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1. 发明申请

US20090134339A1 ELECTRON-OPTICAL CORRECTOR FOR APLANATIC IMAGING SYSTEMS 有权
标题翻译：用于APLANICAL IMAGING SYSTEMS的电子光学校正器
公开(公告)号：US20090134339A1
公开(公告)日：2009-05-28
申请号：US12297306
申请日：2007-03-31
申请人： Stephan Uhlemann , Harald Rose , Heiko Muller
发明人： Stephan Uhlemann , Harald Rose , Heiko Muller
IPC分类号： H01J3/14
CPC分类号： H01J37/153 , H01J2237/1534
摘要： A particle-optical corrector for eliminating both the third-order aperture aberration and the third-order extra-axial coma, using circular lenses and hexapole fields, includes three coaxially arranged hexapole fields, at least one circular lens doublet being arranged between adjacent hexapole fields and adjusted so that the center hexapole field is imaged on the hexapole fields. Between the hexapole fields, an intermediate plane prevails and the intermediate planes are conjugated with one another. The three hexapole fields are identically oriented in the Larmor reference system with the intensities of the three fields being chosen so that the image aberration coefficient of the astigmatism with three-fold symmetry becomes 0. The corrective contains two hexapole fields, in which the fields of the hexapole field pair are excited anti-symmetrically to one another, and the pairs are in each case arranged around the two intermediate planes. The orientation of the hexapole field pairs is rotated with respect to the orientation defined by the hexapole fields by a sufficient angle so that the extra-axial third order coma is corrected.
摘要翻译：一种使用圆形透镜和六极场消除三次孔径像差和三次超外差彗差的粒子光学校正器包括三个同轴布置的六极场，至少一个圆形透镜双曲线布置在相邻的六极场之间并调整为使六边形中心六极场成像。在六极场之间，以中间平面为准，中间平面彼此共轭。三个六极场在拉莫尔参考系中相同取向，选择三个场的强度，使得具有三重对称性的像散的像差系数变为0.校正包含两个六极场，其中场六极场对被彼此反对称地激励，并且在每种情况下这些对围绕两个中间平面布置。六极场对的取向相对于由六极场限定的取向旋转足够的角度，以便校正异轴三阶彗差。

2. 发明授权

US06797962B1 Electrostatic corrector for eliminating the chromatic aberration of particle lenses 有权
标题翻译：用于消除粒子透镜色差的静电校正器
公开(公告)号：US06797962B1
公开(公告)日：2004-09-28
申请号：US10018193
申请日：2002-03-05
申请人： Harald Rose , Stephan Uhlemann , Christoph Weissbacker
发明人： Harald Rose , Stephan Uhlemann , Christoph Weissbacker
IPC分类号： H01J314
CPC分类号： H01J37/153 , H01J2237/1516
摘要： An electrostatic corrector for eliminating the chromatic aberration of particle lenses, includes a corrector having a straight optical axis and an electrostatic quadrupole for allocating to the objective lens. Two corrector pieces are positioned behind the quadrupole, along the optical axis in the direction of radiation. Each corrector piece has three electrical quadrupole fields with an overlying circular lens field. The quadrupole fields, however, are rotated 90° about the optical axis in relation to each other. This arrangement is adjusted so that the astigmatic first image of one sectional view lies in one corrector piece and the astigmatic first image perpendicular thereto, of the other sectional view, lies in the other corrector piece, with another electrostatic quadrupole being located on the output side.
摘要翻译：用于消除粒子透镜的色像差的静电校正器包括具有用于分配到物镜的直线光轴和静电四极杆的校正器。两个校正件位于四极杆的后面，沿着辐射方向的光轴。每个校正器具有三个具有上覆圆形透镜场的四极四极场。然而，四极场相对于彼此绕光轴旋转90°。调整这种布置，使得一个截面图的散光的第一图像位于一个校正件中，并且另一截面图垂直于其的象散的第一图像位于另一个校正件中，另一个静电四极杆位于输出侧。

