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1. 发明申请

US20070024951A1 Small thin film movable element, small thin film movable element array and method of driving small thin film movable element array 失效
标题翻译：小薄膜可移动元件，小薄膜可移动元件阵列及驱动小薄膜可移动元件阵列的方法
公开(公告)号：US20070024951A1
公开(公告)日：2007-02-01
申请号：US11492757
申请日：2006-07-26
申请人： Fumihiko Mochizuki , Shinya Ogikubo , Hirochika Nakamura
发明人： Fumihiko Mochizuki , Shinya Ogikubo , Hirochika Nakamura
IPC分类号： G02B26/00
CPC分类号： G02B26/0841
摘要： A small thin film movable element comprises; a movable portion supported elastically deformably and having a movable electrode at at least a portion of the movable portion; and a fixed electrode arranged to be opposed to the movable portion, wherein the movable portion is displaced by an electrostatic force in accordance with a voltage applied to the movable electrode and the fixed electrode, and wherein the voltage applied in displacing the movable portion falls in a range equal to or lower than a static pull-in voltage for bringing the movable portion into contact with a side of the fixed electrode against a resistance force generated in accordance with an amount of displacing the movable portion and equal to or higher than a minimum dynamic pull-in voltage for bringing the movable portion into contact with the side of the fixed electrode by being compounded with an inertia force generated in accordance with an operation of the movable portion.
摘要翻译：小薄膜可移动元件包括：弹性变形地支撑的活动部分，在所述可动部的至少一部分具有可动电极; 以及与所述可动部相对设置的固定电极，其中，根据施加到所述可动电极和所述固定电极的电压，所述可动部由静电力移位，并且其中施加在所述可动部的移动中的电压落入一个等于或小于静态引入电压的范围，用于使可移动部分抵抗固定电极的一侧与根据移动部分的移动量产生的阻力相等并等于或高于最小值动态引入电压，用于通过与根据可动部分的操作产生的惯性力复合使可动部分与固定电极的侧面接触。

2. 发明授权

US07436575B2 Small thin film movable element, small thin film movable element array and method of driving small thin film movable element array 失效
标题翻译：小薄膜可移动元件，小薄膜可移动元件阵列及驱动小薄膜可移动元件阵列的方法
公开(公告)号：US07436575B2
公开(公告)日：2008-10-14
申请号：US11492757
申请日：2006-07-26
申请人： Fumihiko Mochizuki , Shinya Ogikubo , Hirochika Nakamura
发明人： Fumihiko Mochizuki , Shinya Ogikubo , Hirochika Nakamura
IPC分类号： G02B26/00 , G09G3/34
CPC分类号： G02B26/0841
摘要： A small thin film movable element comprises; a movable portion supported elastically deformably and having a movable electrode at at least a portion of the movable portion; and a fixed electrode arranged to be opposed to the movable portion, wherein the movable portion is displaced by an electrostatic force in accordance with a voltage applied to the movable electrode and the fixed electrode, and wherein the voltage applied in displacing the movable portion falls in a range equal to or lower than a static pull-in voltage for bringing the movable portion into contact with a side of the fixed electrode against a resistance force generated in accordance with an amount of displacing the movable portion and equal to or higher than a minimum dynamic pull-in voltage for bringing the movable portion into contact with the side of the fixed electrode by being compounded with an inertia force generated in accordance with an operation of the movable portion.
摘要翻译：小薄膜可移动元件包括：弹性变形地支撑的活动部分，在所述可动部的至少一部分具有可动电极; 以及与所述可动部相对设置的固定电极，其中，根据施加到所述可动电极和所述固定电极的电压，所述可动部由静电力移位，并且其中施加在所述可动部的移动中的电压落入一个等于或小于静态引入电压的范围，用于使可移动部分抵抗固定电极的一侧与根据移动部分的移动量产生的阻力相等并等于或高于最小值动态引入电压，用于通过与根据可动部分的操作产生的惯性力复合使可动部分与固定电极的侧面接触。

