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1. 发明授权

US06908364B2 Method and apparatus for probe tip cleaning and shaping pad 有权
标题翻译：探针头清洁和成型垫的方法和装置
公开(公告)号：US06908364B2
公开(公告)日：2005-06-21
申请号：US09921327
申请日：2001-08-02
申请人： Gerald W. Back , Son Dang , Bahadir Tunaboylu
发明人： Gerald W. Back , Son Dang , Bahadir Tunaboylu
IPC分类号： B24B19/16 , B24B29/08 , B24D3/28 , B24D13/14 , B24D18/00 , B24D11/00
CPC分类号： B24B29/08 , B24B19/16 , B24D3/28 , B24D13/142 , B24D18/0045 , B24D18/0072
摘要： A method and apparatus is provided for cleaning and shaping a probe tip using a multi-layer adhesive and abrasive pad. The multi-layer adhesive and abrasive pad is constructed on the surface of a support structure, such as a silicon wafer, and is made of an adhesive in contact with abrasive particles. Adhesive is applied in layers with abrasive particles in-between each layer of adhesive. Abrasive particles may vary in size and material from layer to layer to achieve cleaning, shaping and polishing objectives.
摘要翻译：提供了一种使用多层粘合剂和磨料垫来清洁和成形探针尖端的方法和装置。多层粘合剂和研磨垫被构造在诸如硅晶片的支撑结构的表面上，并且由与磨料颗粒接触的粘合剂制成。粘合剂以每层粘合剂之间的磨料颗粒层施加。研磨颗粒的尺寸和材料可以在层间变化以实现清洁，成型和抛光目标。

2. 发明授权

US08430676B2 Modular space transformer for fine pitch vertical probing applications 有权
标题翻译：用于细间距垂直探测应用的模块化空间变压器
公开(公告)号：US08430676B2
公开(公告)日：2013-04-30
申请号：US12538639
申请日：2009-08-10
申请人： Son Dang , Rehan Kazmi , Gerald Back , Bahadir Tunaboylu
发明人： Son Dang , Rehan Kazmi , Gerald Back , Bahadir Tunaboylu
IPC分类号： H01R12/00
CPC分类号： G01R31/2889 , Y10T29/4902
摘要： In an embodiment, a modular space transformer for use in a probe card assembly includes a bottom plate, a guide plate, and a top plate. The guide plate is configured for mounting in a cut-out of the bottom plate. The guide plate has a first surface and a second surface and additionally has a first plurality of spaced electrical connections disposed in a plurality of apertures formed through the guide plate for providing electrical connections between a plurality of test probe contacts and a plurality of guide plate contacts. The top plate has a plurality of spaced electrical contacts disposed through the top plate with at least one of the plurality of guide plate contacts electrically connected to at least one of the plurality of spaced electrical contacts.
摘要翻译：在一个实施例中，用于探针卡组件的模块化空间变换器包括底板，导向板和顶板。引导板被配置为安装在底板的切口中。引导板具有第一表面和第二表面，并且另外具有第一多个间隔开的电连接，设置在通过引导板形成的多个孔中，用于提供多个测试探针触点和多个引导板触点之间的电连接。顶板具有穿过顶板设置的多个间隔开的电触点，多个引导板触点中的至少一个与多个间隔开的电触点中的至少一个电连接。

3. 发明授权

US07182672B2 Method of probe tip shaping and cleaning 有权
标题翻译：探针尖端成型和清洁方法
公开(公告)号：US07182672B2
公开(公告)日：2007-02-27
申请号：US11139460
申请日：2005-05-27
申请人： Bahadir Tunaboylu , Jeff Hicklin , Ivan Pipps , Son Dang , Gerry Back
发明人： Bahadir Tunaboylu , Jeff Hicklin , Ivan Pipps , Son Dang , Gerry Back
IPC分类号： B25B1/00 , B24D11/04 , H01L21/66
CPC分类号： B24B19/16 , B24B29/08 , B24D3/28 , B24D13/142 , B24D18/0045 , B24D18/0072
摘要： Methods are provided for shaping, maintaining the shape of, and cleaning a probe tip using a pad such as a multi-layer adhesive and abrasive pad. The multi-layer adhesive and abrasive pad may be formed from layers of adhesive material having abrasive particles in-between each layer. Using the pad, probe tips may be shaped as desired from an unfinished probe stock, substantially limiting the use of relatively expensive conventional machining operations. Further, the pad may also be used to maintain probe tips in a desired operating shape. Still further, the pad may be used to clean accumulated debris from the probe tip. Preferably, the maintenance and cleaning operations are performed on-line, with the probes operatively installed in connection with testing machinery.
摘要翻译：提供了使用诸如多层粘合剂和研磨垫的垫来成形，保持探针尖端的形状和清洁探针尖端的方法。多层粘合剂和研磨垫可以由在各层之间具有磨料颗粒的粘合剂材料层形成。使用垫，探针尖端可以根据需要从未完成的探针坯料成型，从而基本上限制了相对昂贵的常规加工操作的使用。此外，垫也可以用于将探针尖端保持在期望的操作形状。此外，垫可以用于清洁来自探针尖端的积聚的碎屑。优选地，维护和清洁操作在线执行，探头可操作地安装在与测试机器相连接上。

