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    • 1. 发明授权
    • Material processing system and method
    • 材料加工系统及方法
    • US07435973B2
    • 2008-10-14
    • US11499776
    • 2006-08-07
    • Hans W. P. KoopsPeter Hoffrogge
    • Hans W. P. KoopsPeter Hoffrogge
    • G21K7/00
    • H01J37/3056H01J2237/006H01J2237/162H01J2237/166H01J2237/31732H01J2237/31744
    • A material processing system for processing a work piece is provided. The material processing is effected by supplying a reactive gas and energetic radiation for activation of the reactive gas to a surrounding of a location of the work piece to be processed. The radiation is preferably provided by an electron microscope. An objective lens of the electron microscope is preferably disposed between a detector of the electron microscope and the work piece. A gas supply arrangement of the material processing system comprises a valve disposed spaced apart from the processing location, a gas volume between the valve and a location of emergence of the reaction gas being small. The gas supply arrangement further comprises a temperature-adjusted, especially cooled reservoir for accommodating a starting material for the reactive gas.
    • 提供了一种用于处理工件的材料处理系统。 材料处理通过提供反应气体和能量辐射来激活反应气体到待处理工件的位置的周围。 辐射优选由电子显微镜提供。 电子显微镜的物镜优选设置在电子显微镜的检测器和工件之间。 材料处理系统的气体供应装置包括与处理位置间隔开的阀,阀之间的气体体积和反应气体的出现位置较小。 气体供应装置还包括温度调节的特别冷却的储存器,用于容纳用于反应气体的起始材料。
    • 2. 发明授权
    • Material processing system and method
    • 材料加工系统及方法
    • US07868290B2
    • 2011-01-11
    • US12232972
    • 2008-09-26
    • Hans W. P. KoopsPeter Hoffrogge
    • Hans W. P. KoopsPeter Hoffrogge
    • G01N23/00
    • H01J37/3056H01J2237/006H01J2237/162H01J2237/166H01J2237/31732H01J2237/31744
    • A material processing system for processing a work piece is provided. The material processing is effected by supplying a reactive gas and energetic radiation for activation of the reactive gas to a surrounding of a location of the work piece to be processed. The radiation is preferably provided by an electron microscope. An objective lens of the electron microscope is preferably disposed between a detector of the electron microscope and the work piece. A gas supply arrangement of the material processing system comprises a valve disposed spaced apart from the processing location, a gas volume between the valve and a location of emergence of the reaction gas being small. The gas supply arrangement further comprises a temperature-adjusted, especially cooled reservoir for accommodating a starting material for the reactive gas.
    • 提供了一种用于处理工件的材料处理系统。 材料处理通过提供反应气体和能量辐射来激活反应气体到待处理工件的位置的周围。 辐射优选由电子显微镜提供。 电子显微镜的物镜优选设置在电子显微镜的检测器和工件之间。 材料处理系统的气体供应装置包括与处理位置间隔开的阀,阀之间的气体体积和反应气体的出现位置较小。 气体供应装置还包括温度调节的特别冷却的储存器,用于容纳用于反应气体的起始材料。
    • 3. 发明授权
    • Electron spectrometer
    • 电子光谱仪
    • US06903549B2
    • 2005-06-07
    • US10362181
    • 2001-08-08
    • Hans W. P. KoopsAlexander Kaya
    • Hans W. P. KoopsAlexander Kaya
    • H01J49/06H01J49/44H01J49/48H01L29/06H01L29/76G01V3/00
    • B82Y10/00H01J49/44H01L29/7613
    • Inordinate localised systems are used at room temperature in a novel device in the form of an electron spectrometer for utilising single-electron electronic applications. Said electron spectrometer device consists of a nanocrystalline metal or a nanocrystalline semiconductor material used as conductor strip connection in the form of an inlet or an outlet for single-electron electronic components and circuits consisting of lithographically produced quantum dots. The resulting single-electron electronic device consisting of quantum dots is supplied with energetically very sharply defined electrons. Said device can thus be operated at room temperature, undisturbed by phonons.
    • 在室温下使用过量的局部化系统以电子光谱仪形式用于利用单电子电子应用的新型器件。 所述电子分光计装置由纳米晶体金属或纳米晶体半导体材料组成,该材料用作单晶电子元件入口或出口形式的导体条连接,以及由光刻产生的量子点组成的电路。 所产生的由量子点组成的单电子电子器件被提供能量非常清晰的电子。 因此,所述装置可以在室温下操作,而不被声子干扰。
    • 6. 发明授权
    • Method for determining a refractive index
    • 确定折射率的方法
    • US06967714B2
    • 2005-11-22
    • US10240221
    • 2001-03-24
    • Hans W. P. KoopsAlexander KayaOttokar Leminger
    • Hans W. P. KoopsAlexander KayaOttokar Leminger
    • G01N21/41G01N21/47
    • G01N21/4788G01N21/41
    • The matter for which the refractive index is to be determined, is made available in the form of a theoretically determinable scattering or diffraction pattern. Two or more orders of diffraction may then be defined to form at least one intensity ratio. At least one intensity distribution may be formed by irradiating the scattering pattern using one light beam of a defined shape. Subsequently thereto, the intensity ratio may be formed based on the orders of diffraction of the intensity distribution. In addition, at least one portion of a characteristic curve may be determined, which represents the dependency of the intensity ratio on the refractive index, and, with whose assistance, the corresponding refractive index can be assigned to the intensity ratio formed.
