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1. 发明授权

US08739627B2 Inertial sensor with off-axis spring system 有权
标题翻译：惯性传感器带离轴弹簧系统
公开(公告)号：US08739627B2
公开(公告)日：2014-06-03
申请号：US13282192
申请日：2011-10-26
申请人： Gary G. Li , Yizhen Lin , Andrew C. McNeil , Lisa Z. Zhang
发明人： Gary G. Li , Yizhen Lin , Andrew C. McNeil , Lisa Z. Zhang
IPC分类号： G01C19/56
CPC分类号： G01C19/5747 , G01C19/5762
摘要： An inertial sensor (20) includes a drive mass (30) configured to undergo oscillatory motion and a sense mass (32) linked to the drive mass (30). On-axis torsion springs (58) are coupled to the sense mass (32), the on-axis torsion springs (58) being co-located with an axis of rotation (22). The inertial sensor (20) further includes an off-axis spring system (60). The off-axis spring system (60) includes off-axis springs (68, 70, 72, 74), each having a connection interface (76) coupled to the sense mass (32) at a location on the sense mass (32) that is displaced away from the axis of rotation (22). Together, the on-axis torsion springs (58) and the off-axis spring system (60) enable the sense mass (32) to oscillate out of plane about the axis of rotation (22) at a sense frequency that substantially matches a drive frequency of the drive mass (30).
摘要翻译：惯性传感器（20）包括构造成经历振荡运动的驱动质量块（30）和与驱动质量块（30）连接的感测质量块（32）。轴上扭转弹簧（58）联接到感测质量块（32），所述轴上扭转弹簧（58）与旋转轴线（22）共同定位。惯性传感器（20）还包括离轴弹簧系统（60）。离轴弹簧系统（60）包括离轴弹簧（68,70,72,74），每个离轴弹簧具有在感测质量块（32）上的位置处耦合到感测质量块（32）的连接界面（76）其远离旋转轴线（22）移位。一起，轴上扭转弹簧（58）和离轴弹簧系统（60）使得感测质量（32）能够以基本匹配驱动器的感测频率围绕旋转轴线（22）摆动离开平面驱动质量（30）的频率。

2. 发明申请

US20130319117A1 MEMS SENSOR WITH STRESS ISOLATION AND METHOD OF FABRICATION 有权
标题翻译：具有应力隔离的MEMS传感器和制造方法
公开(公告)号：US20130319117A1
公开(公告)日：2013-12-05
申请号：US13482332
申请日：2012-05-29
申请人： Andrew C. McNeil , Gary G. Li , Lisa Z. Zhang , Yizhen Lin
发明人： Andrew C. McNeil , Gary G. Li , Lisa Z. Zhang , Yizhen Lin
IPC分类号： G01P15/125 , H01R43/00
CPC分类号： G01P15/125 , G01P15/0802 , G01P15/18 , G01P2015/0831
摘要： A MEMS sensor (20, 86) includes a support structure (26) suspended above a surface (28) of a substrate (24) and connected to the substrate (24) via spring elements (30, 32, 34). A proof mass (36) is suspended above the substrate (24) and is connected to the support structure (26) via torsional elements (38). Electrodes (42, 44), spaced apart from the proof mass (36), are connected to the support structure (26) and are suspended above the substrate (24). Suspension of the electrodes (42, 44) and proof mass (36) above the surface (28) of the substrate (24) via the support structure (26) substantially physically isolates the elements from deformation of the underlying substrate (24). Additionally, connection via the spring elements (30, 32, 34) result in the MEMS sensor (22, 86) being less susceptible to movement of the support structure (26) due to this deformation.
摘要翻译： MEMS传感器（20,86）包括悬挂在基板（24）的表面（28）上方并通过弹簧元件（30,32,34）连接到基板（24）的支撑结构（26）。证明物质（36）悬挂在基底（24）上方，并通过扭转元件（38）连接到支撑结构（26）。与证明物质（36）间隔开的电极（42,44）连接到支撑结构（26）并悬挂在基底（24）上方。通过支撑结构（26）将基片（24）的表面（28）上方的电极（42,44）和检验质量块（36）悬挂在基本上物理上隔离下面的基底（24）的变形。此外，通过弹簧元件（30,32,34）的连接导致MEMS传感器（22,86）由于这种变形而不易受支撑结构（26）的移动的影响。

