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1. 发明授权

US06797962B1 Electrostatic corrector for eliminating the chromatic aberration of particle lenses 有权
标题翻译：用于消除粒子透镜色差的静电校正器
公开(公告)号：US06797962B1
公开(公告)日：2004-09-28
申请号：US10018193
申请日：2002-03-05
申请人： Harald Rose , Stephan Uhlemann , Christoph Weissbacker
发明人： Harald Rose , Stephan Uhlemann , Christoph Weissbacker
IPC分类号： H01J314
CPC分类号： H01J37/153 , H01J2237/1516
摘要： An electrostatic corrector for eliminating the chromatic aberration of particle lenses, includes a corrector having a straight optical axis and an electrostatic quadrupole for allocating to the objective lens. Two corrector pieces are positioned behind the quadrupole, along the optical axis in the direction of radiation. Each corrector piece has three electrical quadrupole fields with an overlying circular lens field. The quadrupole fields, however, are rotated 90° about the optical axis in relation to each other. This arrangement is adjusted so that the astigmatic first image of one sectional view lies in one corrector piece and the astigmatic first image perpendicular thereto, of the other sectional view, lies in the other corrector piece, with another electrostatic quadrupole being located on the output side.
摘要翻译：用于消除粒子透镜的色像差的静电校正器包括具有用于分配到物镜的直线光轴和静电四极杆的校正器。两个校正件位于四极杆的后面，沿着辐射方向的光轴。每个校正器具有三个具有上覆圆形透镜场的四极四极场。然而，四极场相对于彼此绕光轴旋转90°。调整这种布置，使得一个截面图的散光的第一图像位于一个校正件中，并且另一截面图垂直于其的象散的第一图像位于另一个校正件中，另一个静电四极杆位于输出侧。

2. 发明授权

US07800076B2 Electron-optical corrector for aplanatic imaging systems 有权
标题翻译：用于摄影系统的电子 - 光学校正器
公开(公告)号：US07800076B2
公开(公告)日：2010-09-21
申请号：US12297306
申请日：2007-03-31
申请人： Stephan Uhlemann , Harald Rose , Heiko Müller
发明人： Stephan Uhlemann , Harald Rose , Heiko Müller
IPC分类号： H01J37/153
CPC分类号： H01J37/153 , H01J2237/1534
摘要： A particle-optical corrector for eliminating both the third-order aperture aberration and the third-order extra-axial coma, using circular lenses and hexapole fields, includes three coaxially arranged hexapole fields, at least one circular lens doublet being arranged between adjacent hexapole fields and adjusted so that the center hexapole field is imaged on the hexapole fields. Between the hexapole fields, an intermediate plane prevails and the intermediate planes are conjugated with one another. The three hexapole fields are identically oriented in the Larmor reference system with the intensities of the three fields being chosen so that the image aberration coefficient of the astigmatism with three-fold symmetry becomes 0. The corrective contains two hexapole fields, in which the fields of the hexapole field pair are excited anti-symmetrically to one another, and the pairs are in each case arranged around the two intermediate planes. The orientation of the hexapole field pairs is rotated with respect to the orientation defined by the hexapole fields by a sufficient angle so that the extra-axial third order coma is corrected.
摘要翻译：一种使用圆形透镜和六极场消除三次孔径像差和三次超外差彗差的粒子光学校正器包括三个同轴布置的六极场，至少一个圆形透镜双曲线布置在相邻的六极场之间并调整为使六边形中心六极场成像。在六极场之间，以中间平面为准，中间平面彼此共轭。三个六极场在拉莫尔参考系中相同取向，选择三个场的强度，使得具有三重对称性的像散的像差系数变为0.校正包含两个六极场，其中场六极场对被彼此反对称地激励，并且在每种情况下这些对围绕两个中间平面布置。六极场对的取向相对于由六极场确定的取向旋转足够的角度，以便校正异轴三阶彗差。