3. 发明申请

US20070229204A1 MICRO-MECHANICAL MODULATING ELEMENT, MICRO-MECHANICAL MODULATING ELEMENT ARRAY, IMAGE FORMING APPARATUS, AND METHOD OF DESIGNING A MICRO-MECHANICAL MODULATING ELEMENT 审中-公开
标题翻译：微机械调制元件，微机械调制元件阵列，图像形成装置和设计微机械调制元件的方法
公开(公告)号：US20070229204A1
公开(公告)日：2007-10-04
申请号：US11696471
申请日：2007-04-04
申请人： Shinya OGIKUBO , Koichi Kimura , Fumihiko Mochizuki , Hirochika Nakamura
发明人： Shinya OGIKUBO , Koichi Kimura , Fumihiko Mochizuki , Hirochika Nakamura
IPC分类号： H01F7/08
CPC分类号： G02B26/0841 , H01F2007/068 , H01H47/04 , H01H59/0009 , H02N1/006
摘要： A micro-electromechanical modulating element including a plurality of movable portions as defined herein and a plurality of driving portions as defined herein, wherein a dynamic pull-in voltage defined herein is set to be lower than a hold voltage defined herein, and the driving portion drives the movable portion by a drive voltage greater than or equal to the hold voltage and the drive voltage is less than or equal to 10 V.
摘要翻译：包括如本文所定义的多个可移动部分和如本文所定义的多个驱动部分的微机电调制元件，其中本文定义的动态引入电压被设置为低于本文限定的保持电压，并且驱动部分通过大于或等于保持电压的驱动电压来驱动可动部分，并且驱动电压小于或等于10V。

4. 发明授权

US07400438B2 Micro-electro mechanical device, micro-electro mechanical device array, light modulation device, micro-electro mechanical light modulation device, micro-electro mechanical light modulation device array and image forming apparatus using the same 失效
公开(公告)号：US07400438B2
公开(公告)日：2008-07-15
申请号：US11709028
申请日：2007-02-22
申请人： Shinya Ogikubo , Koichi Kimura , Fumihiko Mochizuki
发明人： Shinya Ogikubo , Koichi Kimura , Fumihiko Mochizuki
IPC分类号： G02B26/00
CPC分类号： G02B26/0841
摘要： A transition time is a time from a state where a movable portion has been rotationally displaced in the first direction and stopped to a state where driving portions apply the physical action forces to the movable portion to rotationally displace the movable portion in the second direction, which is different from the first direction, and the movable portion reaches a final displacement position. An elastic force value of the elastic supporting portion and the transition time have such a relationship that when the elastic force value of the elastic supporting portion is equal to a certain value, the transition time takes a local maximum value. The elastic force value of the elastic supporting portion is equal to or less than the certain value at which the transition time takes the local maximum value.

5. 发明申请

US20080074728A1 Micro-electro mechanical device, micro-electro mechanical device array, light modulation device, micro-electro mechanical light modulation device, micro-electro mechanical light modulation device array and image forming apparatus using the same 失效
标题翻译：微电子机械装置，微机电装置阵列，光调制装置，微机电光调制装置，微机电光调制装置阵列及其使用的成像装置
公开(公告)号：US20080074728A1
公开(公告)日：2008-03-27
申请号：US11709028
申请日：2007-02-22
申请人： Shinya Ogikubo , Koichi Kimura , Fumihiko Mochizuki
发明人： Shinya Ogikubo , Koichi Kimura , Fumihiko Mochizuki
IPC分类号： G02B26/08 , B81B7/04
CPC分类号： G02B26/0841
摘要： A transition time is a time from a state where a movable portion has been rotationally displaced in the first direction and stopped to a state where driving portions apply the physical action forces to the movable portion to rotationally displace the movable portion in the second direction, which is different from the first direction, and the movable portion reaches a final displacement position. An elastic force value of the elastic supporting portion and the transition time have such a relationship that when the elastic force value of the elastic supporting portion is equal to a certain value, the transition time takes a local maximum value. The elastic force value of the elastic supporting portion is equal to or less than the certain value at which the transition time takes the local maximum value.
摘要翻译：过渡时间是从可动部分沿第一方向旋转移位的状态并停止到驱动部分向可动部分施加物理作用力以在第二方向旋转移动可动部分的状态的时间，与第一方向不同，并且可动部分到达最终位移位置。弹性支撑部的弹性力值和过渡时间具有这样的关系：当弹性支撑部的弹力值等于一定值时，转变时间取局部最大值。弹性支撑部的弹性力值等于或小于转变时间取局部最大值的一定值。