3. 发明授权

US08925384B2 MEMS sensor with stress isolation and method of fabrication 有权
标题翻译：具有应力隔离的MEMS传感器和制造方法
公开(公告)号：US08925384B2
公开(公告)日：2015-01-06
申请号：US13482332
申请日：2012-05-29
申请人： Andrew C. McNeil , Gary G. Li , Lisa Z. Zhang , Yizhen Lin
发明人： Andrew C. McNeil , Gary G. Li , Lisa Z. Zhang , Yizhen Lin
IPC分类号： G01P15/125
CPC分类号： G01P15/125 , G01P15/0802 , G01P15/18 , G01P2015/0831
摘要： A MEMS sensor (20, 86) includes a support structure (26) suspended above a surface (28) of a substrate (24) and connected to the substrate (24) via spring elements (30, 32, 34). A proof mass (36) is suspended above the substrate (24) and is connected to the support structure (26) via torsional elements (38). Electrodes (42, 44), spaced apart from the proof mass (36), are connected to the support structure (26) and are suspended above the substrate (24). Suspension of the electrodes (42, 44) and proof mass (36) above the surface (28) of the substrate (24) via the support structure (26) substantially physically isolates the elements from deformation of the underlying substrate (24). Additionally, connection via the spring elements (30, 32, 34) result in the MEMS sensor (22, 86) being less susceptible to movement of the support structure (26) due to this deformation.
摘要翻译： MEMS传感器（20,86）包括悬挂在基板（24）的表面（28）上方并通过弹簧元件（30,32,34）连接到基板（24）的支撑结构（26）。证明物质（36）悬挂在基底（24）上方，并通过扭转元件（38）连接到支撑结构（26）。与证明物质（36）间隔开的电极（42,44）连接到支撑结构（26）并悬挂在基底（24）上方。通过支撑结构（26）将基片（24）的表面（28）上方的电极（42,44）和检验质量块（36）悬挂在基本上物理上隔离下面的基底（24）的变形。此外，通过弹簧元件（30,32,34）的连接导致MEMS传感器（22,86）由于这种变形而不易受支撑结构（26）的移动的影响。

4. 发明授权

US08610222B2 MEMS device with central anchor for stress isolation 有权
标题翻译：具有中心锚杆的MEMS器件用于应力隔离
公开(公告)号：US08610222B2
公开(公告)日：2013-12-17
申请号：US13088579
申请日：2011-04-18
申请人： Yizhen Lin , Gary G. Li , Andrew C. McNeil , Todd F. Miller , Lisa Z. Zhang
发明人： Yizhen Lin , Gary G. Li , Andrew C. McNeil , Todd F. Miller , Lisa Z. Zhang
IPC分类号： H01L27/14
CPC分类号： B81B3/0072 , B81B2203/0136 , B81B2203/0307
摘要： A MEMS device (20) includes a proof mass (32) coupled to and surrounding an immovable structure (30). The immovable structure (30) includes fixed fingers (36, 38) extending outwardly from a body (34) of the structure (30). The proof mass (32) includes movable fingers (60), each of which is disposed between a pair (62) of the fixed fingers (36, 38). A central area (42) of the body (34) is coupled to an underlying substrate (24), with the remainder of the immovable structure (30) and the proof mass (32) being suspended above the substrate (24) to largely isolate the MEMS device (20) from package stress, Additionally, the MEMS device (20) includes isolation trenches (80) and interconnects (46, 50, 64) so that the fixed fingers (36), the fixed fingers (38), and the movable fingers (60) are electrically isolated from one another to yield a differential device configuration.
摘要翻译： MEMS装置（20）包括联接到并围绕不可移动结构（30）的检验质量块（32）。不动结构（30）包括从结构（30）的主体（34）向外延伸的固定指状物（36,38）。检测质量块（32）包括可动指状物（60），每个指状物设置在固定指状物（36,38）的一对（62）之间。主体（34）的中心区域（42）联接到下面的基板（24），其中不可移动的结构（30）的其余部分和证明质量块（32）悬挂在基板（24）上方以大大隔离另外，MEMS器件（20）包括隔离沟槽（80）和互连（46,50,64），使得固定指状物（36），固定指状物（38）和可动指状物（60）彼此电隔离以产生差分装置构型。