3. 发明申请

US20090134339A1 ELECTRON-OPTICAL CORRECTOR FOR APLANATIC IMAGING SYSTEMS 有权
标题翻译：用于APLANICAL IMAGING SYSTEMS的电子光学校正器
公开(公告)号：US20090134339A1
公开(公告)日：2009-05-28
申请号：US12297306
申请日：2007-03-31
申请人： Stephan Uhlemann , Harald Rose , Heiko Muller
发明人： Stephan Uhlemann , Harald Rose , Heiko Muller
IPC分类号： H01J3/14
CPC分类号： H01J37/153 , H01J2237/1534
摘要： A particle-optical corrector for eliminating both the third-order aperture aberration and the third-order extra-axial coma, using circular lenses and hexapole fields, includes three coaxially arranged hexapole fields, at least one circular lens doublet being arranged between adjacent hexapole fields and adjusted so that the center hexapole field is imaged on the hexapole fields. Between the hexapole fields, an intermediate plane prevails and the intermediate planes are conjugated with one another. The three hexapole fields are identically oriented in the Larmor reference system with the intensities of the three fields being chosen so that the image aberration coefficient of the astigmatism with three-fold symmetry becomes 0. The corrective contains two hexapole fields, in which the fields of the hexapole field pair are excited anti-symmetrically to one another, and the pairs are in each case arranged around the two intermediate planes. The orientation of the hexapole field pairs is rotated with respect to the orientation defined by the hexapole fields by a sufficient angle so that the extra-axial third order coma is corrected.
摘要翻译：一种使用圆形透镜和六极场消除三次孔径像差和三次超外差彗差的粒子光学校正器包括三个同轴布置的六极场，至少一个圆形透镜双曲线布置在相邻的六极场之间并调整为使六边形中心六极场成像。在六极场之间，以中间平面为准，中间平面彼此共轭。三个六极场在拉莫尔参考系中相同取向，选择三个场的强度，使得具有三重对称性的像散的像差系数变为0.校正包含两个六极场，其中场六极场对被彼此反对称地激励，并且在每种情况下这些对围绕两个中间平面布置。六极场对的取向相对于由六极场限定的取向旋转足够的角度，以便校正异轴三阶彗差。

4. 发明授权

US06836372B2 Electrostatic corrector 有权
标题翻译：静电校正器
公开(公告)号：US06836372B2
公开(公告)日：2004-12-28
申请号：US10466744
申请日：2003-07-18
申请人： Harald Rose , Stephan Uhlemann , Christoph Weissbäcker
发明人： Harald Rose , Stephan Uhlemann , Christoph Weissbäcker
IPC分类号： G02B1100
CPC分类号： H01J37/153
摘要： An electrostatic corrector with a rectilinear optical axis has two corrective parts, which are arranged one behind the other along the optical axis and which have respective quadrupole fields and superimposed circular lens fields. The astigmatic intermediate image of one cross-section that is created by an axis point lies in one corrective part and the astigmatic intermediate image of the other cross-section, which is perpendicular to the first cross-section, lies in the other corrective part. An object of the invention is to eliminate the chromatic aberration of particle lenses. To achieve this, an electrostatic corrector is used, which includes two corrector units having similar instrumental construction, with each of the two corrector units having input and output sides on which two additional electrostatic quadrupoles are located. The two corrector units represent the axial paths in a telescopic manner in a 1:1 representation. The two corrector units are arranged one behind the other along the optical axia and are rotated by 90° about the optical axis relative to one another.
摘要翻译：具有直线光轴的静电校正器具有两个校正部件，它们沿着光轴一个接一个布置，并且具有相应的四极场和叠加的圆形透镜场。由轴点产生的一个横截面的像散中间图像位于一个校正部分中，并且垂直于第一横截面的另一横截面的像散中间图像位于另一校正部分中。本发明的目的是消除粒子透镜的色差。为了实现这一点，使用静电校正器，其包括具有相似器件结构的两个校正器单元，两个校正器单元中的每一个具有输入和输出侧，两个额外的静电四极杆位于其上。两个校正单元以1：1表示法以伸缩方式表示轴向路径。两个校正单元沿着光学轴线一个接一个地布置，并且相对于彼此围绕光轴旋转90°。