    • 要确定折射率的问题以理论上可确定的散射或衍射图案的形式提供。 然后可以限定两个或多个衍射级以形成至少一个强度比。 可以通过使用具有限定形状的一个光束照射散射图案来形成至少一个强度分布。 随后,可以基于强度分布的衍射次数来形成强度比。 此外,可以确定特征曲线的至少一部分,其表示强度比对折射率的依赖性,并且通过它们的帮助可以将相应的折射率分配给所形成的强度比。
    • 7. 发明授权
    • Optical spectroscopy device and method for its manufacture
    • 光谱仪及其制造方法
    • US08868156B1
    • 2014-10-21
    • US10149045
    • 2000-11-22
    • Hans W. P. KoopsAndreas Reinhardt
    • Hans W. P. KoopsAndreas Reinhardt
    • A61B5/00
    • G01N21/6452G01J3/02G01J3/0256G01J3/0259G01J3/4406G01J3/443G01N2021/6417G01N2021/6478
    • A device (1) for use in optical spectroscopy and a method for its manufacture are described. The device includes at least one light source (8) and at least one spectrometer (3) fabricated integratively, the optical components of the at least one spectrometer (3) being optical microcomponents (11,13,16,19,20,21) which are mounted integratively on the top and/or bottom side (9,12) of a substrate board (2). In the method according to the present invention, at least one light source (8) is mounted on a substrate board (2), and at least one spectrometer (3) is produced monolithically in a three-dimensional integration on the substrate board (2). In this context, the spectrometer (3) that is produced according to the method is assembled from optical microcomponents (11,13,16,19,20,21).
    • 描述了用于光谱学的装置(1)及其制造方法。 所述装置包括至少一个光源(8)和至少一个光谱仪(3),所述至少一个光谱仪(3)被整体地制造,所述至少一个光谱仪(3)的光学部件是光学微组件(11,13,16,19,20,21) 它们一体地安装在基板(2)的顶部和/或底部(9,12)上。 在根据本发明的方法中,至少一个光源(8)安装在基板(2)上,并且至少一个光谱仪(3)在基板(2)上以三维积分制造 )。 在本文中,根据该方法制备的光谱仪(3)由光学微组件(11,13,16,19,20,21)组装。
    • 8. 发明授权
    • Method using photonic crystals for the dispersion compensation of optical signals of different wavelengths which are transmitted together
    • 使用光子晶体对不同波长的光信号进行色散补偿的方法一起传输
    • US06760513B1
    • 2004-07-06
    • US09937579
    • 2001-12-20
    • Walter HeitmannHans W. P. Koops
    • Walter HeitmannHans W. P. Koops
    • G02B634
    • G02B6/29394B82Y20/00G02B6/12007G02B6/1225H04B10/25133
    • The present invention is directed to an economical approach for compensating for the dispersion of optical signals having different wavelengths. In accordance with the present invention, photonic crystals (K1-Kn) are positioned on a common optical waveguide (2). In this context, each photonic crystal (K1-Kn) is tuned to reflect or deflect the signals of one wavelength and to transmit the signals of other wavelengths, unattenuated. The specific arrangement of the photonic crystals (K1-Kn) on the waveguide (2) and the specific arrangement of the deflecting elements in the photonic crystal are defined, in the process, as a function of the dispersion to be compensated for between the individual wavelengths. The approach of the present invention makes it possible to assemble permanently set or controllable photonic dispersion compensators of a high quality, which are approximately 1000 times shorter than conventional diffraction gratings.
    • 本发明涉及用于补偿具有不同波长的光信号的色散的经济方法。根据本发明,光子晶体(K1-Kn)位于公共光波导(2)上。 在这种情况下,每个光子晶体(K1-Kn)被调谐以反射或偏转一个波长的信号并且传输其它波长的信号,而不是衰减的。 光子晶体(K1-Kn)在波导(2)上的具体布置以及光子晶体中的偏转元件的具体布置被定义为在该过程中作为待个体之间补偿的色散的函数 本发明的方法使得可以组装高质量的永久设置或可控的光子色散补偿器,其比常规衍射光栅近约1000倍。
    • 9. 发明授权
    • Photonic crystal devices formed by a charged-particle beam
    • 由带电粒子束形成的光子晶体器件
    • US6093246A
    • 2000-07-25
    • US574810
    • 1995-12-19
    • Shawn-Yu LinHans W. P. Koops
    • Shawn-Yu LinHans W. P. Koops
    • G02B6/122G02B6/13G02B6/132G03F7/00C30B29/02
    • B82Y20/00G02B6/1221G02B6/1225G02B6/13G02B6/132G03F7/001
    • A photonic crystal device and method. The photonic crystal device comprises a substrate with at least one photonic crystal formed thereon by a charged-particle beam deposition method. Each photonic crystal comprises a plurality of spaced elements having a composition different from the substrate, and may further include one or more impurity elements substituted for spaced elements. Embodiments of the present invention may be provided as electromagnetic wave filters, polarizers, resonators, sources, mirrors, beam directors and antennas for use at wavelengths in the range from about 0.2 to 200 microns or longer. Additionally, photonic crystal devices may be provided with one or more electromagnetic waveguides adjacent to a photonic crystal for forming integrated electromagnetic circuits for use at optical, infrared, or millimeter-wave frequencies.
    • 一种光子晶体器件及方法。 光子晶体器件包括通过带电粒子束沉积方法在其上形成有至少一个光子晶体的衬底。 每个光子晶体包括具有不同于衬底的组成的多个间隔元件,并且还可包括取代间隔元件的一个或多个杂质元素。 本发明的实施例可以被提供为在约0.2至200微米或更长的波长范围内使用的电磁波滤波器,偏振器,谐振器,源,反射镜,光束导向器和天线。 此外,光子晶体器件可以设置有与光子晶体相邻的一个或多个电磁波导,用于形成用于光学,红外或毫米波频率的集成电磁电路。