5. 发明申请

US20130104651A1 INERTIAL SENSOR WITH OFF-AXIS SPRING SYSTEM 有权
标题翻译：具有偏轴弹簧系统的惯性传感器
公开(公告)号：US20130104651A1
公开(公告)日：2013-05-02
申请号：US13282192
申请日：2011-10-26
申请人： Gary G. Li , Yizhen Lin , Andrew C. McNeil , Lisa Z. Zhang
发明人： Gary G. Li , Yizhen Lin , Andrew C. McNeil , Lisa Z. Zhang
IPC分类号： G01C19/56
CPC分类号： G01C19/5747 , G01C19/5762
摘要： An inertial sensor (20) includes a drive mass (30) configured to undergo oscillatory motion and a sense mass (32) linked to the drive mass (30). On-axis torsion springs (58) are coupled to the sense mass (32), the on-axis torsion springs (58) being co-located with an axis of rotation (22). The inertial sensor (20) further includes an off-axis spring system (60). The off-axis spring system (60) includes off-axis springs (68, 70, 72, 74), each having a connection interface (76) coupled to the sense mass (32) at a location on the sense mass (32) that is displaced away from the axis of rotation (22). Together, the on-axis torsion springs (58) and the off-axis spring system (60) enable the sense mass (32) to oscillate out of plane about the axis of rotation (22) at a sense frequency that substantially matches a drive frequency of the drive mass (30).
摘要翻译：惯性传感器（20）包括构造成经历振荡运动的驱动质量块（30）和与驱动质量块（30）连接的感测质量块（32）。轴上扭转弹簧（58）联接到感测质量块（32），所述轴上扭转弹簧（58）与旋转轴线（22）共同定位。惯性传感器（20）还包括离轴弹簧系统（60）。离轴弹簧系统（60）包括离轴弹簧（68,70,72,74），每个离轴弹簧具有在感测质量块（32）上的位置处耦合到感测质量块（32）的连接界面（76）其远离旋转轴线（22）移位。一起，轴上扭转弹簧（58）和离轴弹簧系统（60）使得感测质量（32）能够以基本匹配驱动器的感测频率围绕旋转轴线（22）摆动离开平面驱动质量（30）的频率。

6. 发明申请

US20120262026A1 MEMS DEVICE WITH CENTRAL ANCHOR FOR STRESS ISOLATION 有权
标题翻译：具有中心锚杆的应力分离的MEMS装置
公开(公告)号：US20120262026A1
公开(公告)日：2012-10-18
申请号：US13088579
申请日：2011-04-18
申请人： Yizhen Lin , Gary G. Li , Andrew C. McNeil , Lisa Z. Zhang , Todd F. Miller
发明人： Yizhen Lin , Gary G. Li , Andrew C. McNeil , Lisa Z. Zhang , Todd F. Miller
IPC分类号： H02N11/00
CPC分类号： B81B3/0072 , B81B2203/0136 , B81B2203/0307
摘要： A MEMS device (20) includes a proof mass (32) coupled to and surrounding an immovable structure (30). The immovable structure (30) includes fixed fingers (36, 38) extending outwardly from a body (34) of the structure (30). The proof mass (32) includes movable fingers (60), each of which is disposed between a pair (62) of the fixed fingers (36, 38). A central area (42) of the body (34) is coupled to an underlying substrate (24), with the remainder of the immovable structure (30) and the proof mass (32) being suspended above the substrate (24) to largely isolate the MEMS device (20) from package stress, Additionally, the MEMS device (20) includes isolation trenches (80) and interconnects (46, 50, 64) so that the fixed fingers (36), the fixed fingers (38), and the movable fingers (60) are electrically isolated from one another to yield a differential device configuration.
摘要翻译： MEMS装置（20）包括联接到并围绕不可移动结构（30）的检验质量块（32）。不动结构（30）包括从结构（30）的主体（34）向外延伸的固定指状物（36,38）。检测质量块（32）包括可动指状物（60），每个指状物设置在固定指状物（36,38）的一对（62）之间。主体（34）的中心区域（42）联接到下面的基板（24），其中不可移动的结构（30）的其余部分和证明质量块（32）悬挂在基板（24）上方以大大隔离另外，MEMS器件（20）包括隔离沟槽（80）和互连（46,50,64），使得固定指状物（36），固定指状物（38）和可动指状物（60）彼此电隔离以产生差分装置构型。