6. 发明授权

US07420729B2 Small thin film movable element, small thin film movable element array and method of driving small thin film movable element 失效
标题翻译：小薄膜可移动元件，小薄膜可移动元件阵列及小薄膜可移动元件的驱动方法
公开(公告)号：US07420729B2
公开(公告)日：2008-09-02
申请号：US11482737
申请日：2006-07-10
申请人： Fumihiko Mochizuki , Hirochika Nakamura
发明人： Fumihiko Mochizuki , Hirochika Nakamura
IPC分类号： G02B26/00
CPC分类号： G02B26/0841 , G02B6/3556 , G02B6/3564
摘要： A small thin film movable element comprises: a movable portion supported elastically deformably and having a movable electrode at least a portion of the movable portion; and a fixed electrode arranged to be opposed to the movable portion, wherein the movable portion is displaced by an electrostatic force in accordance with a voltage applied to the movable electrode and the fixed electrode, and wherein the movable portion comprises a vibration applying unit that applies a vibration to the movable portion at least immediately before displacing operation of the movable portion.
摘要翻译：小薄膜可移动元件包括：可弹性变形地支撑的可移动部分，并且在可移动部分的至少一部分上具有可动电极; 以及与所述可动部相对设置的固定电极，其中，所述可动部根据施加到所述可动电极和所述固定电极的电压，通过静电力而位移，并且其中，所述可动部包括施加于所述可动部的振动施加部至少在可移动部分的移动操作之前立即向可动部分发出振动。

7. 发明申请

US20070008674A1 Small thin film movable element, small thin film movable element array and method of driving small thin film movable element 失效
标题翻译：小薄膜可移动元件，小薄膜可移动元件阵列及小薄膜可移动元件的驱动方法
公开(公告)号：US20070008674A1
公开(公告)日：2007-01-11
申请号：US11482737
申请日：2006-07-10
申请人： Fumihiko Mochizuki , Hirochika Nakamura
发明人： Fumihiko Mochizuki , Hirochika Nakamura
IPC分类号： H01G7/02
CPC分类号： G02B26/0841 , G02B6/3556 , G02B6/3564
摘要： A small thin film movable element comprises: a movable portion supported elastically deformably and having a movable electrode at at least a portion of the movable portion; and a fixed electrode arranged to be opposed to the movable portion, wherein the movable portion is displaced by an electrostatic force in accordance with a voltage applied to the movable electrode and the fixed electrode, and wherein the movable portion comprises a vibration applying unit that applies a vibration to the movable portion at least immediately before displacing operation of the movable portion.
摘要翻译：小薄膜可移动元件包括：可弹性变形地支撑的可移动部分，并且在可移动部分的至少一部分上具有可动电极; 以及与所述可动部相对设置的固定电极，其中，所述可动部根据施加到所述可动电极和所述固定电极的电压，通过静电力而位移，并且其中，所述可动部包括施加于所述可动部的振动施加部至少在可移动部分的移动操作之前立即向可动部分发出振动。