5. 发明授权

US5449914A Imaging electron energy filter 失效
标题翻译：成像电子能过滤器
公开(公告)号：US5449914A
公开(公告)日：1995-09-12
申请号：US218343
申请日：1994-03-25
申请人： Harald Rose , Stephan Uhlemann , Eugen Weimer
发明人： Harald Rose , Stephan Uhlemann , Eugen Weimer
IPC分类号： G01Q30/02 , H01J37/05 , H01J37/26 , H01J49/44 , H01J49/46 , H01J37/14
CPC分类号： H01J37/05 , H01J49/46 , H01J2237/055 , H01J2237/057 , H01J2237/26
摘要： The invention relates to an electron energy filter for electron microscopes as well as to an electron microscope equipped with such a filter. The filter comprises three sector magnets with the deflection field in the first sector magnet being homogeneous. The deflection field in each of the two other sector magnets is an inhomogeneous gradient field. To generate the gradient field, the pole pieces of the two other sector magnets have the form of segments of truncated double cones. The electron beam passes the first homogeneous sector magnet twice. Multipole elements are arranged in front of, behind and between the three sector magnets. The filter has a large dispersion also for high-energy electrons while at the same time providing a compact configuration. All second-order aberrations and the significant second-rank aberrations are corrected by means of the multiple elements.
摘要翻译：本发明涉及一种用于电子显微镜的电子能量过滤器以及配有这种过滤器的电子显微镜。滤波器包括三扇形磁体，其中第一扇形磁体中的偏转场是均匀的。两个其他扇形磁体中的每一个中的偏转场是不均匀的梯度场。为了产生梯度场，两个其他扇形磁体的极片具有截顶双锥段的形式。电子束通过第一均匀扇形磁体两次。多极元件布置在三个扇形磁体之前，后面和之间。该滤波器对于高能电子也具有大的色散，同时提供紧凑的结构。通过多个元素校正所有二阶像差和显着的二次像差。

6. 发明申请

US20080290273A1 Monochromator and radiation source with monochromator 有权
标题翻译：单色仪和辐射源
公开(公告)号：US20080290273A1
公开(公告)日：2008-11-27
申请号：US12153455
申请日：2008-05-20
申请人： Stephan Uhlemann
发明人： Stephan Uhlemann
IPC分类号： H01J47/00
CPC分类号： H01J37/153 , H01J37/05 , H01J37/26 , H01J49/48 , H01J2237/057 , H01J2237/1534 , H01J2237/1538
摘要： A monochromator (1) for a charged particle optics, in particular, for electron microscopy, comprises at least one first deflection element (2, 3) with an electrostatic deflecting field (2′, 3′) for generating a dispersion (4) in the plane (5) of a selection aperture (6) to select charged particles of a desired energy interval (7) and at least one second deflection element (8, 9) with an electrostatic deflecting field (8′, 9′) which eliminates the dispersion (4) of the at least one first deflecting field (2′, 3′). A radiation source (17) comprises such a monochromator (1). High monchromatism without intensity contrasts caused by defects of the slit aperture is thereby achieved in that the deflection elements (2, 3, 8, 9) have a design other than spherically shaped and their electrodes (24, 25) are given a potential (φ+, φ−) such that the charged particles (xα, yβ) which virtually enter the image of the radiation source (17) at different respective angles (α, β) in different sections (x, y), are differently focused such that charged particles (xα, yβ) of one energy are point focused (10, 10′, 10″) exclusively in the plane (5) of the selection aperture (6), since zero-crossings (11, 12) of the deflections (A) of the charged particles (xα, yβ) of the different sections (x, y) only coincide there at the same axial position (z, E).
摘要翻译：用于带电粒子光学器件的单色仪（1），特别是用于电子显微镜的装置包括至少一个具有用于产生分散体（4）的静电偏转场（2'，3'）的第一偏转元件（2,3）选择孔径（6）的平面（5）以选择具有期望能量间隔（7）的带电粒子和至少一个具有静电偏转场（8'，9'）的第二偏转元件（8,9）所述至少一个第一偏转场（2'，3'）的色散（4）。辐射源（17）包括这样的单色仪（1）。因此，由于偏转元件（2,3,8,9）具有除球形之外的设计，并且它们的电极（24,25）被赋予电位（phi + ，phi），使得在不同部分（x，y）中以不同的相应角度（α，β）实际进入辐射源（17）的图像的带电粒子（xalpha，ybeta）被不同地聚焦，使得带电一个能量的粒子（xalpha，ybeta）专门在选择孔径（6）的平面（5）中点聚焦（10,10'，10“），因为偏转的零交叉（11,12） A）的不同部分（x，y）的带电粒子（xalpha，ybeta）仅在相同的轴向位置（z，E）处重合。