7. 发明申请

US20110174074A1 FRAMED TRANSDUCER DEVICE 审中-公开
标题翻译：框架传动装置
公开(公告)号：US20110174074A1
公开(公告)日：2011-07-21
申请号：US12688560
申请日：2010-01-15
申请人： Gary G. Li , Todd F. Miller , Lisa Z. Zhang
发明人： Gary G. Li , Todd F. Miller , Lisa Z. Zhang
IPC分类号： G01C19/56
CPC分类号： G01C19/5755 , G01P15/125 , G01P2015/0814 , G01P2015/082
摘要： A MEMS device (20) includes a substrate (22), a proof mass (28), and a frame structure (30) laterally spaced apart from the proof mass (28). Compliant members (36) are coupled to the proof mass (28) and the frame structure (30) to retain the proof mass (28) suspended above the surface (26) of the substrate (22) without directly coupling the proof mass (28) to the substrate (22). Anchors (32) suspend the frame structure (30) above the surface (26) of the substrate (22) without directly coupling the structure (30) to the substrate (22), and retain the structure (30) immovable relative to the substrate (22) in a sense direction (42). The compliant members (36) enable movement of the proof mass (28) in the sense direction (42). Movable fingers (38) extending from the proof mass (28) are disposed between fixed fingers (46) extending from the frame structure (30) to form a differential capacitive structure.
摘要翻译： MEMS装置（20）包括基板（22），检验质量块（28）和与证明块（28）横向间隔开的框架结构（30）。合格构件（36）联接到校验块（28）和框架结构（30），以将悬挂在衬底（22）的表面（26）上方的校准质量块（28）保持在一起，而不直接将校验块（28 ）到基板（22）。锚固件（32）将框架结构（30）悬挂在衬底（22）的表面（26）上方，而不将结构（30）直接耦合到衬底（22），并且保持结构（30）相对于衬底不可移动（22）在感测方向（42）上。柔性构件（36）使检测质量块（28）能够在感测方向（42）上移动。从防弹块（28）延伸的可动手指（38）设置在从框架结构（30）延伸的固定指状物（46）之间以形成差分电容结构。

8. 发明申请

US20140230549A1 SPRING SYSTEM FOR MEMS DEVICE 审中-公开
标题翻译：用于MEMS器件的弹簧系统
公开(公告)号：US20140230549A1
公开(公告)日：2014-08-21
申请号：US13770224
申请日：2013-02-19
申请人： Andrew C. McNeil , Gary G. Li
发明人： Andrew C. McNeil , Gary G. Li
IPC分类号： G01C19/5684 , G01C25/00
CPC分类号： G01C19/5684 , G01C19/574 , G01C25/00 , Y10T29/49002
摘要： A spring system (74) links a pair of drive masses (30, 32) of a MEMS device (72). The spring system (74) includes stiff beams (76, 78, 80, 82) oriented to form a parallelogram arrangement (84). The beams are oriented diagonal to a drive direction (56) of the masses (30, 32). Diagonally opposing corners (86, 88) of the parallelogram arrangement (84) are coupled to the drive masses (30, 32). A spring (90) is coupled to a corner (94) and a spring (92) is coupled to a diagonally opposing corner (96) of the parallelogram arrangement. The springs (90, 92) are interconnected with a sense frame (34) surrounding the drive masses. The beams and side springs are stiff to substantially prevent in-phase motion (66) of the drive masses. However, rotationally compliant flexures (102, 104, 106, 108), allow the arrangement (84) to collapse and expand to enable anti-phase motion (60) of the drive masses.
摘要翻译：弹簧系统（74）连接MEMS装置（72）的一对驱动块（30,32）。弹簧系统（74）包括定向成形成平行四边形布置（84）的刚性梁（76,78,80,82）。梁与质量块（30,32）的驱动方向（56）成对角定向。平行四边形排列（84）的对角线对角（86,88）联接到驱动块（30,32）。弹簧（90）联接到角部（94）并且弹簧（92）联接到平行四边形布置的对角相对的拐角（96）。弹簧（90,92）与围绕驱动块的感测框架（34）互连。梁和侧弹簧是刚性的，以基本上防止驱动块的同相运动（66）。然而，旋转柔性挠曲件（102,104,106,108）允许装置（84）折叠和膨胀以使得驱动质量块能够进行反相运动（60）。