4. 发明申请

US20110032063A1 Modular Space Transformer For Fine Pitch Vertical Probing Applications 有权
标题翻译：用于精细间距垂直探测应用的模块化空间变压器
公开(公告)号：US20110032063A1
公开(公告)日：2011-02-10
申请号：US12538639
申请日：2009-08-10
申请人： Son Dang , Rehan Kazmi , Gerald Back , Bahadir Tunaboylu
发明人： Son Dang , Rehan Kazmi , Gerald Back , Bahadir Tunaboylu
IPC分类号： H01F27/29 , H01F41/00
CPC分类号： G01R31/2889 , Y10T29/4902
摘要： In an embodiment, a modular space transformer for use in a probe card assembly includes a bottom plate, a guide plate, and a top plate. The guide plate is configured for mounting in a cut-out of the bottom plate. The guide plate has a first surface and a second surface and additionally has a first plurality of spaced electrical connections disposed in a plurality of apertures formed through the guide plate for providing electrical connections between a plurality of test probe contacts and a plurality of guide plate contacts. The top plate has a plurality of spaced electrical contacts disposed through the top plate with at least one of the plurality of guide plate contacts electrically connected to at least one of the plurality of spaced electrical contacts.
摘要翻译：在一个实施例中，用于探针卡组件的模块化空间变换器包括底板，导向板和顶板。引导板被配置为安装在底板的切口中。引导板具有第一表面和第二表面，并且另外具有第一多个间隔开的电连接，设置在通过引导板形成的多个孔中，用于提供多个测试探针触点和多个引导板触点之间的电连接。顶板具有穿过顶板设置的多个间隔开的电触点，多个引导板触点中的至少一个与多个间隔开的电触点中的至少一个电连接。

5. 发明申请

US20050260937A1 Method of probe tip shaping and cleaning 有权
标题翻译：探针尖端成型和清洁方法
公开(公告)号：US20050260937A1
公开(公告)日：2005-11-24
申请号：US11139460
申请日：2005-05-27
申请人： Bahadir Tunaboylu , Jeff Hicklin , Ivan Pipps , Son Dang , Gerry Back
发明人： Bahadir Tunaboylu , Jeff Hicklin , Ivan Pipps , Son Dang , Gerry Back
IPC分类号： B24B19/16 , B24B29/08 , B24D3/28 , B24D13/14 , B24D18/00 , B24B1/00
CPC分类号： B24B19/16 , B24B29/08 , B24D3/28 , B24D13/142 , B24D18/0045 , B24D18/0072
摘要： Methods are provided for shaping, maintaining the shape of, and cleaning a probe tip using a pad such as a multi-layer adhesive and abrasive pad. The multi-layer adhesive and abrasive pad may be formed from layers of adhesive material having abrasive particles in-between each layer. Using the pad, probe tips may be shaped as desired from an unfinished probe stock, substantially limiting the use of relatively expensive conventional machining operations. Further, the pad may also be used to maintain probe tips in a desired operating shape. Still further, the pad may be used to clean accumulated debris from the probe tip. Preferably, the maintenance and cleaning operations are performed on-line, with the probes operatively installed in connection with testing machinery.
摘要翻译：提供了使用诸如多层粘合剂和研磨垫的垫来成形，保持探针尖端的形状和清洁探针尖端的方法。多层粘合剂和研磨垫可以由在各层之间具有磨料颗粒的粘合剂材料层形成。使用垫，探针尖端可以根据需要从未完成的探针坯料成型，从而基本上限制了相对昂贵的常规加工操作的使用。此外，垫也可以用于将探针尖端保持在期望的操作形状。此外，垫可以用于清洁来自探针尖端的积聚的碎屑。优选地，维护和清洁操作在线执行，探头可操作地安装在与测试机器相连接上。

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