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1. 发明授权

US06261959B1 Method and apparatus for chemically-mechanically polishing semiconductor wafers 失效
标题翻译：用于化学机械抛光半导体晶片的方法和装置
公开(公告)号：US06261959B1
公开(公告)日：2001-07-17
申请号：US09540385
申请日：2000-03-31
申请人： Glenn Travis , Christopher Pena
发明人： Glenn Travis , Christopher Pena
IPC分类号： H01L2100
CPC分类号： B24B37/245 , B24B41/005
摘要： An apparatus for chemically-mechanically polishing a semiconductor wafer comprises a receiving surface attached with a frame; a loading mechanism in contact with the receiving surface, the loading mechanism being configured to load measured portions of a wafer-polishing member containing a fixed abrasive onto the receiving surface; a reciprocation device attached with at least a portion of the receiving surface, the reciprocation device being powered to move the receiving surface in a linear, bi-directional motion; and a wafer holder positioned to releasably hold a wafer adjacent to the receiving surface. Methods of chemically-mechanically polishing semiconductor wafers are also provided.
摘要翻译：一种用于化学机械抛光半导体晶片的设备包括：附接有框架的接收表面; 与接收表面接触的装载机构，所述装载机构构造成将包含固定磨料的晶片抛光构件的测量部分加载到所述接收表面上; 附接有所述接收表面的至少一部分的往复运动装置，所述往复运动装置被驱动以使所述接收表面以线性的双向运动移动; 以及定位成将晶片可靠地保持在与接收表面相邻的晶片保持架。还提供了化学机械研磨半导体晶片的方法。

2. 发明授权

US08959704B1 Debris collection devices 有权
标题翻译：碎片收集装置
公开(公告)号：US08959704B1
公开(公告)日：2015-02-24
申请号：US13815350
申请日：2013-02-25
申请人： Christopher Pena
发明人： Christopher Pena
IPC分类号： A47L13/52 , B65B67/12 , B65F1/14
CPC分类号： B65F1/1415 , B65F1/10 , B65F2210/181 , B65F2240/138
摘要： Provided herein are devices which facilitate collection of debris from various locations, such as roads, driveways, and fields. An article provided in accordance with some embodiments includes a receiver with an opening suitable for admitting debris, and also having panels connected thereto which assist in directing debris into the opening of the receiver. An adapter body having a proximal end attached to the receiver permits debris to pass through the adapter body to the distal end of the adapter body, and the distal end is fitted with a collection receptacle, which receptacle comprises a sack, bag or the like that contains perforations or holes sufficiently dimensioned to enable air to pass through the wall of the sack, bag, or the like, while retaining debris within the interior volume of the sack, bag, or the like.
摘要翻译：这里提供了便于从诸如道路，车道和田野等不同位置收集碎屑的装置。根据一些实施例提供的物品包括具有适于容纳碎片的开口的接收器，并且还具有连接到其上的面板，其有助于将碎屑引导到接收器的开口中。具有附接到接收器的近端的适配器主体允许碎片穿过适配器主体到达适配器主体的远端，并且远端装配有收集容器，该容器包括袋，袋等，包含足够尺寸的穿孔或孔，以使空气能够通过袋，袋等的壁，同时将碎屑保持在袋，袋等的内部体积内。

3. 发明授权

US07735177B1 Brush core assembly 有权
标题翻译：刷芯组装
公开(公告)号：US07735177B1
公开(公告)日：2010-06-15
申请号：US11351567
申请日：2006-02-10
申请人： Jeffrey J. Farber , Christopher Pena , Edward Orbeta
发明人： Jeffrey J. Farber , Christopher Pena , Edward Orbeta
IPC分类号： H01L21/00
CPC分类号： H01L21/67046
摘要： A brush core for use in cleaning a substrate is provided. The brush core includes an elongated cylinder having a first end and a second end. The first end of the elongated cylinder is configured to receive a drive hub. The second end is configured to receive fluid into an inner cavity of the elongated cylinder. The inner cavity is configured to distribute fluid to a plurality of fluid channels having a first diameter. The plurality of fluid channels are configured to distribute the fluid to corresponding distribution holes having a second diameter. The brush core further including a plurality of non-fluid distributing pockets defined on the outer surface. The corresponding distribution holes and plurality of non-fluid distributing pockets are configured so that a thickness of a solid portion of the brush core is substantially similar. In one embodiment, the first diameter is less than the second diameter.
摘要翻译：提供了用于清洁基板的刷芯。刷芯包括具有第一端和第二端的细长圆筒。细长圆柱体的第一端构造成接收驱动毂。第二端构造成将流体接收到细长圆柱体的内腔中。内腔构造成将流体分配到具有第一直径的多个流体通道。多个流体通道被配置成将流体分配到具有第二直径的相应的分配孔。刷芯还包括限定在外表面上的多个非流体分配袋。相应的分配孔和多个非流体分配袋被构造成使得刷芯的实心部分的厚度基本相似。在一个实施例中，第一直径小于第二直径。

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