置,其可以在自动无人值守操作发生时使用,并且必须知道工具在主轴中。 例如,如果加工中心的刀具更换器在将刀具从刀库传送到主轴时掉落刀具,则机床将继续运行,但不会发生加工。 在本发明中,空气压力通过主轴中的一系列孔被供给到点,并且如果工具存在于主轴中,则其将防止空气逸出。 如果工具不存在,则空气将从主轴中脱落,或者当工具未正确安置在主轴的锥形中,这将导致空气压力下降并停止主轴电机和/或提供适当的指示和警告 操作员。