3. 发明授权

US07800076B2 Electron-optical corrector for aplanatic imaging systems 有权
标题翻译：用于摄影系统的电子 - 光学校正器
公开(公告)号：US07800076B2
公开(公告)日：2010-09-21
申请号：US12297306
申请日：2007-03-31
申请人： Stephan Uhlemann , Harald Rose , Heiko Müller
发明人： Stephan Uhlemann , Harald Rose , Heiko Müller
IPC分类号： H01J37/153
CPC分类号： H01J37/153 , H01J2237/1534
摘要： A particle-optical corrector for eliminating both the third-order aperture aberration and the third-order extra-axial coma, using circular lenses and hexapole fields, includes three coaxially arranged hexapole fields, at least one circular lens doublet being arranged between adjacent hexapole fields and adjusted so that the center hexapole field is imaged on the hexapole fields. Between the hexapole fields, an intermediate plane prevails and the intermediate planes are conjugated with one another. The three hexapole fields are identically oriented in the Larmor reference system with the intensities of the three fields being chosen so that the image aberration coefficient of the astigmatism with three-fold symmetry becomes 0. The corrective contains two hexapole fields, in which the fields of the hexapole field pair are excited anti-symmetrically to one another, and the pairs are in each case arranged around the two intermediate planes. The orientation of the hexapole field pairs is rotated with respect to the orientation defined by the hexapole fields by a sufficient angle so that the extra-axial third order coma is corrected.
摘要翻译：一种使用圆形透镜和六极场消除三次孔径像差和三次超外差彗差的粒子光学校正器包括三个同轴布置的六极场，至少一个圆形透镜双曲线布置在相邻的六极场之间并调整为使六边形中心六极场成像。在六极场之间，以中间平面为准，中间平面彼此共轭。三个六极场在拉莫尔参考系中相同取向，选择三个场的强度，使得具有三重对称性的像散的像差系数变为0.校正包含两个六极场，其中场六极场对被彼此反对称地激励，并且在每种情况下这些对围绕两个中间平面布置。六极场对的取向相对于由六极场确定的取向旋转足够的角度，以便校正异轴三阶彗差。

4. 发明授权

US06836372B2 Electrostatic corrector 有权
标题翻译：静电校正器
公开(公告)号：US06836372B2
公开(公告)日：2004-12-28
申请号：US10466744
申请日：2003-07-18
申请人： Harald Rose , Stephan Uhlemann , Christoph Weissbäcker
发明人： Harald Rose , Stephan Uhlemann , Christoph Weissbäcker
IPC分类号： G02B1100
CPC分类号： H01J37/153
摘要： An electrostatic corrector with a rectilinear optical axis has two corrective parts, which are arranged one behind the other along the optical axis and which have respective quadrupole fields and superimposed circular lens fields. The astigmatic intermediate image of one cross-section that is created by an axis point lies in one corrective part and the astigmatic intermediate image of the other cross-section, which is perpendicular to the first cross-section, lies in the other corrective part. An object of the invention is to eliminate the chromatic aberration of particle lenses. To achieve this, an electrostatic corrector is used, which includes two corrector units having similar instrumental construction, with each of the two corrector units having input and output sides on which two additional electrostatic quadrupoles are located. The two corrector units represent the axial paths in a telescopic manner in a 1:1 representation. The two corrector units are arranged one behind the other along the optical axia and are rotated by 90° about the optical axis relative to one another.
摘要翻译：具有直线光轴的静电校正器具有两个校正部件，它们沿着光轴一个接一个布置，并且具有相应的四极场和叠加的圆形透镜场。由轴点产生的一个横截面的像散中间图像位于一个校正部分中，并且垂直于第一横截面的另一横截面的像散中间图像位于另一校正部分中。本发明的目的是消除粒子透镜的色差。为了实现这一点，使用静电校正器，其包括具有相似器件结构的两个校正器单元，两个校正器单元中的每一个具有输入和输出侧，两个额外的静电四极杆位于其上。两个校正单元以1：1表示法以伸缩方式表示轴向路径。两个校正单元沿着光学轴线一个接一个地布置，并且相对于彼此围绕光轴旋转90°。