9. 发明授权

US08056415B2 Semiconductor device with reduced sensitivity to package stress 有权
标题翻译：对封装应力敏感性降低的半导体器件
公开(公告)号：US08056415B2
公开(公告)日：2011-11-15
申请号：US12130702
申请日：2008-05-30
申请人： Andrew C. McNeil , Aaron A. Geisberger , Daniel N. Koury, Jr. , Gary G. Li
发明人： Andrew C. McNeil , Aaron A. Geisberger , Daniel N. Koury, Jr. , Gary G. Li
IPC分类号： G01P15/125
CPC分类号： B81B3/0072 , B81B2201/0235 , B81B2203/0109 , B81B2203/0136 , G01P1/006 , G01P15/0802 , G01P15/125 , G01P15/18 , G01P2015/0814 , G01P2015/082
摘要： A microelectromechanical systems (MEMS) sensor (52) includes a substrate (62) a movable element (58) spaced apart from the substrate (62), suspension anchors (66, 68, 70, 72) formed on the substrate (62), and compliant members (74) interconnecting the movable element (58) with the suspension anchors. The MEMS sensor (52) further includes fixed fingers (76) and fixed finger anchors (78) attaching the fixed fingers (76) to the substrate (62). The movable element (58) includes openings (64). At least one of the suspension anchors resides in at least one of the multiple openings (64) and pairs (94) of the fixed fingers (76) reside in other multiple openings (64). The MEMS sensor (52) is symmetrically formed, and a location of the fixed finger anchors (78) defines an anchor region (103) within which the suspension anchors (66, 68, 70, 72) are positioned.
摘要翻译：微机电系统（MEMS）传感器（52）包括基板（62），与基板（62）间隔开的可移动元件（58），形成在基板（62）上的悬挂锚固件（66,68,70,72）以及将可移动元件（58）与悬挂锚固件互连的柔性构件（74）。 MEMS传感器（52）还包括将固定指状物（76）附接到基底（62）的固定指状物（76）和固定指状锚（78）。可移动元件（58）包括开口（64）。悬挂锚中的至少一个驻留在多个开口（64）中的至少一个中，固定指状物（76）的对（94）位于其它多个开口（64）中。 MEMS传感器（52）对称地形成，并且固定指状物锚定件（78）的位置限定了锚定区域（103），悬挂锚固件（66,68,70,72）定位在锚定区域内。

10. 发明授权

US08555719B2 MEMS sensor with folded torsion springs 有权
标题翻译：具有折叠扭力弹簧的MEMS传感器
公开(公告)号：US08555719B2
公开(公告)日：2013-10-15
申请号：US13012643
申请日：2011-01-24
申请人： Andrew C. McNeil , Gary G. Li
发明人： Andrew C. McNeil , Gary G. Li
IPC分类号： G01P15/125
CPC分类号： G01P15/125 , G01P2015/0831 , G01P2015/086
摘要： A microelectromechanical systems (MEMS) sensor (40) includes a substrate (46) and a suspension anchor (54) formed on a planar surface (48) of the substrate (46). A first folded torsion spring (58) and a second folded torsion spring (60) interconnect the movable element (56) with the suspension anchor (54) to suspend the movable element (56) above the substrate (46). The folded torsion springs (58, 60) are each formed from multiple segments (76) that are linked together by bar elements (78) in a serpentine fashion. The folded torsion springs (58, 60) have an equivalent shape and are oriented relative to one another in rotational symmetry about a centroid (84) of the suspension anchor (54).
摘要翻译：微机电系统（MEMS）传感器（40）包括形成在基板（46）的平面（48）上的基板（46）和悬挂锚（54）。第一折叠扭簧（58）和第二折叠扭簧（60）将可移动元件（56）与悬挂锚固件（54）相互连接，以将可移动元件（56）悬置在基板（46）上方。折叠的扭转弹簧（58,60）各自由多个段（76）形成，所述多个段（76）通过杆元件（78）以蛇形方式连接在一起。折叠的扭转弹簧（58,60）具有等效的形状并且相对于彼此以悬挂锚定件（54）的重心（84）为中心的旋转对称定向。

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