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    • 10. 发明授权
    • Near field analysis apparatus having irradiation-side guide light and light-collection-side guide light
    • 近场分析装置具有照射侧引导灯和集光侧引导光
    • US07235807B2
    • 2007-06-26
    • US11316402
    • 2005-12-22
    • Yoshihito NaritaShigeyuki KimuraFuminori SatoAtsushi Yamada
    • Yoshihito NaritaShigeyuki KimuraFuminori SatoAtsushi Yamada
    • G01N21/86
    • G01Q60/22
    • A near field analysis apparatus comprising: an irradiation optical system comprising an irradiation-side adjustable optical system for adjusting the position or angle of an optical axis thereof, and irradiating irradiation-side guide light onto an adjustment surface via the irradiation-side adjustable optical system; a light collecting optical system comprising a light-collection-side adjustable optical system for adjusting the position or angle of an optical axis thereof, and irradiating light-collection-side guide light onto the adjustment surface via the light-collection-side adjustable optical system; an irradiation-side adjustment device for adjusting the position or angle of the irradiation-side adjustable optical system such that the spots of the guide light, which are observed at the adjustment surface, match; and a light-collection-side adjustment device for adjusting the position or angle of the light-collection-side adjustable optical system such that the spots of the guide light, which are observed at the adjustment surface, match.
    • 一种近场分析装置,包括:照射光学系统,包括用于调节其光轴的位置或角度的照射侧可调节光学系统,并且经由照射侧可调节光学系统将照射侧引导光照射到调整表面上 ; 光收集光学系统,包括用于调节其光轴的位置或角度的采光侧可调光学系统,以及经由采光侧可调节光学系统将光收集侧引导光照射到调节表面上 ; 照射侧调节装置,用于调节照射侧可调节光学系统的位置或角度,使得在调节表面观察到的引导光点相匹配; 以及采集侧调整装置,其用于调整所述收光侧可调光学系统的位置或角度,使得在所述调整面观察到的所述引导光的光斑匹配。