7. 发明授权

US06903337B2 Examining system for the particle-optical imaging of an object, deflector for charged particles as well as method for the operation of the same 有权
标题翻译：用于物体的粒子光学成像，带电粒子的偏转器及其操作方法的检查系统
公开(公告)号：US06903337B2
公开(公告)日：2005-06-07
申请号：US10185729
申请日：2002-07-01
申请人： Oliver Kienzle , Dirk Stenkamp , Michael Steigerwald , Rainer Knippelmeyer , Max Haider , Heiko Müller , Stephan Uhlemann
发明人： Oliver Kienzle , Dirk Stenkamp , Michael Steigerwald , Rainer Knippelmeyer , Max Haider , Heiko Müller , Stephan Uhlemann
IPC分类号： G03F7/20 , H01J31/00 , H01J37/09 , H01J37/12 , H01J37/147 , H01J37/244 , H01J37/28 , H01J37/285
CPC分类号： H01J37/28 , H01J2237/082 , H01J2237/2446
摘要： An examining system for imaging an object positionable in an object plane, includes an illumination device for supplying energy to a delimited field of the object such that charged particles emerge from locations of the field, the field being displaceable in the plane of the object, a first deflector for providing a variable deflection field for guiding charged particles emerging from locations of a selectable region of the object through a fixed, predetermined beam cross-section, and a position-sensitive detector disposed in the beam path such that the charged particles, after having passed through the first deflector, impinge on the position-sensitive detector, wherein particles emerging from different locations of the region are imaged on different locations of the position-sensitive detector which are allocated to the locations of emergence.
摘要翻译：一种用于对物体平面中定位的物体进行成像的检查系统，包括用于向物体的界定场提供能量的照明装置，使得带电粒子从场的位置出现，该场可在物体的平面中移动，第一偏转器，用于提供可变偏转场，用于引导通过固定的预定光束横截面从物体的可选择区域的位置出射的带电粒子，以及设置在光束路径中的位置敏感检测器，使得带电粒子在已经穿过第一偏转器，撞击位置敏感检测器，其中从该区域的不同位置出现的颗粒被成像在位置敏感检测器的分配到出现位置的不同位置上。

8. 发明授权

US08637834B2 Particle-optical systems and arrangements and particle-optical components for such systems and arrangements 有权
标题翻译：用于这种系统和布置的粒子 - 光学系统和布置以及粒子 - 光学部件
公开(公告)号：US08637834B2
公开(公告)日：2014-01-28
申请号：US13342017
申请日：2011-12-31
申请人： Rainer Knippelmeyer , Oliver Kienzle , Thomas Kemen , Heiko Mueller , Stephan Uhlemann , Maximillian Haider , Antonio Casares , Steven Rogers
发明人： Rainer Knippelmeyer , Oliver Kienzle , Thomas Kemen , Heiko Mueller , Stephan Uhlemann , Maximillian Haider , Antonio Casares , Steven Rogers
IPC分类号： H01J37/28 , H01J3/14 , H01J1/50
CPC分类号： H01J37/04 , B82Y10/00 , B82Y40/00 , H01J37/09 , H01J37/10 , H01J37/14 , H01J37/153 , H01J37/28 , H01J37/3007 , H01J37/3177 , H01J2237/0435 , H01J2237/0453 , H01J2237/047 , H01J2237/04735 , H01J2237/04756 , H01J2237/06 , H01J2237/14 , H01J2237/2817 , H01J2237/31774
摘要： A particle-optical arrangement comprises a charged-particle source for generating a beam of charged particles; a multi-aperture plate arranged in a beam path of the beam of charged particles, wherein the multi-aperture plate has a plurality of apertures formed therein in a predetermined first array pattern, wherein a plurality of charged-particle beamlets is formed from the beam of charged particles downstream of the multi-aperture plate, and wherein a plurality of beam spots is formed in an image plane of the apparatus by the plurality of beamlets, the plurality of beam spots being arranged in a second array pattern; and a particle-optical element for manipulating the beam of charged particles and/or the plurality of beamlets; wherein the first array pattern has a first pattern regularity in a first direction, and the second array pattern has a second pattern regularity in a second direction electron-optically corresponding to the first direction, and wherein the second regularity is higher than the first regularity.
摘要翻译：粒子光学装置包括用于产生带电粒子束的带电粒子源; 布置在带电粒子束的光束路径中的多孔板，其中多孔板具有以预定的第一阵列图案形成在其中的多个孔，其中多个带电粒子子束由束形成在多孔板下游的带电粒子，并且其中通过所述多个子束在所述装置的图像平面中形成多个束斑，所述多个束斑以第二阵列图案布置; 以及用于操纵带电粒子束和/或多个子束的粒子光学元件; 其中所述第一阵列图案在第一方向上具有第一图案规则性，并且所述第二阵列图案在与所述第一方向对应的电子 - 光学上的第二方向上具有第二图案规则性，并且其中所述第二规则性高于所述第一规则性。