5. 发明授权

US5449914A Imaging electron energy filter 失效
标题翻译：成像电子能过滤器
公开(公告)号：US5449914A
公开(公告)日：1995-09-12
申请号：US218343
申请日：1994-03-25
申请人： Harald Rose , Stephan Uhlemann , Eugen Weimer
发明人： Harald Rose , Stephan Uhlemann , Eugen Weimer
IPC分类号： G01Q30/02 , H01J37/05 , H01J37/26 , H01J49/44 , H01J49/46 , H01J37/14
CPC分类号： H01J37/05 , H01J49/46 , H01J2237/055 , H01J2237/057 , H01J2237/26
摘要： The invention relates to an electron energy filter for electron microscopes as well as to an electron microscope equipped with such a filter. The filter comprises three sector magnets with the deflection field in the first sector magnet being homogeneous. The deflection field in each of the two other sector magnets is an inhomogeneous gradient field. To generate the gradient field, the pole pieces of the two other sector magnets have the form of segments of truncated double cones. The electron beam passes the first homogeneous sector magnet twice. Multipole elements are arranged in front of, behind and between the three sector magnets. The filter has a large dispersion also for high-energy electrons while at the same time providing a compact configuration. All second-order aberrations and the significant second-rank aberrations are corrected by means of the multiple elements.
摘要翻译：本发明涉及一种用于电子显微镜的电子能量过滤器以及配有这种过滤器的电子显微镜。滤波器包括三扇形磁体，其中第一扇形磁体中的偏转场是均匀的。两个其他扇形磁体中的每一个中的偏转场是不均匀的梯度场。为了产生梯度场，两个其他扇形磁体的极片具有截顶双锥段的形式。电子束通过第一均匀扇形磁体两次。多极元件布置在三个扇形磁体之前，后面和之间。该滤波器对于高能电子也具有大的色散，同时提供紧凑的结构。通过多个元素校正所有二阶像差和显着的二次像差。

6. 发明申请

US20080283749A1 Corrective For Eliminating the Third-Order Aperture Aberration and the First-Order, First-Degree Axial, Chromatic Aberration 有权
标题翻译：纠正三阶孔径畸变和一阶，一级轴向，色差
公开(公告)号：US20080283749A1
公开(公告)日：2008-11-20
申请号：US12096579
申请日：2005-12-06
申请人： Heiko Muller , Harald Rose
发明人： Heiko Muller , Harald Rose
IPC分类号： G01N23/00 , G02B9/00
CPC分类号： H01J37/153 , H01J37/26 , H01J2237/1534
摘要： A corrective for eliminating the third-order aperture aberration and the first-order, first-degree axial chromatic aberration includes two correction pieces, which are arranged one behind the other in the direction of the optical axis, in which each correction piece has a plurality of quadrupole fields (QP) and at least one octupole field (OP.) Each correction piece is constructed such that it is symmetrical with respect to its central plane (S, S′) with each correction piece having an uneven number of at least five quadrupole fields (QP) and at least one octupole field (OP). Each correction piece is further constructed so that it is symmetrical with respect to its central plane. The central quadrupole field is arranged so that it is centered with respect to the central plane of the correction piece and is electromagnetic. The quadrupole fields of the two correction pieces are antisymmetrical and a transfer lens system is arranged such that it is symmetrical with respect to the central plane of the corrective between the correction pieces. The transfer lens system has two round lenses and the setting of the transfer lens system takes place so that the two round lenses image the central plane of the two correction pieces anamorphically onto one another, in which the enlargement in one main section is the reciprocal of the enlargement in the other main section and with an octupole field superimposed on the central quadrupole field.
摘要翻译：用于消除三次孔径像差和一级一级轴向色差的校正方法包括两个校正片，其在光轴方向上一个接一个布置，其中每个校正片具有多个四极场（QP）和至少一个八极场（OP）。每个校正片被构造成使得它相对于其中心平面（S，S'）是对称的，每个校正片具有不均匀数量的至少五个四极场（QP）和至少一个八极场（OP）。每个校正件进一步构造成使得它相对于其中心平面是对称的。中心四极场被布置为使得其相对于校正件的中心平面居中并且是电磁的。两个校正块的四极场是反对称的，并且转印透镜系统被布置成使得其相对于校正片之间的校正的中心平面对称。转印透镜系统具有两个圆形透镜，并且传送透镜系统的设置发生，使得两个圆形透镜彼此变形地将两个校正片的中心平面成像，其中一个主要部分的放大是另一个主要部分的放大和一个叠加在中心四极场上的八极场。

