专利快速检索-快速检索全球专利，免费商用专利数据库-IPRDB

1. 发明授权

US10239167B2 Stiffness-frequency adjustable XY micromotion stage based on stress stiffening 有权
公开(公告)号：US10239167B2
公开(公告)日：2019-03-26
申请号：US15114090
申请日：2014-09-24
申请人： Guangdong University of Technology
发明人： Zhijun Yang , Youdun Bai , Xin Chen , Jian Gao , Haidong Yang , Meng Wang , Hui Tang
IPC分类号： B23Q1/34 , B23Q1/62 , B23Q5/28
摘要： The present disclosure involves occasions where precise two-dimensional motion takes place, and is applicable to XY motion stages for precise displacement compensation. The present disclosure particularly involves a stiffness-frequency adjustable XY micromotion stage based on stress stiffening, which includes X-direction and Y-direction motion sub-stages and corresponding drivers and a micromotion working table. The micromotion stage uses membrane sets that have tension levels thereof adjusted by bolts as a flexible hinge, so as to achieve independent adjustment of the vibration frequency of the XY micromotion stage. The present disclosure implements the foregoing configuration based on prestressed membrane, so the frequency is adjustable. The inherent frequency of the micromotion stage can be adjusted before or during operation according to various working conditions and driving frequency. The two feed motion direction are perpendicular so as to prevent the micromotion working table from coupling during two-dimensional motion.

2. 发明授权

US11715655B1 Flexure-based continuous ejector pin mechanism for mini/micro chip mass transfer 有权
公开(公告)号：US11715655B1
公开(公告)日：2023-08-01
申请号：US18062025
申请日：2022-12-06
申请人： GUANGDONG UNIVERSITY OF TECHNOLOGY
发明人： Xin Chen , Zhihang Lin , Hui Tang , Hongcheng Li , Jian Gao , Qiang Liu , Xun Chen
IPC分类号： H01L21/67 , H01L33/00
CPC分类号： H01L21/67144 , H01L33/0093
摘要： A flexure-based continuous ejector pin mechanism for Mini/Micro chip mass transfer includes a first drive frame, a second drive frame, a mounting base, a first thorn die attach drive device, a second thorn die attach drive device, first flexible hinges, second flexible hinges, and a pricking pin. The second drive frame and the first drive frame are connected through the first flexible hinge. The mounting base is connected to a left side and a right side of the second drive frame through the second flexible hinges. Compared with a laser transfer technology, the flexible movable thorn die attach device has lower cost and higher accuracy; compared with a vacuum nozzle transfer technology, the flexible movable thorn die attach device has higher transfer efficiency and quality; and compared with a conventional thorn die attach device, the flexible movable thorn die attach device has higher transfer efficiency and precision.

3. 发明申请

US20170001275A1 STIFFNESS-FREQUENCY ADJUSTABLE XY MICROMOTION STAGE BASED ON STRESS STIFFENING 审中-公开
标题翻译：基于应力强化的柔性 - 频率可调XY显微镜
公开(公告)号：US20170001275A1
公开(公告)日：2017-01-05
申请号：US15114090
申请日：2014-09-24
申请人： GUANGDONG UNIVERSITY OF TECHNOLOGY
发明人： Zhijun Yang , Youdun Bai , Xin Chen , Jian Gao , Haidong Yang , Meng Wang , Hui Tang
IPC分类号： B23Q1/34 , B23Q5/28 , B23Q1/62
CPC分类号： B23Q1/34 , B23Q1/62 , B23Q5/28 , B23Q2210/002 , B23Q2230/004
摘要： The present disclosure involves occasions where precise two-dimensional motion takes place, and is applicable to XY motion stages for precise displacement compensation. The present disclosure particularly involves a stiffness-frequency adjustable XY micromotion stage based on stress stiffening, which includes X-direction and Y-direction motion sub-stages and corresponding drivers and a micromotion working table. The micromotion stage uses membrane sets that have tension levels thereof adjusted by bolts as a flexible hinge, so as to achieve independent adjustment of the vibration frequency of the XY micromotion stage. The present disclosure implements the foregoing configuration based on prestressed membrane, so the frequency is adjustable. The inherent frequency of the micromotion stage can be adjusted before or during operation according to various working conditions and driving frequency. The two feed motion direction are perpendicular so as to prevent the micromotion working table from coupling during two-dimensional motion.
摘要翻译：本公开涉及发生精确二维运动的场合，并且适用于用于精确位移补偿的XY运动台。本公开特别涉及基于应力硬化的刚度 - 频率可调XY微动平台，其包括X方向和Y方向运动子级以及相应的驱动器和微动作工作台。微动阶段使用具有通过螺栓调节的张力水平的膜组作为柔性铰链，以便实现XY微动阶段的振动频率的独立调整。本公开实现了基于预应力膜的上述构造，因此频率是可调节的。可以根据各种工作条件和驱动频率在操作前或操作期间调整微动阶段的固有频率。两个进给运动方向是垂直的，以防止微动工作台在二维运动期间耦合。

你已经成功收藏专利！

检索式保存成功!

IPRDB

热门服务

关于我们

友情链接

联系方式