9. 发明申请

US20120153147A1 Corrector 有权
标题翻译：校正者
公开(公告)号：US20120153147A1
公开(公告)日：2012-06-21
申请号：US12973984
申请日：2010-12-21
申请人： Joachim Zach , Stephan Uhlemann
发明人： Joachim Zach , Stephan Uhlemann
IPC分类号： H01J3/20 , H01J37/28
CPC分类号： H01J37/153 , H01J2237/1534 , H01J2237/28 , H01J2237/2802
摘要： A corrector (10) for an electron microscope is proposed which is less sensitive to fluctuations of the electrical power supply if a stigmatic intermediate image (9) of the axial fundamental rays (xα, yβ) is produced in the quadrupole field (1′) of a first quadrupole element (1) and this quadrupole field (1′) is set such that astigmatic intermediate images (12, 13) of the off-axial fundamental rays (xγ, yδ) are produced in the region of the center of the quadrupole fields (3′, 4′) of a third (3) and fourth multipole element (4) and there also, due to the setting of the quadrupole field (2′) of a second quadrupole element (2), the axial fundamental rays (xα, yβ) of the same section (x, y) as that, in which the intermediate images (12, 13) of the off-axial fundamental rays (xγ, yδ) are located, each exhibit a maximum.
摘要翻译：提出了一种用于电子显微镜的校正器（10），如果在四极场（1'）中产生轴向基本射线（xα，y＆bgr）的眩目中间图像（9），对于电源的波动较不敏感，），并且该四极场（1'）被设置为使得在轴向中心的区域中产生离轴基波（xγ，yδ）的像散中间图像（12,13）第三（3）和第四多极元件（4）的四极场（3'，4'），并且由于第二四极元件（2）的四极场（2'）的设定，与偏轴基波（xγ，yδ）的中间图像（12,13）相同的部分（x，y）的基波（xα，y＆bgr）各自呈现最大值。

10. 发明授权

US08097847B2 Particle-optical systems and arrangements and particle-optical components for such systems and arrangements 有权
标题翻译：用于这种系统和布置的粒子 - 光学系统和布置以及粒子 - 光学部件
公开(公告)号：US08097847B2
公开(公告)日：2012-01-17
申请号：US12459078
申请日：2009-06-25
申请人： Rainer Knippelmeyer , Oliver Kienzle , Thomas Kemen , Heiko Mueller , Stephan Uhlemann , Maximilian Haider , Antonio Casares
发明人： Rainer Knippelmeyer , Oliver Kienzle , Thomas Kemen , Heiko Mueller , Stephan Uhlemann , Maximilian Haider , Antonio Casares
IPC分类号： H01J37/30 , H01J37/26
CPC分类号： H01J37/04 , B82Y10/00 , B82Y40/00 , H01J37/09 , H01J37/10 , H01J37/14 , H01J37/153 , H01J37/28 , H01J37/3007 , H01J37/3177 , H01J2237/0435 , H01J2237/0453 , H01J2237/047 , H01J2237/04735 , H01J2237/04756 , H01J2237/06 , H01J2237/14 , H01J2237/2817 , H01J2237/31774
摘要： A particle-optical arrangement comprises a charged-particle source for generating a beam of charged particles; a multi-aperture plate arranged in a beam path of the beam of charged particles, wherein the multi-aperture plate has a plurality of apertures formed therein in a predetermined first array pattern, wherein a plurality of charged-particle beamlets is formed from the beam of charged particles downstream of the multi-aperture plate, and wherein a plurality of beam spots is formed in an image plane of the apparatus by the plurality of beamlets, the plurality of beam spots being arranged in a second array pattern; and a particle-optical element for manipulating the beam of charged particles and/or the plurality of beamlets; wherein the first array pattern has a first pattern regularity in a first direction, and the second array pattern has a second pattern regularity in a second direction electron-optically corresponding to the first direction, and wherein the second regularity is higher than the first regularity.
摘要翻译：粒子光学装置包括用于产生带电粒子束的带电粒子源; 布置在带电粒子束的光束路径中的多孔板，其中多孔板具有以预定的第一阵列图案形成在其中的多个孔，其中多个带电粒子子束由束形成在多孔板下游的带电粒子，并且其中通过所述多个子束在所述装置的图像平面中形成多个束斑，所述多个束斑以第二阵列图案布置; 以及用于操纵带电粒子束和/或多个子束的粒子光学元件; 其中所述第一阵列图案在第一方向上具有第一图案规则性，并且所述第二阵列图案在与所述第一方向对应的电子 - 光学上的第二方向上具有第二图案规则性，并且其中所述第二规则性高于所述第一规则性。

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