7. 发明授权

US07989776B2 Corrective for eliminating the third-order aperture aberration and the first-order, first-degree axial, chromatic aberration 有权
标题翻译：纠正消除三阶孔径像差和一级，一度轴向色差
公开(公告)号：US07989776B2
公开(公告)日：2011-08-02
申请号：US12096579
申请日：2005-12-06
申请人： Heiko Müller , Harald Rose
发明人： Heiko Müller , Harald Rose
IPC分类号： H01J1/50
CPC分类号： H01J37/153 , H01J37/26 , H01J2237/1534
摘要： A corrective for eliminating the third-order aperture aberration and the first-order, first-degree axial chromatic aberration includes two correction pieces, which are arranged one behind the other in the direction of the optical axis, in which each correction piece has a plurality of quadrupole fields (QP) and at least one octupole field (OP.) Each correction piece is constructed such that it is symmetrical with respect to its central plane (S, S′) with each correction piece having an uneven number of at least five quadrupole fields (QP) and at least one octupole field (OP). Each correction piece is further constructed so that it is symmetrical with respect to its central plane. The central quadrupole field is arranged so that it is centered with respect to the central plane of the correction piece and is electromagnetic. The quadrupole fields of the two correction pieces are antisymmetrical and a transfer lens system is arranged such that it is symmetrical with respect to the central plane of the corrective between the correction pieces. The transfer lens system has two round lenses and the setting of the transfer lens system takes place so that the two round lenses image the central plane of the two correction pieces anamorphically onto one another, in which the enlargement in one main section is the reciprocal of the enlargement in the other main section and with an octupole field superimposed on the central quadrupole field.
摘要翻译：用于消除三次孔径像差和一级一级轴向色差的校正方法包括两个校正片，其在光轴方向上一个接一个布置，其中每个校正片具有多个四极场（QP）和至少一个八极场（OP）。每个校正片被构造成使得它相对于其中心平面（S，S'）是对称的，每个校正片具有不均匀数量的至少五个四极场（QP）和至少一个八极场（OP）。每个校正件进一步构造成使得它相对于其中心平面是对称的。中心四极场被布置为使得其相对于校正件的中心平面居中并且是电磁的。两个校正块的四极场是反对称的，并且转印透镜系统被布置成使得其相对于校正片之间的校正的中心平面对称。转印透镜系统具有两个圆形透镜，并且传送透镜系统的设置发生，使得两个圆形透镜彼此变形地将两个校正片的中心平面成像，其中一个主要部分的放大是另一个主要部分的放大和一个叠加在中心四极场上的八极场。

8. 发明授权

US07807965B2 Corrector for axial and off-axial beam paths 有权
标题翻译：用于轴向和离轴光束路径的校正器
公开(公告)号：US07807965B2
公开(公告)日：2010-10-05
申请号：US12230632
申请日：2008-09-03
申请人： Joachim Zach , Harald Rose
发明人： Joachim Zach , Harald Rose
IPC分类号： H01J37/153 , H01J37/26 , G21K1/08
CPC分类号： H01J37/153 , H01J37/26 , H01J2237/1534
摘要： A corrector (1) for the axial and off-axial beam path of a particle-optical system, comprises a first (10) and a second (20) correction piece, which are disposed one behind the other in the beam path (2) on an optical axis (3). Each correction piece (10, 20) comprises four successive multipole elements (11, 12, 13, 14; 24, 23, 22, 21) disposed symmetrically with respect to a center plane (5) and with the following fields: wherein the first (11; 24) and the fourth (14; 21) multipole elements of the multipole elements (11, 12, 13, 14; 24, 23, 22, 21) are used to generate quadrupole fields (11′, 14′; 24′, 21′) and the second (12; 23) and third (13; 22) are used to generate octupole fields (12′″, 13′″; 23′″,22′″) and quadrupole fields (12′, 13′; 23′,22′), wherein the latter are superposed magnetic (12′, 13′; 23′, 22′) and electric fields (12″, 13″; 23″, 22″), wherein the quadrupole fields (11′, 12′, 13′, 14′; 24′, 23′, 22′, 21′) of all four multipole elements (11, 12, 13, 14; 24, 23, 22,21) are rotated from one to the next through 90°. An astigmatism of third order is corrected by a central multipole element disposed in the center plane and generating an octupole field.
摘要翻译：一种用于粒子光学系统的轴向和非轴向光束路径的校正器（1）包括在光束路径（2）中一个在另一个之后设置的第一（10）和第二（20）校正片，在光轴（3）上。每个校正件（10,20）包括相对于中心平面（5）对称设置的四个连续的多极元件（11,12,13,14，24,23,22,21），并具有以下场：其中第一（11; 24）和多极元件（11,12,13,14; 24,23,22,21）的第四（14; 21）多极元件用于产生四极场（11'，14'; 24 '，21'）和第二（12; 23）和第三（13; 22）用于产生八极场（12“，13”“23”“22”“）和四极场（12' 13'; 23'，22'），其中后者是重叠的磁（12'，13'; 23'，22'）和电场（12“，13”; 23“，22”），其中四极场所有四个多极元件（11,12,13,14; 24,23,22,21）的所述四个多极元件（11,12,13,14; 24,23,22,21）的所述四个多极元件（11'，12'，13'，14'; 24'，23'，22'，21' 一个到下一个到90°。通过设置在中心平面中的中心多极元件校正三阶散光并产生八极场。

