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    • 1. 发明授权
    • Method and system for providing an improved hard bias structure
    • 提供改进的硬偏置结构的方法和系统
    • US08343319B1
    • 2013-01-01
    • US12238156
    • 2008-09-25
    • Guanxiong LiXiaohai XiangMing MaoMahendra Pakala
    • Guanxiong LiXiaohai XiangMing MaoMahendra Pakala
    • C23C14/34
    • G11B5/3932G11B5/3163
    • A method and system for providing a magnetic transducer is described. The method and system define a magnetoresistive sensor in a track width direction, provide hard bias material(s) adjacent to the sensor in the track width direction, and provide sacrificial capping layer(s) on a portion of the hard bias material(s). The sacrificial capping layer(s) have a first height in a stripe height direction. The method and system also provide a mask for defining a stripe height of the sensor. The mask covers at least part of the sensor and has a second height in the stripe height direction. The second height is less than the first height. The method and system define the stripe height of the sensor while the mask covers the sensor. The sacrificial capping layer(s) are configured to prevent removal of the portion of the hard bias material(s) while the stripe height is defined.
    • 描述了一种用于提供磁换能器的方法和系统。 该方法和系统在磁道宽度方向上限定磁阻传感器,在磁道宽度方向上提供与传感器相邻的硬偏置材料,并在硬偏置材料的一部分上提供牺牲性覆盖层, 。 牺牲覆盖层具有条纹高度方向上的第一高度。 该方法和系统还提供用于定义传感器的条纹高度的掩模。 掩模覆盖传感器的至少一部分,并且在条纹高度方向上具有第二高度。 第二个高度小于第一个高度。 该方法和系统定义传感器的条纹高度,同时掩模覆盖传感器。 牺牲覆盖层被构造成在限定条纹高度的同时防止去除硬偏移材料的一部分。
    • 6. 发明授权
    • Method and system for providing a magnetic recording transducer using a line hard mask
    • 使用线硬掩模提供磁记录传感器的方法和系统
    • US08233248B1
    • 2012-07-31
    • US12560669
    • 2009-09-16
    • Guanxiong LiWei ZhangMing Mao
    • Guanxiong LiWei ZhangMing Mao
    • G11B5/39B44C1/22
    • G11B5/398G01R33/098G11B5/3163G11B5/3932H01L43/12Y10T29/49041Y10T29/49046Y10T29/49052
    • A method and system for fabricating a magnetic transducer is described. The transducer has a device region, a field region, and a magnetoresistive stack. The method and system include providing a hard mask on the magnetoresistive stack. The hard mask is inorganic and includes a sensor portion and a line frame. The sensor portion covers a first portion of the magnetoresistive stack corresponding to a magnetoresistive structure. The line frame covers a second portion of the magnetoresistive stack in the device region. The method and system include defining the magnetoresistive structure in a track width direction using the hard mask and providing at least one hard bias material after the magnetoresistive structure is defined. A first portion of the hard bias material(s) is substantially adjacent to the magnetoresistive structure in the track width direction. The method and system also include removing a second portion of the hard bias material(s).
    • 描述了用于制造磁换能器的方法和系统。 换能器具有器件区域,场区域和磁阻堆叠。 该方法和系统包括在磁阻堆叠上提供硬掩模。 硬掩模是无机的,并且包括传感器部分和线框架。 传感器部分覆盖对应于磁阻结构的磁阻堆叠的第一部分。 线框架覆盖器件区域中的磁阻堆叠的第二部分。 该方法和系统包括使用硬掩模限定磁道宽度方向上的磁阻结构,并且在限定了磁阻结构之后提供至少一种硬偏置材料。 硬偏压材料的第一部分在磁道宽度方向上基本上与磁阻结构相邻。 该方法和系统还包括去除硬偏压材料的第二部分。
    • 9. 发明授权
    • Method and system for providing a perpendicular magnetic recording head
    • 用于提供垂直磁记录头的方法和系统
    • US08334093B2
    • 2012-12-18
    • US12262572
    • 2008-10-31
    • Jinqiu ZhangHai SunHongping YuanTsung Yuan ChenGuanxiong Li
    • Jinqiu ZhangHai SunHongping YuanTsung Yuan ChenGuanxiong Li
    • H04R31/00
    • G11B5/3163G11B5/1278G11B5/3116Y10T29/49041
    • A method and system for providing a PMR pole in a magnetic recording transducer including an intermediate layer are disclosed. The method and system include providing a mask on the intermediate layer. The mask includes a line having at least one side. A hard mask layer is provided on the mask. At least a portion of the hard mask layer resides on the side(s) of the line. At least part of the hard mask layer on the side(s) of the line is removed. Thus, at least a portion of the line is exposed. The line is then removed, providing an aperture in the hard mask corresponding to the line. The method also includes forming a trench in the intermediate layer under the aperture. The trench top is wider than its bottom. The method further includes providing a PMR pole, at least a portion of which resides in the trench.
    • 公开了一种用于在包括中间层的磁记录换能器中提供PMR极的方法和系统。 该方法和系统包括在中间层上提供掩模。 掩模包括具有至少一个侧面的线。 在掩模上设置硬掩模层。 硬掩模层的至少一部分位于线的一侧。 除去线的侧面上的硬掩模层的至少一部分。 因此,线的至少一部分被暴露。 然后去除线,在对应于线的硬掩模中提供孔。 该方法还包括在孔下方的中间层中形成沟槽。 沟槽顶部比底部宽。 该方法还包括提供PMR极,其至少一部分位于沟槽中。