8. 发明授权

US08222158B2 Electronic device, method of manufacturing the same, display and sensor 有权
标题翻译：电子设备，制造方法，显示和传感器
公开(公告)号：US08222158B2
公开(公告)日：2012-07-17
申请号：US12832077
申请日：2010-07-08
申请人： Fumihiko Mochizuki , Atsushi Tanaka
发明人： Fumihiko Mochizuki , Atsushi Tanaka
IPC分类号： H01L21/302
CPC分类号： H01L21/02631 , H01L21/02554 , H01L21/02565 , H01L27/1225 , H01L29/7869
摘要： A method of manufacturing an electronic device includes: preparing a film-attached substrate including a substrate, and an oxide semiconductor film containing In, Ga, and Zn and a metal film containing at least one of W or Mo provided in this order on the substrate; and wet-etching the metal film of the film-attached substrate using an etching liquid of which a main component is hydrogen peroxide under conditions such that an etching selection ratio between the metal film and the oxide semiconductor film (etching rate of the metal film/etching rate of the oxide semiconductor film) is 100 or higher.
摘要翻译：一种制造电子器件的方法包括：制备包括衬底的膜附着衬底和包含In，Ga和Zn的氧化物半导体膜以及在衬底上依次提供包含W或Mo中的至少一种的金属膜 ; 在主要成分为过氧化氢的蚀刻液中，使金属膜与氧化物半导体膜之间的蚀刻选择比（金属膜/氧化物半导体膜的蚀刻速度）的条件，湿式蚀刻附着有膜的基板的金属膜，氧化物半导体膜的蚀刻速度）为100以上。

9. 发明授权

US06930816B2 Spatial light modulator, spatial light modulator array, image forming device and flat panel display 失效
标题翻译：空间光调制器，空间光调制器阵列，图像形成装置和平板显示器
公开(公告)号：US06930816B2
公开(公告)日：2005-08-16
申请号：US10758278
申请日：2004-01-16
申请人： Fumihiko Mochizuki
发明人： Fumihiko Mochizuki
IPC分类号： G02B6/35 , G02B26/02 , G02B26/00 , G02F1/03 , G09G3/34
CPC分类号： G02B26/001 , G02B6/3524 , G02B6/357 , G02B26/02
摘要： A spatial light modulator has: a support substrate that has an electrode layer; and a movable thin film that has at least an electrode layer, and that is opposingly placed above the support substrate with being separated by a predetermined gap distance in a manner that the movable thin film is flexurally deformable toward the support substrate, and in which a predetermined driving voltage is applied between the electrode layer of the support substrate and the electrode layer of the movable thin film to cause the movable thin film to be deflected toward the support substrate by an electrostatic force acting between the electrode layers. A returning electrode is disposed on an side of the movable thin film opposite to the side which is opposed to the support substrate to apply an electrostatic force of attracting the movable thin film when a driving voltage is applied.
摘要翻译：空间光调制器具有：具有电极层的支撑基板; 以及至少具有电极层的可移动薄膜，并且相对地设置在支撑基板上方，以可移动薄膜朝向支撑基板弯曲变形的方式分隔预定间隙距离，并且其中在支撑基板的电极层和可动薄膜的电极层之间施加预定的驱动电压，通过作用在电极层之间的静电力使可动薄膜向支撑基板偏转。返回电极设置在可动薄膜的与支撑基板相对的一侧相反的一侧，以在施加驱动电压时施加吸引可动薄膜的静电力。

10. 发明授权

US06667794B2 Collimator utilizing wavelength selective reflection and backlight system 有权
标题翻译：准直仪利用波长选择反射和背光系统
公开(公告)号：US06667794B2
公开(公告)日：2003-12-23
申请号：US09960340
申请日：2001-09-24
申请人： Kohei Arakawa , Fumihiko Mochizuki , Kenichi Nakagawa , Mitsuyoshi Ichihashi
发明人： Kohei Arakawa , Fumihiko Mochizuki , Kenichi Nakagawa , Mitsuyoshi Ichihashi
IPC分类号： C09K1902
CPC分类号： G02B5/3016 , G02F1/1336 , G02F2001/133521 , G02F2001/133545 , G02F2001/133607
摘要： A flat plate collimator and backlight system capable of improving the display characteristics of liquid crystal display devices are obtained. In order to achieve this end, a collimator is provided which comprises a cholesteric liquid crystal layer exhibiting a selective-reflection wavelength band with respect to perpendicularly-incident light in the wavelength range &lgr;1 to &lgr;2 (&lgr;1
摘要翻译：可以获得能够改善液晶显示装置的显示特性的平板准直器和背光系统。为了实现这一目的，提供了一种准直器，其包括相对于波长λ1至λ2（λ1

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