9. 发明授权

US06784437B2 Corrector for correcting first-order chromatic aberrations of the first degree 有权
标题翻译：用于校正第一度的一阶色差的校正器
公开(公告)号：US06784437B2
公开(公告)日：2004-08-31
申请号：US10309262
申请日：2002-12-04
申请人： Harald Rose
发明人： Harald Rose
IPC分类号： H01J3714
CPC分类号： B82Y10/00 , B82Y40/00 , H01J37/153 , H01J37/3174 , H01J2237/1534 , H01J2237/3175 , H01J2237/31754
摘要： The invention is directed to a corrector for correcting energy-dependent first-order aberrations of the first degree as well as third-order spherical aberrations of electron-optical lens systems. The corrector includes at least one quadropole septuplet (S1) having seven quadrupoles (Q1 to Q7). The quadrupoles are mounted symmetrically to a center plane (ZS) so as to permit excitation along a linear axis. The corrector furthermore includes at least five octopoles (O1 to O7) which can be excited within the quadrupole septuplet. In an advantageous embodiment, two quadrupole septuplets are mounted in series one behind the other. The quadrupole fields of the two quadrupole septuplets are excited antisymmetrically to a center plane lying between the two quadrupole septuplets. With such a system, all geometric third-order aberrations and additional energy-dependent first-order aberrations of the third degree and geometric fifth-order aberrations of a lens system can be corrected in addition to the axial and off-axial first-order chromatic aberrations of the first degree.
摘要翻译：本发明涉及用于校正电子 - 光学透镜系统的第一度以及三阶球面像差的能量相关一阶像差的校正器。校正器包括至少一个具有七个四极管（Q1至Q7）的四极簧片（S1）。四极杆对称地安装在中心平面（ZS）上，以便沿线性轴线激发。校正器还包括至少五个八极管（O1至O7），其可以在四极六通孔内被激发。在一个有利的实施例中，两个四极簧片串联地一个接一个地安装。两个四极七分体的四极场与位于两个四极六分体之间的中心平面反对称地被激发。利用这样的系统，除了轴向和轴向外的一阶色度之外，可以校正透镜系统的第三度和第五级像差的所有几何三阶像差和附加的依赖于能量的一阶像差第一度的畸变。

10. 发明授权

US06774372B1 Electron-optical lens arrangement with an axis that can be largely displaced 失效
标题翻译：具有可大幅偏移的轴的电子 - 光学透镜装置
公开(公告)号：US06774372B1
公开(公告)日：2004-08-10
申请号：US10018904
申请日：2002-01-15
申请人： Harald Rose , Peter Schmid , Roland Janzen
发明人： Harald Rose , Peter Schmid , Roland Janzen
IPC分类号： H01J3726
CPC分类号： B82Y10/00 , B82Y40/00 , H01J37/3007 , H01J37/3174
摘要： An electron-optical lens arrangement with an axis that can be substantially displaced, and useful for electron lithography, includes a cylinder lens and a quadrupole field. The plane of symmetry of the quadrupole field extends in the mid-plane of the gap pertaining to the cylinder lens. The focussing level of the quadrupole is oriented in the direction of the gap. The amount of the focussing refractive power belonging to the cylinder lens is twice as high as the amount of the quadrupole. A deflection system for the charged particles is connected upstream in the level of the gap pertaining to the cylinder lens and several electrodes or pole shoes, which generate a quadrupole field are provided in the direction of the gap pertaining to the cylinder lens. The electrodes or pole shoes can be individually and, preferably, successively excited and the quadrupole field can be displaced according to the deflection of the particle beam, so that the particle beam impinges upon the area of the quadrupole field. A holding device is provided for an object, such as a wafer, and is arranged vertically in relation to the optical axis and can be displaced in relation to the direction of the gap pertaining to the cylinder lens.
摘要翻译：可以基本上位移并且可用于电子光刻的电子 - 光学透镜装置包括柱面透镜和四极场。四极场的对称平面在与柱面透镜相关的间隙的中间平面内延伸。四极杆的聚焦位置取向于间隙的方向。属于圆柱透镜的聚焦屈光力的量是四极的量的两倍。带电粒子的偏转系统在与气缸透镜相关的间隙的水平面上游连接，并且产生四极场的几个电极或极靴在与气缸透镜相关的间隙的方向上设置。电极或极靴可以单独地，优选地被连续地激发，并且四极场可以根据粒子束的偏转而移位，使得粒子束撞击四极场的区域。为诸如晶片的物体提供保持装置，并且相对于光轴垂直地布置，并且可以相对于与柱面透镜相关的间隙的方向移位。

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