会员体验
专利管家(专利管理)
工作空间(专利管理)
风险监控(情报监控)
数据分析(专利分析)
侵权分析(诉讼无效)
联系我们
交流群
官方交流:
QQ群: 891211   
微信请扫码    >>>
现在联系顾问~
热词
    • 8. 发明授权
    • Method for manufacturing semiconductor device
    • 制造半导体器件的方法
    • US08293563B2
    • 2012-10-23
    • US12775037
    • 2010-05-06
    • Susumu Hiyama
    • Susumu Hiyama
    • H01L31/042
    • H01L27/14685H01L27/14623
    • Disclosed herein is a method for making a semiconductor device including the steps of: forming a light-receiving portion for carrying out photoelectric conversion in a semiconductor substrate; forming an insulating film to cover a light-receiving side of the semiconductor substrate; forming a metallic light-shielding film to partly cover the insulating film in correspondence to the light-receiving portion; and heating the metallic light-shielding film by irradiation of the metallic light-shielding film with a microwave to permit selective annealing of a laminated portion with the metallic light-shielding film in the insulating film.
    • 本发明公开了一种制造半导体器件的方法,包括以下步骤:在半导体衬底中形成用于进行光电转换的光接收部分; 形成绝缘膜以覆盖半导体衬底的光接收侧; 形成与所述受光部对应地部分覆盖所述绝缘膜的金属遮光膜; 以及通过用微波照射金属遮光膜来加热金属遮光膜,以允许绝缘膜中的金属遮光膜对层压部分进行选择性退火。
    • 10. 发明申请
    • METHOD FOR MANUFACTURING SOLID-STATE IMAGING DEVICE
    • 制造固态成像装置的方法
    • US20110237014A1
    • 2011-09-29
    • US13153941
    • 2011-06-06
    • Susumu HiyamaTomoyuki Hirano
    • Susumu HiyamaTomoyuki Hirano
    • H01L31/18
    • H01L27/14601H01L27/14603H01L27/1462H01L27/14685H01L27/14689
    • A method for manufacturing a solid-state imaging device in which a charge generator that detects an electromagnetic wave and generates signal charges is formed on a semiconductor substrate and a negative-charge accumulated layer having negative fixed charges is formed above a detection plane of the charge generator. The method includes the steps of: forming an oxygen-feed film capable of feeding oxygen on the detection plane of the charge generator; forming a metal film that covers the oxygen-feed film on the detection plane of the charge generator; and performing heat treatment for the metal film in an inactive atmosphere to thereby form an oxide of the metal film between the metal film and the oxygen-feed film on the detection plane of the charge generator, the oxide being to serve as the negative-charge accumulated layer.
    • 一种制造固态成像装置的方法,其中在半导体衬底上形成检测电磁波并产生信号电荷的电荷产生器,并且在电荷的检测平面上方形成具有负固定电荷的负电荷累积层 发电机。 该方法包括以下步骤:在电荷发生器的检测面上形成能够供给氧的氧供给膜; 形成覆盖所述电荷发生器的检测面上的氧供给膜的金属膜; 在惰性气氛中对金属膜进行热处理,从而在电荷发生器的检测面上形成金属膜与氧气供给膜之间的金属膜的氧化物,氧化物用作负电荷 累积层